JP4299917B2 - 真空継手機構 - Google Patents

真空継手機構 Download PDF

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Publication number
JP4299917B2
JP4299917B2 JP14924799A JP14924799A JP4299917B2 JP 4299917 B2 JP4299917 B2 JP 4299917B2 JP 14924799 A JP14924799 A JP 14924799A JP 14924799 A JP14924799 A JP 14924799A JP 4299917 B2 JP4299917 B2 JP 4299917B2
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JP
Japan
Prior art keywords
vacuum joint
vacuum
positioning member
guide
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14924799A
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English (en)
Japanese (ja)
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JP2000052159A (ja
JP2000052159A5 (OSRAM
Inventor
俊裕 米沢
弘 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP14924799A priority Critical patent/JP4299917B2/ja
Publication of JP2000052159A publication Critical patent/JP2000052159A/ja
Publication of JP2000052159A5 publication Critical patent/JP2000052159A5/ja
Application granted granted Critical
Publication of JP4299917B2 publication Critical patent/JP4299917B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)
JP14924799A 1998-06-02 1999-05-28 真空継手機構 Expired - Fee Related JP4299917B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14924799A JP4299917B2 (ja) 1998-06-02 1999-05-28 真空継手機構

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-169207 1998-06-02
JP16920798 1998-06-02
JP14924799A JP4299917B2 (ja) 1998-06-02 1999-05-28 真空継手機構

Publications (3)

Publication Number Publication Date
JP2000052159A JP2000052159A (ja) 2000-02-22
JP2000052159A5 JP2000052159A5 (OSRAM) 2006-07-13
JP4299917B2 true JP4299917B2 (ja) 2009-07-22

Family

ID=26479180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14924799A Expired - Fee Related JP4299917B2 (ja) 1998-06-02 1999-05-28 真空継手機構

Country Status (1)

Country Link
JP (1) JP4299917B2 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110405453B (zh) * 2019-08-13 2024-02-09 宁波福尔达智能科技股份有限公司 车辆空调出风口万向节与万向轴装配装置
CN114454023B (zh) * 2021-03-01 2022-12-16 华中科技大学 基于标准气缸的晶圆磨削吸附平台
CN114393468B (zh) * 2021-12-29 2023-03-10 江苏威森美微电子有限公司 一种半导体晶圆磨边加工用磨边机
CN116177354B (zh) * 2023-04-26 2023-07-28 山东阳光博士太阳能工程有限公司 一种太阳能光伏板的起吊装配装置
CN120002742B (zh) * 2025-04-17 2025-07-11 常州市南挂车辆部件有限公司 一种具有多重固定功能的组合灯具壳体加工用切割装置

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Publication number Publication date
JP2000052159A (ja) 2000-02-22

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