JP4289967B2 - プラズマ電位測定用プローブ - Google Patents
プラズマ電位測定用プローブ Download PDFInfo
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- JP4289967B2 JP4289967B2 JP2003344721A JP2003344721A JP4289967B2 JP 4289967 B2 JP4289967 B2 JP 4289967B2 JP 2003344721 A JP2003344721 A JP 2003344721A JP 2003344721 A JP2003344721 A JP 2003344721A JP 4289967 B2 JP4289967 B2 JP 4289967B2
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- cylinder
- shaped member
- potential
- electrode
- plasma
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Description
[外1]
[外3]
一定のプラズマ電位φを持つプラズマの領域である。ここで、アンテナ1に印加する高周波電圧Vrfを大きくすると、動重力により電子が跳ね返され実線で示すφ(r)分布において、イオンシース区間の電位が上昇し始める(C1)。高周波電圧Vrfをさらに大きくすると、電極2の電位はφを越えて大きくなりイオン粒子も跳ね返すようになる(C2)。
2a イオン電流検出用内部電極
17 円筒
19 キャップ状部材
21 銅管
22 同軸給電線
23 内部導体
25 ギャップ
Claims (1)
- プラズマ雰囲気中に挿入されるロッド状部材と、前記ロッド状部材内に軸方向に挿通されて前記ロッド状部材の先端より先に突き出た導電性の円筒と、その円筒の一端よりギャップを隔てて該円筒の端面に臨み前記円筒と同径の円筒の最先端を端面壁で閉じた導電性のキャップ状部材と、前記円筒の中から前記円筒の先端より先に突き出て前記キャップ状部材に届く銅管からなる電極と、この銅管の側面に前記ギャップに臨ませて設けられたスリットと、前記銅管の内部に同軸構造で配置された内部円筒からなる内部電極と、前記内部円筒の内部に配置され前記銅管の先端よりさらに先に突き出て前記キャップ状部材の前記端面壁に電気的に接続された内部導体とを備え、高周波電流の片側極が前記円筒に給電され反対側極が前記内部導体に給電され、前記円筒と前記キャップ状部材との間に高周波電場に囲まれた測定空間が形成され、この測定空間内で、前記電極により浮遊電位が検出され、前記内部電極により前記スリットを通して流れるイオン電流が検出されることを特徴とするプラズマ電位測定用プローブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003344721A JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
US10/953,113 US7288942B2 (en) | 2003-10-02 | 2004-09-30 | Plasma potential measuring method and apparatus, and plasma potential measuring probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003344721A JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005116189A JP2005116189A (ja) | 2005-04-28 |
JP4289967B2 true JP4289967B2 (ja) | 2009-07-01 |
Family
ID=34538262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003344721A Expired - Fee Related JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
Country Status (1)
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JP (1) | JP4289967B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4867241B2 (ja) * | 2005-09-08 | 2012-02-01 | 富士電機株式会社 | プラズマ計測装置 |
JP5192237B2 (ja) * | 2005-10-12 | 2013-05-08 | 三井化学株式会社 | リチウム二次電池用非水電解液、それを用いたリチウム二次電池 |
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2003
- 2003-10-02 JP JP2003344721A patent/JP4289967B2/ja not_active Expired - Fee Related
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Publication number | Publication date |
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JP2005116189A (ja) | 2005-04-28 |
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