JP2005116189A - プラズマ電位測定用プローブ - Google Patents
プラズマ電位測定用プローブ Download PDFInfo
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- JP2005116189A JP2005116189A JP2003344721A JP2003344721A JP2005116189A JP 2005116189 A JP2005116189 A JP 2005116189A JP 2003344721 A JP2003344721 A JP 2003344721A JP 2003344721 A JP2003344721 A JP 2003344721A JP 2005116189 A JP2005116189 A JP 2005116189A
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Abstract
【解決手段】 円筒17からなる高周波印加用の片側電極と、その円筒17の一端よりギャップを隔てて該円筒17の端面に臨む高周波印加用の反対側電極と、これら高周波印加用の両側電極に囲まれた空間内に配置された浮遊電位検出用電極2及びイオン電流検出用内部電極2aとを有する。
【選択図】 図3
Description
[外1]
[外3]
一定のプラズマ電位φを持つプラズマの領域である。ここで、アンテナ1に印加する高周波電圧Vrfを大きくすると、動重力により電子が跳ね返され実線で示すφ(r)分布において、イオンシース区間の電位が上昇し始める(C1)。高周波電圧Vrfをさらに大きくすると、電極2の電位はφを越えて大きくなりイオン粒子も跳ね返すようになる(C2)。
2a イオン電流検出用内部電極
17 円筒
19 キャップ状部材
21 銅管
22 同軸給電線
23 内部導体
25 ギャップ
Claims (2)
- 円筒からなる高周波印加用の片側電極と、その円筒の一端よりギャップを隔てて該円筒の端面に臨む高周波印加用の反対側電極と、これら高周波印加用の両側電極に囲まれた空間内に配置された浮遊電位検出用電極及びイオン電流検出用内部電極とを有することを特徴とするプラズマ電位測定用プローブ。
- 前記浮遊電位検出用電極及びイオン電流検出用内部電極が同軸の導体管で構成され、この導体管内に前記反対側電極への給電線が挿通されていることを特徴とする請求項1記載のプラズマ電位測定用プローブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003344721A JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
US10/953,113 US7288942B2 (en) | 2003-10-02 | 2004-09-30 | Plasma potential measuring method and apparatus, and plasma potential measuring probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003344721A JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005116189A true JP2005116189A (ja) | 2005-04-28 |
JP4289967B2 JP4289967B2 (ja) | 2009-07-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003344721A Expired - Fee Related JP4289967B2 (ja) | 2003-10-02 | 2003-10-02 | プラズマ電位測定用プローブ |
Country Status (1)
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JP (1) | JP4289967B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073420A (ja) * | 2005-09-08 | 2007-03-22 | Fuji Electric Holdings Co Ltd | プラズマ計測装置 |
JPWO2007043624A1 (ja) * | 2005-10-12 | 2009-04-16 | 三井化学株式会社 | 非水電解液、それを用いたリチウム二次電池 |
-
2003
- 2003-10-02 JP JP2003344721A patent/JP4289967B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073420A (ja) * | 2005-09-08 | 2007-03-22 | Fuji Electric Holdings Co Ltd | プラズマ計測装置 |
JPWO2007043624A1 (ja) * | 2005-10-12 | 2009-04-16 | 三井化学株式会社 | 非水電解液、それを用いたリチウム二次電池 |
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Publication number | Publication date |
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JP4289967B2 (ja) | 2009-07-01 |
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