JP4283839B2 - 電子ビーム装置を用いた非点収差調整方法 - Google Patents

電子ビーム装置を用いた非点収差調整方法 Download PDF

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Publication number
JP4283839B2
JP4283839B2 JP2006276058A JP2006276058A JP4283839B2 JP 4283839 B2 JP4283839 B2 JP 4283839B2 JP 2006276058 A JP2006276058 A JP 2006276058A JP 2006276058 A JP2006276058 A JP 2006276058A JP 4283839 B2 JP4283839 B2 JP 4283839B2
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electron beam
astigmatism
line
adjusting
electron
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Japanese (ja)
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JP2008097902A (ja
JP2008097902A5 (enExample
Inventor
賢治 渡辺
武司 村上
涼 田島
雅規 畠山
正年 恒岡
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Ebara Corp
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Ebara Corp
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Priority to JP2006276058A priority Critical patent/JP4283839B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to US11/898,358 priority patent/US8013315B2/en
Priority to KR1020070092115A priority patent/KR101364672B1/ko
Priority to TW096133807A priority patent/TWI443704B/zh
Priority to TW103100024A priority patent/TWI485742B/zh
Publication of JP2008097902A publication Critical patent/JP2008097902A/ja
Publication of JP2008097902A5 publication Critical patent/JP2008097902A5/ja
Application granted granted Critical
Publication of JP4283839B2 publication Critical patent/JP4283839B2/ja
Priority to KR1020130136867A priority patent/KR101507476B1/ko
Priority to KR1020140088521A priority patent/KR101564047B1/ko
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JP2006276058A 2006-09-12 2006-10-10 電子ビーム装置を用いた非点収差調整方法 Active JP4283839B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2006276058A JP4283839B2 (ja) 2006-10-10 2006-10-10 電子ビーム装置を用いた非点収差調整方法
KR1020070092115A KR101364672B1 (ko) 2006-09-12 2007-09-11 하전입자선장치, 그 장치를 이용한 비점수차 조정방법 및그 장치를 이용한 디바이스제조방법
TW096133807A TWI443704B (zh) 2006-09-12 2007-09-11 荷電粒子束裝置及使用該裝置之元件製造方法
TW103100024A TWI485742B (zh) 2006-09-12 2007-09-11 荷電粒子束裝置及使用該裝置之半導體元件製造方法
US11/898,358 US8013315B2 (en) 2006-09-12 2007-09-11 Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same
KR1020130136867A KR101507476B1 (ko) 2006-09-12 2013-11-12 하전입자선장치, 그 장치를 이용한 비점수차 조정방법 및 그 장치를 이용한 디바이스제조방법
KR1020140088521A KR101564047B1 (ko) 2006-09-12 2014-07-14 하전입자선장치, 그 장치를 이용한 비점수차 조정방법 및 그 장치를 이용한 디바이스제조방법

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Application Number Priority Date Filing Date Title
JP2006276058A JP4283839B2 (ja) 2006-10-10 2006-10-10 電子ビーム装置を用いた非点収差調整方法

Publications (3)

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JP2008097902A JP2008097902A (ja) 2008-04-24
JP2008097902A5 JP2008097902A5 (enExample) 2008-08-14
JP4283839B2 true JP4283839B2 (ja) 2009-06-24

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7187384B2 (ja) * 2019-05-17 2022-12-12 株式会社日立製作所 検査装置
WO2023248320A1 (ja) * 2022-06-21 2023-12-28 株式会社日立ハイテク 荷電粒子線装置

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