JP4262709B2 - X線用ガスフロー型比例計数管を備えるx線分析装置およびx線用ガスフロー型比例計数管の使用方法。 - Google Patents
X線用ガスフロー型比例計数管を備えるx線分析装置およびx線用ガスフロー型比例計数管の使用方法。 Download PDFInfo
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- JP4262709B2 JP4262709B2 JP2005289821A JP2005289821A JP4262709B2 JP 4262709 B2 JP4262709 B2 JP 4262709B2 JP 2005289821 A JP2005289821 A JP 2005289821A JP 2005289821 A JP2005289821 A JP 2005289821A JP 4262709 B2 JP4262709 B2 JP 4262709B2
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Description
20、40、50 混合ガス生成装置
21 ガス混合部
22 PRガス配管
23 ヘリウムガス配管
24 混合ガス配管
25 PRガス流量調節弁
26 PRガス流量計
27 ヘリウムガス流量調節弁
28 ヘリウムガス流量計
29、49、59、79 混合ガス体積割合一定化手段
60、80 X線分析装置(蛍光X線分析装置)
90 ヘリウムガス置換手段
Claims (4)
- X線用ガスフロー型比例計数管にフローガスを供給する混合ガス生成装置において、
アルゴンガスおよびメタンガスからなるPRガスとヘリウムガスとを所定の体積割合で混合するガス混合部と、
前記ガス混合部に前記PRガスを導入するPRガス配管と、
前記ガス混合部に前記ヘリウムガスを導入するヘリウムガス配管と、
前記混合ガス部で混合された混合ガスを前記X線用ガスフロー型比例計数管に導入する混合ガス配管と、
前記混合ガスの前記PRガスと前記ヘリウムガスの所定の混合体積割合を一定に保持する混合ガス体積割合一定化手段と、
を備えることを特徴とする混合ガス生成装置。 - ガスフロー型比例計数管を備えるX線分析装置において、
アルゴンガスおよびメタンガスからなるPRガスとヘリウムガスとを所定の体積割合で混合するガス混合部と、
前記ガス混合部に前記PRガスを導入するPRガス配管と、
前記ガス混合部に前記ヘリウムガスを導入するヘリウムガス配管と、
前記混合ガス部で混合された混合ガスを前記X線用ガスフロー型比例計数管に導入する混合ガス配管と、
前記混合ガスの前記PRガスと前記ヘリウムガスの所定の混合体積割合を一定に保持する混合ガス体積割合一定化手段と、
を備えることを特徴とするX線分析装置。 - 請求項2において、
さらに、前記X線分析装置の分析部内部を大気圧または所定真空度の空気雰囲気から前記ヘリウムガス雰囲気に置換するヘリウムガス置換手段を備えるX線分析装置。 - ガスフロー型比例計数管の使用方法において、
X線検出用フローガスとしてアルゴンガス、ヘリウムガスおよびメタンガスを所定の体積割合で混合した混合ガスを使用することを特徴とするガスフロー型比例計数管の使用方法。
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JP2005289821A JP4262709B2 (ja) | 2005-10-03 | 2005-10-03 | X線用ガスフロー型比例計数管を備えるx線分析装置およびx線用ガスフロー型比例計数管の使用方法。 |
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JP2005289821A JP4262709B2 (ja) | 2005-10-03 | 2005-10-03 | X線用ガスフロー型比例計数管を備えるx線分析装置およびx線用ガスフロー型比例計数管の使用方法。 |
Publications (2)
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JP2007101298A JP2007101298A (ja) | 2007-04-19 |
JP4262709B2 true JP4262709B2 (ja) | 2009-05-13 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4788676B2 (ja) | 2007-07-12 | 2011-10-05 | トヨタ自動車株式会社 | 分析装置用のガス導入装置および方法 |
JP4784569B2 (ja) * | 2007-07-13 | 2011-10-05 | トヨタ自動車株式会社 | 分析装置用のガス導入装置のモニター装置 |
JP2009191960A (ja) * | 2008-02-14 | 2009-08-27 | Osaka Prefecture Univ | ヘリウムガス用パイプライン |
JP2010032495A (ja) * | 2008-06-27 | 2010-02-12 | Rigaku Corp | ガスフロー型比例計数管 |
JP2010096678A (ja) * | 2008-10-17 | 2010-04-30 | Soda Kogyo:Kk | イオン化装置及び方法 |
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