JP4262676B2 - 半導体素子の低誘電率絶縁膜の蒸着方法 - Google Patents
半導体素子の低誘電率絶縁膜の蒸着方法 Download PDFInfo
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- JP4262676B2 JP4262676B2 JP2004506072A JP2004506072A JP4262676B2 JP 4262676 B2 JP4262676 B2 JP 4262676B2 JP 2004506072 A JP2004506072 A JP 2004506072A JP 2004506072 A JP2004506072 A JP 2004506072A JP 4262676 B2 JP4262676 B2 JP 4262676B2
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- dielectric constant
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- 238000000151 deposition Methods 0.000 title claims description 38
- 239000004065 semiconductor Substances 0.000 title claims description 16
- 239000010408 film Substances 0.000 claims description 59
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 39
- 229910000077 silane Inorganic materials 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 33
- 239000010409 thin film Substances 0.000 claims description 29
- 230000008021 deposition Effects 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 26
- 230000001681 protective effect Effects 0.000 claims description 19
- 239000007800 oxidant agent Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004973 liquid crystal related substance Substances 0.000 claims description 10
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 10
- 125000003342 alkenyl group Chemical group 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 239000012495 reaction gas Substances 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 2
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 230000008859 change Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003071 parasitic effect Effects 0.000 description 6
- 230000001590 oxidative effect Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013386 optimize process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
- H01L21/31633—Deposition of carbon doped silicon oxide, e.g. SiOC
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
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- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
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- Plasma & Fusion (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Liquid Crystal (AREA)
Description
[化学式1]
SiHx(CH3)4-x
前記式で、xは0,1、2、または4の整数であり、
[化学式2]
Si(OR1)yR2 4-y
前記式で、
R1及びR2は各々独立的にまたは同時に炭素数1〜5のアルキル基またはアルケニル基で置換または非置換された直鎖または側鎖の炭素数1〜10のアルキル基またはアルケニル基であり、好ましくはR1及びR2は各々独立的にまたは同時にメチル、エチル、プロピル、またはビニル基であり、yは0〜4の整数であり、
[化学式3]
サイクリック-(SiR3R4-O)n
R 3 及びR 4 は各々独立的にまたは同時に水素、炭素数1〜5のアルキル基またはアルケニル基で置換または非置換された直鎖または側鎖の炭素数1〜10のアルキル基またはアルケニル基であり、好ましくはR 3 及びR 4 は各々独立的にまたは同時に水素、メチル、エチル、プロピル、またはビニル基である。
[実施例1〜9]
容量性結合平板列(capacitively coupled parallel plate)PECVD反応機を使用してトリメチルシラン(3MS)、シラン、窒素酸化物(N2O)及びアルゴン(Ar)の反応機体混合物と基板でベアー(bare)シリコンウエハーまたはガラス上に低誘電率絶縁薄膜を蒸着させた。蒸着温度は270℃であり、実施例のPECVDに対する他のパラメターである誘電定数及び成長速度を表1に示した。
Claims (6)
- 基板が含まれた蒸着チャンバーに気体状態の基本ソース、モノシラン及び酸化剤を含む反応気体混合物を添加してCVD法またはPECVD法でa−SiCOH薄膜を蒸着する工程を含み、
前記基本ソース気体は、式(1)及び式(2)
Si(OR1)yR2 4 - y (1)
(式中、R1及びR2は、各々独立的にまたは同時に、炭素数1〜5のアルキル基またはアルケニル基で置換されていてもよい直鎖または分岐の炭素数1〜10のアルキル基またはアルケニル基であり、xは0〜4の整数である)
サイクリック-(SiR3R4-O)n (2)
(式中、R3及びR4は、各々独立的にまたは同時に、水素原子、炭素数1〜5のアルキル基またはアルケニル基で置換されていてもよい直鎖または分岐の炭素数1〜10のアルキル基またはアルケニル基である)
で示されるオルガノシリコン化合物からなる群から選択される1種以上であり、かつ
前記シランを、基本ソース:モノシラン=1:0.5〜1(流量比)で使用する低誘電率絶縁膜の蒸着方法。 - 前記a−SiCOH薄膜は誘電定数が3.6以下であり、400〜800nmの波長範囲で95%以上の光透過度を有する請求項1に記載の低誘電率絶縁膜の蒸着方法。
- 前記基板は、液晶表示素子、光発光ダイオードディスプレイ素子又は有機光発光ダイオードディスプレイ素子を構成する基板である請求項1に記載の低誘電率絶縁膜の蒸着方法。
- 前記a−SiCOH薄膜は、液晶表示素子に含まれる半導体素子における保護膜として使用される請求項1に記載の低誘電率絶縁膜の蒸着方法。
- 前記酸化剤はO2、N2O、NO、CO2、CO、オゾン及びこれらの混合物からなる群より選択される請求項1に記載の低誘電率絶縁膜の蒸着方法。
- 前記a−SiCOH薄膜は電力密度0.2〜1.5(mw/cm2)、圧力1〜10000Torr、温度25〜300℃でプラズマに反応気体混合物を露出させて実施されるPECVD法で蒸着される請求項1に記載の低誘電率絶縁膜の蒸着方法。
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KR1020020027413A KR100878270B1 (ko) | 2002-05-17 | 2002-05-17 | 반도체 소자의 저유전율 절연막의 증착방법 |
PCT/KR2002/001337 WO2003098672A1 (en) | 2002-05-17 | 2002-07-16 | Deposition method of insulating layers having low dielectric constant of semiconductor device |
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JP2005526397A JP2005526397A (ja) | 2005-09-02 |
JP4262676B2 true JP4262676B2 (ja) | 2009-05-13 |
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US (1) | US6984594B2 (ja) |
JP (1) | JP4262676B2 (ja) |
KR (1) | KR100878270B1 (ja) |
CN (1) | CN1319125C (ja) |
AU (1) | AU2002319930A1 (ja) |
WO (1) | WO2003098672A1 (ja) |
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KR100915231B1 (ko) * | 2002-05-17 | 2009-09-02 | 삼성전자주식회사 | 저유전율 절연막의 증착방법, 이를 이용한 박막트랜지스터및 그 제조방법 |
US20040166692A1 (en) * | 2003-02-26 | 2004-08-26 | Loboda Mark Jon | Method for producing hydrogenated silicon oxycarbide films |
TWI388078B (zh) | 2008-01-30 | 2013-03-01 | Osram Opto Semiconductors Gmbh | 電子組件之製造方法及電子組件 |
US8674484B2 (en) * | 2008-12-30 | 2014-03-18 | Intel Corporation | Dielectric separator layer |
KR102052664B1 (ko) * | 2013-03-15 | 2019-12-06 | 삼성전자주식회사 | 트리알킬실란 계열의 실리콘 전구체 및 이를 이용하는 박막 형성 방법 |
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JP3192903B2 (ja) * | 1995-01-30 | 2001-07-30 | 株式会社東芝 | 半導体装置の製造方法および半導体製造装置 |
JPH09330925A (ja) * | 1996-06-13 | 1997-12-22 | Sony Corp | 低誘電率酸化シリコン系絶縁膜の形成方法およびこれを用いた半導体装置 |
JPH1088352A (ja) * | 1996-09-13 | 1998-04-07 | Kojundo Chem Lab Co Ltd | (フルオロアルコキシ)(アルコキシ)シラン化合物 と、その製造法およびフッ素含有シリコン酸化膜の製法 |
JPH10313003A (ja) * | 1997-05-13 | 1998-11-24 | Sony Corp | 酸化シリコン系誘電体膜の形成方法 |
JPH11111712A (ja) * | 1997-10-01 | 1999-04-23 | Fujitsu Ltd | 低誘電率絶縁膜とその形成方法及びこの膜を用いた半導体装置 |
US6147009A (en) * | 1998-06-29 | 2000-11-14 | International Business Machines Corporation | Hydrogenated oxidized silicon carbon material |
US6316167B1 (en) * | 2000-01-10 | 2001-11-13 | International Business Machines Corporation | Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof |
US6312793B1 (en) * | 1999-05-26 | 2001-11-06 | International Business Machines Corporation | Multiphase low dielectric constant material |
JP2004526318A (ja) * | 2001-03-23 | 2004-08-26 | ダウ・コーニング・コーポレイション | 水素化シリコンオキシカーバイド膜を生産するための方法 |
KR100915231B1 (ko) * | 2002-05-17 | 2009-09-02 | 삼성전자주식회사 | 저유전율 절연막의 증착방법, 이를 이용한 박막트랜지스터및 그 제조방법 |
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2002
- 2002-05-17 US US10/150,480 patent/US6984594B2/en not_active Expired - Lifetime
- 2002-05-17 KR KR1020020027413A patent/KR100878270B1/ko active IP Right Grant
- 2002-07-16 WO PCT/KR2002/001337 patent/WO2003098672A1/en active Application Filing
- 2002-07-16 AU AU2002319930A patent/AU2002319930A1/en not_active Abandoned
- 2002-07-16 CN CNB028289765A patent/CN1319125C/zh not_active Expired - Lifetime
- 2002-07-16 JP JP2004506072A patent/JP4262676B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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US6984594B2 (en) | 2006-01-10 |
KR20030089267A (ko) | 2003-11-21 |
CN1319125C (zh) | 2007-05-30 |
JP2005526397A (ja) | 2005-09-02 |
WO2003098672A1 (en) | 2003-11-27 |
US20030215970A1 (en) | 2003-11-20 |
KR100878270B1 (ko) | 2009-01-13 |
CN1625799A (zh) | 2005-06-08 |
AU2002319930A8 (en) | 2003-12-02 |
AU2002319930A1 (en) | 2003-12-02 |
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