JP4244778B2 - Device for measuring characteristics of chip-type electronic components - Google Patents

Device for measuring characteristics of chip-type electronic components Download PDF

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JP4244778B2
JP4244778B2 JP2003361172A JP2003361172A JP4244778B2 JP 4244778 B2 JP4244778 B2 JP 4244778B2 JP 2003361172 A JP2003361172 A JP 2003361172A JP 2003361172 A JP2003361172 A JP 2003361172A JP 4244778 B2 JP4244778 B2 JP 4244778B2
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electronic component
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electrode
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measurement
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JP2005127752A (en
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秀治 田中
宏 大久保
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Murata Manufacturing Co Ltd
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Description

本発明は、特性測定装置、特に、両端部に外部電極を有するチップ型電子部品の電気的特性を測定するための特性測定装置に関する。   The present invention relates to a characteristic measuring apparatus, and more particularly to a characteristic measuring apparatus for measuring electrical characteristics of a chip-type electronic component having external electrodes at both ends.

複数のチップ型電子部品の電気的特性(静電容量、絶縁抵抗)を同時に測定する測定装置として、従来広く使用されているのは、例えば、特許文献1に記載のものである。この測定装置は、図9及び図10に示すように、導電性平板50と、該導電性平板50上に重ねられ、チップ型電子部品60が収容される貫通孔52をマトリクス状に配置した非導電性平板51と、貫通孔52に対応して設けられた複数の測定端子55と、を備えたものである。貫通孔52に収容された電子部品60の一方の外部電極61aは導電性平板50と電気的に接触し、他方の外部電極61bには下降した測定端子55が電気的に接触し、特性が測定される。   For example, Patent Document 1 discloses a widely used measuring apparatus that simultaneously measures electrical characteristics (capacitance, insulation resistance) of a plurality of chip-type electronic components. As shown in FIGS. 9 and 10, this measuring apparatus has a non-conductive plate 50 and a through hole 52 that is stacked on the conductive flat plate 50 and accommodates chip-type electronic components 60 arranged in a matrix. A conductive flat plate 51 and a plurality of measurement terminals 55 provided corresponding to the through holes 52 are provided. One external electrode 61a of the electronic component 60 accommodated in the through hole 52 is in electrical contact with the conductive flat plate 50, and the lowered measurement terminal 55 is in electrical contact with the other external electrode 61b. Is done.

しかしながら、この測定装置は、2端子タイプで測定を行うものであり、低インピーダンスの電子部品60(例えば、大容量コンデンサや低抵抗チップ)の特性を測定する場合、導電性平板50と外部電極61aの間、あるいは、測定端子55と外部電極61bの間に発生する接触抵抗の影響を受けて、精度よく測定できないという問題点を有していた。また、導電性平板50が全ての電子部品60の共通端子として機能するため、同時に1種類の特性しか測定できず、測定効率が悪いという問題点も残されていた。   However, this measuring apparatus performs measurement with a two-terminal type, and when measuring the characteristics of the low-impedance electronic component 60 (for example, a large-capacitance capacitor or a low-resistance chip), the conductive flat plate 50 and the external electrode 61a. Or under the influence of contact resistance generated between the measurement terminal 55 and the external electrode 61b, there is a problem that the measurement cannot be performed accurately. Further, since the conductive flat plate 50 functions as a common terminal for all the electronic components 60, only one type of characteristic can be measured at the same time, and the problem of poor measurement efficiency remains.

一方、4端子タイプであって高精度に特性を測定可能とする測定装置が特許文献2に記載されている。この測定装置では、下側に一対の櫛歯状の電極を配置し、上側に上下動可能な同軸プローブを配置している。   On the other hand, Patent Document 2 discloses a measuring device that is a four-terminal type and can measure characteristics with high accuracy. In this measuring apparatus, a pair of comb-like electrodes are arranged on the lower side, and a coaxial probe that can move up and down is arranged on the upper side.

しかし、この測定装置にあっては、一対の櫛歯状電極は同一基板上に形成されており、チップ型電子部品の外部電極が該電極のそれぞれに完全に接触しないおそれがあり、かつ、電子部品の小型化に伴って一対の櫛歯状電極を高密度に配置することが困難になっている。
特開平8−51048号公報 特開平9−89951号公報
However, in this measuring apparatus, the pair of comb-like electrodes are formed on the same substrate, and there is a possibility that the external electrodes of the chip-type electronic component do not completely contact each of the electrodes, and the electronic With the miniaturization of parts, it is difficult to arrange a pair of comb-like electrodes at high density.
JP-A-8-51048 JP-A-9-89951

そこで、本発明の目的は、チップ型電子部品の電気的特性を確実かつ高精度に測定できると共に、同時に複数種類の特性の測定を可能にする特性測定装置を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide a characteristic measuring apparatus that can measure the electrical characteristics of a chip-type electronic component reliably and with high accuracy, and simultaneously measure a plurality of types of characteristics.

前記目的を達成するため、第1の発明は、両端部に外部電極を有するチップ型の電子部品の電気的特性を測定する特性測定装置において、電子部品をその外部電極が上下方向に位置する縦置きで収容するためのマトリクス状に配置された多数の収容孔を有する収容プレートと、前記収容孔に収容された電子部品の下部外部電極と接触する共通電極を表面に配置し、かつ、収容孔に連通するとともに前記共通電極を貫通する貫通孔を有する絶縁性プレートと、各収容孔に収容された電子部品の上部外部電極に接離可能な二つの測定端子を有する上部プローブが設けられた上部測定ユニットと、各収容孔に収容された電子部品の下部外部電極に前記貫通孔を通じて接離可能な下部プローブが設けられた下部測定ユニットと、前記共通電極、上部プローブ及び下部プローブを介して電子部品の電気的特性を測定する測定手段と、を備えたことを特徴とする。 In order to achieve the above object, a first invention is a characteristic measuring apparatus for measuring electrical characteristics of a chip-type electronic component having external electrodes at both ends, wherein the electronic component is vertically aligned with the external electrodes positioned in the vertical direction. A receiving plate having a plurality of receiving holes arranged in a matrix for receiving in a matrix; a common electrode that contacts a lower external electrode of an electronic component received in the receiving hole; and a receiving hole upper probe having an insulating plate, a contact and separation can be two measurement terminals to the upper external electrode of the electronic component housed in the housing hole having a through hole penetrating through the common electrode communicated with is provided in the upper and measuring unit, and a lower measuring unit is detachably a lower probe provided through the through hole in the lower external electrode of the electronic component housed in the housing hole, the common electrode, the upper-flop Characterized by comprising measuring means for measuring the electrical characteristics of the electronic component, the via over blanking and lower probe.

以上の構成からなる第1の発明に係る特性測定装置にあっては、共通電極と二つの測定端子を有する上部プローブと下部プローブとによる4端子タイプで電子部品の電気的特性を測定するため、低インピーダンスの電子部品であっても測定精度が向上し、かつ、静電容量や絶縁抵抗など同時に複数種類の特性を測定することができ、測定効率が向上する。また、櫛歯状の細工の細かい電極を設ける必要はなく、電子部品の外部電極の接触不良のおそれを解消できると共に、電子部品の小型化にも対応することができる。   In the characteristic measuring apparatus according to the first invention having the above-described configuration, in order to measure the electric characteristics of an electronic component with a four-terminal type using a common electrode, an upper probe having two measurement terminals, and a lower probe, Even with low-impedance electronic components, the measurement accuracy is improved, and a plurality of types of characteristics such as capacitance and insulation resistance can be measured simultaneously, thereby improving measurement efficiency. Further, it is not necessary to provide a comb-like finely crafted electrode, which can eliminate the possibility of contact failure of the external electrode of the electronic component, and can cope with downsizing of the electronic component.

第1の発明に係る特性測定装置において、共通電極は収容孔の所定のグループに対応して配置されていてもよい。所定のグループごとにも独立して特性を測定することが可能となる。   In the characteristic measuring apparatus according to the first invention, the common electrode may be arranged corresponding to a predetermined group of the accommodation holes. The characteristics can be measured independently for each predetermined group.

また、上部プローブは互いに独立して上下動可能な同軸構造の測定端子を備えていることが好ましい。同軸構造であれば、電子部品の上部外部電極への電気的接触がより確実なものとなる。   Moreover, it is preferable that the upper probe has a coaxial measuring terminal that can move up and down independently of each other. With the coaxial structure, the electrical contact with the upper external electrode of the electronic component becomes more reliable.

また、収容孔は電子部品の断面形状より僅かに大きい矩形形状の孔であってもよく、あるいは、電子部品の断面形状の対角線寸法より僅かに大きい直径の円形状の孔であってもよい。円形状の孔であれば、加工が容易である。   Further, the accommodation hole may be a rectangular hole slightly larger than the cross-sectional shape of the electronic component, or may be a circular hole having a diameter slightly larger than the diagonal dimension of the cross-sectional shape of the electronic component. If it is a circular hole, processing is easy.

第2の発明は、両端部に外部電極を有するチップ型の電子部品の電気的特性を測定する特性測定装置において、電子部品をその外部電極が水平方向に位置する横置きで収容するためのマトリクス状に配置された多数の収容孔を有する収容プレートと、前記収容孔に収容された電子部品のそれぞれの外部電極とそれぞれ接触する共通電極及び個別電極を表面に配置し、かつ、収容孔に連通するとともに前記共通電極及び個別電極をそれぞれ貫通する貫通孔を有する絶縁性プレートと、各収容孔に収容された電子部品のそれぞれの外部電極に前記貫通孔を通じて接離可能な一対のプローブが設けられた下部測定ユニットと、前記共通電極、個別電極及び一対のプローブを介して電子部品の電気的特性を測定する測定手段と、を備えたことを特徴とする。 According to a second aspect of the present invention, there is provided a characteristic measuring apparatus for measuring electrical characteristics of a chip-type electronic component having external electrodes at both ends thereof, and a matrix for accommodating the electronic components in a horizontal position in which the external electrodes are positioned in the horizontal direction. A receiving plate having a plurality of receiving holes arranged in a shape, a common electrode and an individual electrode that are in contact with each external electrode of the electronic component housed in the receiving hole are arranged on the surface and communicated with the receiving hole In addition, an insulating plate having a through hole penetrating each of the common electrode and the individual electrode, and a pair of probes that can be brought into and out of contact with each external electrode of the electronic component housed in each housing hole are provided. a lower measurement units, the common electrode, and further comprising a, a measuring means for measuring the electrical characteristics of the electronic component via the individual electrodes and the pair of the probes That.

以上の構成からなる第2の発明に係る特性測定装置にあっても、4端子タイプで電子部品の電気的特性を測定するため、前記第1の発明に係る特性測定装置と同様の作用効果を奏する。   Even in the characteristic measuring apparatus according to the second invention configured as described above, the same effect as that of the characteristic measuring apparatus according to the first invention is obtained in order to measure the electric characteristics of the electronic component with the four-terminal type. Play.

以下、本発明に係る特性測定装置の実施例について添付の図面を参照して説明する。なお、以下に説明する実施例では、チップ型電子部品として積層コンデンサを例示しているが、インダクタやLCノイズフィルタやコモンモードチョークコイルや高周波複合電子部品などであってもよいことは言うまでもない。   Embodiments of a characteristic measuring apparatus according to the present invention will be described below with reference to the accompanying drawings. In the embodiment described below, a multilayer capacitor is exemplified as the chip-type electronic component, but it goes without saying that it may be an inductor, an LC noise filter, a common mode choke coil, a high-frequency composite electronic component, or the like.

(第1実施例、図1〜図4参照)
図1に示すように、特性測定装置1は、概略、チップ型の電子部品を収容するための収容ユニット10と、下部測定ユニット20と、上部測定ユニット30と、制御部41と、測定部42と、演算部43と、表示器44とで構成されている。
(Refer to the first embodiment, FIGS. 1 to 4)
As shown in FIG. 1, the characteristic measuring apparatus 1 generally includes a housing unit 10 for housing chip-type electronic components, a lower measuring unit 20, an upper measuring unit 30, a control unit 41, and a measuring unit 42. And a calculation unit 43 and a display unit 44.

被測定物であるチップ型の電子部品は、例えば図2に示す積層コンデンサ60であり、積層体の両端部に外部電極61a,61bを有している。この外部電極61a,61b間に電圧を印加することにより、静電容量及び絶縁抵抗が測定される。   The chip-type electronic component that is the object to be measured is a multilayer capacitor 60 shown in FIG. 2, for example, and has external electrodes 61a and 61b at both ends of the multilayer body. By applying a voltage between the external electrodes 61a and 61b, the capacitance and the insulation resistance are measured.

収容ユニット10は、絶縁性の底板11と該底板11上に重ねて固定された絶縁性の収容プレート15とで構成されている。収容プレート15には多数の収容孔16がマトリクス状に形成されている。この収容孔16は、電子部品(積層コンデンサ60)をその外部電極61a,61bが上下方向に位置する縦置きで収容するためのものであり、その深さは(収容プレート15の厚さに相当する)積層コンデンサ60の長さ寸法よりも若干大きい。また、収容孔16の上縁部は積層コンデンサ60が振り込まれやすいように上方に広がったテーパ状とされている。   The housing unit 10 includes an insulating bottom plate 11 and an insulating housing plate 15 that is fixed on the bottom plate 11 in an overlapping manner. A large number of receiving holes 16 are formed in the receiving plate 15 in a matrix. The accommodation hole 16 is for accommodating the electronic component (multilayer capacitor 60) in a vertical position in which the external electrodes 61a and 61b are positioned in the vertical direction, and the depth thereof corresponds to the thickness of the accommodation plate 15. It is slightly larger than the length of the multilayer capacitor 60. Further, the upper edge portion of the accommodation hole 16 has a tapered shape that spreads upward so that the multilayer capacitor 60 can be easily transferred.

さらに、収容孔16の水平断面形状は、図3(A)に示すように、積層コンデンサ60の断面形状より僅かに大きい矩形形状をなしている。あるいは、図3(B)に示すように、積層コンデンサ60の断面形状の対角線寸法より僅かに大きい直径の円形状であってもよい。なお、収容孔16は円形状としたほうが加工が容易である。   Further, the horizontal cross-sectional shape of the accommodation hole 16 is a rectangular shape slightly larger than the cross-sectional shape of the multilayer capacitor 60 as shown in FIG. Alternatively, as shown in FIG. 3B, a circular shape having a diameter slightly larger than the diagonal dimension of the cross-sectional shape of the multilayer capacitor 60 may be used. The receiving hole 16 is easier to process if it is circular.

底板11にはその表面に共通電極12が形成されており、この共通電極12は前記収容孔16の横方向2列のグループに対応して配置されている。また、底板11には、各収容孔16に対応した位置に貫通孔13が形成されており、この貫通孔13は共通電極12をも貫通している。   A common electrode 12 is formed on the surface of the bottom plate 11, and the common electrode 12 is arranged corresponding to the two groups in the horizontal direction of the receiving holes 16. Further, through holes 13 are formed in the bottom plate 11 at positions corresponding to the respective accommodation holes 16, and the through holes 13 also penetrate the common electrode 12.

下部測定ユニット20は、絶縁性の保持プレート21に複数の下部プローブ22を設けたもので、図示しない駆動機構によって上下方向に昇降可能に設置されている。下部プローブ22は、1本の測定端子からなり、前記収容孔16に対向する位置に配置され、上昇時には絶縁性プレート11の貫通孔13を通じて収容孔16に収容されている積層コンデンサ60の外部電極61aに電気的に接触する。   The lower measurement unit 20 is provided with a plurality of lower probes 22 on an insulating holding plate 21, and is installed so as to be moved up and down by a drive mechanism (not shown). The lower probe 22 includes a single measurement terminal, is disposed at a position facing the accommodation hole 16, and is externally connected to the multilayer capacitor 60 accommodated in the accommodation hole 16 through the through hole 13 of the insulating plate 11 when raised. 61a is in electrical contact.

上部測定ユニット30は、絶縁性の保持プレート31に複数の上部プローブ32を設けたもので、図示しない駆動機構によって上下方向に昇降可能に設置されている。上部プローブ32は、図2に示すように2本の測定端子32a,32bからなり、前記収容孔16に対向する位置に配置され、下降時には収容孔16に収容されている積層コンデンサ60の外部電極61bに電気的に接触する。この接触時における外部電極61bとプローブ32(測定端子32a,32b)との位置関係は図3(A),(B)に示されている。   The upper measurement unit 30 is provided with a plurality of upper probes 32 on an insulating holding plate 31, and is installed so as to be moved up and down by a drive mechanism (not shown). The upper probe 32 includes two measurement terminals 32a and 32b as shown in FIG. 2, and is arranged at a position facing the accommodation hole 16. When the upper probe 32 is lowered, the outer electrode of the multilayer capacitor 60 is accommodated in the accommodation hole 16. 61b is in electrical contact. The positional relationship between the external electrode 61b and the probe 32 (measurement terminals 32a and 32b) at the time of contact is shown in FIGS. 3 (A) and 3 (B).

さらに、上部測定ユニット30の側部には測定プローブ33が設けられている。この測定プローブ33は下降時に共通電極12の一端部上に電気的に接触する。   Further, a measurement probe 33 is provided on the side of the upper measurement unit 30. The measurement probe 33 is in electrical contact with one end of the common electrode 12 when lowered.

ところで、下部プローブ22の直径、貫通孔13の直径、共通電極12の開口径a及び積層コンデンサ60の平面上における大きさの関係は図4に示すとおりである。図4において斜線を施した部分は共通電極12を示している。   Incidentally, the relationship among the diameter of the lower probe 22, the diameter of the through-hole 13, the opening diameter a of the common electrode 12, and the size of the multilayer capacitor 60 on the plane is as shown in FIG. In FIG. 4, the hatched portion indicates the common electrode 12.

制御部41は、周知のマイクロコンピュータにて構成され、予め設定されたプログラムに基づいて特性測定装置1の各部の動作制御を行う。   The control unit 41 is configured by a known microcomputer, and controls the operation of each unit of the characteristic measurement device 1 based on a preset program.

測定部42は、周知の静電容量測定器や絶縁抵抗計にて構成され、図示しない電子スイッチを制御部41からの制御信号によって切り換えることにより、所定の手順に従って、収容孔16に収容された積層コンデンサ60の静電容量や絶縁抵抗を測定し、測定結果を演算部43に送る。   The measurement unit 42 is configured by a known capacitance measuring instrument or insulation resistance meter, and is accommodated in the accommodation hole 16 according to a predetermined procedure by switching an electronic switch (not shown) by a control signal from the control unit 41. The capacitance and insulation resistance of the multilayer capacitor 60 are measured, and the measurement result is sent to the calculation unit 43.

演算部43は、周知のマイクロコンピュータにて構成され、測定部42で得た測定値に基づいて各積層コンデンサ60の特性の良否を判定し、この測定/判定結果を表示器44に表示する。   The calculation unit 43 is configured by a known microcomputer, determines the quality of each multilayer capacitor 60 based on the measurement value obtained by the measurement unit 42, and displays the measurement / determination result on the display 44.

次に、以上の構成からなる特性測定装置1を使用して、積層コンデンサ60の特性を測定する方法について説明する。   Next, a method for measuring the characteristics of the multilayer capacitor 60 using the characteristic measuring apparatus 1 having the above configuration will be described.

まず、図2に示すように、収容孔16のそれぞれに積層コンデンサ60をその外部電極61a,61bが上下方向に位置する縦置き状態で振り込む。この振込みは、例えば、積層コンデンサ60に周知の方法で振動を作用させることにより行われ、振り込まれた積層コンデンサ60は、一端に設けた外部電極61aが共通電極12上に電気的に接触した状態で収容孔16に収容される。   First, as shown in FIG. 2, the multilayer capacitor 60 is transferred into each of the accommodation holes 16 in a vertically placed state in which the external electrodes 61a and 61b are positioned in the vertical direction. This transfer is performed, for example, by applying vibration to the multilayer capacitor 60 by a well-known method. In the transferred multilayer capacitor 60, the external electrode 61a provided at one end is in electrical contact with the common electrode 12. Is accommodated in the accommodation hole 16.

次に、上部測定ユニット30が下降し、上部プローブ32の各測定端子32a,32bが積層コンデンサ60の外部電極61bに電気的に接触すると共に、測定プローブ33が共通電極12の一端部に電気的に接触する。   Next, the upper measurement unit 30 is lowered, the measurement terminals 32 a and 32 b of the upper probe 32 are in electrical contact with the external electrode 61 b of the multilayer capacitor 60, and the measurement probe 33 is electrically connected to one end of the common electrode 12. To touch.

その後、下部測定ユニット20が上昇し、下部プローブ22が貫通孔13を通じて積層コンデンサ60の外部電極61aに電気的に接触する。図4に示すように共通電極12と貫通孔13とは接触しないように形成されており、下部プローブ22と共通電極12とは絶縁状態にある。   Thereafter, the lower measurement unit 20 is raised, and the lower probe 22 is in electrical contact with the external electrode 61 a of the multilayer capacitor 60 through the through hole 13. As shown in FIG. 4, the common electrode 12 and the through hole 13 are formed so as not to contact each other, and the lower probe 22 and the common electrode 12 are in an insulated state.

以上で測定のセッテイングが完了し、上部プローブ32と共通電極12との間に測定電圧が印加され、あるいは、上部プローブ32と下部プローブ22との間に測定電圧が印加され、順次、各積層コンデンサ60の静電容量が測定される。また、積層コンデンサ60の絶縁抵抗が共通電極12ごとに(言い換えると、2列の収容孔16に収容された積層コンデンサ60ごとに)測定される。あるいは、上部プローブ32と下部プローブ22との間で個々の積層コンデンサ60ごとに絶縁抵抗を測定してもよい。   The measurement setting is thus completed, and a measurement voltage is applied between the upper probe 32 and the common electrode 12, or a measurement voltage is applied between the upper probe 32 and the lower probe 22, and each multilayer capacitor is sequentially applied. A capacitance of 60 is measured. Further, the insulation resistance of the multilayer capacitor 60 is measured for each common electrode 12 (in other words, for each multilayer capacitor 60 accommodated in the two rows of accommodation holes 16). Alternatively, the insulation resistance may be measured for each multilayer capacitor 60 between the upper probe 32 and the lower probe 22.

測定が全て終了すると、制御部41から終了信号が出力され、上部測定ユニット30及び下部測定ユニット20をそれぞれ昇降させて元の位置に復帰させる。その後、貫通孔13からエアーを吹き込むなどの方法によって積層コンデンサ60をそれぞれの収容孔16から取り出す。なお、測定結果が不良な積層コンデンサ60は、ロットごとに排除するか、個別にエアー吸引法などによって排除する。   When all the measurements are completed, an end signal is output from the control unit 41, and the upper measurement unit 30 and the lower measurement unit 20 are moved up and down to return to their original positions. Thereafter, the multilayer capacitor 60 is taken out from the respective accommodation holes 16 by a method such as blowing air from the through holes 13. In addition, the multilayer capacitor 60 having a poor measurement result is excluded for each lot or individually by an air suction method or the like.

本第1実施例においては、共通電極12と二つの測定端子32a,32bを有する上部プローブ32と下部プローブ22とによる4端子タイプで積層コンデンサ60の電気的特性を測定するため、低インピーダンス部品であっても測定精度が向上し、かつ、静電容量や絶縁抵抗など同時に複数種類の特性を測定することができ、測定効率が向上する。共通電極12は環状に積層コンデンサ60の外部電極61aと接触するため、接触不良を生じるおそれはない。   In the first embodiment, since the electrical characteristics of the multilayer capacitor 60 are measured by a four-terminal type using the upper probe 32 and the lower probe 22 having the common electrode 12 and the two measurement terminals 32a and 32b, a low impedance component is used. Even in such a case, the measurement accuracy is improved, and a plurality of types of characteristics such as capacitance and insulation resistance can be measured at the same time, thereby improving the measurement efficiency. Since the common electrode 12 contacts the external electrode 61a of the multilayer capacitor 60 in a ring shape, there is no possibility of causing a contact failure.

また、共通電極12を収容孔16の2列ごとに独立して設置しているので、2列の積層コンデンサ60ごとに異なる種類の測定を同時に行うことも可能であり、測定の効率アップが可能となる。   In addition, since the common electrode 12 is installed independently for every two rows of the accommodation holes 16, it is possible to simultaneously perform different types of measurements for each of the two rows of multilayer capacitors 60, thereby increasing the measurement efficiency. It becomes.

(第2実施例、図5〜図7参照)
第2実施例である特性測定装置2は、前記第1実施例である特性測定装置1において、図5に示すように、上部プローブ32を互いに独立して上下動可能な同軸構造の測定端子32c,32dとした点にある。他の構成は前記第1実施例と同様であり、図5において第1実施例とは共通した符号を使用している。
(Refer 2nd Example and FIGS. 5-7)
As shown in FIG. 5, the characteristic measuring apparatus 2 according to the second embodiment is the same as the characteristic measuring apparatus 1 according to the first embodiment, as shown in FIG. , 32d. Other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment are used in FIG.

この特性測定装置2は前記第1実施例である特性測定装置1と同様の作用効果を奏するものであるが、上部プローブ32に関して同軸構造を採用したことにより、さらに、上部プローブ32が積層コンデンサ60の外部電極61bに安定して電気的に接触する作用効果を奏する。   The characteristic measuring apparatus 2 has the same effect as that of the characteristic measuring apparatus 1 according to the first embodiment. However, by adopting a coaxial structure with respect to the upper probe 32, the upper probe 32 further includes the multilayer capacitor 60. The effect of being in stable electrical contact with the external electrode 61b is obtained.

即ち、図6に示すように、収容孔16内で積層コンデンサ60の位置が点線で示す状態にずれた場合、第1実施例の測定端子32a,32bではいずれかの接触が不十分になるおそれがある(図6(A)参照)。しかし、同軸構造の測定端子32c,32dにあっては、内周側の測定端子32cは勿論のこと、外周側の測定端子32dも環状であるために十分な接触面積を確保することができる(図6(B)参照)。なお、図6では接触部分に斜線が付されている。以下に示す図7でも同様である。   That is, as shown in FIG. 6, when the position of the multilayer capacitor 60 is shifted to the state indicated by the dotted line in the accommodation hole 16, either of the contacts may be insufficient at the measurement terminals 32 a and 32 b of the first embodiment. (See FIG. 6A). However, in the measurement terminals 32c and 32d having the coaxial structure, a sufficient contact area can be ensured because the measurement terminal 32d on the outer peripheral side as well as the measurement terminal 32c on the inner peripheral side are annular. (See FIG. 6B). In FIG. 6, the contact portion is hatched. The same applies to FIG. 7 shown below.

また、図7に示すように、収容孔16内で積層コンデンサ60が点線で示す状態に回転して位置ずれを生じた場合であっても、測定端子32a,32bでは接触面積が減少するが(図7(A)参照)、測定端子32c,32dでは接触面積の減少は生じない(図7(B)参照)。   Further, as shown in FIG. 7, even when the multilayer capacitor 60 rotates in the state indicated by the dotted line in the accommodation hole 16 and the positional deviation occurs, the contact area is reduced in the measurement terminals 32a and 32b ( The contact area does not decrease at the measurement terminals 32c and 32d (see FIG. 7A) (see FIG. 7B).

(第3実施例、図8参照)
第3実施例である特性測定装置3は、図8に示すように、積層コンデンサ60をその外部電極61a,61bが水平方向に位置する横置き状態で収容孔16に振り込むようにしたものである。
(Refer to the third embodiment, FIG. 8)
As shown in FIG. 8, the characteristic measuring apparatus 3 according to the third embodiment is configured such that the multilayer capacitor 60 is transferred into the receiving hole 16 in a state in which the external electrodes 61a and 61b are horizontally positioned. .

詳しくは、この特性測定装置3は、絶縁性の底板11と絶縁性の収容プレート15とからなる収容ユニット10、昇降可能な押さえ治具45、昇降可能なプローブ35,36にて構成されている。   Specifically, the characteristic measuring device 3 includes a housing unit 10 including an insulating bottom plate 11 and an insulating housing plate 15, a lifting jig 45 that can be raised and lowered, and probes 35 and 36 that can be raised and lowered. .

収容プレート15には多数の収容孔16がマトリクス状に形成されている。底板11上には電極12a,12bが形成されていると共に、貫通孔13が収容孔16に対応した位置に形成されている。電極12a,12bはそれぞれ電気的に絶縁されて独立状態にあり、例えば、電極12aは共通電極として、電極12bは個別電極として機能するように構成されている。   A large number of receiving holes 16 are formed in the receiving plate 15 in a matrix. Electrodes 12 a and 12 b are formed on the bottom plate 11, and a through hole 13 is formed at a position corresponding to the accommodation hole 16. The electrodes 12a and 12b are electrically insulated and are in an independent state. For example, the electrode 12a functions as a common electrode and the electrode 12b functions as an individual electrode.

また、前記第1実施例で説明したように、制御部41、測定部42、演算部43及び表示器44が設けられている。   Further, as described in the first embodiment, the control unit 41, the measurement unit 42, the calculation unit 43, and the display 44 are provided.

測定は以下のようにして行われる。まず、積層コンデンサ60が収容孔16に横置き状態で振り込まれ、押さえ治具45によって押圧されることにより、外部電極61a,61bが電極12a,12bと電気的に接触した状態を確実なものとして保持される。次に、プローブ35,36が貫通孔13を通じて上昇して外部電極61a,61bに電気的に接触する。   The measurement is performed as follows. First, when the multilayer capacitor 60 is horizontally placed into the accommodation hole 16 and pressed by the holding jig 45, the external electrodes 61a and 61b are in a state of being in electrical contact with the electrodes 12a and 12b. Retained. Next, the probes 35 and 36 are raised through the through hole 13 and are in electrical contact with the external electrodes 61a and 61b.

この状態で、電極12a,12b及びプローブ35,36から測定電圧が外部電極61a,61bに印加され、積層コンデンサ60の静電容量及び絶縁抵抗が測定される。   In this state, a measurement voltage is applied to the external electrodes 61a and 61b from the electrodes 12a and 12b and the probes 35 and 36, and the capacitance and insulation resistance of the multilayer capacitor 60 are measured.

第3実施例である特性測定装置3においても、4端子タイプで積層コンデンサの電気的特性を測定する。従って、その作用効果は前記第1実施例である特性測定装置1と同様である。   Also in the characteristic measuring apparatus 3 which is the third embodiment, the electric characteristic of the multilayer capacitor is measured with a four-terminal type. Accordingly, the function and effect are the same as those of the characteristic measuring apparatus 1 according to the first embodiment.

(他の実施例)
なお、本発明は前記実施例に限定されるものではなく、その要旨の範囲内で種々に変更することができる。
(Other examples)
In addition, this invention is not limited to the said Example, It can change variously within the range of the summary.

例えば、前記第1実施例において、共通電極12は収容孔16の2列のグループごとに電気的に独立して設けているが、1列ごとであってもよいし、3列以上のグループごとに電気的に独立して設けてもよい。   For example, in the first embodiment, the common electrode 12 is electrically provided independently for each group of the two rows of the accommodation holes 16, but may be one row or every group of three or more rows. May be provided electrically independently.

本発明の第1実施例である特性測定装置を示す概略構成図である。It is a schematic block diagram which shows the characteristic measuring apparatus which is 1st Example of this invention. 前記第1実施例の要部を示す断面図である。It is sectional drawing which shows the principal part of the said 1st Example. (A),(B)共に、前記第1実施例において収容孔と積層コンデンサとプローブとの位置関係を示す説明図である。(A), (B) is explanatory drawing which shows the positional relationship of an accommodation hole, a multilayer capacitor, and a probe in the said 1st Example. 前記第1実施例において貫通孔と共通電極と積層コンデンサとプローブとの位置関係を示す説明図である。It is explanatory drawing which shows the positional relationship of a through-hole, a common electrode, a multilayer capacitor, and a probe in the said 1st Example. 本発明の第2実施例である特性測定装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the characteristic measuring apparatus which is 2nd Example of this invention. 収容孔内における積層コンデンサの位置ずれとプローブの接触状態を示す説明図であり、(A)は第1実施例、(B)は第2実施例に関する。It is explanatory drawing which shows the position shift of the multilayer capacitor in an accommodation hole, and the contact state of a probe, (A) is related with 1st Example, (B) is related with 2nd Example. 収容孔内における積層コンデンサの位置ずれとプローブの接触状態を示す説明図であり、(A)は第1実施例、(B)は第2実施例に関する。It is explanatory drawing which shows the position shift of the multilayer capacitor in an accommodation hole, and the contact state of a probe, (A) is related with 1st Example, (B) is related with 2nd Example. 本発明の第3実施例である特性測定装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the characteristic measuring apparatus which is 3rd Example of this invention. 従来の特性測定装置に使用される測定用トレイの分解斜視図である。It is a disassembled perspective view of the tray for a measurement used for the conventional characteristic measuring apparatus. 従来の特性測定装置における測定状態を示す断面図である。It is sectional drawing which shows the measurement state in the conventional characteristic measuring apparatus.

符号の説明Explanation of symbols

1,2,3…特性測定装置
10…収容ユニット
11…底板(絶縁性プレート)
12…共通電極
12a…共通電極
12b…個別電極
13…貫通孔
15…収容プレート
16…収容孔
20…下部測定ユニット
22…下部プローブ
30…上部測定ユニット
32…上部プローブ
32a〜32d…測定端子
60…積層コンデンサ
61a,61b…外部電極
1, 2, 3 ... Characteristic measuring device 10 ... Housing unit 11 ... Bottom plate (insulating plate)
12 ... Common electrode
12a ... Common electrode
12b ... Individual electrode 13 ... Through hole 15 ... Housing plate 16 ... Housing hole
20 ... Lower measurement unit 22 ... Lower probe
30 ... Upper measurement unit 32 ... Upper probe 32a to 32d ... Measurement terminal 60 ... Multilayer capacitor 61a, 61b ... External electrode

Claims (6)

両端部に外部電極を有するチップ型の電子部品の電気的特性を測定する特性測定装置において、
前記電子部品をその外部電極が上下方向に位置する縦置きで収容するためのマトリクス状に配置された多数の収容孔を有する収容プレートと、
前記収容孔に収容された前記電子部品の下部外部電極と接触する共通電極を表面に配置し、かつ、収容孔に連通するとともに前記共通電極を貫通する貫通孔を有する絶縁性プレートと、
各収容孔に収容された前記電子部品の上部外部電極に接離可能な二つの測定端子を有する上部プローブが設けられた上部測定ユニットと
各収容孔に収容された前記電子部品の下部外部電極に前記貫通孔を通じて接離可能な下部プローブが設けられた下部測定ユニットと、
前記共通電極、上部プローブ及び下部プローブを介して前記電子部品の電気的特性を測定する測定手段と、
を備えたことを特徴とする特性測定装置。
In a characteristic measuring device for measuring the electrical characteristics of a chip-type electronic component having external electrodes at both ends,
A receiving plate having a large number of receiving holes arranged in a matrix for receiving the electronic component in a vertical position in which the external electrodes are positioned in the vertical direction;
An insulating plate having a through hole penetrating the common electrode while being arranged on the surface with a common electrode in contact with a lower external electrode of the electronic component housed in the housing hole;
An upper measurement unit provided with an upper probe having two measurement terminals capable of contacting and separating from the upper external electrode of the electronic component housed in each housing hole;
A lower measurement unit provided with a lower probe that can be contacted and separated through the through hole to the lower external electrode of the electronic component housed in each housing hole;
Measuring means for measuring electrical characteristics of the electronic component via the common electrode, upper probe and lower probe;
A characteristic measuring apparatus comprising:
前記共通電極は前記収容孔の所定のグループに対応して配置されていることを特徴とする請求項1に記載の特性測定装置。   The characteristic measuring apparatus according to claim 1, wherein the common electrode is arranged corresponding to a predetermined group of the accommodation holes. 前記上部プローブは互いに独立して上下動可能な同軸構造の測定端子を備えていることを特徴とする請求項1又は請求項2に記載の特性測定装置。   The characteristic measurement apparatus according to claim 1, wherein the upper probe includes a coaxial measurement terminal that can move up and down independently of each other. 前記収容孔は前記電子部品の断面形状より僅かに大きい矩形形状の孔であることを特徴とする請求項1、請求項2又は請求項3に記載の特性測定装置。   The characteristic measuring device according to claim 1, wherein the housing hole is a rectangular hole that is slightly larger than a cross-sectional shape of the electronic component. 前記収容孔は前記電子部品の断面形状の対角線寸法より僅かに大きい直径の円形状の孔であることを特徴とする請求項1、請求項2又は請求項3に記載の特性測定装置。   4. The characteristic measuring apparatus according to claim 1, wherein the housing hole is a circular hole having a diameter slightly larger than a diagonal dimension of a cross-sectional shape of the electronic component. 両端部に外部電極を有するチップ型の電子部品の電気的特性を測定する特性測定装置において、
前記電子部品をその外部電極が水平方向に位置する横置きで収容するためのマトリクス状に配置された多数の収容孔を有する収容プレートと、
前記収容孔に収容された前記電子部品のそれぞれの外部電極とそれぞれ接触する共通電極及び個別電極を表面に配置し、かつ、収容孔に連通するとともに前記共通電極及び個別電極をそれぞれ貫通する貫通孔を有する絶縁性プレートと、
各収容孔に収容された前記電子部品のそれぞれの外部電極に前記貫通孔を通じて接離可能な一対のプローブが設けられた下部測定ユニットと、
前記共通電極、個別電極及び一対のプローブを介して前記電子部品の電気的特性を測定する測定手段と、
を備えたことを特徴とする特性測定装置。
In a characteristic measuring device for measuring the electrical characteristics of a chip-type electronic component having external electrodes at both ends,
A receiving plate having a large number of receiving holes arranged in a matrix for receiving the electronic component in a horizontal orientation in which the external electrodes are positioned in the horizontal direction;
A common electrode and an individual electrode that are in contact with each external electrode of the electronic component housed in the housing hole are arranged on the surface, and a through-hole that communicates with the housing hole and penetrates the common electrode and the individual electrode, respectively. An insulating plate having
A lower measurement unit provided with a pair of probes that can be brought into and out of contact with each external electrode of the electronic component accommodated in each accommodation hole;
Measuring means for measuring electrical characteristics of the electronic component via the common electrode, the individual electrode and a pair of probes;
A characteristic measuring apparatus comprising:
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