JPH02168164A - Probe - Google Patents

Abstract

PURPOSE:To make the measuring operation easy when two measuring points are needed for one object to be measured by providing a second measuring terminal coaxially with a first measuring terminal within the same holding member. CONSTITUTION:A needle-shaped measuring terminal 1 is provided centering a socket 3. A cylindrical measuring terminal 2 is provided coaxially with the terminal 1, specifically, at the outside of the terminal 1. Between the terminals 1, 2 and socket 3 are provided insulating bodies 4, 5 respectively. Moreover, the terminals 1, 2 are connected with measuring cables 6, 7 respectively. The socket 3 is secured to a probe hand 8. When the terminals 1 and 2 are in touch with an object to be measured (electrode) 11, they are pressed against the object 11 with a fixed pressure by springs 9, 10a and 10b. Therefore, the object 11 can be measured at two points. Moreover, it can be detected whether the probe is poorly connected to the substance 11 if a current is passed between the terminals 1 and 2.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a probe, and more particularly to a probe for laser trimming.

Previously, laser trimming probes did not have a constant terminal for measuring electrical characteristics such as resistance by contacting the object to be measured (such as electrical work).

Furthermore, the patterns of hybrid ICs that are laser trimmed using laser trimming probes are becoming more and more B&S patterns in recent years, and the measurement electrodes are also becoming much smaller.

Conventional laser trimming probes like this have only one measurement terminal that comes into contact with the object to be measured, so if two measurement locations are required on the same electrode, such as when measuring low resistance, two Probes must be used to detect lfi&! of the hybrid IC pattern. [With integration into one, there is a drawback that it takes time and effort to perform work such as when two measurement locations are required for the same electrode.

Purpose of the Invention The present invention has been made in order to eliminate the drawbacks of the conventional ones as described above, and provides a probe that can be easily used when two measurement locations are required for the same electrode. purpose.

The probe according to the present invention has first and second measurement terminals in the same holding member for measuring the electrical characteristics of an object to be measured, and the first measurement terminal is provided in the holding member. The second measurement terminal is arranged on a concentric circle centered on the terminal.

Next, a first embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing the configuration of an embodiment of the present invention.

In the figure, the needle-shaped measurement terminal 1 is arranged at the center of the socket 3, and the cylindrical A1 constant terminal 2 is arranged on a concentric circle centered on the measurement terminal 1, that is, on the outside of the measurement terminal 1. , insulators 4.5 are provided between the measurement terminals 1.degree.2 and the sockets 3, respectively. In addition, measurement terminal 1.2
Measuring cables 6 and 7 are connected to the respective measuring cables 6 and 7.

The socket 3 is fixed to a glove hand 8 attached to a probe card (not shown).

FIG. 2 is a cross-sectional view of the socket 3 shown in FIG. YS1, and FIG. 3 is a cross-sectional view of the measuring terminal 1.2 shown in FIG. 1 in contact with an object to be measured. In these figures, the measuring terminal 1 is connected to the spring 9, and the measuring terminal 2 is connected to the spring loa,
10b, it is brought into contact with the object to be measured (electrode) 11 with a constant pressure.

Therefore, the measurement terminals 1 and 2 are to be measured! By contacting the tall, illumination of the object to be measured 11 can be performed using each of the measurement terminals 1 and 2, that is, at two locations, which is useful when two measurement locations are required for the same object to be measured. Work can be done easily.

In addition, it is possible to detect whether the probe is in contact with the object to be measured 11 by flowing a current between the measurement terminals 1 and 2 while the constant terminals 1 and 2 are in contact with the object to be measured 11. Can be done.

That is, when a voltage is applied between the measurement terminals 1.2 with the measurement terminals 1.2 in contact with the object to be measured 11, if the probe is in contact with the object to be measured 11, the measurement terminal 1.
．． The resistance between 2 becomes almost zero, and the probe connects to the object to be measured 1.
If the measurement terminal 1 is not in contact (including the case where the position of the target J!1 constant!Nil and the glove is misaligned),
．． The resistance between the two becomes infinite.

Therefore, it is possible to detect that the probe is causing poor contact with the object to be measured 11.

In this way, by arranging the needle-shaped measurement terminal 1 at the center of the socket 3 and arranging the cylindrical measurement terminal 2 on a concentric circle centered on the measurement terminal 1, one probe can be used. It is possible to measure two locations at the same time. Therefore,
Work can be easily carried out when two measurement locations are required for small electrodes, etc.

Furthermore, since the contact state between the measurement terminal 1.2 and the object to be measured 11 can be detected, the preparation time for laser trimming can be shortened.

In one embodiment of the present invention, the cylindrical measuring terminal 2 is arranged on a concentric circle centered on the needle-shaped measuring terminal 1. A plurality of needle-shaped measurement terminals may be provided, but the present invention is not limited thereto.

As explained above, according to the present invention, by arranging the second measurement terminal on a concentric circle centered on the first measurement terminal within the same holding member, the same electrode This has the effect that work can be easily carried out when two measurement locations are required.

[Brief explanation of the drawing]

Fig. 1 is a block diagram showing the configuration of an embodiment of the present invention, Fig. 2 is a sectional view of the socket shown in Fig. 1, and Fig. 3 shows the measurement terminal in Fig. 1 in contact with a fixed object. It is a cross-sectional view of the state in which the main parts are explained. 1... Needle-shaped measurement terminal 2... Cylindrical Jl constant terminal 3... Socket 4.5 ...Insulator 6.7...Measurement cable

Claims (1)

[Claims] (1) First and second measurement terminals for measuring the electrical characteristics of the object to be measured are provided in the same holding member, and the first and second measurement terminals are arranged on a concentric circle centered on the first measurement terminal within the holding member. A probe characterized in that the second measurement terminal is provided.