JP4241369B2 - リニアスケール - Google Patents
リニアスケール Download PDFInfo
- Publication number
- JP4241369B2 JP4241369B2 JP2003435639A JP2003435639A JP4241369B2 JP 4241369 B2 JP4241369 B2 JP 4241369B2 JP 2003435639 A JP2003435639 A JP 2003435639A JP 2003435639 A JP2003435639 A JP 2003435639A JP 4241369 B2 JP4241369 B2 JP 4241369B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- thermal expansion
- linear
- head
- reference point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Description
Claims (5)
- 前記検出器は測定対象物と共に移動し、前記検出器の前記基準点からの距離の真値Lを求めることにより、前記測定対象物の移動量を求めることを特徴とする請求項1に記載のリニアスケール。
- 前記2本のスケール部は、一方がCu−Ni−Fe合金により形成され、他方がFe−Cr−Co合金により形成されていることを特徴とする請求項1又は2に記載のリニアスケール。
- 前記一方のスケール部の熱膨張率α1と、前記他方のスケール部の熱膨張率α2との差が0.5×10−6以上であることを特徴とする請求項1又は2に記載のリニアスケール。
- 前記2本のスケール部は、磁気的に又は光学的に読み取り可能な目盛りが記録されていることを特徴とする請求項1乃至4のいずれか1項に記載のリニアスケール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003435639A JP4241369B2 (ja) | 2003-12-26 | 2003-12-26 | リニアスケール |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003435639A JP4241369B2 (ja) | 2003-12-26 | 2003-12-26 | リニアスケール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005195367A JP2005195367A (ja) | 2005-07-21 |
JP4241369B2 true JP4241369B2 (ja) | 2009-03-18 |
Family
ID=34815653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003435639A Expired - Fee Related JP4241369B2 (ja) | 2003-12-26 | 2003-12-26 | リニアスケール |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4241369B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8044658B2 (en) | 2007-07-30 | 2011-10-25 | Yamaha Corporation | Position detector |
EP2414782B1 (en) * | 2009-04-03 | 2014-11-12 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | A one-dimension position encoder |
ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
WO2017064802A1 (ja) * | 2015-10-16 | 2017-04-20 | 株式会社島津製作所 | 測定装置の温度変位による測定誤差補正方法及び該方法を用いた質量分析装置 |
-
2003
- 2003-12-26 JP JP2003435639A patent/JP4241369B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005195367A (ja) | 2005-07-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4550276B2 (ja) | センサの非線形領域に対する補正機能を具備した位置検出装置 | |
JP6727721B2 (ja) | 冗長空間位相信号を含むアブソリュート型エンコーダ | |
JP2619593B2 (ja) | 位置測定装置 | |
JP6791741B2 (ja) | 電子式アブソリュート型エンコーダ | |
EP1929247B1 (en) | Thermal coefficients of nudge compensation and tare compensation for linear and rotary mr array position transducers | |
US5955882A (en) | Magnetic position measuring device using a plurality of sensors and a scale | |
CN210773869U (zh) | 磁阻位置传感器 | |
JP4241369B2 (ja) | リニアスケール | |
TW201435303A (zh) | 位移感測器及位移之檢測方法 | |
KR20130102499A (ko) | 측정기와, 측정 오차의 보정 방법 | |
US7576532B2 (en) | Motion transducer for motion related to the direction of the axis of an eddy-current displacement sensor | |
JP4868159B2 (ja) | リニアスケール | |
JP2017102090A (ja) | 位置検出装置 | |
JP2007192722A (ja) | 位置検出装置 | |
JP2014153114A (ja) | スケール及び変位検出装置 | |
JP4783698B2 (ja) | 電磁誘導式エンコーダ | |
TWI657228B (zh) | 線性位移感測裝置 | |
CN116678301A (zh) | 一种用于磁栅位移传感器的单场扫描装置 | |
JP4924825B2 (ja) | 電磁誘導式リニアスケール | |
US7948230B2 (en) | Magnetic type digital-analogic position-sensing device | |
JP6438233B2 (ja) | 変位検出装置 | |
US7071682B2 (en) | Magnetic array position sensor and method | |
JP4189139B2 (ja) | リニアエンコーダ | |
US20220065668A1 (en) | Position-measuring device | |
EP1211477B1 (en) | Measurement of the unbalancing of a ferromagnetic metal core in a nonconductive and nonferroelectric ribbon |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060623 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081119 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20081209 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20081222 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120109 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130109 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140109 Year of fee payment: 5 |
|
LAPS | Cancellation because of no payment of annual fees |