JP4225538B2 - Hot displacement measuring device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement in a hot displacement measuring apparatus in which a laser beam transmitter is provided on one side of a heating furnace and a laser beam receiver is provided on the opposite side.
[0002]
[Prior art]
Conventionally, as a hot displacement measuring device, a displacement measuring system composed of a camera control unit and a camera in which two sets of illumination devices on one side of a sample heating furnace and two sets of solid scanning light receiving elements on the other side are combined with a built-in lens system. Various devices have been proposed for automatically measuring the displacement of the sample during heating by arranging each device (Japanese Patent Laid-Open Nos. 60-39540, 61-7452 and 61-172041). Issue gazette).
[0003]
However, these apparatuses are difficult to set properly because the setting of the sample is complicated and the set state of the sample cannot be visually confirmed. Furthermore, because the resolution of the displacement measuring device is low, the measurement accuracy is low for small samples, and the measurement range is as narrow as about 3 mm on one side, so that abnormally expanded samples or samples with large shrinkage cannot be measured.
[0004]
"Displacement measuring device between hot materials such as ceramics, etc., which enables high-precision measurement by using a laser displacement measuring instrument as a means of measuring displacement of such a small dimension with high resolution with sub-micron order resolution. (JP-A-3-77053).
Furthermore, Japanese Patent Laid-Open No. 2002-82077 proposes that this device has been improved to make it easy to set the sample at the appropriate position in the heating furnace, and to be able to measure the displacement between the heat with high accuracy and ease of use. .
[0005]
[Problems to be solved by the invention]
However, although the above-described displacement measuring apparatus can achieve a high resolution and can measure a sample that abnormally expands or a sample that contracts greatly, there are the following problems.
{Circle around (1)} In Japanese Patent Laid-Open No. 3-77053, setting a sample set in a heating furnace is complicated as in the prior art and it is difficult to set the sample properly.
Briefly described with reference to FIG. 8, the measurement windows 4 are provided at both ends of the furnace core tube 7 that supports the sample 8 in the heating furnace 1 to form an airtight structure in the furnace core tube 7, and exhaust is performed at both ends of the furnace core tube 7. The measurement window 4 and the inside thereof are provided with a port 9 (exhaust by a vacuum pump 19) and a gas introduction port 10 so that the displacement of the sample 8 can be measured in various atmospheres, and is fixed by a measurement window fixing hardware 17 having a water cooling structure. A heat insulating material 6 having an in-furnace radiant heat prevention slit and an in-furnace radiant light prevention slit metal fitting 5 are provided to prevent the glass in the measurement window 4 from being distorted due to heat in the furnace and causing an error. In-furnace radiation light preventing slit plate 30 having in-furnace radiation light reducing slits 30 'provided on the end faces of the light transmitting port 2' of the laser light transmitting unit 2 and the light receiving port 3 'of the laser light receiving unit 3, and the in-furnace radiation light, respectively. A reduction optical filter 29 is provided to prevent the in-furnace light from entering the laser transmitter 2 and the laser receiver 3 during a high temperature measurement and causing a displacement measurement error of the sample 8. The sample is electrically displaced from the time when the laser beam scanned horizontally with a width equal to or greater than the length of the sample at a constant speed from the laser transmitting unit 2 is interrupted, that is, the time when the output from the laser receiving unit 3 is zero. Measured and digitally displayed on the display 12, and the output signal and the output of the sample temperature measuring digital thermometer 13 (converting the detection signal of the thermocouple 20 into a digital signal) are input to the personal computer 15 via the interface 14. And the digital plotter 16 draws a relationship curve between temperature and coefficient of thermal expansion. In order to set the sample 8 in the heating furnace 1, the laser transmitter 2 or the laser receiver 3, the measurement window 4, and the heat insulating material 6 in the furnace tube 7 are removed in this order, and the sample tube is put into the furnace tube 7. After the placed sample 8 was inserted and set with an insertion jig or the like, the heat insulating material 6, the measurement window 4, the laser transmitter 2 or the laser receiver 3 were mounted.
(2) Japanese Laid-Open Patent Publication No. 2002-82077 made it easy to set the sample at the proper position of the heating furnace and made it easy to use and highly accurate measurement of the displacement of the heat. Therefore, the sample cannot be set on the measuring device outside the working hours.
[0006]
[Means for Solving the Problems]
The present invention is to solve the above-mentioned problems, and is a hot displacement measuring device that can automatically set a sample to an appropriate position in a heating furnace and can be measured even with high accuracy and good operability. The purpose is to provide.
In the present invention, the laser beam transmitter of the laser displacement measuring device is disposed on one side of the heating furnace, the laser beam receiver is disposed on the opposite side, and the direction orthogonal to the line connecting the laser beam transmitter and the laser beam receiver And a hot displacement measuring device provided with a sample supply / discharge means for automatically supplying and discharging a sample under computer control,
The sample supply / discharge means is:
A furnace inlet lid and a furnace outlet lid, which are respectively provided at the front and rear of the heating furnace, driven by an open / close air cylinder with a sample insertion bridge and a sample discharge bridge attached to the lower end;
A position sensor located near the furnace inlet lid;
A plurality of sample transport tables provided on the furnace inlet lid side and attached to the endless belt conveyor and the sample tables mounted on each sample transport table;
A sample insertion air cylinder for inserting the sample stage into a furnace tube;
A sample discharge yard provided on the furnace outlet lid side and having a moving roller;
With
By the position detection of the position sensor, the sample stage conveyed by the belt conveyor is controlled to stop in front of the furnace inlet lid,
The sample insertion bridge is positioned below the belt conveyor when the furnace inlet lid is closed, and rises to a position where the sample table is placed when the furnace inlet lid is opened,
When the sample table stops before the furnace inlet lid, it is driven by the open / close air cylinder to open the furnace inlet lid, the sample insertion bridge rises, the sample insertion bridge, the heating furnace core tube, and the sample transport table Aligned in a straight line, the tip of the sample insertion air cylinder extends to fit into a fixed hole formed in the sample table, and the sample table slides on the core tube and is driven by the air cylinder to the center of the furnace Is inserted, the furnace inlet lid and the furnace outlet lid are closed, and measurement is started.
At the end of measurement, driven by the open / close air cylinder, the furnace inlet lid and furnace outlet lid rise and open, the tip of the sample insertion air cylinder extends and fits into the fixing hole of the in-furnace sample stage, and the sample stage Is pushed out to the discharge yard through the discharge bridge on the opposite side.
Moreover, the present invention is characterized in that after the measurement is completed, the furnace lid of the heating furnace is controlled to be in an open state.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
FIG. 1 is a diagram for explaining the overall configuration of the hot displacement measuring apparatus according to the present invention, FIG. 2 is a top view of the apparatus for explaining the configuration of the automatic sample supply apparatus, and FIG. 3 is for explaining the sample insertion state in the furnace of the automatic sample supply apparatus. 4 is a detailed view of the furnace lid, FIG. 4 (a) is a view showing a state where the furnace cover is closed, FIG. 4 (b) is a view showing a state where the furnace cover is opened, and FIG. 5 is an automatic view. FIG. 6 is a diagram for explaining a sample take-out state of the sample supply device, and FIG. 6 is a diagram for explaining a sample stage.
[0008]
A sample 48 for measuring hot displacement is placed on the sample stage 54 in the heating furnace 31, and a laser transmitter 32 and a laser receiver 33 controlled by a displacement meter controller 37 are arranged on the left and right of the furnace 31, Scanning laser light is received through measurement windows (quartz glass) 43 provided on both sides of the heating furnace. A heat insulating material having radiant heat and radiant light prevention slits is arranged inside the measurement window 43, and radiant heat and radiant light prevention slits are respectively arranged and built in the outside of the measurement window 43, and each of the laser transmitting part and the laser receiving part is provided. In order to prevent the measurement window glass from being distorted by the radiant heat from the heating furnace and causing a measurement error, a cooling mechanism should be provided on the measurement window glass. At the same time, the measurement window glass is made of quartz glass having high heat resistance and a low coefficient of thermal expansion, and is configured to be a measurement window glass having both glass surfaces parallel to each other.
[0009]
A furnace inlet lid 46 equipped with a sample insertion bridge 52 (Fig. 3) operated by an air cylinder 59 (Fig. 2) that can be controlled by a CPU 38 comprising a computer etc. at the front of the heating furnace 31, and a sample discharge of the same structure at the rear A furnace outlet lid 47 equipped with a working bridge 52 '(FIG. 5) is provided. The heating furnace 31 is heated by a heater 45 that is driven and controlled by a heater controller 36, and the furnace temperature signal detected by a control thermocouple 42 is converted into a digital signal by a thermometer 49 and is captured by a CPU 38 for detection. Based on the result, the CPU 38 controls the heater controller 36. Further, the temperature of the sample is detected by the thermocouple 44 for temperature measurement, converted into a digital signal by the thermometer 40, and taken into the CPU 38. As for the hot displacement of the sample, the sample name, test temperature, heating rate, etc. are input from the input device 49 to the CPU 38, and scanned at a constant speed from the laser transmitter 32 horizontally with a width greater than the length of the sample. The time when the laser beam is interrupted, that is, the time when the output from the laser light receiving unit 33 is “0” is calculated by the CPU 38 based on the signal from the displacement controller 37, and at the same time, the temperature data obtained from the thermometer 40 And the coefficient of thermal expansion are obtained and output to the printer 39.
[0010]
As will be described in detail later, the hot displacement measuring device of the present invention has an automatic sample supply device 34 that can automatically insert and eject a sample in a heating furnace 31, and opens and closes in conjunction with the supply device. Equipped with a furnace inlet lid 46, a furnace outlet lid 47, and a discharge yard 35, the sample can be easily set continuously. Further, it is characterized in that six samples can be registered at a time, and samples can be added in the middle, and endless and highly accurate displacement measurement can be performed.
[0011]
Next, a mechanism for inserting a sample into the furnace, measuring the displacement, and discharging it will be described in detail with reference to FIGS.
In FIG. 2, the drive belt conveyor 55 is provided with 18 sample transport bases 53 in the circumferential direction, and in the drawing, nine on the upper surface side are shown. The sample 48 is set on a sample table 54 provided on the sample transport table 53. Among them, there are six sample transport bases 53 on which the sample 48 is placed up to the furnace inlet lid 46, and the transport belt conveyor 55 is driven by the drive motor 61 under the control of the CPU 38 and transported. As shown in the figure, six samples are arranged, and a position sensor 58 is provided in the vicinity of the furnace inlet lid 46 so that the sample stage 54 stops accurately in front of the furnace inlet lid 46.
[0012]
The sample stage 54 and the sample 48 are stopped in front of the furnace inlet lid 46 and are driven by an air cylinder 56 to open the furnace inlet lid 46 as shown in FIG. As shown in FIG. 4, a sample insertion bridge 52 is attached to the lower end of the furnace inlet lid 46, and in the state where the air cylinder 56 extends and the furnace inlet lid is closed (FIG. 4 (a)), The bridge 52 is positioned below the belt conveyor, and in a state where the air cylinder 56 is pulled in and the furnace inlet lid is opened (FIG. 4B), the sample insertion bridge 52 rises to a position where the sample stage is placed. ing. Accordingly, the sample insertion bridge 52 rises simultaneously with the opening of the furnace inlet lid 46, and the insertion bridge 52, the core tube 51 provided in the heating furnace 31, and the sample transport table 53 are aligned in a straight line (FIG. 5 ( a)) The tip portion 59A of the sample insertion air cylinder 59 enters the fixing hole 57 for maintaining the stability of the sample provided in the sample stage 54 (FIG. 6), and the core provided in the heating furnace 31. The tube 51 is slid and inserted to the center of the furnace, and the furnace inlet lid 46 is closed to start measurement.
[0013]
When the measurement is completed, the furnace inlet lid 46 and the furnace outlet lid 47 are lifted, and the tip of the sample insertion air cylinder 59 extends to enter the fixing hole 57 of the in-furnace sample stage 54 as shown in FIG. Into the discharge yard 35 through the discharge bridge 52 'on the opposite side (FIG. 5C). The discharge yard 35 is provided with a moving roller 61 so that the sample stage 54 moves smoothly.
[0014]
The series of operations as described above are automatically performed under the control of a program stored in the CPU 38 in advance. Note that the furnace inlet lid 46 and the furnace outlet lid 47 are forcibly opened after the measurement and the inside of the heating furnace is cooled to shorten the waiting time of the next measurement sample and to improve efficiency.
[0015]
Next, the shape of the measurement sample will be described with reference to FIG. 7A is a plan view and FIG. 7B is a front view.
As for the shape of a refractory sample for measuring hot displacement, the expansion measurement part is generally formed with an edge of 70 to 85 °, and such an edge-shaped sample lacks an edge during preparation. It is easy and the operability is lowered because it is conscious not to cause chipping, and it becomes a problem particularly when the tissue is rough and not homogeneous. Therefore, in the present invention, the expansion measuring part is formed in an R shape. As shown in the figure, when the length direction i, the height h, and the width are d,
i: 20 to 150 mm
h: 5 to 40 mm
d: 5-30 mm
The radius of curvature R is preferably 2.5 mm to 20 mm, more preferably 5 mm to 15 mm. If R is smaller than 2.5 mm, the chipping of R is likely to occur, and if it is larger than 20 mm, highly accurate displacement measurement is difficult. In addition, when the end surface has poor surface accuracy, when the end surface is displaced due to expansion, an accurate coefficient of thermal expansion cannot be obtained due to the unevenness of the measurement surface. Therefore, the surface accuracy of the R-shaped portion is the length dimension of the sample. If the sample length is large, the surface accuracy may be about 160 μm or less. However, when the length dimension of the sample is small, the surface accuracy is preferably 50 μm or less.
[0016]
【The invention's effect】
According to the first to third aspects of the invention, the sample can be automatically set at an appropriate position by the sample supply / discharge device provided in the heating furnace, so that the measurement accuracy is improved and the measurement outside the working hours can be performed. Efficiency becomes possible.
According to the invention of claim 4, the temperature control means of the heating furnace, the displacement measurement means of the laser displacement measuring instrument, and the sample supply / discharge means are programmed in advance in the computer, and the function of measuring the displacement of the sample in the hot state is fully automatic. By providing this, the efficiency of measurement can be further improved.
According to the invention of claim 5, the sample can be stably inserted into the reactor core tube by engaging the end portion of the sample stage with the irregularities formed at the tip portion of the sample insertion pusher. it can.
According to invention of Claim 6, the heat insulating material which has a radiant heat and a radiation light prevention slit is arrange | positioned inside the measurement window provided in the end surface of a heating furnace, and a radiation heat and a radiation light prevention slit are arrange | positioned on the outer side. Thus, it is possible to suppress the incidence of radiant heat and radiant light to the laser beam transmission / reception unit, thereby enabling highly accurate displacement measurement.
According to the seventh aspect of the present invention, since the in-furnace radiation light preventing slit and the optical filter are disposed on the end faces of the laser light transmitting part and the light receiving part, radiation light is incident on the laser light transmitting part and the light receiving part. Therefore, highly accurate dimension measurement is possible.
According to the invention of claim 8, since the measurement window glass is provided with a cooling mechanism on the measurement window glass, deformation of the window glass due to radiant heat from the heating furnace can be suppressed, so that the flatness of the measurement window glass is maintained and the laser is maintained. It does not affect the accuracy of displacement measurement due to light refraction.
According to the invention of claim 9, since the material of the measurement window glass is high heat resistance, quartz glass having a small coefficient of thermal expansion, and both surfaces of the glass are parallel, deformation is suppressed to a minimum even at high temperatures. In addition, since the flatness of the glass is good, highly accurate displacement measurement is possible.
According to the tenth aspect of the present invention, the measurement end face of the refractory sample is provided with an R shape, so that the end portion is less likely to be chipped and the operability can be improved.
According to the eleventh aspect of the present invention, it is possible to perform highly accurate measurement by defining the surface accuracy of the R end portion.
According to the twelfth aspect of the present invention, the waiting time of the next measurement sample can be shortened and the efficiency can be improved by opening the furnace lid of the heating furnace after completion of the measurement and forcibly cooling the inside of the heating furnace.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating an overall configuration of a hot displacement measuring apparatus according to the present invention.
FIG. 2 is a top view of the apparatus for explaining the configuration of the automatic sample supply apparatus.
FIG. 3 is a side view illustrating a sample insertion state in the furnace of the automatic sample supply device.
FIG. 4 is a detailed view of the furnace lid.
FIG. 5 is a diagram for explaining a sample taking-out state of the automatic sample supply device.
FIG. 6 is a diagram illustrating a sample stage.
FIG. 7 is a diagram illustrating the shape of a measurement sample.
FIG. 8 is a diagram illustrating an example of a conventional hot displacement measuring apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 31 ... Heating furnace, 32 ... Laser transmission part, 33 ... Laser light-receiving part, 34 ... Automatic sample supply apparatus, 35 ... Discharge yard, 36 ... Heater controller, 37 ... Displacement controller, 38 ... CPU, 40, 49 ... Thermometer 42 ... Control thermocouple, 43 ... Measurement window, 45 ... Heater, 46 ... Furnace inlet lid, 47 ... Furnace outlet lid, 48 ... Sample, 52 ... Sample insertion bridge, 52 '... Sample discharge bridge, 53 ... Automatic sample transport table 54... Sample table 55. Belt conveyor 57. Fixed hole 58. Sample confirmation sensor 59. Sample air cylinder.

Claims (2)

A laser light transmitting unit of the laser displacement measuring instrument hand side of the heating furnace, a laser light receiving portion arranged respectively on opposite sides, in the direction perpendicular to the line connecting the laser light transmitting unit and the laser light receiving section, the computer A hot displacement measuring device provided with a sample supply / discharge means for automatically supplying and discharging a sample by control ,
The sample supply / discharge means is:
A furnace inlet lid and a furnace outlet lid, which are respectively provided at the front and rear of the heating furnace, driven by an open / close air cylinder with a sample insertion bridge and a sample discharge bridge attached to the lower end;
A position sensor located near the furnace inlet lid;
A plurality of sample transport tables provided on the furnace inlet lid side and attached to the endless belt conveyor and the sample tables mounted on each sample transport table;
A sample insertion air cylinder for inserting the sample stage into a furnace tube;
A sample discharge yard provided on the furnace outlet lid side and having a moving roller;
With
By the position detection of the position sensor, the sample stage conveyed by the belt conveyor is controlled to stop in front of the furnace inlet lid,
The sample insertion bridge is positioned below the belt conveyor when the furnace inlet lid is closed, and rises to a position where the sample table is placed when the furnace inlet lid is opened,
When the sample table stops before the furnace inlet lid, it is driven by the open / close air cylinder to open the furnace inlet lid, the sample insertion bridge rises, the sample insertion bridge, the heating furnace core tube, and the sample transport table Aligned in a straight line, the tip of the sample insertion air cylinder extends to fit into a fixed hole formed in the sample table, and the sample table slides on the core tube and is driven by the air cylinder to the center of the furnace Is inserted, the furnace inlet lid and the furnace outlet lid are closed, and measurement is started.
At the end of measurement, driven by the open / close air cylinder, the furnace inlet lid and furnace outlet lid rise and open, the tip of the sample insertion air cylinder extends and fits into the fixing hole of the in-furnace sample stage, and the sample stage The hot displacement measuring device is characterized in that it is pushed out to the discharge yard through the discharge bridge on the opposite side . The hot displacement measuring apparatus according to claim 1, wherein the furnace lid of the heating furnace is controlled to be in an open state after the measurement is completed.

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