CN212433027U - Measuring device for phase transition temperature of thin film material - Google Patents
Measuring device for phase transition temperature of thin film material Download PDFInfo
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- CN212433027U CN212433027U CN202021907952.9U CN202021907952U CN212433027U CN 212433027 U CN212433027 U CN 212433027U CN 202021907952 U CN202021907952 U CN 202021907952U CN 212433027 U CN212433027 U CN 212433027U
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Abstract
The embodiment of the utility model discloses film material phase transition temperature's measuring device, include: an optical component; the top of the vacuum cavity is provided with a light inlet hole, and the light inlet hole is arranged opposite to incident light of the optical assembly; the high-temperature furnace is arranged in the vacuum cavity, resistance heating sheets are arranged at the bottom and in the lateral direction of the high-temperature furnace, and the resistance heating sheets are connected with a power supply through leads; the sample chamber is arranged in the high-temperature furnace, is in heat conduction connection with the resistance heating sheet through a heat conduction structure, is placed in the sample chamber, and is embedded in the sample chamber and is in contact with the sample through a probe. The method improves the measurement accuracy of the phase change temperature of the film material.
Description
Technical Field
The utility model relates to a film material performance measurement technical field, concretely relates to film material phase transition temperature's measuring device.
Background
This section provides background information related to the present disclosure only and is not necessarily prior art.
Because the performance of the film material is different from that of a block body and is influenced by various factors such as size, stress, film thickness and the like, the accurate measurement of the phase transition temperature has important significance for preparing and developing the film material with excellent performance. The traditional method for researching the phase transition temperature characteristics of the film is to calculate by using a thermodynamic equation theoretically and to obtain the phase transition temperature of the film by changing other properties such as optics, acoustics and the like in the process that the film material changes along with the temperature in an experiment.
At present, a measuring device for phase transition temperature of a thin film material comprises a high-temperature furnace chamber, an infrared heater, a support frame for placing a sample and a thermocouple, wherein the support frame is connected with a chamber door of the high-temperature furnace chamber. During measurement, a sample is placed in a closed high-temperature furnace cavity, a thermocouple is placed on the surface of a film material sample, the film material is heated through an infrared heater, meanwhile, the reflected light power of the surface of the sample is recorded, and a curve is drawn. When the thin film material is subjected to phase change, the reflected light power of the thin film material can be obviously changed, so that the inflection point on the curve is the phase change point of the thin film material, and the corresponding temperature is the phase change temperature.
However, in the existing measuring device, the sample is placed on the support frame, and the support frame is connected with the cavity door of the high-temperature furnace cavity, so that the position of the sample can be moved every time the sample is fed; in the heating process, the support frame can also generate tiny deformation due to the principle of expansion with heat and contraction with cold, and the position of the sample is changed, so that the light path is changed due to the change of the position of the sample, and the measurement accuracy is influenced. And because the sample is placed on the support frame for sample feeding, the position of the sample can be changed during each measurement, and the light path needs to be manually adjusted, so that the consistency of the measurement result cannot be ensured.
Moreover, the heating mode of the existing high-temperature furnace is usually infrared heating, which makes the temperature field in the high-temperature furnace in linear distribution, which may cause the actual temperature of the film surface to be inconsistent with the measured temperature of the thermocouple, and may cause inaccurate phase transition temperature measurement in the repeated measurement process. And during infrared heating, four infrared heating pipes are distributed in four directions of a sample, and because the four infrared heating pipes are linearly radiated and heated, the four heating pipes have certain distribution difference, so that the temperature distribution is not uniform, and the accuracy of a measuring result is influenced.
Meanwhile, during the measurement, the thermocouple probe is simply placed on the surface of the sample, and the contact between the thermocouple probe and the sample is determined during the measurement. In the actual measurement process, the probe of the thermocouple has no contact pressure with the sample, so that the temperature measurement mode is not the real temperature of the surface of the sample, and the accurate measurement of the phase change temperature of the film material is greatly influenced. During measurement, only one probe of one thermocouple is used for measuring the temperature of one point on the surface of the sample, the sample has a certain area, and the measured temperature cannot completely represent the actual temperature of the surface of the sample.
In addition, a quartz glass tube is used as a vacuum cavity in the prior art, on one hand, the use of the quartz tube can cause low vacuum degree in the cavity, so that a sample is oxidized in the heating process, and oxides of the sample can pollute the tube, thereby causing the reduction of light transmittance; on the other hand, the circular structure of the glass tube requires that laser must be vertically incident on the central point of the quartz tube, which causes difficulty in adjusting the light path; in addition, the vacuum degree in the high temperature furnace is low, and inert protective gas is not filled, so that the sample is oxidized in the heating process, the measurement result is inaccurate, and the uniformity and stability of the temperature field distribution influence the accuracy of the measurement result.
SUMMERY OF THE UTILITY MODEL
Therefore, the embodiment of the utility model provides a measuring device of film material phase transition temperature to solve the relatively poor technical problem of film material phase transition temperature measuring result accuracy among the prior art.
In order to achieve the above object, the embodiment of the present invention provides the following technical solutions:
a device for measuring phase transition temperature of a thin film material, comprising:
an optical component;
the top of the vacuum cavity is provided with a light inlet hole, and the light inlet hole is arranged opposite to incident light of the optical assembly;
the high-temperature furnace is arranged in the vacuum cavity, resistance heating sheets are arranged at the bottom and in the lateral direction of the high-temperature furnace, and the resistance heating sheets are connected with a power supply through leads;
the sample chamber is arranged in the high-temperature furnace, is in heat conduction connection with the resistance heating sheet through a heat conduction structure, is placed in the sample chamber, and is embedded in the sample chamber and is in contact with the sample through a probe.
Further, the optical assembly includes:
a support frame;
the laser generator is mounted at the top of the support frame;
the light emitted by the laser generator is split by the beam splitter to form the incident light and the reflected light, and the incident light is emitted to the sample in the sample chamber through the light inlet;
and the photoelectric detector receives the reflected light rays so as to obtain the reflectivity through the photoelectric detector.
Further, the optical assembly further includes:
and the optical path automatic calibration module images the laser spots and automatically adjusts the angle of the laser through calculation and analysis of the images so as to realize automatic calibration of the optical path.
Further, the optical path automatic calibration module includes:
the image sensor is arranged on one side of the spectroscope and is used for imaging the laser spots;
and the three-dimensional regulator is connected with the laser generator and automatically regulates the angle of the laser through the calculation and analysis of the image so as to realize the automatic calibration of the light path.
Further, the vacuum cavity is a high-temperature-resistant metal outer wall.
Furthermore, the metal outer wall of the vacuum cavity is provided with an air hole, and the air hole is communicated with an air exhaust device or an air charging device pipeline.
Furthermore, a water cooling hole is formed in the metal outer wall of the vacuum cavity and communicated with a water cooler pipeline.
In one or more embodiments, the utility model provides a measuring device of thin film material phase transition temperature has following technological effect: the measuring device improves the temperature distribution uniformity in the high-temperature furnace through improving the structure of the high-temperature furnace; in addition, the sample chamber which is in direct contact with the high-temperature furnace is arranged in the high-temperature furnace, and the thermocouple is embedded into the sample chamber, so that the thermocouple is really in contact with the sample, the high-temperature furnace, the sample chamber and the sample are ensured to be heated synchronously, the heating uniformity is improved, and the accuracy of a detection result is ensured. Meanwhile, the sample is loaded into the sample chamber, so that the measurement position of the sample is fixed, the position of the sample is unchanged during repeated measurement, the consistency of the position of the sample during multiple measurements is ensured, and the measurement accuracy is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structure, ratio, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential significance, and any structure modification, ratio relationship change or size adjustment should still fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy and the achievable purpose of the present invention.
Fig. 1 is a schematic structural diagram of a device for measuring phase transition temperature of a thin film material provided by the present invention;
fig. 2 is a schematic structural view of the measuring device shown in fig. 1, showing other accessories.
Description of reference numerals:
1-control panel 2-master control module 3-PID control module 4-heat dissipation module 5-power supply
6-digital acquisition module 7-photoelectric driving module 8-thermocouple 9-vacuum cavity 10-air hole
11-photodetector 12-three-dimensional regulator 13-laser generator 14-spectroscope
15-support frame 16-light inlet hole 17-high temperature furnace 18-sample chamber 19-water cooling hole 20-vacuum gauge
21-laser driving module
Detailed Description
The present invention is described in terms of specific embodiments, and other advantages and benefits of the present invention will become apparent to those skilled in the art from the following disclosure. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a film material phase transition temperature's measuring device has add sample room 18 to the true temperature measurement that contacts of sample makes its measuring temperature more be close to the true temperature on sample surface, and through scheme such as vacuum cavity 9, heating methods, advance kind mode, light path regulation mode, vacuum, multiple spot temperature measurement, condition uniformity when repeated measurement can be guaranteed, makes its measuring result more stable.
In one embodiment, as shown in fig. 1, the present invention provides a measuring device for phase transition temperature of thin film material, which comprises an optical assembly, a vacuum chamber 9, a high temperature furnace 17 and a sample chamber 18. The top of the vacuum cavity 9 is provided with a light inlet 16, and the light inlet 16 is arranged opposite to the incident light of the optical assembly; the vacuum cavity 9 is a high-temperature-resistant metal outer wall, the sealed vacuum cavity 9 is enclosed by the metal outer wall, an air hole 10 is formed in the metal outer wall of the vacuum cavity 9, and the air hole 10 is communicated with an air exhaust device or an air charging device pipeline to realize air exhaust and discharge. And a water cooling hole 19 is further formed in the metal outer wall of the vacuum cavity 9, and the water cooling hole 19 is communicated with a water cooler pipeline so as to introduce cooling water.
A sample chamber 18 is additionally arranged in the measuring device, the sample chamber 18 is arranged in the high-temperature furnace 17, the sample chamber 18 is in heat conduction connection with the resistance heating sheet through a heat conduction structure, a sample is placed in the sample chamber 18, and the thermocouple 8 is embedded in the sample chamber 18 and is in contact with the sample through a probe.
Therefore, the vacuum cavity 9 and the heating mode are firstly modified, and the original quartz glass tube is modified into a high-temperature-resistant metal outer wall, so that the airtightness of the whole cavity is improved, and the vacuum degree is improved. The infrared heating is transformed into resistance heating, resistance heating sheets are arranged at the bottom and the side part of the high-temperature furnace 17, a fixed sample chamber 18 is arranged in the chamber, and the position is consistent when a sample is placed every time. Moreover, a flat optical incidence window (i.e. an entrance aperture 16) is arranged above the vacuum chamber 9, which facilitates the adjustment of the optical path; fourthly, because the tightness is good, the vacuum degree is high, the sample is not easy to be oxidized after the protective gas is filled, and the optical window is not easy to be polluted; fifthly, three surfaces are integrally heated, so that the temperature in the cavity is more uniformly distributed; sixthly, in the heating process, because the sample is placed at the bottom of the vacuum furnace, the thermal deformation of the sample is very small relatively, and the influence on the light path in the measurement process can be greatly reduced.
The sample chamber 18 for placing the sample and the heating plate are welded through a heat conduction material, and belong to contact heat conduction, and the sample is placed in the sample chamber 18, so that the sample is completely contacted with the sample chamber 18 through the structural design, and the thermocouple 8 is embedded in the sample chamber 18 and is also contacted; thus, the sample, thermocouple 8 and heating resistor are connected through sample chamber 18 as a unit, and the temperature measured by thermocouple 8 is kept consistent and closer to the true temperature of the sample surface. Because the sample chamber 18 is a small closed environment, the internal temperature is more uniform, and the temperature measurement precision can be ensured in a higher temperature region; as the sample chamber 18 is added, the multipoint thermocouples 8 can be distributed in the high-temperature heating furnace, so that the temperature in the furnace can be represented more comprehensively and accurately.
Specifically, the optical assembly includes a support frame 15, a laser generator 13, a beam splitter 14 and a photodetector 11; the laser generator 13 is mounted on the top of the supporting frame 15, light emitted by the laser generator 13 is split by the beam splitter 14 to form the incident light and the reflected light, the incident light is incident on the sample in the sample chamber 18 through the light incident hole 16, and the reflected light is received by the photodetector 11, so that the reflectivity is obtained by the photodetector 11.
In operation, laser light emitted by the laser 13 is incident as incident light on a sample in a sample chamber 18 in a high temperature furnace 17 through a beam splitter 14. The reflected light is detected by the photoelectric detection module 11 through the spectroscope 14. The high temperature furnace 17 heats the sample according to the requirement, when the sample is heated to a certain temperature, the film material can generate the change of the crystal phase, the optical reflectivity of the film material also changes, and the phase change temperature of the film material can be obtained by recording the temperature at the moment when the reflectivity changes.
The optical component further comprises an optical path automatic calibration module, the optical path automatic calibration module images laser spots, and the angle of the laser is automatically adjusted through calculation and analysis of images so as to achieve automatic calibration of the optical path. Specifically, the optical path automatic calibration module comprises an image sensor and a three-dimensional regulator 12, wherein the image sensor is arranged on one side of the spectroscope 14 and is used for imaging a laser spot; the three-dimensional regulator 12 is connected with the laser generator 13, and automatically regulates the angle of the laser through calculation and analysis of images so as to realize automatic calibration of the light path.
That is to say, the three-dimensional regulator 12 is added at the laser, the CCD is added at the other end of the spectroscope 14 to image the laser spot, the angle of the laser is automatically regulated by calculating and analyzing the image, and the automatic calibration of the optical path is realized, so that the optical path can be regulated in a quantitative manner to ensure the consistency of repeated measurement.
It should be understood that in order to realize the basic function of the optical module, a power supply 5 (which may also be used as a power supply for the resistance heating sheet), a driving module and a control module are required, and for convenience of installation and arrangement, the power supply 5, the driving module of the optical module and the control module of the optical module are all installed in the accessory box as shown in fig. 2. In addition, a heat dissipation module 4 and a vacuum gauge 20 are also installed in the accessory box.
Specifically, the driving module of the optical component comprises a photoelectric driving module 7 and a laser driving module 21, and the control module of the optical component comprises a control panel 1, a master control module 2, a digital acquisition module 6 and a PID control module 3.
In one or more of the above-mentioned embodiments, the utility model provides a measuring device of film material phase transition temperature has following technological effect: the measuring device improves the temperature distribution uniformity in the high-temperature furnace 17 through improving the structure of the high-temperature furnace 17; in addition, the sample chamber 18 which is directly contacted with the thermocouple 8 is arranged in the high-temperature furnace 17, and the thermocouple 8 is embedded into the sample chamber 18, so that the thermocouple 8 is really contacted with the sample, the high-temperature furnace 17, the sample chamber 18 and the sample are synchronously heated, the heating uniformity is improved, and the accuracy of a detection result is ensured. Meanwhile, as the sample is loaded into the sample chamber 18, the measurement position of the sample is fixed, and the position of the sample is unchanged during repeated measurement, the consistency of the position of the sample during multiple measurements is ensured, and the measurement accuracy is improved.
Because the heating sheets are arranged on the side part and the bottom part of the high-temperature furnace 17, multi-point measurement is realized, and the problems that the surface temperature of a sample cannot be truly represented by single-point temperature measurement and the temperature distribution is not uniform due to a sample heating mode are solved; in the measuring process, the vacuum cavity 9 is stable in environment, so that the measuring environment (vacuum degree and protective gas) is stable, and the problem that the measuring environment influences the measuring accuracy is avoided; the arrangement of the optical component enables the automatic adjustment of the light path to be possible, and the problem of inaccurate measurement caused by manual calibration of the light path is avoided.
The above embodiments further describe the objects, technical solutions and advantages of the present invention in detail, it should be understood that the above is only the embodiments of the present invention, and is not intended to limit the protection scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made on the basis of the technical solutions of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A device for measuring phase transition temperature of a thin film material, comprising:
an optical component;
the top of the vacuum cavity is provided with a light inlet hole, and the light inlet hole is arranged opposite to incident light of the optical assembly;
the high-temperature furnace is arranged in the vacuum cavity, resistance heating sheets are arranged at the bottom and in the lateral direction of the high-temperature furnace, and the resistance heating sheets are connected with a power supply through leads;
the sample chamber is arranged in the high-temperature furnace, is in heat conduction connection with the resistance heating sheet through a heat conduction structure, is placed in the sample chamber, and is embedded in the sample chamber and is in contact with the sample through a probe.
2. The measurement device of claim 1, wherein the optical assembly comprises:
a support frame;
the laser generator is mounted at the top of the support frame;
the light emitted by the laser generator is split by the beam splitter to form the incident light and the reflected light, and the incident light is emitted to the sample in the sample chamber through the light inlet;
and the photoelectric detector receives the reflected light rays so as to obtain the reflectivity through the photoelectric detector.
3. The measurement device of claim 2, wherein the optical assembly further comprises:
and the optical path automatic calibration module images the laser spots and automatically adjusts the angle of the laser through calculation and analysis of the images so as to realize automatic calibration of the optical path.
4. The measurement device of claim 3, wherein the optical path auto-calibration module comprises:
the image sensor is arranged on one side of the spectroscope and is used for imaging the laser spots;
and the three-dimensional regulator is connected with the laser generator and automatically regulates the angle of the laser through the calculation and analysis of the image so as to realize the automatic calibration of the light path.
5. The measurement device of claim 1, wherein the vacuum chamber is a high temperature resistant metal outer wall.
6. The measuring device according to claim 5, wherein the metal outer wall of the vacuum chamber is provided with a gas hole, and the gas hole is communicated with a pipeline of an air suction device or an air inflation device.
7. The measuring device according to claim 5, wherein the metal outer wall of the vacuum chamber is provided with a water cooling hole, and the water cooling hole is communicated with a water cooler pipeline.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021907952.9U CN212433027U (en) | 2020-09-04 | 2020-09-04 | Measuring device for phase transition temperature of thin film material |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021907952.9U CN212433027U (en) | 2020-09-04 | 2020-09-04 | Measuring device for phase transition temperature of thin film material |
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| CN212433027U true CN212433027U (en) | 2021-01-29 |
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| CN202021907952.9U Expired - Fee Related CN212433027U (en) | 2020-09-04 | 2020-09-04 | Measuring device for phase transition temperature of thin film material |
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- 2020-09-04 CN CN202021907952.9U patent/CN212433027U/en not_active Expired - Fee Related
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Granted publication date: 20210129 Termination date: 20210904 |