JP4217300B2 - XY stage - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an XY stage such as a microscope used for appearance inspection of a liquid crystal glass substrate.
[0002]
[Prior art]
Conventionally, in order to stably maintain the quality of a glass substrate of a liquid crystal display, appearance inspection such as dust and scratches attached to the substrate surface has become extremely important.
In such an appearance inspection, the liquid crystal glass substrate to be inspected is placed on the XY stage, and the liquid crystal glass substrate is moved to a predetermined observation position while moving the stage in the XY direction.
[0003]
By the way, recently, liquid crystal glass substrates have been increasing in size, and along with this, XY stages on which these substrates are placed are also increasing in size. This is because, in a microscope having an XY stage with a fixed observation optical system, the stage movement range is required to be four times the area of the substrate, so that the outer shape of the apparatus becomes extremely large. That is, in such a microscope, the outer shape of the apparatus is determined by the size of the moving range of the stage.
[0004]
[Problems to be solved by the invention]
Therefore, minimizing the stage movement range is important in reducing the outer shape of the apparatus. The stage movement range is determined by the size of the liquid crystal glass substrate to be inspected. For example, when the entire surface of a 670 × 550 glass substrate is to be inspected, the stage movement range is required to be 670 × 2 in the X axis direction and 550 × 2 or more in the Y direction.
[0005]
When a stage having a large stroke in the X and Y directions is used as described above, the entire apparatus becomes very large, and the amount of movement of the operation handle that moves following the stage also increases. In particular, when moving the stage to the left and right (X direction), the operability of the operation handle does not matter so much, but if the Y stage is moved forward to the maximum stroke away from the observer, the operation handle can be reached. There is also a problem that the glass substrate is contaminated by dust or the like falling from the observer because the functional problem that the observer does not exist and the observer leans on the glass substrate to operate. As described above, the conventional method in which the stage stroke is simply set in accordance with the size of the glass substrate to be inspected has a problem that not only the apparatus can be prevented from being enlarged, but also functionally difficult to use.
The present invention has been made in view of the above circumstances, and an object thereof is to provide an XY stage that can be reduced in size and is functionally easy to use.
[0006]
[Means for Solving the Problems]
According to the first aspect of the present invention, the Y stage is provided on the base so as to be linearly movable in one direction via a guide, and can be linearly moved in the other direction intersecting the one direction via the guide on the Y stage. and X stage provided, the a rectangular shape of a rectangular substrate having the same shape to be inspected rectangular substrate placing Then both predetermined distance from the maximum movement position of the Y stage through a guide on the X stage An auxiliary stage that is linearly movable in the one direction only, and an operation handle that is provided at a front end near the observation side of the auxiliary stage and moves the auxiliary stage in the one direction on the X stage. Yes.
[0007]
According to a second aspect of the present invention, in the first aspect of the invention, the auxiliary stage is further movable in the forward movement direction by a predetermined distance from the maximum forward movement position of the Y stage .
[0008]
According to a third aspect of the invention, in the first aspect of the invention, the auxiliary stage is further movable in the backward direction by a predetermined distance from the maximum backward movement position of the Y stage .
The invention according to claim 4 is the invention according to claim 1, wherein the Y stage is provided to be linearly movable in one direction within a range narrower than twice the short side length of the rectangular substrate to be inspected, The X stage is provided so as to be linearly movable in the other direction intersecting with the one direction within a range twice the long side length of the substrate.
According to a fifth aspect of the present invention, in the first aspect of the invention, the rectangular substrate is placed above the center of the movement range of the Y stage and the center of the movement range of the X stage via a gate-type support. A microscope main body for observation is provided.
[0009]
As a result, according to the present invention, the maximum stroke of the Y stage can be set smaller than the longitudinal (Y direction) length of the liquid crystal glass substrate to be inspected, and the glass is moved by the stage stroke smaller than the size of the glass substrate. The entire surface of the substrate can be inspected, and the amount of movement of the Y operation handle can be reduced.
[0010]
According to the present invention, since the auxiliary stage can be operated on the near side from the maximum advance position of the Y stage, the distance to the operation handle of the auxiliary stage can be reduced.
[0011]
According to the present invention, since the auxiliary stage can be operated from the maximum retracted position of the Y stage, the distance to the operation handle of the auxiliary stage can be further reduced.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIGS. 1A and 1B show a schematic configuration of a substrate inspection apparatus to which an XY stage of the present invention is applied.
[0013]
In the figure, reference numeral 1 denotes an apparatus main body. The apparatus main body 1 is provided with a fixed stage (base) 2 in the horizontal direction, and an XY stage 3 is provided on the fixed stage 2.
[0014]
As shown in FIG. 2, the XY stage 3 is provided with a lower stage (hereinafter referred to as a Y stage) 31 on the fixed stage 2 so as to be linearly movable in the front-rear direction (Y direction) via a guide (not shown). Further, an upper stage (hereinafter referred to as an X stage) 32 is provided on the Y stage 31 so as to be linearly movable in a horizontal direction (X direction) orthogonal to the moving direction of the Y stage 31 via a guide (not shown). Yes.
[0015]
Further, a slide stage 4 as an auxiliary stage is provided on the X stage 32. This slide stage 4 is used to place a liquid crystal glass substrate 5 to be inspected that is aligned with the substrate observation coordinate reference O, and is provided along two opposing side edges on the X stage 32. Along the lines 61 and 61, a linear movement is further possible in the Y direction. The slide stage 4 is provided with an operation handle 41, and the operation handle 41 enables movement in the Y direction on the X stage 32.
[0016]
In this case, as shown in FIG. 3, assuming that the liquid crystal glass substrate 5 to be inspected placed on the slide stage 4 (indicated by the slanted line in the drawing) has a size of 670 mm × 550 mm, for example, X The stage 32 is set so as to be linearly movable in the X direction in the range of twice the long side of the liquid crystal glass substrate 5, that is, 670 mm × 2, and the Y stage 31 is doubled on the short side of the liquid crystal glass substrate 5, In other words, the slide stage 4 is set so as to be linearly movable in the Y direction within a range of 550 mm × 2, for example, 450 mm × 2, and the slide stage 4 is set to be linearly movable on the Y stage 31 within a range of 100 mm.
[0017]
On the other hand, returning to FIG. 1, a microscope 7 is provided above the XY stage 3. The microscope 7 includes a microscope main body 71, an extension optical system 72, and an eyepiece 73. The microscope main body 71 is fixed at a position facing the XY stage 3 by a gate-type column 11 provided on the apparatus main body 1. The eyepiece 73 of the microscope main body 71 is led out to the front of the apparatus via the extension optical system 72. In this case, the microscope main body 71 facing the XY stage 3 is located at the center of the X range moving range of the X stage 32 and at the center of the Y stage 31 moving range of the Y stage 31.
[0018]
Next, the operation of the embodiment configured as described above will be described.
First, the 670 mm × 550 mm liquid crystal glass substrate 5 to be inspected is placed on the slide stage 4.
[0019]
In this case, as shown in FIG. 4A, the lower corner portion of the liquid crystal glass substrate 5 is aligned with the substrate observation coordinate reference O on the slide stage 4 for alignment. Further, in this state, the slide stage 4 is moved to the front end on the X stage 32 as shown in FIG. 2A, and the observation and monitoring of the liquid crystal glass substrate 5 as shown in FIG. The upper left corner as a position is made to coincide with the observation optical axis (objective lens) of the microscope main body 71.
[0020]
From this state, while moving the X stage 32 in the X direction, that is, in the left-right direction, the Y stage 31 is advanced in the Y direction (a direction away from the observer). As a result, as shown in FIG. 4B, observation images are taken in from the microscope main body 71 in order from the upper part to the lower part of the surface of the liquid crystal glass substrate 5 excluding the lower side 100 mm indicated by the hatched portion, and the extension optics A defect inspection is performed by the eyepiece 73 via the system 72.
[0021]
As shown in FIG. 4B, when the Y stage 31 is moved forward in the Y direction to the maximum of 450 mm, the Y stage 31 does not move any further, so the lower 100 mm indicated by the hatched portion on the surface of the liquid crystal glass substrate 5 Cannot be observed by moving the Y stage 31 in the Y direction.
[0022]
In this case, the slide stage 4 on the Y stage 31 is moved forward and operated in the direction as shown in FIG. Thereby, as shown in FIG. 4C, the defect inspection is performed by the eyepiece 73 from the microscope main body 71 via the extended optical system 72 also on the lower side 100 mm indicated by the hatched portion of the liquid crystal glass substrate 5 surface. it can.
[0023]
In the above description, the defect inspection is performed from the upper part to the lower part of the liquid crystal glass substrate 5 surface. However, the defect inspection can be performed from the lower part to the upper part of the liquid crystal glass substrate 5 surface. In this case, when the slide stage 4 is moved to the front end of the X stage 32 as shown in FIG. 2B, the lower left corner, which is the observation start position of the liquid crystal glass substrate 5, is observed by the microscope main body 71. Match with the optical axis (objective lens).
[0024]
From this state, the X stage 32 is moved in the X direction, that is, in the left-right direction, and the Y stage 31 is retracted in the Y direction (direction approaching the observer). As a result, as shown in FIG. 5B, an observation image is captured from the microscope body 71 from the lower part to the upper part of the surface of the liquid crystal glass substrate 5 excluding the upper side 100 mm indicated by the inclined part, and the extended optical system 72. A defect inspection is performed by the eyepiece 73 via
[0025]
As shown in FIG. 5B, when the Y stage 31 is moved backward to the maximum 450 mm in the Y direction, the Y stage 31 does not move any more, so the upper 100 mm indicated by the hatched portion on the surface of the liquid crystal glass substrate 5 The Y stage 31 cannot be observed by moving in the Y direction.
[0026]
Therefore, this time, the slide stage 4 on the X stage 32 is operated to move backward as shown in FIG. Thereby, as shown in FIG. 5C, the defect inspection can be performed by the eyepiece portion 73 from the microscope main body 71 through the extended optical system 72 also on the upper side 100 mm indicated by the hatched portion of the liquid crystal glass substrate 5 surface. .
[0027]
Accordingly, in this way, the X stage 32 and the Y stage 31 are arranged so as to be overlapped in the vertical direction and movable in directions orthogonal to each other, and the Y stage 31 is disposed on the X stage 32. Since the liquid crystal glass substrate 5 to be inspected is placed on the slide stage 4, the substrate is moved by a stage stroke smaller than the size of the liquid crystal glass substrate 5. The entire surface can be inspected, and the entire apparatus to which such a stage is applied can be reduced in size.
[0028]
Further, the slide stage 4 can be moved further in the forward direction by a predetermined distance from the maximum forward movement position of the Y stage 31, and the slide stage 4 can be operated in front of the maximum forward position of the Y stage 31. Since the distance to the operation handle 41 of 4 can be made smaller than the size of the liquid crystal glass substrate 5, the problem that the operation handle 41 cannot be reached can be solved, and the functional usability can be improved.
[0029]
Further, since the slide stage 4 can be moved further in the backward direction by a predetermined distance from the maximum retracted position of the Y stage 31, the distance to the operation handle 41 of the slide stage 4 can be further reduced, and functional ease of use is further increased. Can be improved.
[0030]
【The invention's effect】
As described above, according to the present invention, since the entire surface of the glass substrate can be inspected with a stage stroke smaller than the size of the liquid crystal glass substrate to be inspected, the overall size of the apparatus to which such a stage is applied can be reduced. Can be achieved.
[0031]
In addition, the auxiliary stage can be operated before the maximum advance position of the Y stage, and the distance to the operation handle of the auxiliary stage can be made smaller than the size of the liquid crystal glass substrate to be inspected. Can be eliminated and functional usability can be improved.
[0032]
Furthermore, since the auxiliary stage can be operated from the maximum retracted position of the Y stage, the distance to the operation handle of the auxiliary stage can be further reduced, and the functional ease of use can be further improved.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a substrate inspection apparatus to which an XY stage according to an embodiment of the present invention is applied.
FIG. 2 is a diagram showing a schematic configuration of an XY stage according to an embodiment.
FIG. 3 is a diagram illustrating a slide stage provided on an XY stage according to one embodiment.
FIG. 4 is a diagram illustrating an operation example of one embodiment.
FIG. 5 is a diagram illustrating another operation example of one embodiment;
[Explanation of symbols]
1 ... The device body,
11 ... main pillar,
2 ... fixed stage,
3 ... XY stage,
31 ... Y stage,
32 ... X stage,
4 ... Slide stage,
41. Operation handle,
5 ... Liquid crystal glass substrate,
61 ... Guide,
7 ... Microscope,
71 ... Microscope body,
72. Extension optical system,
73 ... Eyepiece part.

Claims (5)

A Y stage provided on the base so as to be linearly movable in one direction via a guide;
An X stage provided on the Y stage so as to be linearly movable in the other direction intersecting the one direction via a guide;
Wherein a rectangular shape of a rectangular substrate having the same shape to be inspected rectangular substrate placing Then both linear movement only one direction a predetermined distance from the maximum movement position of the Y stage through a guide on the X stage An auxiliary stage provided as possible,
An operation handle provided at a front end near the observation side of the auxiliary stage and configured to move the auxiliary stage in the one direction on the X stage;
XY stage, characterized in that it comprises a. 2. The XY stage according to claim 1, wherein the auxiliary stage is further movable in a forward movement direction by a predetermined distance from a maximum forward movement position of the Y stage. The XY stage according to claim 1, wherein the auxiliary stage is further movable in a backward direction by a predetermined distance from a maximum backward movement position of the Y stage. The Y stage is provided so as to be linearly movable in one direction within a range narrower than twice the short side length of the rectangular substrate to be inspected, and the X stage is a range twice the long side length of the substrate. The XY stage according to claim 1, wherein the XY stage is provided so as to be linearly movable in another direction intersecting the one direction. The microscope main body for observing the rectangular substrate through a gate-shaped support is provided above the center of the Y stage movement range and the center of the X stage movement range. The XY stage according to 1.

Images