JP4208141B2 - 画像露光方法および装置 - Google Patents

画像露光方法および装置 Download PDF

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Publication number
JP4208141B2
JP4208141B2 JP2004000395A JP2004000395A JP4208141B2 JP 4208141 B2 JP4208141 B2 JP 4208141B2 JP 2004000395 A JP2004000395 A JP 2004000395A JP 2004000395 A JP2004000395 A JP 2004000395A JP 4208141 B2 JP4208141 B2 JP 4208141B2
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JP
Japan
Prior art keywords
dmd
light
micromirror
aperture
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2004000395A
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English (en)
Japanese (ja)
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JP2005195747A (ja
JP2005195747A5 (enExample
Inventor
弘美 石川
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2004000395A priority Critical patent/JP4208141B2/ja
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Publication of JP2005195747A5 publication Critical patent/JP2005195747A5/ja
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Publication of JP4208141B2 publication Critical patent/JP4208141B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2004000395A 2004-01-05 2004-01-05 画像露光方法および装置 Expired - Lifetime JP4208141B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004000395A JP4208141B2 (ja) 2004-01-05 2004-01-05 画像露光方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004000395A JP4208141B2 (ja) 2004-01-05 2004-01-05 画像露光方法および装置

Publications (3)

Publication Number Publication Date
JP2005195747A JP2005195747A (ja) 2005-07-21
JP2005195747A5 JP2005195747A5 (enExample) 2006-07-13
JP4208141B2 true JP4208141B2 (ja) 2009-01-14

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JP2004000395A Expired - Lifetime JP4208141B2 (ja) 2004-01-05 2004-01-05 画像露光方法および装置

Country Status (1)

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JP (1) JP4208141B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4588428B2 (ja) * 2004-12-09 2010-12-01 富士フイルム株式会社 画像露光方法および装置
JP2006251748A (ja) * 2005-02-10 2006-09-21 Fuji Photo Film Co Ltd 画像露光装置
JP5168659B2 (ja) * 2008-11-27 2013-03-21 株式会社リコー 可動板構造体及び光走査装置
CN117950283B (zh) * 2024-03-27 2024-07-09 之江实验室 基于千束焦斑独立调控的超分辨灰度刻写装置及方法

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Publication number Publication date
JP2005195747A (ja) 2005-07-21

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