JP4176855B2 - 半導体製造システム - Google Patents

半導体製造システム Download PDF

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Publication number
JP4176855B2
JP4176855B2 JP28632897A JP28632897A JP4176855B2 JP 4176855 B2 JP4176855 B2 JP 4176855B2 JP 28632897 A JP28632897 A JP 28632897A JP 28632897 A JP28632897 A JP 28632897A JP 4176855 B2 JP4176855 B2 JP 4176855B2
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Japan
Prior art keywords
semiconductor manufacturing
chemical
host computer
manufacturing apparatus
consumption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP28632897A
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English (en)
Japanese (ja)
Other versions
JPH11121318A5 (https=
JPH11121318A (ja
Inventor
修 守田
俊光 浦辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP28632897A priority Critical patent/JP4176855B2/ja
Publication of JPH11121318A publication Critical patent/JPH11121318A/ja
Publication of JPH11121318A5 publication Critical patent/JPH11121318A5/ja
Application granted granted Critical
Publication of JP4176855B2 publication Critical patent/JP4176855B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

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  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
JP28632897A 1997-10-20 1997-10-20 半導体製造システム Expired - Fee Related JP4176855B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28632897A JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28632897A JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Publications (3)

Publication Number Publication Date
JPH11121318A JPH11121318A (ja) 1999-04-30
JPH11121318A5 JPH11121318A5 (https=) 2005-06-16
JP4176855B2 true JP4176855B2 (ja) 2008-11-05

Family

ID=17702974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28632897A Expired - Fee Related JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Country Status (1)

Country Link
JP (1) JP4176855B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6456894B1 (en) * 1999-06-01 2002-09-24 Applied Materials, Inc. Semiconductor processing techniques
JP4899478B2 (ja) * 2003-09-02 2012-03-21 株式会社ニコン 保守管理装置、保守管理方法、保守管理プログラム、及び情報記録媒体
JP5259042B2 (ja) * 2004-09-24 2013-08-07 株式会社日立国際電気 半導体製造システム、半導体製造装置のロギング方法、管理装置及び管理装置のプログラム

Also Published As

Publication number Publication date
JPH11121318A (ja) 1999-04-30

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