JPH11121318A5 - - Google Patents

Info

Publication number
JPH11121318A5
JPH11121318A5 JP1997286328A JP28632897A JPH11121318A5 JP H11121318 A5 JPH11121318 A5 JP H11121318A5 JP 1997286328 A JP1997286328 A JP 1997286328A JP 28632897 A JP28632897 A JP 28632897A JP H11121318 A5 JPH11121318 A5 JP H11121318A5
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing apparatus
host computer
consumption amount
manufacturing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997286328A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11121318A (ja
JP4176855B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28632897A priority Critical patent/JP4176855B2/ja
Priority claimed from JP28632897A external-priority patent/JP4176855B2/ja
Publication of JPH11121318A publication Critical patent/JPH11121318A/ja
Publication of JPH11121318A5 publication Critical patent/JPH11121318A5/ja
Application granted granted Critical
Publication of JP4176855B2 publication Critical patent/JP4176855B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP28632897A 1997-10-20 1997-10-20 半導体製造システム Expired - Fee Related JP4176855B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28632897A JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28632897A JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Publications (3)

Publication Number Publication Date
JPH11121318A JPH11121318A (ja) 1999-04-30
JPH11121318A5 true JPH11121318A5 (https=) 2005-06-16
JP4176855B2 JP4176855B2 (ja) 2008-11-05

Family

ID=17702974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28632897A Expired - Fee Related JP4176855B2 (ja) 1997-10-20 1997-10-20 半導体製造システム

Country Status (1)

Country Link
JP (1) JP4176855B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6456894B1 (en) * 1999-06-01 2002-09-24 Applied Materials, Inc. Semiconductor processing techniques
JP4899478B2 (ja) * 2003-09-02 2012-03-21 株式会社ニコン 保守管理装置、保守管理方法、保守管理プログラム、及び情報記録媒体
JP5259042B2 (ja) * 2004-09-24 2013-08-07 株式会社日立国際電気 半導体製造システム、半導体製造装置のロギング方法、管理装置及び管理装置のプログラム

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