JP4153413B2 - Punching machine - Google Patents

Description

  The present invention relates to a punching machine provided with a work stocker on which a thin plate work (hereinafter simply referred to as “workpiece”) such as a ceramic green sheet or a film for a flexible substrate is placed.

  In the punching machine, the unprocessed and processed workpieces are exchanged between the workpiece stocker outside the machining area and the machining area. In the punching machine of Patent Document 1, the workpieces are stored in a stacked state outside the machining area. A number of magazines (work stockers) are moved around at a predetermined pitch in a moving path along the vertical plane, and unprocessed workpieces are supplied to the machining area of the punching machine from the magazine stopped at the supply unit by the workpiece transfer device. The processed workpieces are stacked and stored from the punching machine in a magazine stopped at the collection section.

  Further, in Patent Document 2, when a ceramic raw sheet (work) placed on a punching machine is punched with a punch pin, punch punches adhering to the tip of the punch pin due to static electricity are scraped off by rotating a static elimination brush and sucked with a dust collector. What to do is disclosed.

  Patent Documents 3 to 5 are not punching machines, but are presented because they are somewhat similar to the configuration of the present application. In Patent Document 3, a substrate (workpiece) such as a semiconductor wafer is transferred by a transfer arm from outside the processing chamber (outside the processing region) to the processing chamber (processing region), and the transfer arm is transferred to the transfer arm. A dustproof cover is provided so as to cover the upper side of the substrate. Further, a charging unit is provided, and the dust cover is charged by irradiating ions from the charging unit, and the falling dust is adsorbed to the dust cover. This dust-proof cover prevents the dust that falls during substrate transportation from adhering to the substrate.

  Further, in Patent Document 4, a static electricity removing means is provided on a conveyance path along which a workpiece reciprocates, and the state of charging of the workpiece is measured during loading or unloading between the workpiece carrier (work stocker) and the exposure apparatus. Then, according to the measurement result, the positive / negative balance of the ion wind from the static electricity removing means is opposite to the charged polarity of the work, and the work is discharged by blowing the ion wind onto the work.

Moreover, in the thing of patent document 5, the workpiece conveyance apparatus is provided with the three conveyance pallets, a 1st conveyance pallet is set to the processing position of a processing apparatus, a processing operation is performed, and the 2nd conveyance pallet is mounted. The third work pallet is supported by the unit, and the third work pallet is transferred to the working unit so that the processed work is replaced with a non-worked work.
Japanese Patent No. 2505699 Japanese Patent Laid-Open No. 10-100099 Japanese Unexamined Patent Publication No. 2000-1000078 JP-A-6-222563 JP-A-5-309554

  When a workpiece is punched with a punching machine, static electricity is generated in the workpiece. Due to this static electricity, punching debris remains attached to the workpiece, or dust floating near the workpiece adheres. If such dust is left as it is, it may cause a work defect, so if the static electricity of the work is removed by the static eliminator, the attached dust will be released from the work and fall down. In the type in which the processed workpieces are stacked from the processing region to the workpiece stocker outside the processing region, there is a problem that dust falls on and adheres to the previous processed workpiece in the workpiece stocker and causes the workpiece to be defective.

  In Patent Document 2, punching scraps attached to the tip of a punch pin for punching a workpiece are removed from the tip of the punch pin by a rotating brush in order to prevent the punch from adhering to the workpiece. Although there is no inconvenience of dropping the scrap, since the punching is fast, the contact between the punch pin and the rotating brush is high and the number of times of contact is very large, and the rotating brush may be worn out immediately.

  In Patent Document 3, a dust-proof cover is provided on a transfer arm that transfers a workpiece to and from the machining area to prevent the falling dust from adhering to the work. As a result, the fallen dust accumulates on the dustproof cover. Patent Document 4 does not disclose that the work stocker is provided with a dust-proof cover that receives falling dust or a suction duct that sucks and removes the dropped dust on the dust-proof cover. In the workpiece transfer device of Patent Document 5, a processed workpiece placed on the transfer pallet can be replaced with an unprocessed workpiece while one workpiece is being processed, but this workpiece transfer device is directly used in a punching machine. Then, since static electricity is not removed, dust is attached to the processed workpiece as described above, and when the processed workpieces are stacked and stocked, the quality of the workpiece is deteriorated by the attached dust.

  Therefore, according to the present invention, when dust adhered to a processed workpiece is removed by a static eliminator, the dust that is released from the processed workpiece and falls is dropped onto the processed workpiece previously loaded on the workpiece stocker. It is an object of the present invention to provide a punching machine that can prevent the above-described problem.

In order to achieve the above object, the invention described in claim 1 opens the work stocker at a cover position that covers the work stocker and prevents the dust from falling onto the processed work, and the work stocker is opened above the work stocker. A suction duct that is provided with a dust removal cover that can be moved between the open position and prevents dust from falling on the processed workpiece by the dust cover at the cover position, and that sucks and removes dust that has fallen on the top surface of the dust removal cover Is provided .
In addition to the object of the first aspect , the invention described in claim 2 is characterized in that the dust cover has flexibility in order to rationally move the dust cover and perform suction by the suction duct in a space-saving manner. Is connected to an open / close drive device slidably provided on the work stocker, while the other end is wound around a guide roller provided on the work stocker, and is moved by a slide of the open / close drive device. The suction duct is arranged with the suction port facing downward at a position above the guide roller.

In addition to the object of the first or second aspect , the invention according to claim 3 includes a stocker base and a workpiece stocker disposed above the stocker base so as to facilitate removal of the processed workpieces loaded on the stocker unit. A slide unit for loading the finished workpiece, and the slide unit is guided and held in the stocker base so as to be movable between a receiving position for receiving the processed workpiece from the workpiece transfer device and a drawing position for being pulled out from the stocker base in the lateral direction. It is characterized by being.
In addition to the object of claim 3 , the invention according to claim 4 includes a slide unit main body that is guided and held by the stocker base in order to enable the processed workpiece to be easily conveyed to a subsequent process. It is characterized by comprising a stocker unit that is loaded with a work and can be attached to and detached from the slide unit main body from above.

According to the first aspect of the present invention, since dust removed from the processed workpiece by the static eliminator and falling is received by the dust removal cover, the dust drops and adheres to the processed workpiece loaded below the dust removal cover. Thus, it is possible to avoid the inconvenience of processing the processed workpiece as a defective product, and to improve the quality of the processed workpiece.
According to the first aspect of the present invention, dust that has fallen on the upper surface of the dust removal cover is sucked by the suction duct, so that dust does not accumulate on the dust removal cover and can always be kept clean.
According to the invention described in claim 2, in addition to the effect of claim 1, the movement of the dust cover can be rationally performed in a space-saving, the suction duct can also be placed in the optimal position to the suction removal of dust It becomes.

According to the third aspect of the present invention, in addition to the effect of the first or second aspect , the processed workpiece loaded on the stocker unit can be easily taken out by pulling out the slide unit, and the workability can be improved.
According to the invention of claim 4 , in addition to the effect of claim 3 , since the stocker unit can be detached from the slide unit main body as it is, the stocker unit loaded with the processed workpiece is removed as it is and carried to the subsequent process. Therefore, shortening of processing time can be expected.

  An embodiment of the present invention will be described with reference to FIGS. 1 and 2, A indicates a processing area of the punching machine 1, and B indicates a work stock area in which a work (a flexible ceramic green sheet before lamination (before firing)) W is stocked. In the processing area A, the punching device 2 is arranged on the machine base 24. The punching device 2 includes a punching unit 6 configured by providing a plurality of (here, three) punch heads 5 on a frame 4 installed on a pair of right and left rods 3 that can be moved up and down, and a die below the punching unit 6. It consists of unit 7. The punch head 5 moves a punch pin (not shown) up and down by a punch pin driving device using a piezoelectric actuator (not shown), punches the workpiece W by hitting the die of the die unit 7, and punches a punch chip (punching scrap). To the chip recovery device outside the machine through the suction hose.

  On the machine base 24, a work table 12 is disposed on the front side (left side in FIG. 1) with the punching device 2 interposed therebetween, and a well-known planar servo motor 13 is disposed on the rear side. A holding frame 14 that holds the workpiece W is slidably held on the upper surface of the work table 12. The planar servo motor 13 includes a fixed portion 15 in which a large number of N-pole permanent magnets and S-pole permanent magnets are arranged on the upper surface, and a movable portion 16 in which a plurality of electromagnets are disposed on the lower surface (details). (Japanese Patent Publication No. 52-48271, Japanese Patent Laid-Open No. 62-1000016, and Japanese Patent Laid-Open No. 5-69242). The fixed portion 15 is fixed on the machine base 24, and the movable portion 16 is placed so as to be movable in the front-rear and left-right directions on the upper surface of the fixed portion 15. The movable portion 16 includes a connecting mechanism 21 that removably connects the holding frame 14.

  Between the machining area A and the work stock area B, ionizers 17L and 17R shown as static eliminators before and after machining are arranged on the left and right (up and down in FIG. 2). The ionizers 17L and 17R are provided so as to face each other vertically, the upper ionizers 17L and 17R are provided inside the protective cover 55, and the lower ionizers 17L and 17R are attached to the front surface of the machine base 24. Yes. The ionizers 17L and 17R generate ions and blow an ion wind onto the workpiece W by air. The ionizers 17L and 17R are always turned on during the processing of the workpiece W, and are turned off when the protective cover 55 and the front cover 56 of the punching machine 1 are opened. The ionizers 17L and 17R are arranged so as to cross the workpiece W conveyance path. When the workpiece W is conveyed between the workpiece stock area B and the machining area A, the ionizer 17L and 17R blows air strongly to generate the ion wind. Inject into W.

  A pre-processing work stocker 18 is disposed on the right side (upper side in FIG. 2) of the work stock area B, and a processed work stocker 19 is disposed on the left side (lower side in FIG. 2). A work transfer device 20 is disposed between them. The workpiece transfer device 20 includes an electric cylinder 23 for raising and lowering fixed to the front surface of the machine base 24, a rotating arm 25 that can be moved up and down by the electric cylinder 23, and that is rotatable with respect to the rotating arm 25. The telescopic arm 26 protrudes and retracts, and a holding frame suction portion 27 at the tip of the telescopic arm 26. The workpiece transfer device 20 is lowered on the pre-work workpiece stocker 18 with the telescopic arm 26 retracted, and adsorbs and lifts the holding frame 14 with the pre-work workpiece, and after turning 90 degrees, the telescopic arm 26 is moved. Then, the holding frame 14 is held by the movable portion 16 by the connecting mechanism 21 of the movable portion 16 to release the suction. Thereafter, the telescopic arm 26 is retracted and waits, and after drilling, the telescopic arm 26 is extended, the holding frame 14 with the workpiece is taken out from the movable portion 16, and is lifted and rotated 90 degrees to the processed workpiece stocker 19 with the holding frame with the workpiece. 14 is transferred.

  Next, details of the work stockers 18 and 19 will be described. 3 to 5 show the processed work stocker 19, and FIGS. 7 and 8 show the pre-processing work stocker 18, respectively. The work stockers 18 and 19 disposed symmetrically have substantially the same configuration and include a stocker base 28 and a slide unit 29. The processed work stocker 19 is shown as a dust removal cover 30 and an opening / closing drive device. And a cover opening / closing cylinder 31. First, the stocker base 28 is configured by providing left and right support frames 28b and 28b on the front surface of the fixing frame 28a fixed to the machine base 24, and providing upper support frames 28c on the upper surfaces of the left and right support frames 28b and 28b. Has been. A pair of roller support members 34a and 34a are erected in parallel in the front-rear direction on the left and right surfaces of the upper support frame 28c, and a plurality (here, a plurality of roller support members 34a and 34a) Four rollers 34, 34,... Are arranged.

  The slide unit 29 includes a slide unit main body 32 and a stocker unit 33 on which the workpiece W is placed. The stocker unit 33 is detachably attached to the slide unit main body 32 from above. The slide unit main body 32 is pulled out by the roller 34 on the stocker base 28 to the receiving position located on the stocker base 28 as shown in FIGS. 1 to 5 and the front of the stocker base 28 as shown in FIG. It is guided and held so as to be movable laterally between the drawer positions. In addition, a plurality (three) of engagement holes 36 are provided on the upper surface of the slide unit main body 32, and the engagement pins 36 hang downward from the lower surface of the stocker unit 33. 35 is inserted and removed. Further, as shown in FIG. 6, the stocker unit 33 is provided with a fitting pin 37 that comes into contact with an edge portion between the V groove 38 and the wide groove 39 of the holding frame 14 loaded on the stocker unit 33. . That is, the holding frame 14 is stacked on the stocker unit 33 with the edges positioned by the fitting pins 37, 37,. Reference numerals 51, 52, and 53 denote clamping pieces that are in contact with the four circumferences of the stocker unit 33 to clamp the stocker unit 33, and 54 is a stopper of the slide unit 29.

  Next, the dust removal cover 30 and the cover opening / closing cylinder 31 of the processed work stocker 19 will be described. A roller support member 40 that pivotally supports the guide roller 41 is fixed to the left support frame 28 b of the stocker base 28. Drive device support arms 42 and 42 are fixed to the lower surfaces of the left and right support frames 28b and 28b, and a cover opening / closing cylinder 31 is installed between the drive device support arms 42 and 42. A lower end portion of a cover support member 45 is attached to a piston mount 43 (external moving body) of a cover opening / closing cylinder 31 formed of a well-known rodless cylinder via a bracket 44, and an upper end portion of the cover support member 45 is A cover mounting member 47 that clamps one end of the dust removal cover 30 between the clamping pieces 46 is attached.

  The dust removal cover 30 is a belt-like flexible cover that can cover the entire surface of the stocker unit 33 at a cover position above the stocker unit 33, and a weight 30 a is attached to the other end wound around the guide roller 41. Thus, it hangs down below the guide roller 41. The processing area A side of the stocker unit 33 is covered with a cover 48 erected on the stocker base 28 below the ionizer 17R as shown in FIG. On the other hand, at a position above the guide roller 41, a suction duct 49 is provided in which a suction port 50 directed downward is brought close to the upper surface of the dust cover 30. The electric cylinder 23 and the cover opening / closing cylinder 31 may be other actuators.

  Processing operations in the punching machine 1 configured as described above will be described. First, the holding frame 14 with the workpiece W before machining (also referred to as a workpiece before machining) is moved from the workpiece stocker 18 before machining to the work table 12 by the workpiece conveying device 20. At this time, an ion wind is blown from the ionizer 17L to the workpiece W passing between the upper and lower ionizers 17L to remove the charge. When the holding frame 14 with the workpiece is transferred to the movable portion 16 in this way, the movable portion 16 is driven in the front-rear and left-right directions to punch the workpiece W by the punching device 2. Along with the perforating process, the workpiece W is charged with static electricity, and the static electricity causes a part of the punching waste and fine dust floating around the workpiece W to adhere to the upper and lower surfaces of the workpiece W. When the drilling is completed, the holding frame 14 with the processed workpiece W (processed workpiece) is taken out from the movable portion 16 by the workpiece transfer device 20 and transferred from the work table 12 to the processed workpiece stocker 19. . During this conveyance, if the workpiece W is passed between the upper and lower ionizers 17R, and the ion wind is sprayed from the upper and lower ionizers 17R onto the upper and lower surfaces of the workpiece W to remove the charge, the workpiece W adheres to the upper and lower surfaces of the processed workpiece W. The dust that has been released is released from the upper and lower surfaces of the workpiece W and blown off from the processed workpiece W by the ion wind.

  The dust thus separated from the work will also be scattered above the processed work stocker 19, but on the processed work stocker 19, it falls onto the dust removal cover 30 that is still closed at the cover position. It does not reach the previous processed workpiece W below the dust removal cover 30. Then, when the processed workpiece W is positioned on the processed workpiece stocker 19, the cover opening / closing cylinder 31 extends as shown in FIG. 9, and the dust removal cover 30 is moved leftward via the bracket 44 and the cover support member 45. Therefore, the dust removal cover 30 is guided downward by the guide roller 41 as the weight 30a is lowered, and opens the stocker unit 33 (open position). When the dust cover 30 is slid, the suction duct 49 is operated to suck the dust on the dust cover 30. Then, when the processed workpiece W is placed on the stocker unit 33 and the workpiece transfer device 20 returns to the standby position, the cover opening / closing cylinder 31 contracts and the dust removal cover 30 is slid rightward to cover the cover. In order to return to the position, the upper part of the processed work stocker 19 is covered again. As described above, the processed workpieces W are stacked in a state where the dust is removed, and the dust falling from the upper side by the dust-proof cover 30 is not attached, so that the processed workpiece W does not become a defective product. Of course, the upper surface of the dust cover 30 is always kept clean.

  When the work holding frame 14 holding the work W before the work stocker 18 is all processed and placed on the processed work stocker 19, the front cover 56 of the machine base 24 is opened, and FIG. As shown, the slide units 29 of the work stockers 18 and 19 are drawn from the receiving position to the drawing position. In the unprocessed work stocker 18, the empty stocker unit 33 is lifted and removed upward from the slide unit main body 32, and the new stocker unit 33 on which a plurality of holding frames 14 holding the unprocessed work W are placed is slid. Fit into the unit body 32. Further, in the processed work stocker 19, the stocker unit 33 loaded with the holding frame 14 holding the processed work W is lifted and removed from the slide unit main body 32, and an empty stocker unit on which no work is placed is removed. Replace with 33. The stocker unit 33 on which the holding frame 14 holding the processed workpiece W is placed can be carried to a subsequent process as it is. Such replacement operation of the stocker unit 33 can be performed even during punching.

As described above, in the punching machine 1 having the above-described configuration, since the dust that is removed from the processed workpiece W by the ionizers 17L and 17R and falls is received by the dust cover 30, the processed workpiece W loaded below the dust cover 30 is used. It is possible to avoid the inconvenience that the dust falls and adheres to make the processed workpiece W defective, and the quality of the processed workpiece W can be improved.
In addition, by providing the suction duct 49 for sucking and removing the dust that has fallen on the upper surface of the dust removal cover 30, dust is not accumulated on the dust removal cover 30, and can always be kept clean.
Furthermore, the dust cover 30 has flexibility, and one end is connected to a cover opening / closing cylinder 31 slidably provided on the processed work stocker 19, while the other end is connected to the processed work stocker 19. Since the provided guide roller 41 is wound around and suspended and moved by expansion and contraction of the cover opening / closing cylinder 31, the dust cover 30 can be moved rationally in a space-saving manner. Further, since the suction duct 49 is disposed above the guide roller 41 with the suction port 50 facing downward, it is suitable for sucking and removing dust.

The work stockers 18 and 19 each include a stocker base 28 and a slide unit 29 that is placed above the stocker base 28 and loads the work. The slide unit 29 can be pulled out from the stocker base 28 in the lateral direction. Since the guide is held, the work can be easily put in and out by pulling out the slide unit 29, and workability can be improved.
In addition, the left and right slide units 29 are composed of a slide unit main body 32 guided and held by the stocker base 28 and a stocker unit 33 that loads a work and is detachable from the slide unit main body 32 from above. The stocker unit 33 can be mounted from the previous process as it is, or removed and carried to the subsequent process, so that the processing time can be shortened.

  Note that the dust cover is not limited to the above-mentioned form, but if it has a bellows shape or if there is enough space, it is not flexible and can be opened and closed above the work stocker by buttering one end of a plate. It is possible to change the shape as appropriate, such as making it possible to open and close the work stocker with a simple horizontal movement. In addition, the flexible dust removal cover is stored in the open position without being suspended from the guide roller as in the above embodiment, and the end of the dust removal cover is fixed to the peripheral surface of the guide roller, and the dust removal cover is attached to the guide roller. A rotation urging means such as a torsion spring that urges rotation in the winding direction can be provided so that the guide roller is wound around and stored in the open position. Furthermore, the suction duct is not limited to the one provided downward with respect to the guide roller, and may be provided sideways and close to the dust cover.

On the other hand, the slide unit pull-out structure uses balls instead of rollers as in the above embodiment, guides and holds by fitting linear rails without using these rolling elements, or uses a linear guide. The design can be changed as appropriate.
In addition, the stocker unit attachment / detachment structure can be used to increase / decrease the number of engagement holes and engagement pins, or to fit the concavities and convexities in place of the engagement / disengagement of the holes and pins. A structure in which the entire bottom portion of the stocker unit is fitted into the formed recess is also conceivable.

It is a side view of the punching machine provided with the work stocker. It is a top view of the punching machine. It is a front view of the processed work stocker provided with the dustproof cover. FIG. 4 is a right side view of FIG. 3. It is a top view of the processed work stocker provided with the dustproof cover. It is the top view to which the stocker unit which mounted the workpiece | work was expanded. It is a top view of the work stocker before a process which made the slide unit the drawer position. FIG. 8 is an enlarged sectional view taken along line AA in FIG. 7. It is a front view of the processed work stocker which opened the dust removal cover.

Explanation of symbols

1 Punching machine 6 Punching unit 17L, 17R Ionizer (static elimination device)
18, 19 Work stocker 20 Work transfer device 28 Stocker base 29 Slide unit 30 Dust removal cover 31 Cover opening / closing cylinder (opening / closing drive device)
32 Slide unit body 33 Stocker unit 41 Guide roller 49 Suction duct A Processing area W Thin workpiece

Claims (4)

While providing a punching unit for punching thin plate workpieces in the processing area, a work stocker for loading processed thin plate workpieces outside the processing area, and a workpiece transfer device for picking up processed workpieces in the processing area to the work stocker And a punching machine in which a static eliminator is provided between the work stocker and the processing area to neutralize the processed workpiece being transferred by the workpiece transfer device,
The work stocker is provided with a dust removal cover that can be moved between a cover position that covers the top of the work stocker to prevent dust from falling onto the processed work and an open position that opens the top of the work stocker. It is possible to prevent the dust from falling onto the processed workpiece with the dust cover in
A punching machine comprising a suction duct for sucking and removing dust falling on the upper surface of the dust removal cover . The dust removal cover has flexibility, and one end is connected to an opening / closing drive device slidably provided on the work stocker, while the other end is wound around a guide roller provided on the work stocker, 2. The punching machine according to claim 1 , wherein the punching machine is moved by a slide of an opening / closing drive device, and the suction duct is disposed at a position above the guide roller with a suction port facing downward. The work stocker includes a stocker base and a slide unit that is placed above the stocker base and loads a processed work. The slide unit is pulled out laterally from the stocker base and a receiving position for receiving the processed work from the work transfer device. 3. The punching machine according to claim 1, wherein the punching machine is guided and held by the stocker base so as to be movable between the drawing positions. 4. The punching machine according to claim 3 , wherein the slide unit includes a slide unit main body guided and held by the stocker base, and a stocker unit that is loaded with a work and can be attached to and detached from the slide unit main body from above.

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