JP4144486B2 - Sample concentration detection method, apparatus and program - Google Patents

Description

  The present invention relates to a sample concentration detection method, apparatus, and program, and in particular, a fluorescent paint is applied to a work surface in a sample atmosphere, and fluorescence is generated by irradiating the fluorescent paint surface with excitation light to obtain the fluorescence intensity. The present invention relates to a sample concentration detection method, apparatus, and program for detecting the sample concentration on the workpiece surface.

  There has been proposed an apparatus and a method for detecting a sample concentration on the surface of a workpiece by using a fluorescent paint that extinguishes and emits light according to the sample concentration when irradiated with excitation light.

  In Patent Document 1 (Japanese Patent Application Laid-Open No. 9-113450), a mixed gas is brought into contact with a detection material formed by applying a matrix polymer containing TPP (tetra-polyphylline) in a state of irradiating light. A gas concentration detection method is disclosed in which a gas concentration is measured by measuring a color change as a spectral change of transmitted light or reflected light of a specific wavelength.

  In Patent Document 2 (Japanese Patent Publication No. 2002-529682) and Patent Document 3 (Japanese Patent Publication No. 9-506166), a fluorescent paint having an oxygen quenching property is applied to the end face of the optical fiber, and the tip of the optical fiber is applied. A gas concentration detection method capable of measuring the oxygen concentration is disclosed.

  Further, in Patent Document 4 (Japanese Patent Laid-Open No. 6-34545), an excitation light irradiation optical fiber bundle is arranged between the excitation light source and the sample to change the irradiation position of the excitation light, or a two-dimensional surface. An optical property evaluation method that eliminates the need to move an optical system or a sample in the case of analysis is disclosed.

JP-A-9-113450 Japanese translation of PCT publication No. 2002-529682 Japanese National Patent Publication No. 9-506166 JP-A-6-34545

  However, in the method of generating fluorescence by irradiating excitation light onto such a fluorescent paint surface and detecting the gas concentration by acquiring the fluorescence intensity, the fluorescence intensity fluctuates due to a factor independent of the gas concentration. May be a problem. When the fluorescence intensity fluctuates, the fluctuation of the fluorescence intensity becomes a gas concentration detection noise due to the fluorescence, which hinders the acquisition of highly accurate fluorescence intensity. As such fluorescence intensity fluctuation factors, the fluorescence intensity fluctuation factors that are independent of the gas concentration are generally used, but in particular, “brightness / darkness change of excitation light source”, “irradiation unevenness of excitation light”, “film thickness unevenness of fluorescent paint” Can be mentioned. “Brightness / darkness change of the excitation light source” means that the irradiation amount of the excitation light on the work surface changes due to a temporal change in which the brightness of the excitation light source itself changes when the excitation light source is continuously used. “Excitation light irradiation unevenness” refers to a difference in the amount of excitation light irradiated on the surface of the workpiece irradiated with the excitation light. It is often caused by the illumination angle of the light source. “Thickness unevenness of fluorescent paint” means that the fluorescent paint film is not uniformly applied to the surface of the workpiece, and the fluorescence intensity changes locally depending on the thickness of the fluorescent paint.

  The present invention has been made in view of the above-described problems, and the like, a sample concentration detection method, an apparatus, and a sample concentration detection method for detecting the sample concentration on the workpiece surface with higher accuracy while preventing the influence of the fluorescence intensity variation factor independent of the sample concentration. The purpose is to provide a program.

  According to a first aspect of the present invention, fluorescence is generated by irradiating excitation light onto the surface of a fluorescent paint applied on the surface of a workpiece in a sample atmosphere, and the fluorescence intensity is acquired. A sample concentration detection method for detecting a sample concentration, a fluorescence intensity acquisition step for acquiring fluorescence intensity of fluorescence generated by irradiation of excitation light, and acquiring the fluorescence intensity, and at the same time, independent of the sample concentration from the workpiece surface A variation factor calculation step for calculating the influence of the fluorescence intensity variation factor, a correction step for correcting the fluorescence intensity based on the influence of the fluorescence intensity variation factor, and a sample concentration on the workpiece surface based on the corrected fluorescence intensity And the variation factor calculation step partially applies an excitation light reflecting layer that reflects the excitation light onto the fluorescent paint surface of the workpiece. , An excitation light intensity acquisition step for acquiring the excitation light intensity of the excitation light reflected by the excitation light reflection layer, and an effect of calculating the influence of the fluorescence intensity variation factor depending on the sample concentration based on the reflected excitation light intensity Computation process that matches the relationship between the position of the excitation light reflection layer and the excitation light intensity of the reflected excitation light, and interpolates between the excitation light reflection layers to estimate the excitation light on the entire workpiece surface An estimation step, a theoretical intensity calculation step for estimating the theoretical fluorescence intensity of the entire workpiece surface from the estimated excitation light, and a comparison step for comparing the theoretical fluorescence intensity with the fluorescence intensity. And a step of calculating the influence of the fluorescence intensity variation factor depending on the sample concentration based on the result.

  According to a second aspect of the present invention, fluorescence is generated by irradiating excitation light onto a fluorescent paint surface coated on a work surface in a sample atmosphere, and the fluorescence intensity is acquired to obtain the surface of the work surface. A sample concentration detection device for detecting a sample concentration, a fluorescence intensity acquisition means for acquiring fluorescence intensity of fluorescence generated by irradiating excitation light onto the fluorescent paint surface, and simultaneously acquiring the fluorescence intensity, Fluctuation factor calculation means for calculating the influence of the fluorescence intensity fluctuation factor independent of the sample concentration from the workpiece surface, correction means for correcting the fluorescence intensity based on the influence of the fluorescence intensity fluctuation factor, and the corrected fluorescence intensity Determination means for determining a sample concentration on the surface of the workpiece based on the variation factor calculation means, wherein the variation factor calculation means applies the excitation light partially applied on the fluorescent paint surface of the workpiece. The excitation light intensity acquisition means for acquiring the excitation light intensity of the excitation light reflected by the excitation light reflection layer to be emitted, and the influence of calculating the influence of the fluorescence intensity fluctuation factor depending on the sample concentration based on the reflected excitation light intensity Computation means that matches the relationship between the position of the excitation light reflection layer and the excitation light intensity of the reflected excitation light, and interpolates between the excitation light reflection layers to estimate the excitation light on the entire workpiece surface A comparison means for comparing the theoretical fluorescence intensity with the fluorescence intensity, and a comparison means for comparing the theoretical fluorescence intensity with the fluorescence intensity. And a means for calculating the influence of the fluorescence intensity variation factor depending on the sample concentration based on the result.

  According to a third aspect of the present invention, fluorescence is generated by irradiating excitation light onto the surface of a fluorescent paint applied on the surface of the workpiece in the sample atmosphere, and the fluorescence intensity is acquired. A sample concentration detection program for detecting a sample concentration by a computer, acquiring fluorescence intensity of fluorescence generated by irradiation of excitation light, and acquiring the fluorescence intensity at the same time, partially on the fluorescent paint surface of the workpiece The excitation light intensity of the excitation light reflected by the applied excitation light reflection layer that reflects the excitation light is acquired, and matching is performed to match the relationship between the position of the excitation light reflection layer and the excitation light intensity of the reflected excitation light, The excitation light on the entire workpiece surface is estimated by interpolating between the excitation light reflecting layers, and the theoretical fluorescence intensity on the entire workpiece surface is estimated from the estimated excitation light. The theoretical fluorescence intensity and the fluorescence intensity are estimated. , And the influence of the fluorescence intensity fluctuation factor due to the sample concentration independence is calculated based on the comparison result, the fluorescence intensity is corrected based on the influence of the fluorescence intensity fluctuation factor, and the corrected fluorescence is calculated. The sample concentration on the workpiece surface is determined based on the strength.

  The present invention can provide a sample concentration detection method, apparatus, and program for detecting the sample concentration on the workpiece surface with higher accuracy by preventing the influence of the fluorescence intensity fluctuation factor independent of the sample concentration.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. This embodiment is an example for carrying out the present invention, and the present invention is not limited to this embodiment.

  In the present embodiment, a separator plate used in a MEA of a fuel cell as a workpiece (substrate), oxygen gas as a sample gas to be detected, ruthenium complex paint (oxygen quenching) as a fluorescent paint, and a wavelength of 470 nm as an excitation light source Using an excitation light source capable of emitting blue light as excitation light, the oxygen gas concentration distribution on the surface of the separator plate is detected. Note that the fluorescence generated under such circumstances is about 600 nm. Further, the intensity of the luminance value is used as the intensity of light. Using such a configuration, it is detected how oxygen gas used in the fuel cell is distributed on the separator plate used in the fuel cell electrode.

[Embodiment 1]
"Overall configuration of the device"
FIG. 1 shows a configuration diagram of an oxygen gas concentration detection apparatus 100 according to the first embodiment. There is a detection material 10 that uses a separator 12 as a substrate to be detected as a distribution of surface gas concentration. The detection material 10 is installed in a case 18 having a transmission window through which excitation light and fluorescence can pass. A space 19 is provided between the detection material 10 and the transmission window, and the space 19 becomes a gas flow path 19 through which oxygen gas diffused on the surface of the detection material 10 is passed. An excitation light source 20 is installed so that the detection material 10 can be irradiated with excitation light. A half prism 30 as light splitting means for splitting the excitation light reflected by the detection material 10 and the generated fluorescence in two directions is installed in front of the detection material 10. In one of the two directions in which the light divided by the half prism 30 travels, an excitation light transmission filter 40 is provided as excitation light wavelength passing means for selectively passing a light beam having a wavelength of excitation light (about 470 nm). It has been. Behind the filter 40 is provided an excitation light CCD camera 50 as excitation light detection means for detecting the luminance value of the excitation light that has passed through the filter 40. In the remaining one of the two directions in which the light divided by the half prism 30 travels, a fluorescence transmission filter 60 as a fluorescence wavelength passing means for selectively passing a light beam having a fluorescence wavelength (about 600 nm) is provided. Is provided. Behind the filter 60 is provided a fluorescence CCD camera 70 as fluorescence detection means for detecting the luminance value of the fluorescence that has passed through the filter 60. The CCD camera 50 and the CCD camera 70 are connected in electrical communication with a computer 80. The computer 80 is a calculation unit that acquires data from each CCD camera, performs calculation inside based on the acquired data, and transmits the image data to the image output unit. A display 90 is provided as image output means for outputting image data received from the computer 80.

"Configuration of detection material"
FIG. 1A shows a top view of the detection material 10 to be measured as viewed from the half prism 30 side. FIG. 1B shows a cross-sectional view when the detection material 10 of FIG. 1A is cut along the XY plane. A fluorescent paint is applied to the entire surface of the separator 12 to form a fluorescent paint layer 14. On the fluorescent paint layer 14, an excitation light reflection layer 16 that reflects excitation light is partially applied. The excitation light reflecting layer may be a general paint that can reflect excitation light, such as a white paint.

  The partial application of the excitation light reflecting layer 16 indicates that the surface of the fluorescent paint layer 14 is not the entire surface. Data that can be corrected by calculating the influence of the fluorescence luminance value variation factor by the excitation light by reflecting the excitation light. Any mode can be used as long as it can be collected. For example, the excitation light reflecting layer 16 is scattered and applied to the fluorescent paint layer 14 in a striped shape, a matrix shape, a mottled shape, or the like. In the embodiment, a large number of circular excitation light reflection layers 16 having a diameter of about 1 mm are coated on the fluorescent paint layer 14 at regular intervals, and each of the circular excitation light reflection layers is reflected by excitation light. This is a partial area (FIG. 1A). The application unit may be a general application unit such as a screen printing unit.

  The greater the number of excitation light reflection regions and the shorter the distance between them, the better the excitation light luminance value calculation system by interpolation, which will be described later. Is preferred. Moreover, in order to prevent acquisition of fluorescence data, it is preferable that the area of each excitation light reflection region is small.

"Computer internal configuration"
FIG. 1C shows a block diagram showing the internal configuration of the computer 80. The position luminance calculation means 81 is electrically connected to the excitation light CCD camera 50 and obtains luminance value data of the excitation light from the CCD camera 50. Further, the position luminance calculation means 81 is connected in electrical communication with the position storage means 81R. The position storage unit 81R stores in advance the positional relationship of the excitation light reflecting portion region with respect to the photographing location of the CCD camera 50 stored in advance. The position luminance calculation means 81 reads the positional relation data from the position storage means 81R, and uses the excitation light reflected from which excitation light reflecting portion region of the detection material 10 based on the luminance value data and the positional relation of the reflected excitation light. The luminance value and the positional relationship are calculated and matched. Further, the position luminance calculation means 81 transmits the calculation result to the average luminance calculation means 82. Based on the data from the position luminance calculation means 81, the average luminance calculation means 82 calculates the average luminance value of the excitation light in each excitation light reflection area. Further, the average luminance calculation means 82 transmits the data of the average luminance value of the excitation light in each excitation light reflection area to the interpolation interpolation calculation means 83. Based on the data from the average luminance calculating means 82, the interpolation interpolation calculating means 83 performs the interpolation between the excitation light reflecting portion areas, and calculates the excitation light luminance values of all the locations photographed by the CCD camera 50. The interpolation / interpolation calculation means 83 transmits the relationship data between all the captured locations and the excitation light luminance value to the theoretical luminance value calculation means 84. The theoretical luminance value calculation means 84 is electrically connected to the interpolation interpolation calculation means 83 and the test line storage means 84R. The calibration line storage means 84R stores in advance a theoretical calibration line between the excitation light luminance and the fluorescence luminance. The theoretical luminance value calculation means 84 calls a verification line from the verification line storage means 84R based on the data on the relationship between the excitation light luminance values and all the positions photographed from the interpolation / interpolation calculation means 83, and uses the verification line to indicate all the imaging positions. Theoretical theoretical fluorescence brightness value is calculated. The theoretical luminance value calculation means 84 transmits the theoretical theoretical fluorescence luminance values of all photographing locations to the comparison correction calculation means 85. The comparison correction calculation means 85 is electrically connected to the theoretical luminance value calculation means 84, the fluorescent CCD camera 70, and the correction relationship storage means 85R. The correction relationship storage unit 85R stores in advance a correction relationship as to how much the actual fluorescence luminance value should be corrected with respect to the difference between the theoretical fluorescence luminance value and the actual fluorescence luminance value. The comparison correction calculation means 85 obtains actual fluorescence brightness value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence brightness value sent from the theoretical brightness value calculation means 84. Based on the comparison result, a correction relationship as to how much the actual fluorescence luminance value should be corrected is read from the correction relationship storage means 85R, and the actual fluorescence luminance value data is corrected based on the correction relationship. The fluorescence luminance value data after the correction processing is transmitted to the density calculation means 86. The concentration calculation means 86 is connected to the comparison correction calculation means 85 and the luminance concentration storage means 86R that stores the relationship between the fluorescence luminance value and the oxygen gas concentration. The concentration calculation unit 86 reads the relationship between the fluorescence luminance value and the oxygen gas concentration from the luminance concentration storage unit 86R, calculates the oxygen gas concentration of the entire photographing location based on the corrected fluorescence luminance value data from the comparison correction calculation unit 85, Image data in which colors are divided according to the density is transmitted to the display 90. The series of processes is usually performed in one computer. Usually, the arithmetic means uses a CPU (Central Processing Unit), and the storage means uses a memory. A person skilled in the art can easily measure the correlation such as the calibration line stored in the storage means in advance.

"Detection method of oxygen gas concentration distribution"
Based on the flowchart shown in FIG. 1D, a method of detecting the oxygen gas concentration distribution using the oxygen gas concentration detecting device of FIG. 1 will be described. A surface of oxygen gas is diffused through the gas flow path 19 on the detection material 10 in which the excitation light reflecting layer 16 is partially applied to the fluorescent paint 14 on the separator 12 as a substrate 12 (S10). While diffusing oxygen gas, the excitation light source 20 irradiates the detection material 10 with excitation light, and the excitation light reflection unit 16 reflects the excitation light. The excitation light reflecting unit 16 reflects the excitation light without being used for exciting the fluorescent paint. Since reflected excitation light does not depend on oxygen concentration gas, detection of reflected excitation light has the effect of uneven irradiation of excitation light, which is a cause of fluctuations in fluorescence intensity independent of gas concentration, and changes in brightness of the excitation light source over time. Etc. can be detected and the influence can be removed. Moreover, in the location where the excitation light reflection part 16 is not applied and the fluorescent paint layer 14 is exposed on the surface, fluorescence is generated by the excitation light. Fluorescence is quenched by oxygen gas at locations where the oxygen gas concentration is high. The reflected excitation light and the generated fluorescence are mixed to form mixed light (S12). The mixed light is separated into two directions by the half prism 30 (S14). One direction is separated into the direction through the excitation light transmission filter 40, and the remaining one direction is separated into the direction through the fluorescence transmission filter 60. Using the excitation light transmission filter 40, the mixed light traveling in the direction through the excitation light transmission filter 40 is selected and extracted only. The image brightness value of the extracted reflected excitation light is acquired by the excitation light CCD camera 50 (S16). The image brightness value of the reflected excitation light is processed by the computer 80.

  That is, the position luminance calculation means 81 that has obtained the luminance value data of the excitation light from the CCD camera 50 determines which excitation light reflecting portion region of the detection material 10 based on the positional relationship between the luminance value data of the excitation light and the photographing location of the CCD camera 50. To obtain the data P (Xn, Yn) in which the relationship between the position and the luminance value is matched (S18). Next, based on the luminance data P (Xn, Yn) from the position luminance calculation unit 81, the average luminance calculation unit 82 calculates the average luminance value of the excitation light in each excitation light reflection unit region, and each excitation light reflection unit region Data A (Xn, Yn) of average brightness values of the excitation light is obtained (S20). Thereby, the interpolation interpolation calculating means 83 further interpolates between the excitation light reflecting areas based on the luminance data A (Xn, Yn) from the average luminance calculating means 82, and all the images taken by the CCD camera 50 are captured. Data E (Xn, Yn) of the excitation light luminance value at the location is obtained (S22). Here, as the interpolation method, for example, linear interpolation, polynomial interpolation, spline interpolation, or the like can be used. Next, the theoretical luminance value calculation means 84 calculates theoretical theoretical fluorescence luminance values of all the photographing locations by using a theoretical test line between the reflected excitation light luminance data E (Xn, Yn) from the interpolation interpolation calculation means 83 and the fluorescence luminance. Data C (Xn, Yn) is calculated (S24).

  Next, the mixed light traveling in the direction through the fluorescence transmission filter 60 is extracted by selecting only the fluorescence wavelength using the fluorescence transmission filter 60. The fluorescence image brightness value taken out is acquired by the fluorescence CCD camera 70 (S26). The comparison correction calculation means 85 obtains the actual fluorescence brightness value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence brightness value C (Xn, Yn) of all the photographing locations sent from the theoretical brightness value calculation means 84. Based on the comparison result, the actual fluorescence brightness value data is corrected, and the corrected fluorescence brightness value data L (Xn, Yn) is obtained (S28). Next, the concentration calculation means 86 calculates oxygen gas concentration data O (Xn, Yn) of the entire photographing location based on the corrected fluorescence luminance value data L (Xn, Yn) from the comparison correction calculation means 85, and calculates the concentration. In response to this, the image data divided in color is transmitted to the display 90 (S30). The display 90 outputs image data in which colors are divided according to the oxygen gas concentration O (Xn, Yn). As a result, the distribution of the oxygen gas concentration on the separator can be visualized and recognized with high accuracy (S32).

  By the above method, it is possible to accurately measure the oxygen gas concentration distribution on the separator by removing the influence of the irradiation unevenness of the excitation light and the detection noise of the change in brightness of the excitation light source over time. In addition, in this method, the calibration correction of the fluorescence intensity fluctuation factor independent of the gas concentration can be performed at the same time when the gas concentration is detected, and it is necessary to perform the calibration correction of these fluorescence intensity fluctuation factors in advance before the gas concentration detection. There is no. Therefore, the number of processes can be reduced.

[Reference Form 1]
"Overall configuration of the device"
FIG. 2 shows a configuration diagram of an oxygen gas concentration detection apparatus 200 according to Reference Embodiment 1. There is a detection material 110 that uses a separator 12 as a substrate to be detected as a distribution of surface gas concentration. The detection material 110 is installed in a case 18 having a transmission window through which excitation light and fluorescence can pass. A space 19 is provided between the detection material 110 and the transmission window, and the space 19 becomes a gas flow path 19 through which oxygen gas diffused on the surface of the detection material 110 is passed. The excitation light source 20 is installed so that the detection material 110 can be irradiated with excitation light. A fluorescence transmission filter 60 is provided on the front surface of the detection material 110 as a fluorescence wavelength passing means for selectively passing the light having the fluorescence wavelength (about 600 nm) generated by the detection material 110. Behind the filter 60 is provided a fluorescence CCD camera 70 as fluorescence detection means for detecting the luminance value of the fluorescence that has passed through the filter 60. The CCD camera 70 is electrically connected to the computer 180. The computer 180 is a calculation unit that acquires data from the CCD camera 70, calculates the data based on the acquired data, and transmits the image data to the image output unit. A display 90 is provided as image output means for outputting image data received from the computer 180.

"Configuration of detection material"
FIG. 2A shows a top view of the detection material 110 to be measured as viewed from the camera 70. FIG. 2B shows a cross-sectional view when the detection material 110 of FIG. 2A is cut along the XY plane. 1A and 1B is mainly different from the detection material 10 in that it is not the excitation light reflection layer 16 but the oxygen-impermeable layer 116 that is formed on the fluorescent paint layer 14. That is, the fluorescent paint is applied to the entire surface of the separator 12 to form the fluorescent paint layer 14. An oxygen-impermeable layer 116 that prevents oxygen gas from coming into contact with the fluorescent reaction layer 14 is partially coated on the fluorescent paint layer 14. The oxygen-impermeable layer 116 may not emit fluorescence of about 600 nm and can prevent the fluorescence reaction layer 14 and oxygen gas from coming into contact with each other.

  The partial application of the oxygen-impermeable layer 116 indicates that the surface of the fluorescent paint layer 14 is not the entire surface. Data that can be corrected by reflecting the excitation light and calculating the influence of the fluorescence luminance value variation factor by the excitation light. Any mode can be used as long as it can be collected. For example, the oxygen-impermeable layer 116 may be scattered and applied to the fluorescent paint layer 14 in a striped shape, a matrix shape, or a mottled shape. In the reference embodiment, a large number of circular oxygen-impermeable layers 116 having a diameter of about 1 mm are coated on the fluorescent paint layer 14 at regular intervals, and each of the circular excitation light reflecting layers is impermeable to oxygen. This is a partial area (FIG. 2A). The application unit may be a general application unit such as a screen printing unit.

  The greater the number of oxygen-impermeable regions and the shorter the distance between them, the better the calculation system of excitation light luminance values at all locations by interpolation, which will be described later. It is preferable to shorten it. Moreover, in order to prevent the acquisition inhibition of fluorescence data, it is preferable that the area of each oxygen-impermeable portion region is small.

"Computer internal configuration"
FIG. 2C shows a block diagram showing the internal configuration of the computer 180. The position luminance calculation means 181 is electrically connected to the fluorescence CCD camera 70 to obtain fluorescence luminance value data from the CCD camera 70. Further, the position luminance calculation means 181 is connected in electrical communication with the position storage means 181R. The position storage unit 181R stores in advance the positional relationship of the oxygen-impermeable portion region with respect to the shooting location of the CCD camera 50 stored in advance. The position luminance calculation means 181 reads the positional relationship data from the position storage means 181R, and the fluorescence reflected from which oxygen impermeable portion region of the detection material 110 from the luminance value data and positional relationship of the oxygen impermeable portion. The luminance value and the positional relationship are calculated and matched. Further, the position luminance calculating unit 181 transmits the calculation result to the average luminance calculating unit 182. Based on the data from the position luminance calculation means 181, the average luminance calculation means 182 calculates the average value of the fluorescence luminance values of each oxygen-impermeable portion region. Further, the average luminance calculation means 182 transmits the fluorescence luminance value average data of each oxygen-impermeable portion area to the interpolation interpolation calculation means 183. Based on the data from the average luminance calculation means 182, the interpolation interpolation calculation means 183 performs interpolation between the oxygen-impermeable portion regions, and calculates the fluorescence luminance values at all locations photographed by the CCD camera 70. The interpolation / interpolation calculating means 183 transmits the relationship data between all the captured positions and the fluorescence luminance values to the excitation light calculating means 187. The excitation light calculation means 187 is electrically connected to the interpolation interpolation calculation means 183 and the test line storage means 187R. The calibration line storage unit 187R stores in advance the relationship between the fluorescence luminance and the excitation light luminance obtained in the oxygen-impermeable portion region. The excitation light calculation means 187 calls the fluorescence luminance and excitation light luminance calibration lines from the calibration line storage means 187R on the basis of the relationship data between all the photographed locations from the interpolation interpolation calculation means 183 and the fluorescence luminance values, and the calibration lines thereof. To calculate the excitation light luminance data of all photographing locations. In addition, the excitation light calculation unit 187R transmits excitation light luminance data of all photographing locations to the theoretical luminance value calculation unit 184. The theoretical luminance value calculation means 184 is electrically connected to the excitation light calculation means 187 and the test line storage means 184R. The calibration line storage means 184R stores in advance a theoretical calibration line between the excitation light luminance and the fluorescence luminance. The theoretical luminance value calculating means 184 calls a verification line from the verification line storage means 184R based on the data on the relationship between the excitation light luminance values and all the positions photographed from the excitation light calculating means 187, and uses the verification line for all the imaging positions. Theoretical theoretical fluorescence brightness value is calculated. The theoretical luminance value calculation means 184 transmits the theoretical theoretical fluorescence luminance values of all photographing locations to the comparison correction calculation means 185. The comparison correction calculation means 185 is electrically connected to the theoretical luminance value calculation means 184, the fluorescent CCD camera 70, and the correction relationship storage means 185R. The correction relationship storage unit 185R stores in advance a correction relationship as to how much the actual fluorescence luminance value should be corrected with respect to the difference between the theoretical fluorescence luminance value and the actual fluorescence luminance value. The comparison correction calculation means 185 obtains the actual fluorescence brightness value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence brightness value sent from the theoretical brightness value calculation means 184. Based on the comparison result, a correction relationship as to how much the actual fluorescence luminance value should be corrected is read from the correction relationship storage means 185R, and the actual fluorescence luminance value data is corrected based on the correction relationship. The fluorescence luminance value data after the correction processing is transmitted to the density calculation means 186. The concentration calculation means 186 is connected to the comparison correction calculation means 185 and the luminance concentration storage means 186R that stores the relationship between the fluorescence luminance value and the oxygen gas concentration. The concentration calculation unit 186 reads the relationship between the fluorescence luminance value and the oxygen gas concentration from the luminance concentration storage unit 186R, calculates the oxygen gas concentration of the entire imaging location based on the corrected fluorescence luminance value data from the comparison correction calculation unit 185, Image data in which colors are divided according to the density is transmitted to the display 90. The series of processes is usually performed in one computer. Usually, the calculation means uses a CPU, the storage means uses a memory, and the storage means uses a memory. Similar to the first embodiment, the correlation of the calibration line or the like stored in advance in the storage means can be easily measured by those skilled in the art.

"Detection method of oxygen gas concentration distribution"
Based on the flowchart shown in FIG. 2D, a method of detecting the oxygen gas concentration distribution using the oxygen gas concentration detecting device of FIG. 2 will be described. Oxygen gas is surface-diffused through the gas flow path 19 on the detection material 110 in which the separator 12 is used as a substrate and the oxygen-impermeable portion layer 116 is partially applied to the fluorescent paint 14 thereon. While diffusing oxygen gas, fluorescence emitted from the oxygen-impermeable portion region 116 is acquired. The excitation light source 20 emits excitation light to the detection material 110 (S110), and fluorescence is generated by the fluorescent paint layer 14 under the oxygen-impermeable portion layer 116 (S112). The fluorescence generated at this site is generated in a state where oxygen is not interposed by the oxygen-impermeable portion layer 116, and is independent of the oxygen gas concentration. Therefore, by measuring the fluorescence generated at this site, it is possible to detect the influence of the detection noise of the uneven irradiation of the excitation light or the change in brightness of the excitation light source over time, and to remove the noise. Fluorescence generated in the fluorescent paint 14 below the oxygen impermeable portion region 116 is extracted by selecting only the fluorescence wavelength with the fluorescence transmission filter 60. The fluorescence image brightness value taken out is acquired by the fluorescence CCD camera 70 (S114). The image brightness value of the fluorescence is processed by the computer 180.

  That is, the position luminance calculation means 181 that has obtained the fluorescence luminance value data from the CCD camera 70 determines which oxygen-impermeable portion region 116 of the detection material 10 from the positional relationship between the fluorescence luminance value data and the photographing location of the CCD camera 70. The data P (Xn, Yn) in which the relationship between the position and the luminance value is matched is obtained (S116). Next, based on the luminance data P (Xn, Yn) from the position luminance calculation unit 181, the average luminance calculation unit 182 calculates the average luminance value of the fluorescence of each oxygen impermeable part region and excites each oxygen impermeable part region. The light intensity value average data A (Xn, Yn) is obtained (S118). Accordingly, the interpolation interpolation calculating means 183 further performs interpolation between the oxygen-impermeable portion regions based on the luminance data A (Xn, Yn) from the average luminance calculating means 182, and all of the images taken by the CCD camera 70. Fluorescence luminance value data M (Xn, Yn) of the location is obtained (S120). Next, the fluorescence intensity value data E (Xn, Yn) of all the photographing locations is calculated by the excitation light calculation means 187 by using the calibration line between the fluorescence brightness data M (Xn, Yn) from the interpolation interpolation calculation means 183 and the excitation light brightness. (S122). Next, the theoretical luminance value calculation means 184 uses the theoretical calibration line between the excitation light luminance data E (Xn, Yn) from the excitation light calculation means 187 and the fluorescent luminance, and the theoretical theoretical fluorescent luminance value data C for all photographing locations. (Xn, Yn) is calculated (S124).

  Next, the fluorescence emitted from other than the oxygen-impermeable portion region 116, that is, the fluorescence whose luminance depends on the oxygen concentration, is extracted by selecting only the fluorescence wavelength using the fluorescence transmission filter 70. The fluorescence image brightness value taken out is acquired by the fluorescence CCD camera 70 (S126). The comparison correction calculation unit 185 obtains actual fluorescence luminance value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence luminance value C (Xn, Yn) of all the photographing locations sent from the theoretical luminance value calculation unit 184. . Based on the comparison result, the comparison correction calculation means 185 corrects the actual fluorescence brightness value data, and obtains the corrected fluorescence brightness value data L (Xn, Yn) (S128). Next, the concentration calculation means 186 calculates oxygen gas concentration data O (Xn, Yn) of the entire photographing location based on the corrected fluorescence luminance value data L (Xn, Yn) from the comparison correction calculation means 185, and calculates the concentration. In response to this, the divided image data is transmitted to the display 90 (S130). Next, as in the first embodiment, the display 90 outputs image data in which colors are divided according to the oxygen gas concentration O (Xn, Yn) (S132).

  As described above, the distribution of the oxygen gas concentration on the separator can be visualized and recognized with high accuracy. By the above method, similarly to the first embodiment, it is possible to accurately measure the oxygen gas concentration distribution on the separator by removing the influence of the unevenness of excitation light irradiation and the detection noise of the change in brightness of the excitation light source over time. In addition, in this method, the calibration correction of the fluorescence intensity fluctuation factor independent of the gas concentration can be performed at the same time when the gas concentration is detected, and it is necessary to perform the calibration correction of these fluorescence intensity fluctuation factors in advance before the gas concentration detection. There is no. Therefore, the number of processes can be reduced. Furthermore, in the reference embodiment 1, the calibration correction can be performed only by the fluorescence detection means (fluorescence CCD camera) for detecting the fluorescence image luminance value, and the excitation light detection means and the light splitting means are not required for the calibration correction.

[Reference form 2]
"Overall configuration of the device"
FIG. 3 shows a configuration diagram of an oxygen gas concentration detection apparatus 300 according to Reference Embodiment 2. The basic configuration is the same as that of the first embodiment. There is a detection material 210 that uses a separator 12 as a substrate to be detected as a surface gas concentration distribution. The detection material 210 is installed in a case 18 having a transmission window through which excitation light and fluorescence can pass. A space 19 is provided between the detection material 210 and the transmission window, and the space 19 becomes a gas flow path 19 through which oxygen gas diffused on the surface of the detection material 210 is passed. The excitation light source 20 is installed so that the detection material 210 can be irradiated with excitation light. A half prism 30 as light splitting means for splitting the excitation light reflected by the detection material 210 and the generated fluorescence in two directions is installed in front of the detection material 210. In one of the two directions in which the light divided by the half prism 30 travels, an excitation light transmission filter 40 is provided as excitation light wavelength passing means for selectively passing a light beam having the wavelength of the excitation light. Behind the filter 40 is provided an excitation light CCD camera 50 as excitation light detection means for detecting the luminance value of the excitation light that has passed through the filter 40. A fluorescence transmission filter 60 as a fluorescence wavelength passing means for selectively passing a light beam having a fluorescence wavelength is provided in the remaining one of the two directions in which the light divided by the half prism 30 travels. . Behind the filter 60 is provided a fluorescence CCD camera 70 as fluorescence detection means for detecting the luminance value of the fluorescence that has passed through the filter 60. The CCD camera 50 and the CCD camera 70 are electrically connected to the computer 280. The computer 280 is a calculation unit that acquires data from each CCD camera, performs calculation inside based on the acquired data, and transmits the image data to the image output unit. A display 90 is provided as image output means for outputting image data received from the computer 280.

"Configuration of detection material"
FIG. 3A shows a top view of the detection material 210 to be measured as viewed from the half prism 30 side. FIG. 3B shows a cross-sectional view when the detection material 210 of FIG. 3A is cut along the XY plane. An excitation light reflecting layer 16 that reflects excitation light is partially applied to the separator 12. The mode of application is the same as in the first embodiment. A fluorescent paint layer 14 is applied on the excitation light reflecting layer 16, the excitation light reflecting layer 16 is embedded in the fluorescent paint layer 14, and the entire surface of the detection material 210 is covered with the fluorescent paint layer 14.

  The greater the number of excitation light reflection regions 16 and the shorter the distance between them, the better the calculation system of excitation light luminance values at all locations by interpolation, which will be described later. It is the same as in the first embodiment that it is preferable to shorten it.

"Computer internal configuration"
FIG. 3C is a block diagram showing the internal configuration of the computer 280. The position luminance calculation means 281 is electrically connected to the excitation light CCD camera 50 and obtains the luminance value data of the excitation light from the CCD camera 50. Further, the position luminance calculation means 281 is connected in electrical communication with the position storage means 281R. The position storage unit 281R stores in advance the positional relationship of the excitation light reflecting portion region with respect to the photographing location of the CCD camera 50 stored in advance. The position luminance calculation means 281 reads the positional relationship data from the position storage means 281R, and uses the excitation light reflected from which excitation light reflecting portion region of the detection material 10 based on the luminance value data of the reflected excitation light and the positional relationship. The luminance value and the positional relationship are calculated and matched. Further, the position luminance calculation means 281 transmits the calculation result to the average luminance calculation means 282. Based on the luminance value data from the position luminance calculating unit 281, the average luminance calculating unit 282 calculates the average luminance value of the excitation light in each excitation light reflecting part region. Further, the average luminance calculation means 282 transmits the average data of the luminance values of the excitation light in the excitation light reflection area to the interpolation interpolation calculation means 283. Based on the data from the average luminance calculation means 282, the interpolation interpolation calculation means 283 performs interpolation between the excitation light reflecting portion areas, and calculates the excitation light luminance values of all locations photographed by the CCD camera 50. The interpolation / interpolation calculating means 283 transmits the relationship data between all the photographed locations and the excitation light luminance value to the film thickness calculating means 288. The film thickness calculation means 288 is connected in electrical communication with the interpolation interpolation calculation means 283 and the test line storage means 288R. The calibration line storage means 288R stores in advance a theoretical calibration line between the excitation light luminance and the fluorescence luminance. The film thickness calculation means 288 calls a verification line from the verification line storage means 288R based on the data on the relationship between the excitation light luminance values and all the positions photographed from the interpolation / interpolation calculation means 283. Calculate fluorescent paint film thickness. Further, the film thickness calculating means 288 transmits the fluorescent paint film thickness data of all photographing locations to the theoretical luminance value calculating means 284. The theoretical luminance value calculation means 284 is electrically connected to the film thickness calculation means 288 and the test line storage means 284R. The test line storage means 284R stores in advance a theoretical test line between the paint film thickness and the fluorescence luminance. Based on the film thickness data from the film thickness calculation unit 288, the theoretical luminance value calculation unit 284 calls a verification line from the verification line storage unit 284R, and calculates the theoretical theoretical fluorescence luminance value of all photographing locations using the verification line. . The theoretical luminance value calculation means 284 transmits the theoretical theoretical fluorescence luminance values of all photographing locations to the comparison correction calculation means 285.

  The comparison correction calculation means 285 is electrically connected to the theoretical luminance value calculation means 284, the fluorescent CCD camera 70, and the correction relationship storage means 285R. The correction relationship storage unit 285R stores in advance a correction relationship as to how much the actual fluorescence luminance value should be corrected with respect to the difference between the theoretical fluorescence luminance value and the actual fluorescence luminance value. The comparison correction calculation unit 285 obtains actual fluorescence luminance value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence luminance value sent from the theoretical luminance value calculation unit 284. Based on the comparison result, the correction relationship as to how much the actual fluorescence luminance value should be corrected is read from the correction relationship storage means 285R, and the actual fluorescence luminance value data is corrected based on the correction relationship. The fluorescence luminance value data after the correction processing is transmitted to the density calculation means 286. The concentration calculation means 286 is connected to the comparison correction calculation means 285 and the luminance concentration storage means 286R that stores the relationship between the fluorescence luminance value and the oxygen gas concentration. The concentration calculation unit 286 reads the relationship between the fluorescence luminance value and the oxygen gas concentration from the luminance concentration storage unit 286R, calculates the oxygen gas concentration of the entire imaging location based on the corrected fluorescence luminance value data from the comparison correction calculation unit 285, Image data in which colors are divided according to the density is transmitted to the display 90. The series of processes is usually performed in one computer. Usually, a CPU is used as the calculation means and a memory is used as the storage means. The correlation such as the calibration line stored in advance in the storage means can be easily measured by those skilled in the art, and is the same as in the first embodiment.

"Detection method of oxygen gas concentration distribution"
Based on the flowchart shown in FIG. 3D, a method of detecting the oxygen gas concentration distribution using the oxygen gas concentration detecting device of FIG. 3 will be described. Using the separator 12 as a substrate, the excitation light reflecting layer 16 is partially applied thereon, and the oxygen gas is surface diffused through the gas flow path 19 on the detection material 210 on which the fluorescent paint layer 14 is coated. While diffusing oxygen gas, the excitation light source 20 irradiates the detection material 210 with excitation light (S210), and the excitation light reflection unit 16 reflects the excitation light through the fluorescent paint layer. The thicker the fluorescent paint film, the more the excitation light quantity that reaches the excitation light reflecting portion 16 is attenuated, and the reflected excitation light reflected by the excitation light reflecting layer 16 is also attenuated. Therefore, there is a correlation between the attenuation of the reflected excitation light and the fluorescent paint film thickness 14, and by detecting the reflected excitation light, the unevenness of the paint film thickness, which is a gas concentration-independent fluorescence intensity fluctuation factor, is detected. It becomes possible to remove the influence.

  The entire detection material 210 is irradiated with excitation light to generate fluorescence. Fluorescence is quenched by oxygen gas at locations where the oxygen gas concentration is high. The excitation light reflected by the excitation light reflecting layer 16 and the generated fluorescence are mixed to form mixed light (S212). The mixed light is separated in two directions by the half prism 30. One direction is separated into the direction through the excitation light transmission filter 40, and the remaining one direction is separated into the direction through the fluorescence transmission filter 60 (S214). Using the excitation light transmission filter 40, the mixed light traveling in the direction through the excitation light transmission filter 40 is selected and extracted only. The image brightness value of the extracted reflected excitation light is acquired by the excitation light CCD camera 50 (S216). The image brightness value of the reflected excitation light is processed by the computer 280.

  That is, the position luminance calculation means 281 that has obtained the luminance value data of the excitation light from the CCD camera 50 determines which excitation light reflecting portion region of the detection material 210 based on the positional relationship between the luminance value data of the excitation light and the photographing location of the CCD camera 50. Whether the excitation light is reflected from the light is calculated, and data P (Xn, Yn) in which the relationship between the position and the luminance value is matched is obtained (S218). Next, based on the luminance data P (Xn, Yn) from the position luminance calculation unit 281, the average luminance calculation unit 282 calculates the average luminance value of the excitation light in each excitation light reflection unit region, and each excitation light reflection unit region Data A (Xn, Yn) of average luminance values of the excitation light is obtained (S220). Thus, the interpolation interpolation calculating means 283 further performs interpolation between the excitation light reflecting portion regions based on the luminance data A (Xn, Yn) from the average luminance calculating means 282, and all the images taken by the CCD camera 50 are captured. Data E (Xn, Yn) of the excitation light luminance value at the location is obtained (S222).

  Next, the fluorescent paint film thickness data D of all the photographing locations is obtained by the film thickness calculating means 288 by the theoretical test line between the reflected excitation light luminance data E (Xn, Yn) from the interpolation interpolation calculating means 283 and the fluorescent paint film thickness. (Xn, Yn) is calculated (S224). Next, the theoretical luminance value calculation means 284 uses the theoretical calibration line between the film thickness data D (Xn, Yn) from the film thickness calculation means 288 and the fluorescent luminance, and theoretical theoretical fluorescent luminance value data C ( Xn, Yn) is calculated (S226).

  Next, the mixed light traveling in the direction passing through the fluorescence transmission filter 60 is selected using the fluorescence transmission filter 60 and only the fluorescence wavelength is selected and extracted. The fluorescence image brightness value taken out is acquired by the fluorescence CCD camera 70 (S228). The comparison correction calculation means 285 obtains the actual fluorescence brightness value data from the CCD camera 70 and compares it with the theoretical theoretical fluorescence brightness value C (Xn, Yn) of all the photographing locations sent from the theoretical brightness value calculation means 284. Based on the comparison result, the actual fluorescence brightness value data is corrected, and the corrected fluorescence brightness value data L (Xn, Yn) is obtained (S230). Next, the concentration calculating means 286 calculates oxygen gas concentration data O (Xn, Yn) of the entire photographing location based on the corrected fluorescence luminance value data L (Xn, Yn) from the comparison correction calculating means 285, and calculates the concentration. In response to this, the image data divided in color is transmitted to the display 90 (S232). The display 90 outputs image data in which colors are divided according to the oxygen gas concentration O (Xn, Yn) (S234).

  As described above, the distribution of the oxygen gas concentration on the separator can be visualized and recognized with high accuracy. By the above method, it is possible to accurately measure the oxygen gas concentration distribution on the separator by removing the unevenness of the film thickness of the fluorescent paint.

[Reference form 3]
The reference form 3 is a configuration in which the apparatus of the first embodiment or the reference form 1 and the reference form 2 are combined. As the detection material, the excitation light reflecting layer 16 of Embodiment 1 or the oxygen-impermeable portion layer 116 of Reference Embodiment 1 is partially applied on the fluorescent paint layer 14 of Reference Embodiment 2.

  In the reference form 3, the correction of the fluorescence intensity variation factor due to the unevenness of the excitation light irradiation of the first embodiment and the reference form 1 and the time-dependent brightness change of the excitation light source, and the fluorescence intensity due to the uneven film thickness of the fluorescent paint of the reference form 2 Variation factors can be corrected simultaneously.

[Others]
Although the above describes the embodiment of the gas concentration detection device, it is possible to provide a similar gas concentration detection method and gas concentration detection program, and those skilled in the art can fully implement the embodiment based on the above embodiment. is there.

  The present invention can be applied to all workpieces that require detection of sample concentration. The sample concentration is not limited to the gas concentration, and may be applicable even with a liquid concentration or a solid density. For example, it can be applied to the detection measurement of the gas concentration flowing through the electrode cell of the fuel cell. It can also be applied to measurement of the distribution of the gas concentration of the shield gas during workpiece welding.

It is a block diagram of the gas concentration detection apparatus of Embodiment 1. 3 is a top view of the detection material of Embodiment 1. FIG. 2 is a cross-sectional view of a detection material according to Embodiment 1. FIG. FIG. 2 is a block diagram illustrating an internal configuration of the computer according to the first embodiment. 3 is a gas concentration detection flowchart according to the first embodiment. It is a block diagram of the gas concentration detection apparatus of the reference form 1. It is a top view of the detection material of the reference form 1. It is sectional drawing of the detection material of the reference form 1. It is a block diagram which shows the internal structure of the computer of the reference form 1. 3 is a gas concentration detection flowchart according to Reference Embodiment 1. It is a block diagram of the gas concentration detection apparatus of the reference form 2. It is a top view of the detection material of the reference form 2. It is sectional drawing of the detection material of the reference form 2. It is a block diagram which shows the internal structure of the computer of the reference form 2. It is a gas concentration detection flowchart which concerns on the reference form 2.

Explanation of symbols

10, 110, 210 Detection material, 12 Separator, 14 Fluorescent paint layer, 16 Excitation light reflection layer, 18 Case, 19 Gas flow path (space), 116 Oxygen impermeable layer, 20 Excitation light source, 30 Half prism, 40, 60 Filter, 50, 70 CCD camera, 80, 180, 280 Computer, 90 display, 100, 200, 300 Gas concentration detector.

Claims (3)

A sample concentration detection method for detecting the sample concentration of the workpiece surface by generating fluorescence by irradiating excitation light onto the fluorescent paint surface coated on the workpiece surface in the sample atmosphere and acquiring the fluorescence intensity Because
A fluorescence intensity acquisition step of acquiring fluorescence intensity of fluorescence generated by irradiation of excitation light;
At the same time as acquiring this fluorescence intensity, a fluctuation factor calculation step for calculating the influence of the fluorescence intensity fluctuation factor depending on the sample concentration from the workpiece surface,
Based on the influence of this fluorescence intensity variation factor, a correction step of correcting the fluorescence intensity,
A determination step of determining the sample concentration of the workpiece surface based on the corrected fluorescence intensity;
Have
The variation factor calculation step includes:
An application step of partially applying an excitation light reflecting layer that reflects the excitation light on the fluorescent paint surface of the workpiece;
An excitation light intensity acquisition step of acquiring the excitation light intensity of the excitation light reflected by the excitation light reflection layer;
Based on the reflected excitation light intensity, this is an influence calculation process that calculates the influence of the fluorescence intensity variation factor depending on the sample concentration, and matches the relationship between the position of the excitation light reflection layer and the excitation light intensity of the reflected excitation light. A matching process, an estimation process for estimating the excitation light on the entire workpiece surface by interpolating between the excitation light reflecting layers, and a theoretical intensity calculation for estimating the theoretical fluorescence intensity on the entire workpiece surface from the estimated excitation light. A step of comparing the theoretical fluorescence intensity with the fluorescence intensity, and calculating the influence of the fluorescence intensity variation factor depending on the sample concentration based on the comparison result,
Having a method. A sample concentration detection device for detecting the sample concentration of the work surface by generating fluorescence by irradiating excitation light onto the fluorescent paint surface applied on the work surface in the sample atmosphere and acquiring the fluorescence intensity Because
Fluorescence intensity acquisition means for acquiring fluorescence intensity of fluorescence generated by irradiating the fluorescent paint surface with excitation light;
At the same time as obtaining this fluorescence intensity, a fluctuation factor calculation means for calculating the influence of the fluorescence intensity fluctuation factor depending on the sample concentration from the workpiece surface,
Correction means for correcting the fluorescence intensity based on the influence of the fluorescence intensity variation factor,
Determination means for determining the sample concentration on the workpiece surface based on the corrected fluorescence intensity;
Have
The variation factor calculation means includes:
Excitation light intensity acquisition means for acquiring the excitation light intensity of excitation light partially reflected on the fluorescent paint surface of the workpiece and reflected by the excitation light reflection layer that reflects the excitation light;
Based on this reflected excitation light intensity, it is an influence calculation means that calculates the influence of the fluorescence intensity fluctuation factor depending on the sample concentration, and matches the relationship between the position of the excitation light reflection layer and the excitation light intensity of the reflected excitation light. Matching means, estimation means for estimating excitation light on the entire workpiece surface by interpolating between the excitation light reflecting layers, and theoretical intensity calculation for estimating the theoretical fluorescence intensity on the entire workpiece surface from the estimated excitation light Means for comparing the theoretical fluorescence intensity with the fluorescence intensity, and calculating the influence of the fluorescence intensity variation factor depending on the sample concentration based on the comparison result;
Having a device . Fluorescence is generated by irradiating excitation light onto the surface of the fluorescent paint applied on the work surface in the sample atmosphere, and the sample concentration on the work surface is detected by a computer by acquiring the fluorescence intensity. A detection program,
Acquire fluorescence intensity of fluorescence generated by irradiation of excitation light,
At the same time as acquiring this fluorescence intensity, the excitation light intensity of the excitation light reflected by the excitation light reflecting layer that is partially coated on the fluorescent paint surface of the workpiece and reflects the excitation light is acquired,
Match the relationship between the position of the excitation light reflecting layer and the excitation light intensity of the reflected excitation light,
Interpolate between the excitation light reflecting layers to estimate the excitation light on the entire workpiece surface,
The theoretical fluorescence intensity of the entire workpiece surface is estimated from this estimated excitation light,
Compare this theoretical fluorescence intensity with the fluorescence intensity,
Based on this comparison result, the influence of the fluorescence intensity fluctuation factor due to the sample concentration independence is calculated,
Based on the influence of this fluorescence intensity variation factor, the fluorescence intensity is corrected,
Program determining sample concentration of the workpiece surface based on the fluorescence intensity after the correction.

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