JP4135013B2 - 試料作製装置 - Google Patents

試料作製装置 Download PDF

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Publication number
JP4135013B2
JP4135013B2 JP2005362596A JP2005362596A JP4135013B2 JP 4135013 B2 JP4135013 B2 JP 4135013B2 JP 2005362596 A JP2005362596 A JP 2005362596A JP 2005362596 A JP2005362596 A JP 2005362596A JP 4135013 B2 JP4135013 B2 JP 4135013B2
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JP
Japan
Prior art keywords
sample
cartridge
chamber
wafer
transfer chamber
Prior art date
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Expired - Lifetime
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JP2005362596A
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English (en)
Japanese (ja)
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JP2006119150A5 (enExample
JP2006119150A (ja
Inventor
秀夫 鹿島
広康 志知
英巳 小池
浩之 鈴木
聡 富松
宗行 福田
幸二 金杉
正作 山岡
昌和 菅谷
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2005362596A priority Critical patent/JP4135013B2/ja
Publication of JP2006119150A publication Critical patent/JP2006119150A/ja
Publication of JP2006119150A5 publication Critical patent/JP2006119150A5/ja
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Publication of JP4135013B2 publication Critical patent/JP4135013B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2005362596A 2005-12-16 2005-12-16 試料作製装置 Expired - Lifetime JP4135013B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005362596A JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005362596A JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001176475A Division JP3778008B2 (ja) 2001-06-12 2001-06-12 試料作製装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007335609A Division JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Publications (3)

Publication Number Publication Date
JP2006119150A JP2006119150A (ja) 2006-05-11
JP2006119150A5 JP2006119150A5 (enExample) 2006-11-24
JP4135013B2 true JP4135013B2 (ja) 2008-08-20

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ID=36537144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005362596A Expired - Lifetime JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Country Status (1)

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JP (1) JP4135013B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116445266B (zh) * 2023-06-14 2023-09-12 至美时代生物智能科技(北京)有限公司 一种空气微生物自动采样及检测装置

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Publication number Publication date
JP2006119150A (ja) 2006-05-11

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