JP4134627B2 - 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 - Google Patents
窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 Download PDFInfo
- Publication number
- JP4134627B2 JP4134627B2 JP2002225488A JP2002225488A JP4134627B2 JP 4134627 B2 JP4134627 B2 JP 4134627B2 JP 2002225488 A JP2002225488 A JP 2002225488A JP 2002225488 A JP2002225488 A JP 2002225488A JP 4134627 B2 JP4134627 B2 JP 4134627B2
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- Prior art keywords
- piezoelectric film
- electrode
- acoustic wave
- electrode fingers
- wave device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002225488A JP4134627B2 (ja) | 2002-08-02 | 2002-08-02 | 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002225488A JP4134627B2 (ja) | 2002-08-02 | 2002-08-02 | 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004072204A JP2004072204A (ja) | 2004-03-04 |
| JP2004072204A5 JP2004072204A5 (https=) | 2005-10-20 |
| JP4134627B2 true JP4134627B2 (ja) | 2008-08-20 |
Family
ID=32013098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002225488A Expired - Fee Related JP4134627B2 (ja) | 2002-08-02 | 2002-08-02 | 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4134627B2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007202087A (ja) | 2005-05-11 | 2007-08-09 | Seiko Epson Corp | ラム波型高周波デバイス |
| KR100904368B1 (ko) * | 2005-10-19 | 2009-06-23 | 가부시키가이샤 무라타 세이사쿠쇼 | 램파 디바이스 |
| JP4315174B2 (ja) * | 2006-02-16 | 2009-08-19 | セイコーエプソン株式会社 | ラム波型高周波デバイスの製造方法 |
| CN108470823B (zh) * | 2018-04-12 | 2021-09-07 | 中国电子科技集团公司第四十九研究所 | 一种用于高分子薄膜的高压电极化系统 |
| WO2021060522A1 (ja) * | 2019-09-27 | 2021-04-01 | 株式会社村田製作所 | 弾性波装置 |
| US12308825B2 (en) * | 2021-02-12 | 2025-05-20 | Murata Manufacturing Co., Ltd | Transversely-excited film bulk acoustic resonators with narrow gaps between busbars and ends of interdigital transducer fingers |
-
2002
- 2002-08-02 JP JP2002225488A patent/JP4134627B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004072204A (ja) | 2004-03-04 |
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