JP4131990B2 - 超低温での零シフト非線形性を補償する圧力センサ - Google Patents

超低温での零シフト非線形性を補償する圧力センサ Download PDF

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JP4131990B2
JP4131990B2 JP54786099A JP54786099A JP4131990B2 JP 4131990 B2 JP4131990 B2 JP 4131990B2 JP 54786099 A JP54786099 A JP 54786099A JP 54786099 A JP54786099 A JP 54786099A JP 4131990 B2 JP4131990 B2 JP 4131990B2
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Prior art keywords
resistance
pressure sensor
temperature
bridge
parallel
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Japanese (ja)
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JP2001527652A (ja
JP2001527652A5 (enExample
Inventor
アビス，ジャン−ベルナール
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ソシエテ・ナシオナル・デテユード・エ・ドウ・コンストリユクシオン・ドウ・モトール・ダヴイアシオン、“エス．エヌ．ウ．セ．エム．アー．”
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP54786099A 1998-03-20 1999-03-19 超低温での零シフト非線形性を補償する圧力センサ Expired - Lifetime JP4131990B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR98/03437 1998-03-20
FR9803437A FR2776384B1 (fr) 1998-03-20 1998-03-20 Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures
PCT/FR1999/000637 WO1999049288A1 (fr) 1998-03-20 1999-03-19 Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures

Publications (3)

Publication Number Publication Date
JP2001527652A JP2001527652A (ja) 2001-12-25
JP2001527652A5 JP2001527652A5 (enExample) 2007-03-22
JP4131990B2 true JP4131990B2 (ja) 2008-08-13

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ID=9524275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54786099A Expired - Lifetime JP4131990B2 (ja) 1998-03-20 1999-03-19 超低温での零シフト非線形性を補償する圧力センサ

Country Status (8)

Country Link
US (1) US6314815B1 (enExample)
EP (1) EP0990128B1 (enExample)
JP (1) JP4131990B2 (enExample)
CN (1) CN1144032C (enExample)
DE (1) DE69926847T2 (enExample)
ES (1) ES2246565T3 (enExample)
FR (1) FR2776384B1 (enExample)
WO (1) WO1999049288A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6701790B2 (en) * 2002-06-13 2004-03-09 Mykrolis Corporation Temperature regulator for use with a pressure sensing device
CN101275876B (zh) * 2007-03-27 2011-05-11 豪威国际控股有限公司 压力传感器信号调理集成电路的桥臂平衡补偿电阻的设计方法
JP5066010B2 (ja) * 2008-06-09 2012-11-07 株式会社タニタ 多点式秤及びその製造方法
US7938016B2 (en) * 2009-03-20 2011-05-10 Freescale Semiconductor, Inc. Multiple layer strain gauge
CN101887081B (zh) * 2010-06-29 2012-09-05 三一重工股份有限公司 一种电桥零点调节电路
CN102252700B (zh) * 2011-04-29 2012-08-22 中北大学 微悬臂梁压阻电桥式传感器检测仪
JP6490039B2 (ja) * 2016-10-21 2019-03-27 ミネベアミツミ株式会社 ひずみゲージ
CN106595832B (zh) * 2016-12-07 2023-05-02 锐马（福建）电气制造有限公司 一种称重传感器零点漂移补偿工作台
CN106802170B (zh) * 2016-12-30 2019-07-19 北京七星华创流量计有限公司 流量传感器、质量流量输送测控装置及其温漂抑制方法
CN110823446B (zh) * 2019-10-18 2022-01-07 成都凯天电子股份有限公司 硅压阻式压力传感器二次温度补偿零点调试方法
CN116097073B (zh) * 2020-09-18 2024-09-03 深圳纽迪瑞科技开发有限公司 温度压力传感器及电子设备
CN113639903A (zh) * 2021-07-13 2021-11-12 西安理工大学 一种fdm打印过程应力检测方法
CN115342961B (zh) * 2022-08-12 2025-07-22 江阴市埃夫隆电子科技有限公司 丝线张力仪桥式传感器温漂抑制电路
CN117030098B (zh) * 2023-09-28 2024-02-27 无锡菲欧科技有限公司 一种拥有温度补偿的双压力输出传感器
CN118518319A (zh) * 2024-07-24 2024-08-20 中国空气动力研究与发展中心超高速空气动力研究所 一种补偿电阻阻值调节方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645136A (en) * 1970-04-15 1972-02-29 Charles W Calhoun Fluid pressure measuring device
JPS55163880A (en) * 1979-06-07 1980-12-20 Hitachi Ltd Semiconductor strain gauge bridge circuit
US4333349A (en) * 1980-10-06 1982-06-08 Kulite Semiconductor Products, Inc. Binary balancing apparatus for semiconductor transducer structures
FR2497346A1 (fr) * 1980-12-31 1982-07-02 Gi Teploene Transducteur extensometrique a semi-conducteurs
US4414853A (en) * 1981-08-10 1983-11-15 The Foxboro Company Pressure transmitter employing non-linear temperature compensation
JPS62121302A (ja) * 1985-11-21 1987-06-02 Kyowa Electronic Instr Corp Ltd ひずみゲ−ジ式変換器における温度補償回路およびその温度補償方法
JPH0797010B2 (ja) * 1986-03-26 1995-10-18 株式会社日立製作所 半導体歪ゲ−ジブリツジ回路
WO1996017236A1 (en) * 1994-12-02 1996-06-06 Getinge Ab A temperature compensation method in pressure sensors

Also Published As

Publication number Publication date
JP2001527652A (ja) 2001-12-25
ES2246565T3 (es) 2006-02-16
DE69926847D1 (de) 2005-09-29
FR2776384B1 (fr) 2000-06-23
US6314815B1 (en) 2001-11-13
CN1262738A (zh) 2000-08-09
EP0990128A1 (fr) 2000-04-05
DE69926847T2 (de) 2006-06-29
CN1144032C (zh) 2004-03-31
WO1999049288A1 (fr) 1999-09-30
EP0990128B1 (fr) 2005-08-24
FR2776384A1 (fr) 1999-09-24

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