JP2001527652A - 超低温での零シフト非線形性を補償する圧力センサ - Google Patents
超低温での零シフト非線形性を補償する圧力センサInfo
- Publication number
- JP2001527652A JP2001527652A JP54786099A JP54786099A JP2001527652A JP 2001527652 A JP2001527652 A JP 2001527652A JP 54786099 A JP54786099 A JP 54786099A JP 54786099 A JP54786099 A JP 54786099A JP 2001527652 A JP2001527652 A JP 2001527652A
- Authority
- JP
- Japan
- Prior art keywords
- bridge
- resistance
- temperature
- resistor
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.ホイートストンブリッジ(10)のそれぞれのアームに取り付けられた歪ゲ ージ(J1〜J4)と、ブリッジの零ドリフトを温度の関数として補償する手段と を有する圧力センサであって、 超低温における零ドリフトの非線形性を補償するために、ブリッジ(10)の アームの少なくとも一つの歪ゲージを、歪ゲージよりも抵抗がかなり小さく補償 回路と並列に接続された抵抗器(c)と直列に配設し、補償回路は、その一部を 形成する並列回路の抵抗に影響を及ぼし、超低温域で温度が低下するにつれて増 大するように温度の関数として抵抗が変化する抵抗素子を有することを特徴とす る圧力センサ。 2.補償回路(20)は、歪ゲージをブリッジのコーナーに接続する接続リード (c)により構成された抵抗器と並列に接続されたことを特徴とする請求項1に 記載の方法。 3.歪ゲージ(J1〜J4)と、歪ゲージをブリッジ(10)のコーナーに接続す る接続リード(c)とが、基板上の金属の付着層により構成されたことを特徴と する請求項2に記載の方法。 4.接続リード(c)が金で作製されていることを特徴とする請求項3に記載の 方法。 5.上記抵抗素子(P)が並列に接続された抵抗器(c)の抵抗に対する抵抗素 子の抵抗の割合が、温度が−196℃以下に低下すると、100よりも小さく、 その後温度の低下とともに減少することを特徴とする請求項1乃至4のいずれか 1項に記載の方法。 6.上記抵抗素子(P)が、少なくとも一つのプラチナプローブにより構成され ていることを特徴とする請求項1乃至5のいずれか1項に記載の方法。 7.上記補償回路(20)が、上記抵抗素子(P)と直列に接続された調整可能 な抵抗器(R)を備えていることを特徴とする請求項1乃至6のいずれか1項に 記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9803437A FR2776384B1 (fr) | 1998-03-20 | 1998-03-20 | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
FR98/03437 | 1998-03-20 | ||
PCT/FR1999/000637 WO1999049288A1 (fr) | 1998-03-20 | 1999-03-19 | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001527652A true JP2001527652A (ja) | 2001-12-25 |
JP2001527652A5 JP2001527652A5 (ja) | 2007-03-22 |
JP4131990B2 JP4131990B2 (ja) | 2008-08-13 |
Family
ID=9524275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54786099A Expired - Lifetime JP4131990B2 (ja) | 1998-03-20 | 1999-03-19 | 超低温での零シフト非線形性を補償する圧力センサ |
Country Status (8)
Country | Link |
---|---|
US (1) | US6314815B1 (ja) |
EP (1) | EP0990128B1 (ja) |
JP (1) | JP4131990B2 (ja) |
CN (1) | CN1144032C (ja) |
DE (1) | DE69926847T2 (ja) |
ES (1) | ES2246565T3 (ja) |
FR (1) | FR2776384B1 (ja) |
WO (1) | WO1999049288A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6701790B2 (en) * | 2002-06-13 | 2004-03-09 | Mykrolis Corporation | Temperature regulator for use with a pressure sensing device |
CN101275876B (zh) * | 2007-03-27 | 2011-05-11 | 豪威国际控股有限公司 | 压力传感器信号调理集成电路的桥臂平衡补偿电阻的设计方法 |
JP5066010B2 (ja) * | 2008-06-09 | 2012-11-07 | 株式会社タニタ | 多点式秤及びその製造方法 |
US7938016B2 (en) * | 2009-03-20 | 2011-05-10 | Freescale Semiconductor, Inc. | Multiple layer strain gauge |
CN101887081B (zh) * | 2010-06-29 | 2012-09-05 | 三一重工股份有限公司 | 一种电桥零点调节电路 |
CN102252700B (zh) * | 2011-04-29 | 2012-08-22 | 中北大学 | 微悬臂梁压阻电桥式传感器检测仪 |
JP6490039B2 (ja) * | 2016-10-21 | 2019-03-27 | ミネベアミツミ株式会社 | ひずみゲージ |
CN106595832B (zh) * | 2016-12-07 | 2023-05-02 | 锐马(福建)电气制造有限公司 | 一种称重传感器零点漂移补偿工作台 |
CN106802170B (zh) * | 2016-12-30 | 2019-07-19 | 北京七星华创流量计有限公司 | 流量传感器、质量流量输送测控装置及其温漂抑制方法 |
CN110823446B (zh) * | 2019-10-18 | 2022-01-07 | 成都凯天电子股份有限公司 | 硅压阻式压力传感器二次温度补偿零点调试方法 |
CN113639903A (zh) * | 2021-07-13 | 2021-11-12 | 西安理工大学 | 一种fdm打印过程应力检测方法 |
CN117030098B (zh) * | 2023-09-28 | 2024-02-27 | 无锡菲欧科技有限公司 | 一种拥有温度补偿的双压力输出传感器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3645136A (en) * | 1970-04-15 | 1972-02-29 | Charles W Calhoun | Fluid pressure measuring device |
JPS55163880A (en) * | 1979-06-07 | 1980-12-20 | Hitachi Ltd | Semiconductor strain gauge bridge circuit |
US4333349A (en) * | 1980-10-06 | 1982-06-08 | Kulite Semiconductor Products, Inc. | Binary balancing apparatus for semiconductor transducer structures |
FR2497346A1 (fr) * | 1980-12-31 | 1982-07-02 | Gi Teploene | Transducteur extensometrique a semi-conducteurs |
US4414853A (en) * | 1981-08-10 | 1983-11-15 | The Foxboro Company | Pressure transmitter employing non-linear temperature compensation |
JPS62121302A (ja) * | 1985-11-21 | 1987-06-02 | Kyowa Electronic Instr Corp Ltd | ひずみゲ−ジ式変換器における温度補償回路およびその温度補償方法 |
JPH0797010B2 (ja) * | 1986-03-26 | 1995-10-18 | 株式会社日立製作所 | 半導体歪ゲ−ジブリツジ回路 |
JPH11511849A (ja) * | 1994-12-02 | 1999-10-12 | ゲッティンゲ アーベー | 圧力センサにおける温度補償方法 |
-
1998
- 1998-03-20 FR FR9803437A patent/FR2776384B1/fr not_active Expired - Fee Related
-
1999
- 1999-03-19 WO PCT/FR1999/000637 patent/WO1999049288A1/fr active IP Right Grant
- 1999-03-19 ES ES99910415T patent/ES2246565T3/es not_active Expired - Lifetime
- 1999-03-19 CN CNB998003352A patent/CN1144032C/zh not_active Expired - Lifetime
- 1999-03-19 EP EP99910415A patent/EP0990128B1/fr not_active Expired - Lifetime
- 1999-03-19 DE DE69926847T patent/DE69926847T2/de not_active Expired - Lifetime
- 1999-03-19 JP JP54786099A patent/JP4131990B2/ja not_active Expired - Lifetime
- 1999-03-19 US US09/424,161 patent/US6314815B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2776384A1 (fr) | 1999-09-24 |
CN1262738A (zh) | 2000-08-09 |
FR2776384B1 (fr) | 2000-06-23 |
US6314815B1 (en) | 2001-11-13 |
EP0990128A1 (fr) | 2000-04-05 |
DE69926847T2 (de) | 2006-06-29 |
EP0990128B1 (fr) | 2005-08-24 |
ES2246565T3 (es) | 2006-02-16 |
JP4131990B2 (ja) | 2008-08-13 |
WO1999049288A1 (fr) | 1999-09-30 |
DE69926847D1 (de) | 2005-09-29 |
CN1144032C (zh) | 2004-03-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2000515623A (ja) | ブリッジの主抵抗間の温度勾配を補正するホイーストンブリッジ及びひずみゲージを有する圧力センサにおけるその適用 | |
US10942048B2 (en) | Sensor chip used for multi-physical quantity measurement and preparation method thereof | |
US4911016A (en) | Semiconductor strain gauge bridge circuit | |
JP2001527652A (ja) | 超低温での零シフト非線形性を補償する圧力センサ | |
US7343808B2 (en) | Line pressure compensated differential pressure transducer assembly | |
US3184962A (en) | Strain type transducers | |
JPH038482B2 (ja) | ||
CN109668674A (zh) | 一种硅压阻式压力传感器的高精度温度补偿电路及方法 | |
US5184520A (en) | Load sensor | |
KR100414516B1 (ko) | 스트레인 게이지 스트립 및 그의 적용 장치 | |
Prudenziati et al. | Piezoresistive Properties of Thick‐film Resistors An Overview | |
WO2004104538A1 (en) | Customized span compensation of (soi pressure) sensor with leadout resistance having heavy and light implant portions | |
US7714591B2 (en) | Apparatus and methods for linearizing piezoresistive wheatstone bridges | |
US3448607A (en) | Strain gauge temperature compensation system | |
Stankevič et al. | Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors | |
EP1913355A1 (en) | Thermal conductivity gauge | |
JP2001221696A (ja) | 感温感歪複合センサ | |
Chou et al. | An innovative Pirani pressure sensor | |
JPS6222272B2 (ja) | ||
JPH0455542B2 (ja) | ||
JPS6212458B2 (ja) | ||
RU2244970C1 (ru) | Способ изготовления термокомпенсированного тензорезистора | |
JPH0339569B2 (ja) | ||
JPH04131721A (ja) | 応力センサ | |
Pandey et al. | LTCC based Passive Compensation Circuits for High Temperature Sensors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060111 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060111 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071127 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080226 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080318 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080414 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080507 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080530 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110606 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110606 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120606 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130606 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |