DE69926847T2 - Druckwandler mit kompensation der nichtlinearität der nulldrift für tiefe temperaturen - Google Patents
Druckwandler mit kompensation der nichtlinearität der nulldrift für tiefe temperaturen Download PDFInfo
- Publication number
- DE69926847T2 DE69926847T2 DE69926847T DE69926847T DE69926847T2 DE 69926847 T2 DE69926847 T2 DE 69926847T2 DE 69926847 T DE69926847 T DE 69926847T DE 69926847 T DE69926847 T DE 69926847T DE 69926847 T2 DE69926847 T2 DE 69926847T2
- Authority
- DE
- Germany
- Prior art keywords
- bridge
- temperature
- compensation
- resistive element
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910018487 Ni—Cr Inorganic materials 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical group [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Force In General (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9803437 | 1998-03-20 | ||
| FR9803437A FR2776384B1 (fr) | 1998-03-20 | 1998-03-20 | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
| PCT/FR1999/000637 WO1999049288A1 (fr) | 1998-03-20 | 1999-03-19 | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69926847D1 DE69926847D1 (de) | 2005-09-29 |
| DE69926847T2 true DE69926847T2 (de) | 2006-06-29 |
Family
ID=9524275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69926847T Expired - Lifetime DE69926847T2 (de) | 1998-03-20 | 1999-03-19 | Druckwandler mit kompensation der nichtlinearität der nulldrift für tiefe temperaturen |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6314815B1 (enExample) |
| EP (1) | EP0990128B1 (enExample) |
| JP (1) | JP4131990B2 (enExample) |
| CN (1) | CN1144032C (enExample) |
| DE (1) | DE69926847T2 (enExample) |
| ES (1) | ES2246565T3 (enExample) |
| FR (1) | FR2776384B1 (enExample) |
| WO (1) | WO1999049288A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6701790B2 (en) * | 2002-06-13 | 2004-03-09 | Mykrolis Corporation | Temperature regulator for use with a pressure sensing device |
| CN101275876B (zh) * | 2007-03-27 | 2011-05-11 | 豪威国际控股有限公司 | 压力传感器信号调理集成电路的桥臂平衡补偿电阻的设计方法 |
| JP5066010B2 (ja) * | 2008-06-09 | 2012-11-07 | 株式会社タニタ | 多点式秤及びその製造方法 |
| US7938016B2 (en) * | 2009-03-20 | 2011-05-10 | Freescale Semiconductor, Inc. | Multiple layer strain gauge |
| CN101887081B (zh) * | 2010-06-29 | 2012-09-05 | 三一重工股份有限公司 | 一种电桥零点调节电路 |
| CN102252700B (zh) * | 2011-04-29 | 2012-08-22 | 中北大学 | 微悬臂梁压阻电桥式传感器检测仪 |
| JP6490039B2 (ja) * | 2016-10-21 | 2019-03-27 | ミネベアミツミ株式会社 | ひずみゲージ |
| CN106595832B (zh) * | 2016-12-07 | 2023-05-02 | 锐马（福建）电气制造有限公司 | 一种称重传感器零点漂移补偿工作台 |
| CN106802170B (zh) * | 2016-12-30 | 2019-07-19 | 北京七星华创流量计有限公司 | 流量传感器、质量流量输送测控装置及其温漂抑制方法 |
| CN110823446B (zh) * | 2019-10-18 | 2022-01-07 | 成都凯天电子股份有限公司 | 硅压阻式压力传感器二次温度补偿零点调试方法 |
| CN116097073B (zh) * | 2020-09-18 | 2024-09-03 | 深圳纽迪瑞科技开发有限公司 | 温度压力传感器及电子设备 |
| CN113639903A (zh) * | 2021-07-13 | 2021-11-12 | 西安理工大学 | 一种fdm打印过程应力检测方法 |
| CN115342961B (zh) * | 2022-08-12 | 2025-07-22 | 江阴市埃夫隆电子科技有限公司 | 丝线张力仪桥式传感器温漂抑制电路 |
| CN117030098B (zh) * | 2023-09-28 | 2024-02-27 | 无锡菲欧科技有限公司 | 一种拥有温度补偿的双压力输出传感器 |
| CN118518319A (zh) * | 2024-07-24 | 2024-08-20 | 中国空气动力研究与发展中心超高速空气动力研究所 | 一种补偿电阻阻值调节方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3645136A (en) * | 1970-04-15 | 1972-02-29 | Charles W Calhoun | Fluid pressure measuring device |
| JPS55163880A (en) * | 1979-06-07 | 1980-12-20 | Hitachi Ltd | Semiconductor strain gauge bridge circuit |
| US4333349A (en) * | 1980-10-06 | 1982-06-08 | Kulite Semiconductor Products, Inc. | Binary balancing apparatus for semiconductor transducer structures |
| FR2497346A1 (fr) * | 1980-12-31 | 1982-07-02 | Gi Teploene | Transducteur extensometrique a semi-conducteurs |
| US4414853A (en) * | 1981-08-10 | 1983-11-15 | The Foxboro Company | Pressure transmitter employing non-linear temperature compensation |
| JPS62121302A (ja) * | 1985-11-21 | 1987-06-02 | Kyowa Electronic Instr Corp Ltd | ひずみゲ−ジ式変換器における温度補償回路およびその温度補償方法 |
| JPH0797010B2 (ja) * | 1986-03-26 | 1995-10-18 | 株式会社日立製作所 | 半導体歪ゲ−ジブリツジ回路 |
| EP0803054B1 (en) * | 1994-12-02 | 1999-06-16 | Getinge Ab | A temperature compensation method in pressure sensors |
-
1998
- 1998-03-20 FR FR9803437A patent/FR2776384B1/fr not_active Expired - Fee Related
-
1999
- 1999-03-19 WO PCT/FR1999/000637 patent/WO1999049288A1/fr not_active Ceased
- 1999-03-19 DE DE69926847T patent/DE69926847T2/de not_active Expired - Lifetime
- 1999-03-19 CN CNB998003352A patent/CN1144032C/zh not_active Expired - Lifetime
- 1999-03-19 JP JP54786099A patent/JP4131990B2/ja not_active Expired - Lifetime
- 1999-03-19 US US09/424,161 patent/US6314815B1/en not_active Expired - Lifetime
- 1999-03-19 ES ES99910415T patent/ES2246565T3/es not_active Expired - Lifetime
- 1999-03-19 EP EP99910415A patent/EP0990128B1/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1144032C (zh) | 2004-03-31 |
| CN1262738A (zh) | 2000-08-09 |
| US6314815B1 (en) | 2001-11-13 |
| ES2246565T3 (es) | 2006-02-16 |
| EP0990128B1 (fr) | 2005-08-24 |
| WO1999049288A1 (fr) | 1999-09-30 |
| FR2776384A1 (fr) | 1999-09-24 |
| JP2001527652A (ja) | 2001-12-25 |
| EP0990128A1 (fr) | 2000-04-05 |
| JP4131990B2 (ja) | 2008-08-13 |
| DE69926847D1 (de) | 2005-09-29 |
| FR2776384B1 (fr) | 2000-06-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8328 | Change in the person/name/address of the agent |
Representative=s name: CBDL PATENTANWAELTE, 47051 DUISBURG |
|
| 8364 | No opposition during term of opposition | ||
| R082 | Change of representative |
Ref document number: 990128 Country of ref document: EP Representative=s name: CBDL PATENTANWAELTE, DE |