JP4119658B2 - 易重合性物質取扱設備における易重合性物質の重合抑制方法 - Google Patents

易重合性物質取扱設備における易重合性物質の重合抑制方法 Download PDF

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Publication number
JP4119658B2
JP4119658B2 JP2002074835A JP2002074835A JP4119658B2 JP 4119658 B2 JP4119658 B2 JP 4119658B2 JP 2002074835 A JP2002074835 A JP 2002074835A JP 2002074835 A JP2002074835 A JP 2002074835A JP 4119658 B2 JP4119658 B2 JP 4119658B2
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Prior art keywords
bellows
easily polymerizable
polymerizable substance
pipe
meth
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Expired - Lifetime
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JP2002074835A
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English (en)
Japanese (ja)
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JP2003267916A5 (enExample
JP2003267916A (ja
Inventor
佳正 安藤
靖弘 加峯
幸樹 梅沢
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Mitsubishi Chemical Corp
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Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
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Priority to JP2002074835A priority Critical patent/JP4119658B2/ja
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Publication of JP2003267916A5 publication Critical patent/JP2003267916A5/ja
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Publication of JP4119658B2 publication Critical patent/JP4119658B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Joints Allowing Movement (AREA)
  • Diaphragms And Bellows (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2002074835A 2002-03-18 2002-03-18 易重合性物質取扱設備における易重合性物質の重合抑制方法 Expired - Lifetime JP4119658B2 (ja)

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JP2002074835A JP4119658B2 (ja) 2002-03-18 2002-03-18 易重合性物質取扱設備における易重合性物質の重合抑制方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002074835A JP4119658B2 (ja) 2002-03-18 2002-03-18 易重合性物質取扱設備における易重合性物質の重合抑制方法

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JP2003267916A JP2003267916A (ja) 2003-09-25
JP2003267916A5 JP2003267916A5 (enExample) 2005-09-02
JP4119658B2 true JP4119658B2 (ja) 2008-07-16

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4443904B2 (ja) * 2003-12-03 2010-03-31 株式会社荏原製作所 ポンプシステム
US8648977B2 (en) 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
CN1778986B (zh) 2004-06-02 2015-08-19 应用材料公司 用于密封腔室的方法和装置
JP4689398B2 (ja) * 2004-08-02 2011-05-25 アプライド マテリアルズ インコーポレイテッド チャンバ用ドアの為に浮動シールを与える方法および装置
JP5287411B2 (ja) * 2009-03-26 2013-09-11 Ｊｆｅスチール株式会社 エキスパンション継手

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