JP4099292B2 - Substrate cleaning device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement in a substrate cleaning apparatus for cleaning an electrode formed on a substrate surface.
[0002]
[Prior art]
A substrate such as a liquid crystal panel is configured such that a plurality of electrodes are arranged along the edge of the substrate, and electronic components are bonded and mounted on the electrodes by TCP (Tape Carrier Package) or flip chip. .
[0003]
For example, an anisotropic conductive film is affixed on the electrode surface and the electrode and the electronic component are bonded via the anisotropic conductive film, and an electrically good conductive state is obtained at the bonded portion. In order to achieve this, it is necessary that dust is not attached to the electrode surface in advance or it is not dirty. Therefore, conventionally, a cleaning device for wiping and cleaning the substrate electrode surface is used prior to attaching the anisotropic conductive film.
[0004]
The conventional substrate cleaning device is designed to remove dirt and dust by sliding the sheet sequentially while dropping a volatile solvent such as ethanol as a cleaning solution from the nozzle onto the sheet, and moving relative to the electrode surface. Was configured.
[0005]
[Problems to be solved by the invention]
As described above, the conventional substrate cleaning device is configured so that a volatile solvent is dropped into a sheet so as to remove dirt on the electrode surface, and the electrode surface of the substrate is wiped by relative contact movement. It had been.
[0006]
However, since the solvent is dripped from a nozzle having a thin tip, clogging is often caused, or bubbles are mixed in the solvent and the solvent is not properly dripped.
[0007]
When the solvent is not dripped onto the sheet surface and the dry sheet comes into contact with the substrate electrode surface, static electricity is generated due to friction between the substrate surface and the dried tape, and this static electricity is transferred to the substrate via the electrode. There was a risk of destroying the circuit elements formed inside.
[0008]
In particular, a liquid crystal display panel on which circuit elements such as TFTs (thin film transistors) are mounted is required to be improved because it is weak against static electricity and easily broken.
[0009]
[Means for Solving the Problems]
The present invention has been made to solve the above-described conventional problems. In a substrate cleaning apparatus, a substrate transported with a plurality of electrodes arranged in an edge, and the electrodes of the transported substrate. A sheet that removes dirt on the electrode surface by contacting the electrode while moving relative to the electrode, and a nozzle that drops a solvent toward the sheet surface before contacting the electrode of the sheet, Detecting means for detecting the presence or absence of a solvent dripped from the nozzle or a dripping amount of the solvent per unit time , and the sheet is configured to perform cleaning by contacting the same electrode a plurality of times. is, that the amount of the solvent to be dropped to the sheet in contact with the previously said electrodes are configured to be larger than the amount of the solvent to be dropped and then the contact with the sheet for cleaning And features.
[0010]
As described above, the substrate cleaning apparatus according to the present invention includes detection means, detects the presence or absence of the solvent dripping or the dripping amount per unit time, and immediately detects this when the solvent is not properly dripped. Since the cleaning can be stopped upon detection, it is possible to prevent the circuit in the substrate from being destroyed due to the generation of static electricity.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of a substrate cleaning apparatus according to the present invention will be described in detail with reference to FIGS.
[0012]
FIG. 1 is a front view showing a first embodiment of a substrate cleaning apparatus according to the present invention, FIG. 2 is a right side view of the apparatus shown in FIG. 1, and FIG. It is sectional drawing which looked at.
[0013]
That is, as shown in FIGS. 1 to 3, the substrate 2 is sucked and held on the positioning and conveying table 1 composed of an XY table, and the substrate 2 is conveyed in the arrow X direction. A plurality of electrodes are arranged in a row on the edge of the substrate 2, and the edge of the substrate 2 being conveyed is sandwiched from the top and bottom on the front surface of the apparatus body 3. Tape-like sheets 4a and 4b formed of a low dust generation cloth are respectively supplied from the supply reels 5a and 5b to the first to third relay rollers 61a and 61b, 62a and 62b, 63a and 63b, and windings. It is wound around take-up reels 8a and 8b via take-up rollers 7a and 7b, and these are arranged so as to be positioned vertically symmetrically about the substrate 2. Motors 5aa, 5ba, 8aa, 8ba for applying appropriate tension to the sheets 4a, 4b are connected to the rotation center shafts of the supply reels 5a, 5b and the take-up reels 8a, 8b, respectively. Drive motors 7aa and 7ba for driving the take-up rollers 7a and 7b are connected to the respective rotation centers of the take-up rollers 7a and 7b, and are respectively installed in the apparatus main body 3.
[0014]
As shown in the partially enlarged view of FIG. 4, the pressing rollers 9a and 9b that can move up and down in the direction of the arrow Z are arranged between the second and third relay rollers 62a and 63a and 62b and 63b. The sheet 4a, 4b is configured to be brought into contact with the electrode surface of the substrate 2 being conveyed by applying an appropriate pressing force.
[0015]
The pressing rollers 9a and 9b are respectively connected to the pressing upper and lower cylinders 9aa and 9ba, and the upper pressing roller 9a is pushed downward (downward) and the lower pressing roller 9b is pushed upward (upward). The sheets 4a and 4b are pressed and brought into contact with the electrode surface (not shown) of the substrate 2 and the back surface thereof, respectively.
[0016]
Further, a container 11 storing a volatile solvent 10 such as ethanol is placed on the apparatus main body 3, and the solvent 10 is supplied to the nozzles 14a and 14b by a pipe 13 via a dispenser 12 having a built-in pump. It is configured to be supplied.
[0017]
As shown in the partially enlarged view of FIG. 4, the nozzles 14a and 14b are provided with a solvent between the pressing rollers 9a and 9b and the second relay rollers 62a and 62b and on the surface of the conveyed sheets 4a and 4b. The solvent 10 is dropped on the sheets 4a and 4b before the pressing rollers 9a and 9b press the sheets 4a and 4b against the substrate 2.
[0018]
The sheets 4a and 4b are intermittently conveyed as the next pressing rollers 9a and 9b descend (9a) and ascend (9b), and the portion where the solvent 10 is dropped is formed between the pressing rollers 9a and 9b and the substrate 2 surface. The electrode surface of the substrate 2 and the back surface thereof are cleaned before the solvent 10 is volatilized by relative movement by conveyance of the substrate 2 on the XY table 1.
[0019]
In this embodiment, a sensor 15a as a detecting means is provided in the vicinity of the tip of each nozzle 14a, 14b.
[0020]
In addition, since the sensor 15 provided with respect to each nozzle 14a, 14b is the same structure, it demonstrates only the sensor 15a provided with respect to the nozzle 14a, and abbreviate | omits description about another sensor. As shown in FIGS. 4 and 5, the sensor 15 a is configured to detect and detect the solvent 10 immediately before dropping from the nozzle 14 a from a direction substantially perpendicular to the dropping direction.
[0021]
In this embodiment, the sensor 15a is composed of an optical sensor having a photoelectric conversion unit, and as shown in FIGS. 5A and 5B, the light receiving unit 15ab is disposed outside the light emitting unit 15aa. It was configured to be coaxial.
[0022]
That is, as shown by a broken line in FIG. 5A, the solvent 10 dripped from the nozzle 14a drops like a bowl from the tip of the nozzle 14a. It can be seen that the shape of the soot-like solvent 10 immediately before leaving the swell swells to a shape that is closest to a sphere, and at this time, the abdomen (most swollen part) of the soot-like solvent 10 is in a state most easily detected by the sensor 15 15a was comprised so that it might oppose the belly part of the saddle-like solvent 10 just before dripping from the edge part of the nozzle 14a.
[0023]
In this embodiment, an optical sensor is used as the sensor 15a. However, since the bowl-shaped solvent 10 that is an object has a spherical shape, the light-emitting portion 15aa has a convex surface toward the central portion P. Since the reflected light is reflected outward slightly, the light receiving portion 15ab is arranged outside the light emitting portion 15aa so that the solvent 10 can be detected efficiently.
[0024]
With the above-described configuration, the sensor 15a can obtain a light reception signal in a pulse form from the reflected light of the dropping solvent 10 that sequentially falls. The sensor 15a converts the light reception signal into an electrical signal by photoelectric conversion, and is applied to the apparatus main body 3 via the cable 16. It is supplied to the attached signal processing device 17. The signal processing device 17 detects the presence or absence of a pulsed reflection signal, counts the pulse signal with a built-in counting operation circuit, and calculates and displays the number of drops per unit time, that is, the amount of drops.
[0025]
Therefore, the worker can know whether or not the solvent 10 is properly dropped from the nozzles 14a (14b) by looking at the display of the processing result of the signal processing device 17. As a result, for example, a problem caused by the solvent 10 not being properly dropped on the sheet 4a (4b) due to clogging or air bubbles, that is, the dry sheet 4a (4b) contacts the electrode of the substrate 2 and the generated static electricity. Thus, an accident that damages the circuit element can be avoided in advance.
[0026]
In the above description, the solvent 10 has been described as being dropped on the upper and lower sheets 4a and 4b of the substrate 2. However, when the electrode is formed only on one surface of the substrate 2, that surface Alternatively, the solvent 10 may be dropped only on the sensor 15 and the sensor 15 may be attached.
[0027]
Next, in the first embodiment, the surface of the substrate 2 is cleaned once by the sheets 4a and 4b. However, the surface of the substrate 2 can be cleaned a plurality of times to further enhance the cleaning effect.
[0028]
That is, a second embodiment of the substrate cleaning apparatus according to the present invention configured to perform cleaning on the surface of the substrate 2 a plurality of times will be described with reference to FIG.
[0029]
FIG. 6 is an enlarged front view of a main part showing the second embodiment. Upper and lower cylinders 91aa, 92aa, 91ba, and 92ba are provided on the upper and lower sides of the substrate 2 on both sides of the second relay rollers 62a and 62b, respectively. A pair of driven pressing rollers 91a, 92a, 91b, and 92b are provided, respectively, and the substrate 2 is wiped twice by rough wiping and finishing wiping by the sheets 4a and 4b that circulate around the pressing rollers 91a, 92a, 91b, and 92b. Configured to be taken.
[0030]
That is, since the pressing rollers 92a and 92b and the pressing rollers 91a and 91b are arranged in the transport movement (X) direction of the substrate 2, the portion of the substrate 2 previously cleaned by the pressing rollers 92a and 92b is later pressed by the pressing rollers 91a and 91b. Wiping is performed, and the cleanliness of the surface of the substrate 2 can be increased by so-called wiping twice.
[0031]
Therefore, in this embodiment, corresponding to the installation of the pressing rollers 91a, 92a, 91b, and 92b, nozzles 141a, 142a, 141b, and 142b for dropping the volatile solvent 10 respectively, and the nozzles 141a (not shown). , 142a, 141b, 142b, sensors (15) are arranged.
[0032]
Further, in this embodiment, the dispenser 12 is configured so that the amount of the solvent 10 dripped by the nozzles 142a and 142b per unit time is larger than the amount of the solvent 10 dripped from the nozzles 141a and 141b to be dripped thereafter. Was controlled, and the solvent 10 was dropped in proportion to the degree of contamination, so that the solvent 10 was efficiently consumed with effective cleaning.
[0033]
At that time, the sliding speed of the sheets 4a and 4b and the distance between the pressing rollers 91a (92a) and 92a (92b) are adjusted, and the cleaning position of the sheets 4a and 4b is changed back and forth (that is, with the pressing rollers 91a and 91b). The pressing rollers 92a and 92b) can be set to be different from each other so that the portions of the sheets 4a and 4b to be cleaned do not overlap.
[0034]
Further, the pressing force of the rear pressing rollers 91a and 91b is made weaker than the pressing force of the front pressing rollers 92a and 92b, and at the same time, dripping of the solvent 10 from the nozzles 141a and 141b is stopped to perform so-called wiping. Further, even if static electricity is generated, the circuit element can be wiped off to the extent that it is not damaged, and the subsequent drying step can be omitted or simplified.
[0035]
In the embodiment shown in FIG. 6, as in the first embodiment, when the electrode is formed only on one of the surfaces of the substrate 2, the solvent 10 is dropped only on that surface. The other side may be made to function so as to simply remove adhesion of dust and the like.
[0036]
Further, in the above embodiment, as a countermeasure when the solvent 10 is not properly dropped, the apparatus may be stopped and an alarm may be issued or displayed. Means can be employed. Further, during the cleaning of the substrate 2, the feeding of the sheets 4a and 4b and the dropping of the solvent 10 may be stopped, or the sheets 4a and 4b may be conveyed at a predetermined speed while dropping a predetermined amount of the solvent 10. Also good.
[0037]
In any case, according to the cleaning of the substrate according to the present invention, the sensor can be provided to monitor the solvent dropped on the sheet and the optimum dripping state can be maintained. It is possible to solve the problem of damage.
[0038]
【The invention's effect】
The present invention can prevent circuit elements from being inadvertently damaged when cleaning a substrate, and can achieve a remarkable effect in practical use.
[Brief description of the drawings]
FIG. 1 is a front view showing a first embodiment of a substrate cleaning apparatus according to the present invention.
FIG. 2 is a right side view of the apparatus shown in FIG.
3 is a cross-sectional view taken along the line AA in FIG. 2;
4 is an enlarged view of a main part of the apparatus shown in FIG.
5A is an enlarged side view of the sensor shown in FIG. 4, and FIG. 5B is a front view of the sensor shown in FIG. 5A.
FIG. 6 is an enlarged front view of an essential part showing a second embodiment of a substrate cleaning apparatus according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 XY table 2 Board | substrate 3 Apparatus body 4a, 4b Sheet | seat 5a, 5b Supply reel 61a, 62a, 63a, 61b, 62b, 63b Relay roller 7a, 7b Winding roller 8a, 8b Winding reel 9a, 9b, 91a, 92a, 91b, 92b Pressing roller 10 Solvent 12 Dispenser 14a, 14b, 141a, 142a, 141b, 142b Nozzle 15a Sensor 15aa Light emitting part 15ab Light receiving part 16 Cable 17 Signal processing device

Claims (3)

A substrate that is transported by arranging a plurality of electrodes on the edge; and
A sheet that removes dirt on the electrode surface by contacting the electrode while being moved relative to the electrode in the direction of arrangement of the electrodes on the substrate to be conveyed;
A nozzle for dropping a solvent toward the sheet surface before contacting the electrode of the sheet;
A detecting means for detecting the presence or absence of solvent dripped from the nozzle or the amount of solvent dripped per unit time ;
The sheet is configured to perform cleaning by contacting the same electrode a plurality of times, and the amount of the solvent dripped onto the sheet that contacts the electrode first is contacted and cleaned thereafter. A substrate cleaning apparatus configured to be larger than an amount of the solvent dripped onto a sheet to be subjected to .   The substrate cleaning apparatus according to claim 1, wherein the detection unit is configured to detect the presence or absence of the solvent immediately before dropping from the opening of the nozzle.   The detecting means is arranged centering on a light emitting unit that emits light toward the solvent to be dropped, and a light receiving unit that receives reflected light from the solvent is arranged outside so as to surround the light emitting unit. The substrate cleaning apparatus according to claim 1, wherein the substrate cleaning apparatus is a configured sensor.

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