JP6215576B2 - Pasting device - Google Patents

Pasting device Download PDF

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Publication number
JP6215576B2
JP6215576B2 JP2013114908A JP2013114908A JP6215576B2 JP 6215576 B2 JP6215576 B2 JP 6215576B2 JP 2013114908 A JP2013114908 A JP 2013114908A JP 2013114908 A JP2013114908 A JP 2013114908A JP 6215576 B2 JP6215576 B2 JP 6215576B2
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film
substrate
unit
roller
sticking
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JP2014236031A (en
Inventor
浩 細田
浩 細田
晶彦 佐藤
晶彦 佐藤
正樹 千葉
正樹 千葉
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東京応化工業株式会社
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Description

  The present invention relates to a sticking device.

  2. Description of the Related Art Conventionally, there has been known an attaching device for attaching a film to a substrate while conveying the film (for example, see Patent Document 1).

Japanese Patent No. 4568374

  By the way, in the prior art, it is necessary to apply an adhesive to a film material before attaching to a substrate, and a coating apparatus for applying an adhesive (coating liquid) separately is required. Therefore, the provision of new technology that can efficiently attach the film to the substrate by performing the process of applying the adhesive to the film and the step of attaching the adhesive-applied film to the substrate in an integrated line. It is desired.

  This invention is made | formed in view of such a subject, and can perform a sticking operation | work efficiently and with high precision by performing the application | coating of an adhesive agent or an adhesive, and the sticking to a board | substrate by a consistent line. It aims at providing the sticking apparatus which can be performed.

To achieve the above object, sticking apparatus of the present invention includes a substrate transfer unit for transferring a substrate, and a film transport for conveying the film, a coating unit for applying a coating liquid to the film, the film on the substrate An affixing part to be affixed, a position detection part for detecting a relative position with respect to the substrate in the film width direction intersecting the transport direction in the film before being affixed to the substrate, and at least the position when the film is affixed A position correction mechanism that corrects the relative position based on the detection result of the detection unit, and the position correction mechanism functions as a part of the substrate transport unit and transports the roller pair while sandwiching the substrate. When a base portion for holding the roller pair includes a drive unit for driving said base portion in a width direction of the substrate, like that it has been conveyed by the substrate conveying unit And correcting the relative position with respect to the substrate.

  According to the sticking apparatus of the present invention, the coating process for applying the coating liquid to the film and the process for sticking the film to the substrate can be performed in a consistent line, so that the film can be efficiently attached to the substrate. Further, since the position correction mechanism corrects the relative position in the width direction of the film with respect to the substrate, that is, the positional deviation, the substrate and the film can be attached with high accuracy.

The pasting apparatus preferably further includes a substrate transport unit that transports the substrate and is formed integrally with the position correction mechanism.
According to this configuration, since the position correction mechanism is provided with the substrate transport unit integrally formed, it is possible to adjust the relative position of the substrate with respect to the film while transporting the substrate.

Moreover, in the said sticking apparatus, it is preferable that the said position correction mechanism correct | amends the position of the said board | substrate in the board | substrate width direction which cross | intersects the board | substrate conveyance direction in which the said board | substrate is conveyed.
According to this configuration, since the position of the substrate is corrected in the substrate width direction, the relative position between the substrate and the film, that is, the relative positional deviation is easily and reliably corrected without moving the film in the width direction. be able to.

Moreover, in the said sticking apparatus, it is preferable to further provide the cutter which cut | disconnects the said film with which the said coating liquid was apply | coated to predetermined length.
According to this structure, since the film which apply | coated the coating liquid is cut | disconnected by predetermined length, what was unwound from the elongate roll body as a film can be used. Accordingly, substrates having various sizes can be used as substrates to which the film is attached, and a highly versatile attaching device can be provided. Moreover, the film unwound from the roll body can be sequentially attached to a plurality of substrates, and the attaching process can be performed more efficiently.

In the sticking device, the film includes a main film material to which the coating liquid is applied and a protective material, and the sticking part peels the protective material from the main film material and also applies the coating liquid. The main film material is preferably attached to the substrate via
According to this configuration, since the main film material attached to the substrate is protected by the protective material, it is possible to prevent the main film material before being attached to the substrate from being damaged.

The pasting apparatus further includes a film inspection unit that inspects the film attached to the substrate, and the position correction mechanism further corrects the positional deviation based on a detection result of the film inspection unit. It is preferable to do this.
According to this configuration, since the displacement is corrected by feeding back the inspection result of the film attached to the substrate, the attaching accuracy between the film and the substrate can be further improved.
it can.

Moreover, in the said sticking apparatus, it is preferable that the said application part apply | coats an adhesive agent as the said coating liquid.
According to this structure, since an application part applies an adhesive agent, a film and a board | substrate can be simply affixed with this adhesive agent.

Moreover, in the said sticking apparatus, it is preferable that the said conveyance part conveys the said film along the direction which cross | intersects a horizontal surface with respect to the said application part.
According to this configuration, since the coating liquid is applied to a film that is transported along a direction that intersects the horizontal plane, for example, the vertical direction, it is possible to prevent mist that has been scattered and dropped downward during application. A coating solution having a stable film thickness can be applied to the film. Therefore, it is possible to suppress the occurrence of unevenness on the application surface of the application liquid.

  ADVANTAGE OF THE INVENTION According to this invention, when performing application | coating of an adhesive agent or an adhesive, and affixing to a board | substrate by a consistent line, an affixing operation | work can be performed efficiently and highly accurately.

The side view which shows schematic structure of the sticking apparatus which concerns on 1st embodiment. Sectional drawing which shows schematic structure of a 1st adsorption | suction roller and a 2nd adsorption | suction roller. The figure which shows schematic structure of a cutter part, and the laminated structure of a film. The figure which shows schematic structure of a film position detection part. The figure which shows the principal part structure of a position correction mechanism. Schematic which shows the principal part structure of an application part. The figure showing the movement of the nozzle tip with respect to a film. The figure showing the movement of the nozzle tip when not having a rotation part. Schematic which shows the periphery structure of an application part. Schematic which shows the structure of a mist collection | recovery mechanism. The figure which shows the periphery structure of a film thickness adjustment mechanism. The flowchart explaining the sticking process of the film by a sticking apparatus. The figure which shows schematic structure of the sticking apparatus which concerns on 2nd embodiment. Explanatory drawing of the inspection method of the film by the test | inspection part in 2nd embodiment. The structure of the sticking apparatus which concerns on 3rd embodiment is shown, (a) is a perspective view, (b) is sectional drawing. The structure of the film thickness adjustment part which concerns on 4th embodiment is shown, (a) is a perspective view, (b) is sectional drawing. The figure which shows schematic structure of the sticking apparatus which concerns on 5th embodiment. The enlarged view of the periphery structure of the film holding roller which concerns on 6th embodiment. The schematic block diagram of the cutter part which concerns on 7th embodiment, and its periphery.

  Hereinafter, with reference to the drawings, an embodiment of the sticking device of the present invention will be described. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The film transport direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do. The sticking apparatus according to the present embodiment includes a protective material and a main film from a film while transporting a film unrolled from a roll body obtained by winding a film in which a long protective material and a main film material are bonded together in a roll shape. The present invention relates to an apparatus for separating a material and attaching a main film material to a substrate.

(First embodiment)
FIG. 1 is a side view showing a schematic configuration of a sticking apparatus according to the present embodiment.
As shown in FIG. 1, the pasting apparatus 100 includes an apparatus casing 101, a substrate supply unit 102, a substrate transport unit 103, a film transport unit 104, a film pasting unit (paste unit) 105, a pasting auxiliary unit 135, a coating unit 106, A heating unit 107, a film position detection unit (position detection unit) 109, and a position correction mechanism 111 are provided.

  The substrate supply unit 102 is for supplying the substrate 1 by moving the substrate 1 into the apparatus housing 101. The substrate supply unit 102 includes a cassette 102a that holds a plurality of substrates 1 before film attachment, and a drive unit 102b that can pull out the substrate 1 from the inside of the cassette 102a. The cassette 102a is configured to be able to descend to a position where the substrate 1 held inside can be delivered to the drive unit 102b. Thus, the substrate supply unit 102 can sequentially supply the plurality of substrates 1 from the cassette 102a to the apparatus housing 101 side by the driving unit 102b. The configuration of the substrate supply unit 102 is not limited to the configuration in which the substrates 1 are sequentially supplied from the cassette 102a, and a configuration in which the substrates 1 are sequentially supplied to the apparatus housing 101 side by a transfer robot may be adopted. .

  The substrate transport unit 103 moves the substrate 1 to a predetermined position (film application position) and also moves the substrate 1 to an unloading position for unloading the substrate 1 from the apparatus housing 101 after the film is attached.

  The film transport unit 104 is for transporting the film to a position where it is attached to the substrate 1. The film sticking unit 105 is for sticking the film transported by the film transporting unit 104 to the substrate 1. The sticking auxiliary unit 135 is for performing a sticking auxiliary operation for bringing the film into close contact with the substrate 1 by sandwiching the substrate 1 as described later.

The application unit 106 is for applying an adhesive or a pressure-sensitive adhesive to the substrate 1 as an application liquid for allowing the film 60 to adhere to the substrate 1.
The heating unit 107 is for curing the adhesive or the pressure-sensitive adhesive by heating the film 60 on which the adhesive or the pressure-sensitive adhesive is applied by the application unit 106 (baking treatment).

  The film position detection unit 109 detects the relative position of the film 60 conveyed by the film conveyance unit 104 with respect to the substrate 1 in the film width direction (Y direction) intersecting the conveyance direction. The position correction mechanism 111 is for correcting the relative position with respect to the substrate 1 in the film width direction based on at least the detection result of the film position detection unit 109 when the film 60 is applied.

  The substrate transport unit 103 includes a first substrate transport roller unit 30, a second substrate transport roller unit 31, a third substrate transport roller unit 32, a fourth substrate transport roller unit 33, and a fifth substrate transport roller unit 34. ing.

  The third substrate transport roller unit 32 includes a transport roller (first transport roller) 32a that is driven by a drive motor (not shown). The conveyance roller 32 a is configured to sandwich the substrate 1 with the film application roller 40 for performing a film application operation in the film conveyance unit 104. Thereby, a film can be affixed on the board | substrate 1 on the conveyance roller 32a. That is, the conveyance roller 32a and the film sticking roller 40 constitute the film sticking part 105 according to the present invention.

  The first substrate transport roller unit 30 has a plurality of (four in this embodiment) driven rollers 30a. Accordingly, the first substrate transport roller unit 30 receives the substrate 1 supplied from the substrate supply unit 102 and guides it into the apparatus housing 101.

The second substrate transport roller unit 31 is disposed so as to face the fourth substrate transport roller unit 33 through the film pasting unit 105.
The second substrate transport roller unit 31 has a plurality (three in this embodiment) of roller pairs 131. Each roller pair 131 has a lower roller 31a and an upper roller 31b. The board | substrate 1 is conveyed in the state clamped between these rollers 31a and 31b.

  The 4th board | substrate conveyance roller part 33 receives the board | substrate 1 with which the film was affixed by the film conveyance part 104. FIG. The fourth substrate transport roller unit 33 has a plurality (two in this embodiment) of roller pairs 133. Each roller pair 133 includes a lower roller 33a and an upper roller 33b. The board | substrate 1 is conveyed in the state clamped between these rollers 33a and 33b.

  Between the third substrate transport roller unit 32 and the fourth substrate transport roller unit 33, the pasting auxiliary unit 135 is disposed. The sticking auxiliary unit 135 includes a transport roller (second transport roller) 135a and a sticking auxiliary roller 135b. The sticking auxiliary roller 135b can advance and retreat with respect to the transport roller 135a.

  The sticking auxiliary unit 135 can sandwich the substrate 1 between the sticking auxiliary roller 135b and the transport roller 135a by bringing the sticking auxiliary roller 135b closer to the transport roller 135a that transports the substrate 1. In addition, the drive part which raises / lowers the sticking auxiliary | assistant roller 135b provides pressing force to the board | substrate 1 between the conveyance rollers 135a. The drive unit includes, for example, a cylinder or a motor, and the pressing force is controlled by controlling the drive unit. The said drive part prescribes | regulates the timing which raises / lowers the sticking auxiliary roller 135b based on the size of the board | substrate 1, and conveyance time.

  The sticking auxiliary roller 135b contacts at least the rear end in the transport direction (+ X direction) of the substrate 1 and sandwiches the substrate 1 with the transport roller 135a until the rear end edge passes. Note that the sticking auxiliary roller 135b only needs to be in contact at least at the time of the rear end in the conveyance direction of the substrate 1, and the contact start position of the substrate 1 is not particularly limited. That is, the auxiliary sticking roller 135b may start contact from half of the substrate 1 or may start contact from the front end of the substrate 1 in the transport direction.

  In this way, the film sticking portion 105 suppresses the edge portion at the rear end in the film transport direction (+ X direction), so that the cut portion at the rear end of the film is securely bonded to the substrate 1 and the film is spread over the entire surface of the substrate 1 Can be adhered satisfactorily.

  The fifth substrate transport roller section 34 has a plurality (four in this embodiment) of driven rollers 34a. Accordingly, the fifth substrate transport roller unit 34 receives the substrate 1 transported from the fourth substrate transport roller unit 33 and moves it so as to be accommodated in a substrate unloading cassette (not shown).

  The film transport unit 104 includes a film feeding unit 41, a transport path adjusting unit 42, a film holding roller 43, a first suction roller 44, a cutter unit 48, a timing adjusting unit 47, a relay roller unit 45, It has the 2nd adsorption | suction roller 49, the film sticking roller 40, the film winding part 51, and the relay rollers 52 and 53.

  The film supply unit 41 includes a rotation drive unit 41a that holds and rotates a roll body R obtained by winding the film 60 in a roll shape. In addition, the film 60 is comprised from the elongate shape which has the main film material 61, the protective material 62, and the adhesion layer 63 which bonds these main film materials 61 and the protective material 62 (refer FIG. 3). In the film 60, the film width in the direction intersecting the transport direction corresponds to the width of the substrate 1. Here, “corresponding to the width of the substrate 1” includes not only the case where the width of the film 60 and the substrate 1 are substantially the same, but also the case where the width of the film 60 is slightly wider or slightly narrower than the width of the substrate 1. . Thereby, the film conveyance part 104 conveys by unwinding the film 60 from the roll body R. FIG.

  The conveyance path adjustment unit 42 includes a lever portion 141 that is rotatably attached to the rotation driving portion 41 a and a contact roller 142 that is rotatably attached to the tip of the lever portion 141 and contacts the film 60. The lever portion 141 is configured to rotate coaxially with the roll body R with respect to the rotation drive portion 41a.

  The transport path (transport distance) of the film 60 unrolled from the roll body R changes according to the remaining amount of the roll body R. Thus, when the conveyance path (conveyance distance) of the film 60 changes, it is necessary to change the driving condition of the rotation drive unit 41a in order to keep the conveyance speed of the film 60 constant.

  On the other hand, in the film transport unit 104 according to the present embodiment, the transport path adjusting unit 42 changes the transport distance (transport path) of the film 60 by rotating the lever unit 141 to a predetermined position. For example, when the remaining amount of the roll body R decreases, the film transport unit 104 rotates the lever portion 141 so as to lower the contact roller 142, thereby reducing the transport distance shortened by reducing the outer shape of the roll body R. Can be extended. Thus, according to the conveyance path adjustment part 42, the conveyance speed of the film 60 can be kept constant, without changing the drive condition (rotation speed) of the rotation drive part 41a. In addition, you may make it change the conveyance path | route (conveyance distance) of the film 60 with the contact roller 142 lowered with dead weight. In this case, the amount of lowering of the contact roller 142 is measured by a sensor (not shown) provided in the vicinity of the contact roller 142, and the rotation speed of the roll body R by the rotation drive unit 41a may be changed based on the measured value. .

  The film holding roller 43 is for holding the film 60 so as to be conveyed along a substantially vertical direction (Z-axis direction) with a first suction roller 44 described later. Thereby, the film 60 is conveyed along the vertical direction.

  The first suction roller 44 and the second suction roller 49 rotate in a state where the film 60 is sucked so that the film 60 can be conveyed at a constant speed. FIG. 2 is a cross-sectional view showing a schematic configuration of the first suction roller 44 and the second suction roller 49. In addition, since the 1st adsorption | suction roller 44 and the 2nd adsorption | suction roller 49 have the same structure, the structure of the 1st adsorption | suction roller 44 is demonstrated in the following description.

  As shown in FIG. 2, the first suction roller 44 includes a roller body 144 having a plurality of through holes 144 a formed on the surface, and a suction unit 145 provided inside the roller body 144. The suction part 145 has a box 145a having a box shape that can be slidably contacted with the inner surface of the rotating roller body 144, and the box 145a is connected to a blower (not shown).

  The box body 145a is capable of sucking air on the roller surface side through the through hole 144a by contacting the inner surface of the roller body 144. In the 1st adsorption | suction roller 44, it becomes possible to attract | suck air only from the through-hole 144a of the area | region A which opposes the opening part of the box 145a. The box 145a is fixed, and only the roller body 144 is driven to rotate.

  With this configuration, in the first suction roller 44, the roller main body 144 is configured to suck air from the through hole 144a at a predetermined rotational position. Therefore, the 1st adsorption | suction roller 44 can convey favorably the film 60 adsorbed via the through-hole 144a along the rotation direction of the roller main body 144. The suction portion 145 does not necessarily have to contact the inner surface of the roller main body 144, and may have a gap as long as it can be sucked through the through hole 144a.

  Moreover, since the 1st adsorption | suction roller 44 hold | maintains the film 60 by adsorption | suction, it can prevent that the friction between the roller main body 144 and the film 60 arises, and can suppress generation | occurrence | production of static electricity. The configuration of the first suction roller 44 has been described above, but the same applies to the second suction roller 49.

FIG. 3 is a diagram showing a schematic configuration of the cutter unit 48 and a laminated structure of the film 60.
As shown in FIG. 3, the cutter unit 48 according to the present embodiment includes a rotary blade (cutter blade) 161 for cutting (cutting) the film 60, a film support unit 162 disposed to face the rotary blade 161, A blade cleaning unit (cutter blade cleaning unit) 163 that cleans the rotary blade 161.

  The rotary blade 161 is composed of a disk-shaped cutter blade, and moves the film 60 while moving along the width direction of the film 60 (from the right to the left shown in FIG. 4) by a guide member (not shown). Disconnect. When the rotary blade 161 cuts the film 60, for example, the rotary blade 161 rotates in the negative direction (clockwise direction) shown in FIG. The film support portion 162 is for holding the film 60 between the rotary blade 161. The cutter part 48 moves between the film support part 162 and the rotary blade 161 by moving the rotary blade 161 in the thickness direction (X direction) of the film 60 according to the thickness of the film 60 (main film material 61). Adjust the interval. Thereby, the cutter part 48 can cut | disconnect only the main film material 61 among the films 60. FIG. The cutter unit 48 can arbitrarily set the rotation speed and movement speed of the rotary blade 161 according to the conditions such as the thickness and material of the film 60 (main film material 61).

  The blade cleaning unit 163 is a position that does not face the film support unit 162 and is disposed at a standby position of the cutter unit 48. Here, the standby position of the cutter unit 48 is a position where the rotary blade 161 waits before cutting the film 60, and the other end side from the one end side (the right end portion shown in FIG. 4) of the film 60. This is the position where the rotary blade 161 that has moved to (the left end portion shown in FIG. 4) is turned back and returned to one end side, and finally returns. In addition, when the rotary blade 161 cut | disconnects the film 60 and returns to the other end side, it is rotating in + direction (counterclockwise direction) shown, for example in FIG. In this description, the case where the rotary blade 161 rotates in the − direction (clockwise direction) when the film 60 is cut and rotates in the + direction (counterclockwise direction) when returning to the other end side is taken as an example. However, the present invention is not limited to this, and conversely, the rotary blade 161 may rotate in the + direction at the time of cutting and rotate in the − direction when returning to the other end side. Alternatively, the rotation direction of the rotary blade 161 may be fixed to either the − direction or the + direction.

  Thus, the cutter unit 48 includes the blade cleaning unit 163 disposed at the standby position, so that the adhesive layer 63 attached to the rotary blade 161 can be cleaned by cutting the film 60.

  The blade cleaning unit 163 includes a sponge member 163a that is in sliding contact with the tip of the rotary blade 161, and a cleaning liquid supply unit 163b that supplies a cleaning liquid to the sponge member 163a. The sponge member 163 a has a slit 163 s that can accommodate the tip of the rotary blade 161. The cleaning liquid supply unit 163b is for impregnating the sponge member 163a with the cleaning liquid, and is for maintaining the cleaning performance of the rotary blade 161 in the sponge member 163a.

  Based on such a configuration, the cutter unit 48 can cut only the main film material 61 of the film 60 as shown in FIG. Therefore, the film 60 after being cut by the cutter unit 48 is in a state of being attached to the protective material 62 by the adhesive layer 63 in a state where the main film material 61 is cut to a predetermined length. In FIG. 3, for example, the adhesive N applied on the main film material 61 of the film 60 is illustrated.

  Specifically, when the main film material 61 is cut, the cutter unit 48 forms an affixed portion that is affixed to the substrate 1 and a non-adhered portion that is not affixed to the substrate. Therefore, the protective film 62 is in a state in which the main film material 61 constituting the pasted portion and the main film material 61 constituting the non-sticked portion are pasted by the adhesive layer 63. Here, the length of the affixed portion corresponds to the length of the substrate 1. Further, the length of the non-sticking portion corresponds to the distance that the substrate 1 is conveyed after the film sticking to a certain substrate 1 is finished and the film sticking to the next substrate 1 is started. That is, the length of the non-sticking part is appropriately set according to the conveyance speed of the substrate 1, the raising / lowering speed of the film sticking roller 40, and the like. Thus, the position of the front-end | tip of the conveyance direction of the board | substrate 1 conveyed by the board | substrate conveyance part 103 and the front-end | tip of the board | substrate 1 conveyed by the board | substrate conveyance part 103 by using the film containing a sticking part and a non-sticking part. It is easy to match.

  Here, the cutter unit 48 cuts the film 60 conveyed by the film conveying unit 104. When the cutter unit 48 cuts the film 60, the conveyance of the film 60 is temporarily stopped. At this time, since the conveyance of the film 60 is continued except for the cut portion, a difference occurs in the conveyance speed of the film 60 between the cut portion by the cutter unit 48 and the other portions. As a result, the transport speed varies, and the film 60 to be transported becomes dubbed, resulting in poor transport of the film 60.

  On the other hand, the film transport unit 104 according to the present embodiment includes the timing adjusting unit 47 as means for adjusting variations in the transport speed generated in the film 60 when being cut by the cutter unit 48.

  The timing adjustment unit 47 is in contact with one side (back side) of the film 60 and transports in a predetermined direction, a lever 242 that holds the transport roller 241 on the other end side, and one end side And a rotating part 240 for rotating the lever member 242 with reference to The transport roller 241 is rotatably held with respect to the lever member 242.

  In the present embodiment, when the film 60 is cut by the cutter unit 48, the timing adjustment unit 47 uses the rotating unit 240 to match the conveyance speed between the part where the film 60 stops once and the other part in the middle of conveyance. By rotating the lever member 242 clockwise, the transport roller 241 provided on the other end side of the lever member 242 is moved in an arc shape. At this time, a predetermined tension can be applied to the film 60 by the conveyance roller 241 pressing one side of the film 60. Further, since the transport roller 241 is rotatable with respect to the lever member 242, the transport roller 241 rotates as the transport roller 241 film 60 is transported. Therefore, the conveyance roller 241 is prevented from hindering the conveyance of the film 60.

  Thus, the film transport unit 104 can perform the cutting by the cutter unit 48 while transporting the film 60 without causing a transport failure. Therefore, it is not necessary to temporarily stop the conveyance of the film 60 for each cutting operation by the cutter unit 48, so that the operation time required for attaching the film 60 can be shortened.

  The film sticking roller 40 is movable along the vertical direction (Z direction). The film sticking roller 40 is lowered to a position where the film 60 can be pressed against the substrate 1 positioned on the transport roller 32a (third substrate transport roller unit 32) of the substrate transport unit 103.

  The film sticking roller 40 and the transport roller 32 a stick the film 60 by sandwiching the film 60 and the substrate 1. Thus, the film sticking roller 40 forms a part of the film transport unit 104 and constitutes the film sticking unit 105.

  When sticking the film 60, the film sticking roller 40 sticks the main film material 61 of the sticking part of the film 60 to the substrate 1. Since the film 60 is affixed to the substrate 1 in a transported state, for example, when the film sticking roller 40 is in contact with the substrate 1 to the rear end in the transport direction of the substrate 1, the film 60 is transported following the pasting portion. A sticking part will be suppressed between conveyance rollers 32a. Then, the main film material 61 of the non-sticking part which should be discarded without being attached may be attached to the substrate 1 or the transport roller 32a.

  In this embodiment, in order to prevent such a problem, a configuration is adopted in which the film sticking roller 40 does not contact the substrate 1 to the rear end in the transport direction. That is, the film sticking roller 40 has a timing at which the leading end of the main film material 61 corresponding to the sticking portion of the film 60 coincides with the leading end of the substrate 1 in the transporting direction (that is, the leading end of the main film material 61 in the transporting direction is the film). The timing at which the abutting portion reaches the rear end portion in the transport direction of the main film material 61 corresponding to the pasting portion (the rear end in the transport direction of the substrate 1) (that is, the main film). The rising starts at the timing (before the rear end of the conveying direction of the material 61 reaches the film application position). According to this, as above-mentioned, the film sticking roller 40 can prevent pinching between the conveyance rollers 32a in the non-sticking part of the film 60. Therefore, the film sticking roller 40 repeats the raising and lowering operation every time the film 60 is stuck to the substrate 1.

  By the way, since the film sticking roller 40 is raised before contacting the rear end in the transport direction of the substrate 1 as described above, the film 60 cannot be sufficiently pressed against the substrate 1 on the rear end side in the transport direction. There is a possibility that sticking of the film 60 becomes insufficient.

  On the other hand, in this embodiment, it is the structure provided with the sticking auxiliary | assistant part 135 (sticking auxiliary roller 135b) mentioned above. The sticking auxiliary roller 135b abuts at least the rear end in the transport direction of the substrate 1, and the film sticking roller 40 alone is not sufficient by sandwiching the substrate 1 with the transport roller 135a until the rear end edge passes. The cut portion of the rear end of the film 60 can be securely bonded to the substrate 1. Therefore, according to this embodiment, the film 60 can be satisfactorily bonded over the entire surface of the substrate 1.

  The film winding unit 51 has a winding shaft 51a for winding the protective material 62 separated from the film 60 after the pasting operation by the film pasting unit 105, and a drive unit 51b for driving the winding shaft 51a. .

  The relay rollers 52 and 53 relay the conveyance of the film 60 between the film sticking roller 40 and the film winding unit 51. The relay roller 52 is located above (Z direction) from the film sticking position by the film sticking roller 40. Further, the relay roller 52 is disposed above the film sticking unit 105 with respect to the sticking auxiliary unit 135 in the conveyance direction of the substrate 1. As a result, the film 60 that has passed through the film sticking roller 40 is sharply bent upward so that only the main film material 61 cut as will be described later is attached to the substrate 1, and the main film material 61 is protected from the protective material. 62 is separated.

  The pasting apparatus 100 according to the present embodiment employs a configuration in which the film transport unit 104 transports the long film 60 to the film pasting position by the film pasting unit 105. The substrate transport unit 103 synchronizes the timing at which the leading end of the substrate 1 in the transport direction reaches the film pasting unit 105 so that the pasting portion of the film 60 transported to the film transport unit 104 reaches the film pasting unit 105. The transport speed is controlled. Therefore, the film 60 is prevented from being displaced relative to the substrate 1 in the transport direction.

  However, since the film 60 is transported from the roll body R to the film pasting position by the film pasting unit 105 after passing through a plurality of roller members, the film 60 is directed to the substrate 1 in the film width direction while being transported by the film transport unit 104. The relative position may change.

  Here, the relative position changes means that when the film 60 reaches the film application position by the film application unit 105, the position of the film 60 is shifted in the width direction (Y direction) intersecting the transport direction of the substrate 1. . For example, in the case where the widths of the substrate 1 and the film 60 are the same, when the position of the film 60 is shifted, the film 60 is shifted from the substrate 1 to one end side in the width direction. An area where the film 60 cannot be attached is generated.

  In response to such a problem, the pasting apparatus 100 according to the present embodiment includes a film position detection unit 109 and a position correction mechanism 111. It is preferable that the film position detection unit 109 is disposed in the transport path of the film 60 at a position upstream of the film application position by the film application unit 105 and as close as possible to the film application position.

  In the present embodiment, the film position detection unit 109 is disposed between the cutter unit 48 and the second suction roller 49 in the conveyance path of the film 60. In addition, the position where the film position detection unit 109 is disposed is not limited to the above-described position, and may be disposed between the second suction roller 49 and the film sticking roller 40, for example.

FIG. 4 is a diagram illustrating a schematic configuration of the film position detection unit 109. FIG. 4 is a view corresponding to a cross section orthogonal to the surface of the film 60.
As shown in FIG. 4, the film position detection unit 109 employs, for example, a laser scanning method, and has a frame-shaped main body 109c that surrounds both surfaces of one end 60c of the film 60 in a cross-sectional shape, and the main body A laser emitting unit 109a that emits laser light and a light receiving unit 109b that receives the laser light emitted from the laser emitting unit 109a are provided on one of opposing surfaces of the unit 109c. The result of light reception by the light receiving unit 109b is transmitted to the determination unit 112. For example, the determination unit 112 may be configured by hardware such as an arithmetic circuit, or may be realized by software such as a program. The film position detection unit 109 is provided only on one end 60c of the film 60, but may be provided on the other end 60d side of the film.

  The determination unit 112 acquires the position information of the end portion of the film 60 based on the result transmitted from the light receiving unit 109b. The determination unit 112 detects a relative position of the film 60 with respect to the substrate 1 in the film width direction. Specifically, the determination unit 112 drives the position correction mechanism 111 when the position of the film 60 with respect to the substrate 1 is shifted in the film width direction. On the other hand, the determination unit 112 does not drive the position correction mechanism 111 when the position of the film 60 with respect to the substrate 1 is not shifted in the film width direction.

  The configuration of the film position detection unit 109 is not limited to the laser scanning method described above, and for example, an imaging unit configured by a CCD sensor or the like may be used. In this case, if a pair of imaging units are arranged on one surface side (−X direction side) of the film 60, and each captures an end in the transport direction of the film 60 and transmits the imaging result to the determination unit 121. Good. Note that the CCD sensor in the imaging unit includes a plurality of pixels arranged in a matrix. Each pixel of the CCD sensor includes a light receiving element such as a photodiode and a switching element such as a thin film transistor.

  The position correction mechanism 111 adjusts the relative position (position shift) of the substrate 1 and the film 60 based on the detection result by the film position detection unit 109. FIG. 5 is a diagram illustrating a main configuration of the position correction mechanism 111. As shown in FIG. 5, in the present embodiment, the position correction mechanism 111 includes a second substrate transport roller unit 31 in the substrate transport unit 103 and a second substrate transport roller unit 31 that transports the substrate 1. A base portion 111a to be held and a drive portion 111b for driving the base portion 111a in the width direction (Y direction) of the substrate 1 are included. The drive unit 111b is connected to, for example, an LM guide, and moves the second substrate transport roller unit 31 along the width direction of the substrate 1 by a drive motor.

  Based on such a configuration, the position correction mechanism 111 moves the base unit 111a in the Y direction by the driving unit 111b, thereby transporting the substrate 1 by the second substrate transporting roller unit 31, while the film 60 of the substrate 1 is moved. The relative position with respect to can be corrected. As a result, the substrate 1 supplied to the film sticking unit 105 via the second substrate transport roller unit 31 (position correction mechanism 111) has the same position in the width direction as the film 60. Therefore, the film sticking part 105 can stick the film 60 to the board | substrate 1 in the state which a position shift does not arise in the width direction (Y direction).

  The application unit 106 applies an adhesive or a pressure-sensitive adhesive to the film 60 conveyed in the vertical direction by the film holding roller 43. Note that as the coating liquid applied by the coating unit 106, a liquid having such a degree of adhesive that it can adhere the film 60 to the substrate 1 after being dried by at least the heating unit 107 is used.

  The application unit 106 includes an application mechanism 70 for applying an adhesive or an adhesive to the substrate 1, a mist collecting mechanism 71, a film thickness adjusting mechanism 72 for adjusting the thickness of the adhesive or the adhesive applied to the film 60, (See FIG. 9).

FIG. 6A is a schematic diagram showing the configuration of the main part of the coating mechanism 70, and FIG. 6B is a diagram conceptually showing the movement of the tip 73 a of the nozzle 73.
As shown in FIG. 6A, the application mechanism 70 includes a nozzle 73 that ejects an adhesive or a pressure-sensitive adhesive, a main body 74, and a rotating portion 75 that rotates the main body 74 about the X axis. . As the nozzle 73, a spray nozzle that sprays an adhesive or an adhesive is used. The main body 74 has a moving mechanism 79 that allows the nozzle 73 to move along the width direction of the film 60. The moving mechanism 79 includes a guide portion 79a that guides the movement of the nozzle 73, and a drive portion 79b that transmits a driving force for moving the nozzle 73 with respect to the guide portion 79a. The nozzle 73 is connected to the guide portion 79 a via the mounting arm 78.

  The drive part 79b transmits a driving force to the guide part 79a side by a rack and pinion mechanism, for example. Thereby, the nozzle 73 can be moved along the width direction of the film 60 as indicated by an arrow B in FIG. Therefore, the nozzle 73 can spray the adhesive or the pressure-sensitive adhesive over the entire region of the film 60 in the width direction.

  The rotating part 75 is composed of a motor or the like. The main body portion 74 is attached to the rotating portion 75 at the central portion thereof. As a result, the main body 74 can be swung on the basis of the central portion by the rotating portion 75. The nozzle 73 can be moved by a moving mechanism 79 of the main body 74 independently of the swinging operation of the main body 74. In the following, for convenience of explanation, it is assumed that the center of the tip 73a of the nozzle 73 coincides with the rotation center of the rotation unit 75.

  Based on such a configuration, the tip 73a of the nozzle 73 moves in a substantially 8-character shape with the rotation center of the rotation unit 75 as a reference, as shown in FIG. 6B. Specifically, when the YZ axis is set with respect to the rotation center C of the rotation unit 75, the tip of the nozzle 73 reaches from the fourth quadrant to the second quadrant, draws an arc, passes through the third quadrant, and passes through the first quadrant. After reaching to the fourth quadrant by drawing an arc, the robot repeatedly moves to draw the same locus. In this description, the case where the tip 73a of the nozzle 73 returns in a circular arc when the second quadrant to the third quadrant and the first quadrant to the fourth quadrant is described as an example. It is not limited to. For example, it may be configured to move from the second quadrant to the third quadrant and from the first quadrant to the fourth quadrant by folding back so as to straddle the Y-axis along the Z-axis direction. In this case, the coating mechanism 70 includes a moving unit that moves the main body 74 in the YZ direction instead of the rotating unit 75.

  FIG. 7 is a diagram illustrating the movement of the tip 73a of the nozzle 73 with respect to the film 60 when the application unit 106 according to the present embodiment applies adhesive or adhesive. FIG. 8 is a view showing the movement of the tip 73a of the nozzle 73 with respect to the film 60 when the application unit 106 that does not have the rotating unit 75 applies adhesive or adhesive as a comparison. In the coating unit 106 according to the present embodiment, since the nozzle 73 moves in an approximately eight shape with the rotation center C of the rotation unit 75 as a reference as described above, the conveyance speed of the film 60 and the movement speed of the nozzle 73. As shown in FIG. 7, the tip of the nozzle 73 can be moved along the width direction of the surface of the film 60 conveyed in a predetermined direction. On the other hand, when the rotation unit 75 is not provided, since the film 60 itself is also transported while the nozzle 73 moves in the width direction of the film 60, the tip 73 a of the nozzle 73 is positioned on the film 60 as shown in FIG. 8. Move zigzag relative to the surface.

  As described above, the application unit 106 according to the present embodiment includes the rotation unit 75 so that the tip 73a of the nozzle 73 can be moved without gaps across the entire width direction and the conveyance direction of the film 60. Therefore, the adhesive or the pressure-sensitive adhesive can be applied uniformly over the entire surface of the film 60.

  Returning to FIG. 1, the heating unit 107 includes a first heating unit 76 and a second heating unit 77. The heating temperatures of the first heating unit 76 and the second heating unit 77 are set to different values.

  The first heating unit 76 is for temporarily curing the adhesive or the pressure-sensitive adhesive by performing a first baking process on the film 60. The 2nd heating part 77 is for carrying out the 2nd baking process with respect to the film 60, and main-hardening an adhesive agent or an adhesive.

  Based on such a configuration, the heating unit 107 can cure the adhesive or the pressure-sensitive adhesive satisfactorily by heating the film 60 stepwise (two steps). When the adhesive or the pressure-sensitive adhesive includes a plurality of (for example, two types) solvents, the first baking in the first heating unit 76 (first-stage heat treatment) causes the first in the adhesive or the pressure-sensitive adhesive. Evaporate the solvent, and evaporate the second solvent in the adhesive or pressure-sensitive adhesive in the second baking process (second-stage heat treatment) by the second heating unit 77 to dry the adhesive or pressure-sensitive adhesive. It can be cured.

  Moreover, since the heating part 107 performs the heat processing of the one film 60 using the 1st heating part 76 and the 2nd heating part 77, it is like the structure which heat-processes the film 60 only by one heating part. There is no problem that the drying process of the next film 60 cannot be started until the drying process of the previous film 60 is completed. Therefore, since the film 60 can be sequentially conveyed into the heating unit 107, the tact required for the heat treatment can be shortened.

  FIG. 9 is a schematic view showing a peripheral configuration of the application unit 106. FIG. 10 is a schematic view showing the configuration of the mist collecting mechanism 71. The mist collecting mechanism 71 is for collecting the mist generated when the adhesive or the adhesive is applied from the nozzle 73 of the applying mechanism 70.

  As shown in FIG. 9, the mist collection mechanism 71 includes a main body 80, a mist cleaning unit 81, and a cleaning liquid circulation unit 82. The main body 80 constitutes a processing chamber in which an adhesive application process is performed by the application unit 106. The main body 80 is provided with an opening 80a for carrying the film 60 conveyed by the film conveying unit 104 into or out of the inside.

  As shown in FIG. 10, the mist cleaning unit 81 is installed in the main body unit 80 so as to cover the back surface 60 a and the side surface 60 b opposite to the surface to which the adhesive or pressure-sensitive adhesive is applied in the film 60. As shown in FIG. 9, the mist cleaning unit 81 includes a cleaning liquid storage unit 83 that stores the cleaning liquid W, a cleaning unit 84 through which the cleaning liquid W overflowing from the cleaning liquid storage unit 83, and a cleaning liquid receiving unit 85. doing. In FIG. 9, only the mist cleaning unit 81 disposed on the back surface 60 a side of the film 60 is illustrated for easy viewing, but the side surface 60 b side of the film 60 is also illustrated in FIG. 10. The mist cleaning unit 81 is arranged. The mist cleaning unit 81 disposed on the side surface 60b side of the film 60 also has the same configuration as the mist cleaning unit 81 on the back surface 60a side.

  The cleaning unit 84 is constituted by a brush member extending along the transport direction (Z direction) of the film 60, and the cleaning liquid flows downward along the surface of the brush member. The cleaning liquid receiving unit 85 functions as a container that receives the cleaning liquid that has flowed downward through the cleaning unit 84.

  Below the cleaning liquid receiving portion 85, a communication portion 85a for allowing the cleaning liquid W to communicate with the main body portion 80 is provided, and the cleaning liquid in the cleaning liquid receiving portion 85 flows into the bottom portion 89 of the main body portion 80 through the communication portion 85a. It is like that. The cleaning liquid circulation unit 82 circulates the cleaning liquid accumulated in the bottom 89 of the main body 80 to the cleaning liquid storage 83 of the cleaning unit 84 by the driving force of the pump P through the communication unit 89a. The cleaning liquid circulation unit 82 has a filter F, and the cleaning liquid is circulated through the filter F. Thereby, the cleaning liquid can be reused by removing foreign substances contained in the cleaning liquid after cleaning.

  According to the application unit 106 according to the present embodiment, the mist generated when the adhesive or the adhesive is applied from the nozzle 73 to the film 60 can be recovered by the mist recovery mechanism 71. It is possible to prevent the occurrence of problems such as the inside of the apparatus 100 becoming dirty.

  The film thickness adjusting mechanism 72 adjusts the thickness of the adhesive or pressure-sensitive adhesive applied to the film end in the width direction of the film 60 to be uniform. 11A and 11B are diagrams showing the peripheral configuration of the film thickness adjusting mechanism 72, where FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

  As shown in FIGS. 11A and 11B, the film thickness adjusting mechanism 72 includes a dummy roller 90 installed near the film end of the film 60, a driving roller 91, a driven roller 92, and the dummy roller 90. , A driving roller 91, and a belt 93 that spans the driven roller 92. The belt 93 is made of polyimide, which is the same material as the film 60.

  The dummy roller 90 rotates coaxially with the film holding roller 43 that conveys the film 60 in the vertical direction. The outer diameter of the dummy roller 90 is set to a size such that the surface of the belt 93 spanned over the dummy roller 90 is substantially the same height as the surface of the film 60 spanned over the film holding roller 43. In addition, the application unit 106 is aligned so that the tip of the nozzle 73 applies adhesive or adhesive to the surface of the film 60 in a region where the surface of the belt 93 and the surface of the film 60 are substantially the same height. ing.

  Here, when the belt 93 of the film thickness adjusting mechanism 72 is not provided at the film edge of the film 60, the film thickness of the adhesive or the pressure-sensitive adhesive becomes thin at the film edge where the scattering condition of the adhesive or the pressure-sensitive adhesive changes. End up. Thereby, there exists a possibility that the film thickness of an adhesive agent or an adhesive may vary in the width direction of the film 60.

  On the other hand, according to the present embodiment, the surface of the belt 93 of the film thickness adjusting mechanism 72 is positioned at substantially the same height as the surface of the film end of the film 60 facing the nozzle 73. The scattering conditions can be adjusted at the film edge and the film center. Therefore, it is possible to apply the adhesive or pressure-sensitive adhesive with a uniform film thickness by aligning the film forming conditions of the adhesive or pressure-sensitive adhesive in the width direction of the film 60.

By the way, unevenness may occur on the coated surface when a spray nozzle such as the nozzle 73 according to the present embodiment is used.
On the other hand, in this embodiment, the structure which apply | coats an adhesive agent or an adhesive from the nozzle 73 with respect to the film 60 conveyed along a perpendicular direction (Z direction) is employ | adopted.

  If the nozzle 73 and the film 60 are arranged so that the opening end of the tip 73a faces the surface of the film 60, the film 60 is not necessarily conveyed along the vertical direction as described above. A non-uniformity suppressing effect can be obtained. That is, the film 60 should just be conveyed along the direction which cross | intersects a horizontal surface. Thus, if the film 60 is conveyed in a direction intersecting the horizontal plane, that is, in a state inclined with respect to the horizontal plane, the tip 73a of the nozzle 73 and the surface of the film 60 are always spaced apart by a predetermined distance in the horizontal direction. Therefore, the occurrence of unevenness on the application surface of the adhesive or pressure-sensitive adhesive described above can be suppressed.

  According to this, since the tip of the nozzle 73 and the surface of the film 60 are separated from each other by a predetermined distance in the horizontal direction, the particles of the adhesive or pressure-sensitive adhesive applied from the nozzle 73 are rough. (Those with large grains) fall before reaching the surface of the film 60 and are not applied to the film 60. On the other hand, among the adhesive or pressure-sensitive adhesive particles applied from the nozzle 73, fine particles (small particles) reach the surface of the film 60 arranged at a predetermined distance from the tip of the nozzle 73. It will be applied to the film 60. Therefore, since the adhesive or pressure-sensitive adhesive containing uniform particles can be applied to the film 60, it is possible to suppress the occurrence of unevenness as described above on the application surface of the adhesive or pressure-sensitive adhesive.

  In addition, you may provide the washing | cleaning apparatus which wash | cleans the adhesive agent or adhesive which adhered to the surface of the belt 93. FIG. The configuration of the cleaning device may be either a configuration in which the cleaning liquid is ejected onto the belt 93 or a configuration in which the belt 93 is dipped in the cleaning liquid storage section. According to this, since the surface of the belt 93 can be always kept clean, the film forming conditions of the adhesive or the adhesive at the film end of the film 60 can be adjusted accurately over a long period of time. .

  Then, the operation | movement which affixes the film 60 on the board | substrate 1 is demonstrated as operation | movement of the sticking apparatus 100 which concerns on this embodiment.

FIG. 12 is a flowchart for explaining a process of attaching the film 60 by the attaching apparatus 100.
First, in the sticking device 100, the roll body R is attached to the film feeding portion 41 (step S1).
After the roll body R is attached, the film transport unit 104 drives the sticking apparatus 100 to unwind the film 60 (step S2). Specifically, the film transport unit 104 rotates the film feeding unit 41 and the film winding unit 51 to transport the film 60 along a predetermined direction.

  The affixing device 100 drives the application unit 106 in accordance with the conveyance of the film 60 by the film conveyance unit 104 to apply the adhesive or the adhesive (Step S3). Specifically, as described above, the application unit 106 applies an adhesive or an adhesive to the film 60 conveyed by the film conveyance unit 104 while the nozzle 73 moves in a substantially eight shape with the rotation center of the rotation unit 75 as a reference. Apply adhesive. The applying unit 106 moves the nozzle 73 by the moving mechanism 79 and rotates the main body 74 holding the nozzle 73 by the rotating unit 75 around the X axis, thereby moving the tip of the nozzle 73 in the width direction of the film 60 and It can be moved without a gap over the entire area in the transport direction (see FIG. 7). Therefore, the adhesive or pressure-sensitive adhesive can be uniformly applied to the entire surface across the width direction of the film 60.

  By the way, when the adhesive or pressure-sensitive adhesive is applied to the film 60, the scattering condition of the adhesive or pressure-sensitive adhesive changes at the film end in the width direction of the film 60. It will be thinner than the center. On the other hand, when applying the adhesive or pressure-sensitive adhesive from the nozzle 73 to the film 60, the coating unit 106 according to this embodiment causes the film thickness adjusting mechanism 72 to function to the film end in the width direction of the film 60. The thickness of the applied adhesive or pressure-sensitive adhesive is adjusted to be uniform.

  Specifically, the film thickness adjusting mechanism 72 rotates the dummy roller 90 in synchronization with the rotation of the film holding roller 43 that transports the film 60. At this time, the surface of the belt 93 spanned over the surface of the dummy roller 90 and the surface of the film 60 spanned over the film holding roller 43 have the same height.

  According to this, since the surface of the belt 93 is positioned at the same height as the surface of the film 60 in the vicinity of the film end, it is possible to substantially match the scattering condition of the adhesive or pressure-sensitive adhesive at the film end to the central portion.

  Therefore, the adhesive or pressure-sensitive adhesive applied from the nozzle 73 does not change the scattering condition of the adhesive or pressure-sensitive adhesive even at the film end of the film 60, and the film-forming condition of the adhesive or pressure-sensitive adhesive is the width of the film 60. By stabilizing in the direction, the adhesive or pressure-sensitive adhesive can be applied under uniform conditions.

  When applying an adhesive or a pressure-sensitive adhesive to the film 60 from the nozzle 73, mist is scattered from the nozzle 73 to the surroundings. On the other hand, in the application unit 106 according to the present embodiment, the mist can be recovered by the mist recovery mechanism 71. Specifically, the mist scattered from the nozzle 73 is captured by the cleaning unit 84 of the mist cleaning unit 81 (mist recovery mechanism 71) provided so as to cover the back surface 60a and the side surface 60b of the film 60.

  As described above, the cleaning unit 84 has a structure in which the cleaning liquid flows downward along the surface of the brush member, so that the captured mist is discharged downward together with the cleaning liquid. According to this, the captured mist does not accumulate in the cleaning unit 84, and the mist can be recovered stably.

  The cleaning liquid from which the mist has been collected flows from the cleaning liquid receiving section 85 to the bottom of the main body section 80, and after the foreign matter is removed by the filter F of the cleaning liquid circulation section 82, it is circulated again to the cleaning section 84.

  Moreover, in this embodiment, since an adhesive agent or an adhesive is applied from the nozzle 73 to the film 60 conveyed along the vertical direction (Z direction), the adhesive or the adhesive applied from the nozzle 73 is applied. Of the particles, particles having coarse particles (large particles) can be prevented from being applied to the film 60, and only particles having fine particles (small particles) can be applied to the film 60. Since the adhesive or pressure-sensitive adhesive applied in this manner contains uniform particles, the adhesive or pressure-sensitive adhesive is applied in a state where the occurrence of unevenness is suppressed. Since this adhesive or pressure-sensitive adhesive has little surface unevenness, it is possible to prevent the occurrence of problems such as reducing the flatness of the main film material 61 even when it is attached to the substrate 1 performed in a subsequent process.

  The film transport unit 104 transports the film 60 coated with the adhesive or the pressure-sensitive adhesive by the coating unit 106 to the heating unit 107 and heats the film 60 (baking treatment) to cure the adhesive or the pressure-sensitive adhesive ( Step S4). Specifically, the heating unit 107 first performs a first (1st) baking process on the film 60 by the first heating unit 76. Subsequently, the heating unit 107 performs a second (2nd) baking process on the film 60 by the second heating unit 77. The heating temperature in the 1st heating part 76 and the 2nd heating part 77 is suitably changed by conditions, such as a kind of adhesive agent or an adhesive, and a film thickness.

  As described above, in the present embodiment, the heating unit 107 uses the first heating unit 76 and the second heating unit 77 to heat the single film 60, so that the film 60 is sequentially transferred into the heating unit 107. The tact required for heat treatment can be shortened.

  The film conveyance part 104 conveys the film 60 after the heat processing by the heating part 107 to the cutter part 48, and cuts the film 60 (step S5). As shown in FIG. 3, the cutter unit 48 presses the blade 48 a against the film 60 on the pedestal unit 48 b and cuts only the main film material 61 in the film 60. The film 60 after being cut by the cutter unit 48 is in a state of being attached to the protective material 62 by the adhesive layer 63 in a state where the main film material 61 is cut to a predetermined length.

Specifically, the cutter unit 48 cuts only the main film material 61 so as to include the pasting portion and the non-sticking portion as described above.
Here, when the film 60 is cut, the conveyance of the film 60 is temporarily stopped. On the other hand, the film 60 is continuously conveyed by the film conveying unit 104 except for the cut portion. For this reason, a difference occurs in the conveyance speed of the film 60 through the cutter portion 48, and the film 60 becomes dull due to variations in the conveyance speed, resulting in a conveyance failure.

  On the other hand, in this embodiment, the timing adjustment unit 47 adjusts the variation in the conveyance speed that occurs when the film 60 is cut. The timing adjustment unit 47 moves the contact roller unit 147 to the upstream side in the transport direction (+ X direction) in accordance with the timing at which the film 60 is cut. Then, the distance between the cutter unit 48 and the timing adjusting unit 47 (contact roller unit 147) is increased, and the apparent transport speed of the film 60 toward the cutter unit 48 is decreased. Therefore, it is possible to prevent the film 60 from becoming dull by adjusting the conveyance speed of the film 60.

  Therefore, the film transport unit 104 can satisfactorily cut the film 60 by the cutter unit 48 in the transported state without causing the transport failure of the film 60. Further, since the film transport unit 104 does not need to temporarily stop the transport of the film 60 for each cutting operation by the cutter unit 48, the work time required for attaching the film 60 can be shortened.

  After cutting the film 60, the pasting apparatus 100 uses the film position detection unit 109 prior to pasting the film 60 in the film width direction (Y direction) in the film 60 transported by the film transport unit 104. The relative position with respect to the substrate 1 is detected (film position detection step shown in step S6).

  Further, prior to applying the film 60, the attaching device 100 is pulled out from the cassette 102a of the substrate supply unit 102 and starts to convey the substrate 1 by the substrate carrying unit 103 (steps S7 and S8).

  Returning to step S6, the film position detection unit 109 detects the end 60c in the transport direction of the film 60 (see FIG. 4). The result of light reception by the light receiving unit 109b is transmitted to the determination unit 112. The determination unit 112 detects a relative position with respect to the substrate 1 in the width direction of the film 60, that is, a positional deviation amount based on the position information of the end portion 60 c of the film 60 detected by the light receiving unit 109 b, and detects the film 60 with respect to the substrate 1. It is determined whether or not there is a shift in the position (step S9).

  When the determination unit 112 determines that the position of the film 60 with respect to the substrate 1 is shifted in the film width direction (YES in step S9), the relative position of the substrate 1 with respect to the film 60 is driven by driving the position correction mechanism 111. Is corrected (step S10).

  Specifically, in step S10, the position correction mechanism 111 drives the driving unit 111b to move the second substrate transport roller unit 31 that transports the substrate 1 together with the base unit 111a in the width direction (Y Direction). The position correction mechanism 111 moves the second substrate transport roller unit 31 in a direction that eliminates the positional shift generated between the film 60 and the substrate 1. The second substrate transport roller unit 31 is moved along the Y direction by the drive unit 111b together with the base unit 111a while the substrate 1 is transported. Thereby, the board | substrate 1 supplied to the film sticking part 105 via the 2nd board | substrate conveyance roller part 31 (position correction | amendment mechanism 111) does not have the position shift of the width direction with respect to the film 60, and a mutual position in the width direction does not exist. It will be in a consistent state.

  On the other hand, when the determination unit 112 determines that the position of the film 60 with respect to the substrate 1 is not shifted in the film width direction (NO in step S9), the second substrate transport roller without driving the position correction mechanism 111. The substrate 31 is transported to the lower side of the film sticking part 105 by the part 31, and the process proceeds to the film sticking process described later.

  After the relative position of the film 60 with respect to the substrate 1 is corrected as described above, the film 60 is attached to the substrate 1 (step S11). In step S11, the film sticking part 105 sticks the film 60 with respect to the board | substrate 1 conveyed by the board | substrate conveyance part 103 (2nd board | substrate conveyance roller part 31).

  Specifically, the substrate 1 is transported to the third substrate transport roller unit 32 (transport roller 32a) through the first substrate transport roller unit 30 and the second substrate transport roller unit 31. The film transport unit 104 lowers the film sticking roller 40 in accordance with the timing at which the substrate 1 reaches the third substrate transport roller unit 32. Thereby, the film sticking roller 40 starts pressing the film 60 (sticking part) against the substrate 1 positioned on the transporting roller 32a (third substrate transporting roller part 32) of the substrate transporting part 103. In addition, the board | substrate conveyance part 103 synchronizes the timing which the conveyance direction front-end | tip of the board | substrate 1 arrives at the film sticking part 105 so that the sticking part of the film 60 conveyed to the film conveyance part 104 reaches the film sticking part 105. The conveyance speed of the substrate 1 is controlled.

  The film 60 is attached to the protective material 62 by the adhesive layer 63 in a state where the main film material 61 is cut into a predetermined length (attached portion or non-attached portion) by a cutting process by the cutter unit 48. Yes.

  Specifically, as described above, the film sticking roller 40 moves down at a timing when the leading end portion in the transport direction of the main film material 61 corresponding to the sticking portion of the film 60 coincides with the leading end in the transport direction of the substrate 1. In the present embodiment, in step S8, when the second substrate transport roller unit 32 transports the substrate 1, the position of the substrate 1 is corrected so that there is no displacement in the width direction with respect to the film 60. Therefore, since the main film material 61 of the pasting portion is transported between the film pasting roller 40 and the transporting roller 32a with no positional deviation in the width direction with respect to the substrate 1, it is sandwiched together with the substrate 1. The main film material 61 is bonded to the substrate 1 through the adhesive N with no positional deviation.

  The film 60 passing through the film application roller 40 is taken up by the film take-up unit 51 via the relay rollers 52 and 53. Here, since the relay roller 52 is located above (Z direction) from the film sticking position by the film sticking roller 40, the film 60 is sharply bent upward through the film sticking roller 40.

  Therefore, the film 60 folded upward by the relay roller 52 is such that only the main film material 61 remains on the substrate 1 via the adhesive N, and only the protective material 62 is conveyed to the relay roller 52 side. 61 and the protective material 62 are separated (step S12). The protective material 62 separated from the film 60 is wound around the film winding unit 51 via the relay rollers 52 and 53 (step S13).

  The substrate 1 on which the main film material 61 is pasted by the film pasting unit 105 is transported to the fourth substrate transport roller unit 33. Here, the film sticking roller 40 is raised before coming into contact with the rear end in the carrying direction of the substrate 1 as described above in order to prevent the film sticking roller 40 from being sandwiched between the non-sticking part and the carrying roller 32a. The film 60 is not sufficiently pressed against the substrate 1 on the rear end side in the direction, and the film 60 is not sufficiently pasted.

  In this embodiment, in the 4th board | substrate conveyance roller part 33, until the edge of the rear end in the conveyance direction of the board | substrate 1 passes the board | substrate 1 between the conveyance auxiliary | assistant part 135 (sticking auxiliary roller 135b), the board | substrate 1 is conveyed between the conveyance rollers 135a. The cut portion of the rear end of the film 60 that is insufficiently pasted by being sandwiched is securely bonded to the substrate 1. Therefore, the film 60 can be satisfactorily bonded over the entire surface of the substrate 1.

  The substrate 1 to which the main film material 61 is attached is accommodated in a substrate unloading cassette (not shown) through the roller pair 133 and the fifth substrate transport roller unit 34 (step S14).

  The sticking apparatus 100 repeats the above-described film sticking processing step SS1 according to steps S1 to S14 until the sticking of the main film material 61 (film 60) to the predetermined number of substrates 1 in the board supply unit 102 is completed ( Step S15). As described above, the pasting apparatus 100 can satisfactorily paste the film 60 to the predetermined number of substrates 1.

  As described above, according to the present embodiment, the coating process of applying an adhesive or a pressure-sensitive adhesive to the film 60, the process of cutting the film 60, and the process of attaching the film 60 to the substrate 1 are performed in a consistent line. Therefore, the film 60 can be attached to the substrate 1 efficiently. Moreover, since the position correction mechanism 111 corrects the relative position in the width direction of the film 60 with respect to the substrate 1, that is, the positional deviation, the substrate 1 and the film 60 can be attached with high accuracy.

  Moreover, in the said embodiment, since the position correction mechanism 111 is provided with the 2nd board | substrate conveyance roller part 31 formed integrally, the relative position of the board | substrate 1 with respect to the film 60 can be adjusted, conveying the board | substrate 1. FIG. Further, since the position correction mechanism 111 corrects the position of the substrate 1 in the width direction, the relative position between the substrate 1 and the film 60, that is, the relative position shift can be easily and easily performed without moving the film 60 in the width direction. It can be corrected reliably.

  Moreover, since the sticking apparatus 100 cut | disconnects the film 60 which apply | coated the adhesive agent or the adhesive to predetermined length, what was unwound from the elongate roll body R as the film 60 can be used. Therefore, the thing of various magnitude | sizes can be used as the board | substrate 1 which becomes the object which a film 60 is affixed, and it becomes a highly versatile sticking apparatus. Moreover, the film 60 unwound from the roll body R can be sequentially attached to the plurality of substrates 1, and the attaching process can be performed efficiently.

  Moreover, since the main film material 61 stuck on the board | substrate 1 is protected by the protective material 62, the sticking apparatus 100 can prevent the main film material 61 before being stuck on the board | substrate 1 being damaged.

  In addition, since the adhesive device 100 is applied with an adhesive or a pressure-sensitive adhesive on the film 60 that is conveyed along the direction intersecting the horizontal plane, for example, the vertical direction, the mist that is scattered during application and falls downward is attached. Thus, an adhesive or pressure-sensitive adhesive having a stable film thickness can be applied to the film 60. Therefore, it is possible to suppress the occurrence of unevenness on the application surface of the adhesive or the pressure-sensitive adhesive. Therefore, the adhesiveness between the substrate 1 and the film can be improved.

  Note that the present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the spirit of the invention. For example, in the above-described embodiment, the case where the position correction mechanism 111 is formed integrally with the substrate transport unit 103 (second substrate transport roller unit 31) has been described as an example. That is, when the relative position between the film 60 and the substrate 1 is adjusted, the position of the substrate 1 is adjusted to correct the positional deviation between the two, but the present invention is not limited to this. For example, a configuration in which the relative position between the film 60 and the substrate 1 is corrected by correcting the position of the film 60 in the width direction may be employed. Moreover, you may employ | adopt the structure which correct | amends a mutual relative position by moving the film 60 and the board | substrate 1 in the width direction (Y direction), respectively.

  Moreover, in the said embodiment, although the case where a drive part was provided in both the film delivery part 41 and the film winding part 51 was mentioned as an example, a drive part is provided only in the film winding part 51, and the film winding part 51 is provided. It is good also as a structure which winds up the film 60 which was unwound from the film delivery part 41 rotated by being driven and rotated.

  Moreover, although the case where the heating unit 107 heats the film 60 in two stages has been described as an example in the above embodiment, the film 60 may be heated in one stage or three or more stages.

(Second embodiment)
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.
FIG. 13 is a diagram illustrating a schematic configuration of a pasting apparatus 100A according to the present embodiment.
As shown in FIG. 13, the attaching device 100 </ b> A according to the present embodiment includes an inspection unit 170 that inspects a film attached to the substrate 1. The inspection unit 170 is disposed between the fourth substrate transport roller unit 33 and the fifth substrate transport roller unit 34.

  The inspection unit 170 includes a substrate transport roller unit 171, an imaging unit 172 that images a film (main film material 61) attached to the substrate 1, and a determination unit that determines an inspection result based on an imaging result obtained by the imaging unit 172. 173.

  The substrate transport roller unit 171 has a plurality of (four in this embodiment) driven rollers 171a. Thereby, the substrate transport roller unit 171 receives the substrate 1 transported from the fourth substrate transport roller unit 33 and moves it so as to be delivered to the fifth substrate transport roller unit 34.

  The imaging unit 172 is configured by a CCD sensor or the like, for example. This CCD sensor includes a plurality of pixels arranged in a matrix. Each pixel of the CCD sensor includes a light receiving element such as a photodiode and a switching element such as a thin film transistor.

  The determination unit 173 is for determining the state of the film attached to the substrate 1 based on the image captured by the imaging unit 172. The determination unit 173 may be configured by hardware such as an arithmetic circuit, or may be realized by software such as a program.

FIG. 14 is a diagram for explaining an example of a method for inspecting a film (main film material 61) by the inspection unit 170. FIG.
As illustrated in FIG. 14, the inspection unit 170 images the four corners of the substrate 1 on which the main film material 61 is pasted with the imaging unit 172, and transmits the captured image G to the determination unit 173. The determination unit 173 calculates distances D <b> 1 and D <b> 2 between the respective edge portions constituting the corners of the substrate 1 and the main film material 61 for the image G transmitted from the imaging unit 172.

  The determination unit 173 compares the calculated distances D1 and D2 with the threshold values stored in advance, and the main film material 61 is applied to the substrate 1 when the difference between the threshold values and the distances D1 and D2 is equal to or greater than a predetermined value. On the other hand, it is determined that the substrate is bent and the substrate 1 is determined as a defective product. On the other hand, the determination unit 173 compares the calculated distances D1 and D2 with the above threshold value, and the main film material 61 is good with respect to the substrate 1 when the difference between the threshold value and the distances D1 and D2 is less than a predetermined value. The substrate 1 is determined as a non-defective product.

  As described above, according to the present embodiment, since the inspection unit 170 is provided, it is possible to determine the affixed state of the film (main film material 61) on the substrate 1, and therefore, it is easy to determine whether the substrate 1 is good or defective. Can be done. Therefore, it is possible to provide a pasting apparatus 100A that can sort out defective substrates 1 with poor film pasting and eliminate them in advance.

  In the present embodiment, the attaching device 100A may feed back the inspection result by the inspection unit 170 to the position correction mechanism 111. Specifically, the position correction mechanism 111 adjusts the relative position (positional deviation) between the substrate 1 and the film 60 based on the inspection result of the inspection unit 170 in addition to the inspection result of the film position detection unit 109. According to this, for example, even when the film position detecting unit 109 breaks down or the film 60 is displaced in the width direction on the downstream side of the film position detecting unit 109 for some reason, the inspection unit 170 performs the operation. The relative position between the substrate 1 and the film 60 can be corrected by feeding back the inspection result. Therefore, the substrate 1 and the film 60 can be attached with high accuracy.

(Third embodiment)
Next, a third embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.
FIG. 15 is a diagram illustrating a configuration of a sticking device according to the third embodiment. In the sticking device 100B, a plurality of ionizers 110 may be arranged in the device housing 101 as shown in FIG. According to this, it is possible to prevent the occurrence of problems such as sticking of the film 60 due to static electricity by removing static electricity generated by the transport of the film 60, and the film 60 can be transported well and pasted to the substrate 1. it can.

  Further, as shown in FIG. 15, a cooling unit 108 may be provided on the downstream side of the heating unit 107 in the transport direction of the film 60. According to this, the film 60 heated by the heating unit 107 can be cooled and lowered to a predetermined temperature in a short time. Therefore, the conveyance path | route of the film 60 can be shortened, the film conveyance part 104 is reduced in size, and size reduction of the sticking apparatus 100 itself is realizable.

(Fourth embodiment)
Next, a fourth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the above embodiment, the film thickness adjusting mechanism 72 has been exemplified in which the surface of the belt 93 is set at substantially the same height as the surface of the film 60, but in this embodiment, the dummy roller 90 is used without using the belt 93. The structure which makes the height of the surface of this and the surface of the film 60 correspond is employ | adopted. In this case, it is preferable to use, for example, SUS, resin, aluminum or the like having a low surface roughness as the material of the dummy roller 90. According to this, the film forming conditions of the adhesive or the adhesive at the film end of the film 60 are set. It can be adjusted and adjusted well.

  FIGS. 16A and 16B are diagrams showing the configuration of the film thickness adjusting unit according to the fourth embodiment, where FIG. 16A is a perspective view and FIG. 16B is a cross-sectional view. In the present embodiment, as shown in FIGS. 16A and 16B, the rotating shaft of the dummy roller 95 is integrally formed with the film holding roller 43, and the dummy roller 95 and the film holding roller 43 rotate integrally. Is adopted.

  In the present embodiment, as shown in FIGS. 16A and 16B, the dummy roller 95 formed integrally with the film holding roller 43 constitutes the film thickness adjusting unit. The dummy roller 95 rotates coaxially with the film holding roller 43. The dummy roller 95 has a surface 95 a set at the same height as the surface of the film 60. That is, the dummy roller 95 has a larger outer diameter than the film holding roller 43 that holds the film 60 by the thickness of the film 60.

  By the way, when an adhesive or a pressure-sensitive adhesive is applied from the nozzle 73 to the film 60, the mist scattered from the nozzle 73 adheres to the dummy roller 95. In this modification, a squeegee member 96 that contacts the surface of the dummy roller 95 is disposed. The squeegee member 96 comes into contact with the surface on the downstream side in the rotation direction with respect to the contact portion with the film 60 in the dummy roller 95. As a material of the squeegee member 96, it is preferable to use rubber, resin, or the like. According to this, the mist attached to the dummy roller 95 can be scraped off without damaging the dummy roller 95. Thereby, the squeegee member 96 can scrape off the mist scattered from the nozzle 73 and adhering to the surface of the dummy roller 95. The mist scraped off by the squeegee member 96 may be recovered by the cleaning liquid W stored in the bottom 89 of the main body 80 in the mist recovery mechanism 71 shown in FIG. 10, or a separate recovery mechanism may be provided. .

  According to this, the film thickness adjusting unit of the present invention is configured only by the dummy roller 95, the number of parts can be reduced, and the cost can be reduced. Moreover, since the dummy roller 95 and the film holding roller 43 rotate integrally, the drive part in these dummy roller 90 and the film holding roller 43 can be shared, and cost reduction can be aimed at.

(Fifth embodiment)
Next, a fifth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the first embodiment, as the timing adjustment unit 47, the configuration in which the tension applied to the film 60 by the transport roller 241 is freely adjusted and the transport path of the film 60 is changed is illustrated, but the present invention is limited to this. It will never be done.

FIG. 17 is a diagram illustrating a schematic configuration of a pasting device 100C according to the present embodiment.
As shown in FIG. 17, the timing adjustment unit 247 according to this embodiment includes a contact roller unit 147 that contacts the back side of the film 60, a holding unit 148 that holds the corresponding contact roller unit 147, and the holding unit 148. And a drive unit 149 that can move along the conveyance direction (X direction) of the film 60.

  When the film 60 is cut by the cutter unit 48, the timing adjustment unit 247 moves the contact roller unit 147 upstream in the conveyance direction so as to match the conveyance speed between the part where the film 60 stops once and the other part in the middle of conveyance. Move in (+ X direction). As a result, the distance between the cutter unit 48 and the timing adjusting unit 47 (contact roller unit 147) becomes longer, so that the apparent conveyance speed of the film 60 to the cutter unit 48 can be reduced, and the film 60 can be conveyed. By matching the speed, it is possible to prevent the film 60 from becoming dull due to variations in the transport speed.

Also in the present embodiment, since the timing adjustment unit 247 adjusts the variation in the conveyance speed that occurs when the film 60 is cut, it is possible to prevent the film 60 from becoming dull by adjusting the conveyance speed of the film 60.
Therefore, the film transport unit 104 can satisfactorily cut the film 60 by the cutter unit 48 in the transported state without causing the transport failure of the film 60. Further, since the film transport unit 104 does not need to temporarily stop the transport of the film 60 for each cutting operation by the cutter unit 48, the work time required for attaching the film 60 can be shortened.

(Sixth embodiment)
Next, a sixth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the first embodiment, the case where the thickness of the adhesive or pressure-sensitive adhesive applied to the film end in the width direction of the film 60 is made uniform by providing the film thickness adjusting mechanism 72 has been described. However, the film thickness adjusting mechanism 72 may not be provided.

FIG. 18 is an enlarged view of the peripheral configuration of the film holding roller 43 as the main configuration of the sticking device according to the present embodiment.
As shown in FIG. 18, in this embodiment, a roller cleaning unit 150 that cleans the adhesive or pressure-sensitive adhesive attached to the film holding roller 43 is provided.

  In the present embodiment, the width of the film holding roller 43 in the direction intersecting the transport direction of the film 60 is larger than the width of the film 60. Therefore, when the adhesive or pressure-sensitive adhesive is applied from the nozzle 73, the film holding roller 43 holds the entire surface of the film 60 to prevent wrinkles or slack from occurring on the adhesive or pressure-sensitive adhesive application surface. Therefore, the adhesive or pressure-sensitive adhesive is applied to the film 60 without any unevenness.

  On the other hand, since the film holding roller 43 is wider than the film 60, both ends are exposed when the film 60 is held. For this reason, a part of the adhesive or pressure-sensitive adhesive applied from the nozzle 73 also adheres to the film holding roller 43. On the other hand, in this embodiment, the structure provided with the said roller washing | cleaning part 150 which wash | cleans the adhesive agent or adhesive which adhered to the film holding roller 43 is employ | adopted.

  The roller cleaning unit 150 includes a cleaning liquid application unit 150a that applies at least a cleaning liquid to a portion of the film holding roller 43 to which the adhesive or pressure-sensitive adhesive has adhered, and a squeegee member 150b that slides on the surface 43a of the film holding roller 43 to which the cleaning liquid is applied Including.

  The cleaning liquid application unit 150a includes, for example, a spray nozzle or the like, and is arranged to apply the cleaning liquid from a direction that does not face the adhesive or pressure-sensitive adhesive application surface of the film 60. In the present embodiment, the cleaning liquid application unit 150 a is disposed in parallel with the transport direction of the film 60 and applies the cleaning liquid to the film holding roller 43 from above. This prevents the occurrence of a problem such that the cleaning liquid adheres to the adhesive or pressure-sensitive adhesive application area of the film 60.

  The squeegee member 150b is in sliding contact with at least a portion of the surface 43a of the film holding roller 43 to which the cleaning liquid is attached. In the present embodiment, the squeegee member 150b has the same width as the film holding roller 43, and can wipe the entire surface 43a of the film holding roller 43 in a lump. Note that the squeegee member 150b may employ a configuration in which only the end portion of the surface 43a of the film holding roller 43 to which the cleaning liquid adheres is wiped. In this case, two squeegee members 150b are prepared, and the film holding roller 43 What is necessary is just to make it slidably contact with the surface 43a of both ends.

  The squeegee member 150b comes into contact with the surface 43a on the downstream side in the rotation direction with respect to the contact portion with the film 60 in the film holding roller 43. As a material of the squeegee member 150b, it is preferable to use rubber, resin or the like. According to this, the adhesive or pressure-sensitive adhesive and the cleaning liquid adhering to the film holding roller 43 are good without damaging the film holding roller 43. Can be scraped off.

  As described above, according to the present embodiment, even a sticking device that employs a configuration that does not have the film thickness adjustment mechanism 72 includes the roller cleaning unit 150, so that the adhesive or the adhesive attached to the film holding roller 43 The pressure-sensitive adhesive can be removed satisfactorily. Therefore, it is possible to prevent the occurrence of a problem that the inside of the apparatus is contaminated by the adhesive or pressure-sensitive adhesive attached to the film holding roller 43.

(Seventh embodiment)
Next, a seventh embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the first embodiment, the case where the cutter unit 48 cuts the main film material 61 along the width direction with the rotary blade 161 is taken as an example. However, the present invention is not limited to this, and another cutter unit may be used. A configuration may be adopted.

FIG. 19 is a diagram illustrating a schematic configuration of a cutter unit and its periphery, which is a main configuration of the sticking device according to the present embodiment.
As shown in FIG. 19, the cutter unit 160 includes a blade 48 a for cutting (cutting) the film 60, and a pedestal portion 48 b disposed to face the blade 48 a. The cutter part 160 can cut | disconnect the film 60 by pressing the blade 48a with respect to the film 60 on the base part 48b. Specifically, as shown in FIG. 19, the cutter unit 48 presses the blade 48 a to a position where only the main film material 61 of the film 60 can be cut. Thereby, the film 60 can be made into the state affixed on the protective material 62 by the adhesion layer 63 in the state which the main film material 61 cut into predetermined length.

  As described above, according to the present embodiment, the cutter unit 160 presses the blade 48a over the entire width direction of the film 60 to cut the film 60 collectively and simply and reliably. Can do.

DESCRIPTION OF SYMBOLS 1 ... Board | substrate, N ... Adhesive, R ... Roll body, 60 ... Film, 61 ... Main film material, 62 ... Protective material, 100 ... Sticking apparatus, 104 ... Film conveyance part, 105 ... Film sticking part, 106 ... Coating part 109: Film position detection unit 111: Position correction mechanism 48, 160: Cutter unit

Claims (7)

  1. A substrate transport section for transporting the substrate;
    A film transport section for transporting the film;
    An application part for applying an application liquid to the film;
    A sticking part pasting the film on the substrate,
    In the film before sticking to the substrate, a position detection unit that detects a relative position with respect to the substrate in the film width direction intersecting the transport direction;
    A position correction mechanism for correcting the relative position based on at least a detection result of the position detection unit at the time of applying the film;
    The position correction mechanism is
    A roller pair that functions as a part of the substrate transport unit and transports the substrate in a sandwiched state,
    A base portion for holding the roller pair;
    A drive unit that drives the base unit in the width direction of the substrate,
    A pasting apparatus that corrects the relative position with respect to the substrate in a state of being transported by the substrate transport unit.
  2. The pasting apparatus according to claim 1 , wherein the position correction mechanism corrects the position of the substrate in a substrate width direction intersecting a substrate transport direction in which the substrate is transported.
  3. Sticking apparatus according to claim 1 or 2, further comprising a cutter for cutting the film in which the coating liquid has been applied to a predetermined length.
  4. The film includes a main film material to which the coating liquid is applied, and a protective material,
    The sticking unit, according to any one of claims 1 to 3, characterized in that paste the main film material through the coating solution to the substrate while peeling the protective material from the main film material Pasting device.
  5. A film inspection unit for inspecting the film attached to the substrate;
    Wherein the position correction mechanism further based on the detection result of the film inspection unit, sticking apparatus according to any one of claim 1 to 4, characterized in that to correct the relative positions.
  6. The application device according to any one of claims 1 to 5 , wherein the application unit applies an adhesive as the application liquid.
  7. The said film conveyance part conveys the said film along the direction which cross | intersects a horizontal surface with respect to the said application part, The sticking apparatus as described in any one of Claims 1-6 characterized by the above-mentioned.
JP2013114908A 2013-05-31 2013-05-31 Pasting device Active JP6215576B2 (en)

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TW103119060A TWI628080B (en) 2013-05-31 2014-05-30 Adhesion apparatus

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US6808593B2 (en) * 2002-03-19 2004-10-26 Af Machine Inc. Spot laminator with charging bar
JP4371709B2 (en) * 2003-06-05 2009-11-25 富士フイルム株式会社 Optical film sticking apparatus and method
DE102004012618B3 (en) * 2004-03-12 2005-10-27 Erich Dipl.-Ing. Thallner Apparatus and method for applying a film to a contact surface of a wafer
CN100547752C (en) * 2005-05-19 2009-10-07 琳得科株式会社 Adhering apparatus
JP2007000815A (en) * 2005-06-24 2007-01-11 Miyako Roller Industry Co Method and apparatus for forming coating film on substrate
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JP2011201677A (en) * 2010-03-26 2011-10-13 Sharp Corp Method and device for conveying plate-like substrate
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