JP4096348B2 - ケーブル処理装置 - Google Patents

ケーブル処理装置 Download PDF

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Publication number
JP4096348B2
JP4096348B2 JP2000107162A JP2000107162A JP4096348B2 JP 4096348 B2 JP4096348 B2 JP 4096348B2 JP 2000107162 A JP2000107162 A JP 2000107162A JP 2000107162 A JP2000107162 A JP 2000107162A JP 4096348 B2 JP4096348 B2 JP 4096348B2
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JP
Japan
Prior art keywords
shaft
cable
clamp
cooling water
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000107162A
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English (en)
Japanese (ja)
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JP2001287188A (ja
JP2001287188A5 (enExample
Inventor
洋一 本村
健生 鈴木
義昭 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
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Yaskawa Electric Corp
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Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2000107162A priority Critical patent/JP4096348B2/ja
Publication of JP2001287188A publication Critical patent/JP2001287188A/ja
Publication of JP2001287188A5 publication Critical patent/JP2001287188A5/ja
Application granted granted Critical
Publication of JP4096348B2 publication Critical patent/JP4096348B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2000107162A 2000-04-07 2000-04-07 ケーブル処理装置 Expired - Fee Related JP4096348B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000107162A JP4096348B2 (ja) 2000-04-07 2000-04-07 ケーブル処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000107162A JP4096348B2 (ja) 2000-04-07 2000-04-07 ケーブル処理装置

Publications (3)

Publication Number Publication Date
JP2001287188A JP2001287188A (ja) 2001-10-16
JP2001287188A5 JP2001287188A5 (enExample) 2006-05-25
JP4096348B2 true JP4096348B2 (ja) 2008-06-04

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ID=18620192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000107162A Expired - Fee Related JP4096348B2 (ja) 2000-04-07 2000-04-07 ケーブル処理装置

Country Status (1)

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JP (1) JP4096348B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4432089B2 (ja) 2007-05-15 2010-03-17 ニッタ株式会社 スイベルジョイント
US11602064B2 (en) 2020-09-01 2023-03-07 Applied Materials, Inc. Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

Also Published As

Publication number Publication date
JP2001287188A (ja) 2001-10-16

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