JP4093828B2 - 測定用プローブ及び光学式測定装置 - Google Patents

測定用プローブ及び光学式測定装置 Download PDF

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Publication number
JP4093828B2
JP4093828B2 JP2002251244A JP2002251244A JP4093828B2 JP 4093828 B2 JP4093828 B2 JP 4093828B2 JP 2002251244 A JP2002251244 A JP 2002251244A JP 2002251244 A JP2002251244 A JP 2002251244A JP 4093828 B2 JP4093828 B2 JP 4093828B2
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Japan
Prior art keywords
movable member
measurement
axis
contact
magnetic force
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Expired - Fee Related
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JP2002251244A
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Japanese (ja)
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JP2004093192A (ja
JP2004093192A5 (enExample
Inventor
圭司 久保
英博 吉田
孝昭 葛西
英貴 堤
恵一 吉住
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2002251244A priority Critical patent/JP4093828B2/ja
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Publication of JP2004093192A5 publication Critical patent/JP2004093192A5/ja
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Publication of JP4093828B2 publication Critical patent/JP4093828B2/ja
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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2002251244A 2002-08-29 2002-08-29 測定用プローブ及び光学式測定装置 Expired - Fee Related JP4093828B2 (ja)

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JP2002251244A JP4093828B2 (ja) 2002-08-29 2002-08-29 測定用プローブ及び光学式測定装置

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Application Number Priority Date Filing Date Title
JP2002251244A JP4093828B2 (ja) 2002-08-29 2002-08-29 測定用プローブ及び光学式測定装置

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JP2004093192A JP2004093192A (ja) 2004-03-25
JP2004093192A5 JP2004093192A5 (enExample) 2005-10-27
JP4093828B2 true JP4093828B2 (ja) 2008-06-04

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1906135B1 (en) 2006-05-18 2012-12-05 Panasonic Corporation Probe for shape measuring apparatus, and shape measuring apparatus
JP4291849B2 (ja) 2006-12-20 2009-07-08 パナソニック株式会社 三次元測定プローブ
JP2008203191A (ja) * 2007-02-22 2008-09-04 Nippon Steel Materials Co Ltd 接触式形状測定器用プローブヘッド
JP5154149B2 (ja) * 2007-06-20 2013-02-27 パナソニック株式会社 三次元測定プローブ
TWI353885B (en) * 2009-06-26 2011-12-11 Primax Electronics Ltd Thickness detecting mechanism
CN103398663A (zh) * 2013-08-09 2013-11-20 昆山允可精密工业技术有限公司 一种单测头自动薄板厚度测量装置
JP5945788B2 (ja) * 2014-05-29 2016-07-05 パナソニックＩｐマネジメント株式会社 三次元形状測定装置
US11128086B2 (en) * 2018-05-11 2021-09-21 The Boeing Company Apparatus for contact insertion and retention testing
CN115247991B (zh) * 2022-07-18 2025-04-25 江西荧光磁业有限公司 一种钕铁硼永磁材料表面镀层检测装置及其检测方法

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JP2004093192A (ja) 2004-03-25

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