JP4062335B2 - 圧電共振部品の周波数調整方法 - Google Patents

圧電共振部品の周波数調整方法 Download PDF

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Publication number
JP4062335B2
JP4062335B2 JP2005517191A JP2005517191A JP4062335B2 JP 4062335 B2 JP4062335 B2 JP 4062335B2 JP 2005517191 A JP2005517191 A JP 2005517191A JP 2005517191 A JP2005517191 A JP 2005517191A JP 4062335 B2 JP4062335 B2 JP 4062335B2
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JP
Japan
Prior art keywords
piezoelectric
resonant component
frequency
electrode
piezoelectric resonant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005517191A
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English (en)
Japanese (ja)
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JPWO2005071832A1 (ja
Inventor
功 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2005071832A1 publication Critical patent/JPWO2005071832A1/ja
Application granted granted Critical
Publication of JP4062335B2 publication Critical patent/JP4062335B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005517191A 2004-01-27 2004-10-28 圧電共振部品の周波数調整方法 Expired - Fee Related JP4062335B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004018373 2004-01-27
JP2004018373 2004-01-27
PCT/JP2004/016043 WO2005071832A1 (ja) 2004-01-27 2004-10-28 圧電共振部品の周波数調整方法及び圧電共振部品

Publications (2)

Publication Number Publication Date
JPWO2005071832A1 JPWO2005071832A1 (ja) 2007-07-26
JP4062335B2 true JP4062335B2 (ja) 2008-03-19

Family

ID=34805565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005517191A Expired - Fee Related JP4062335B2 (ja) 2004-01-27 2004-10-28 圧電共振部品の周波数調整方法

Country Status (4)

Country Link
JP (1) JP4062335B2 (zh)
KR (1) KR100744623B1 (zh)
CN (1) CN1795609B (zh)
WO (1) WO2005071832A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4414987B2 (ja) * 2006-07-27 2010-02-17 日本電波工業株式会社 圧電振動子の製造方法、圧電振動子及び電子部品
JP2014092500A (ja) * 2012-11-06 2014-05-19 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP2017139682A (ja) * 2016-02-05 2017-08-10 セイコーエプソン株式会社 振動片、振動片の製造方法、発振器、電子機器、移動体、および基地局

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038893B2 (ja) * 1976-08-06 1985-09-03 日本電気株式会社 平行電界励振圧電振動子
JPH05109668A (ja) * 1991-10-21 1993-04-30 Seiko Epson Corp 半導体装置の製造方法
JP2837314B2 (ja) 1992-05-22 1998-12-16 川鉄マシナリー株式会社 クレーンの振れ止め制御装置
JPH08274573A (ja) * 1995-03-29 1996-10-18 Olympus Optical Co Ltd マイクロ圧電振動子、その製法及び圧電トランスデューサ
JP2000243340A (ja) * 1999-02-22 2000-09-08 Hitachi Ltd イオンビーム加工方法及びその装置
JP2000269774A (ja) * 1999-03-18 2000-09-29 Murata Mfg Co Ltd 圧電振動素子及び圧電共振部品
JP2000307372A (ja) * 1999-04-16 2000-11-02 Daishinku Corp 表面実装型水晶振動子および表面実装型水晶振動子の製造方法
JP2001144571A (ja) * 1999-11-11 2001-05-25 Tdk Corp 圧電振動部品
JP2001230653A (ja) * 2000-02-17 2001-08-24 Matsushita Electric Ind Co Ltd 圧電振動素子およびこの圧電振動素子を用いたフィルタ
JP3917061B2 (ja) * 2002-11-14 2007-05-23 株式会社昭和真空 圧電素子の周波数調整装置

Also Published As

Publication number Publication date
CN1795609B (zh) 2010-05-26
KR100744623B1 (ko) 2007-08-01
CN1795609A (zh) 2006-06-28
JPWO2005071832A1 (ja) 2007-07-26
WO2005071832A1 (ja) 2005-08-04
KR20060013528A (ko) 2006-02-10

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