JP4053102B2 - 半導体装置およびその作製方法 - Google Patents
半導体装置およびその作製方法 Download PDFInfo
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- JP4053102B2 JP4053102B2 JP26921496A JP26921496A JP4053102B2 JP 4053102 B2 JP4053102 B2 JP 4053102B2 JP 26921496 A JP26921496 A JP 26921496A JP 26921496 A JP26921496 A JP 26921496A JP 4053102 B2 JP4053102 B2 JP 4053102B2
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- semiconductor device
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- -1 oxygen ions Chemical class 0.000 description 1
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26921496A JP4053102B2 (ja) | 1996-09-18 | 1996-09-18 | 半導体装置およびその作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26921496A JP4053102B2 (ja) | 1996-09-18 | 1996-09-18 | 半導体装置およびその作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1093099A JPH1093099A (ja) | 1998-04-10 |
| JPH1093099A5 JPH1093099A5 (enExample) | 2004-09-30 |
| JP4053102B2 true JP4053102B2 (ja) | 2008-02-27 |
Family
ID=17469267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26921496A Expired - Fee Related JP4053102B2 (ja) | 1996-09-18 | 1996-09-18 | 半導体装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4053102B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4275336B2 (ja) | 2001-11-16 | 2009-06-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP5439793B2 (ja) * | 2008-11-06 | 2014-03-12 | 富士通株式会社 | 二次イオン質量分析法の深さ校正用試料、その製造方法及び二次イオン質量分析方法 |
| KR101763959B1 (ko) * | 2009-10-08 | 2017-08-14 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 표시 장치, 및 전자 기기 |
| WO2012157472A1 (en) * | 2011-05-13 | 2012-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
-
1996
- 1996-09-18 JP JP26921496A patent/JP4053102B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1093099A (ja) | 1998-04-10 |
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