JP4034978B2 - 基板貼り合わせ装置 - Google Patents

基板貼り合わせ装置 Download PDF

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Publication number
JP4034978B2
JP4034978B2 JP2002055066A JP2002055066A JP4034978B2 JP 4034978 B2 JP4034978 B2 JP 4034978B2 JP 2002055066 A JP2002055066 A JP 2002055066A JP 2002055066 A JP2002055066 A JP 2002055066A JP 4034978 B2 JP4034978 B2 JP 4034978B2
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Prior art keywords
stage
sealed container
substrate
coupling member
moving device
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Expired - Fee Related
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JP2002055066A
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Japanese (ja)
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JP2003255293A (ja
JP2003255293A5 (enExample
Inventor
崇史 高橋
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2002055066A priority Critical patent/JP4034978B2/ja
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Publication of JP2003255293A5 publication Critical patent/JP2003255293A5/ja
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JP2002055066A 2002-02-28 2002-02-28 基板貼り合わせ装置 Expired - Fee Related JP4034978B2 (ja)

Priority Applications (1)

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JP2002055066A JP4034978B2 (ja) 2002-02-28 2002-02-28 基板貼り合わせ装置

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JP2002055066A JP4034978B2 (ja) 2002-02-28 2002-02-28 基板貼り合わせ装置

Publications (3)

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JP2003255293A JP2003255293A (ja) 2003-09-10
JP2003255293A5 JP2003255293A5 (enExample) 2005-09-02
JP4034978B2 true JP4034978B2 (ja) 2008-01-16

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10696610B2 (en) 2017-12-11 2020-06-30 Valvoline Licensing And Intellectual Property Llc Scalable synthesis of hydrogenated alpha styrene dimer
US10927321B2 (en) 2019-03-13 2021-02-23 Valvoline Licensing And Intellectual Property Llc Traction fluid with improved low temperature properties

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5197089B2 (ja) * 2008-03-27 2013-05-15 株式会社ジャパンディスプレイセントラル 平面表示装置の製造方法及び製造装置
JP5047201B2 (ja) * 2009-01-27 2012-10-10 アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド 基板合着装置
CN102490447B (zh) * 2011-11-16 2015-04-08 申日恒 Ccd定位的自动贴合机及其定位贴合方法
CN104816280A (zh) * 2015-03-17 2015-08-05 京东方光科技有限公司 一种胶框与膜材贴合设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10696610B2 (en) 2017-12-11 2020-06-30 Valvoline Licensing And Intellectual Property Llc Scalable synthesis of hydrogenated alpha styrene dimer
US10927321B2 (en) 2019-03-13 2021-02-23 Valvoline Licensing And Intellectual Property Llc Traction fluid with improved low temperature properties

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Publication number Publication date
JP2003255293A (ja) 2003-09-10

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