JP4025075B2 - ポジ型感光性組成物 - Google Patents
ポジ型感光性組成物 Download PDFInfo
- Publication number
- JP4025075B2 JP4025075B2 JP2002003899A JP2002003899A JP4025075B2 JP 4025075 B2 JP4025075 B2 JP 4025075B2 JP 2002003899 A JP2002003899 A JP 2002003899A JP 2002003899 A JP2002003899 A JP 2002003899A JP 4025075 B2 JP4025075 B2 JP 4025075B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituted
- acid
- carbon atoms
- atom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 0 CC(C)OC(C)*[C@@]1[C@]2OC3(CCCCC3)O[C@]2O[C@@]1C(C*)O Chemical compound CC(C)OC(C)*[C@@]1[C@]2OC3(CCCCC3)O[C@]2O[C@@]1C(C*)O 0.000 description 10
- ILVUFHOMKRKRGS-UHFFFAOYSA-N C=[O]C1(CCCCC1)[O]=C Chemical compound C=[O]C1(CCCCC1)[O]=C ILVUFHOMKRKRGS-UHFFFAOYSA-N 0.000 description 3
- PDXRQENMIVHKPI-UHFFFAOYSA-N OC1(CCCCC1)O Chemical compound OC1(CCCCC1)O PDXRQENMIVHKPI-UHFFFAOYSA-N 0.000 description 3
- AYDGEXKXLPHBND-UHFFFAOYSA-N C(C1)C11C2(CC2)C2(CC2)OCC1 Chemical compound C(C1)C11C2(CC2)C2(CC2)OCC1 AYDGEXKXLPHBND-UHFFFAOYSA-N 0.000 description 2
- KBDZFJDDYRBBLT-UHFFFAOYSA-N CC(C)(CC(C)(C)C(OC(CC(COC)O1)C1=O)=O)C(OCCOCCO)=O Chemical compound CC(C)(CC(C)(C)C(OC(CC(COC)O1)C1=O)=O)C(OCCOCCO)=O KBDZFJDDYRBBLT-UHFFFAOYSA-N 0.000 description 1
- DMIASLBTQQVVPZ-RLZCWDQTSA-N CC(C)COC(C)OC1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 Chemical compound CC(C)COC(C)OC1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 DMIASLBTQQVVPZ-RLZCWDQTSA-N 0.000 description 1
- TXDZWSWAJDGVHT-QLTRYCAESA-N CC(C)COC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O Chemical compound CC(C)COC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O TXDZWSWAJDGVHT-QLTRYCAESA-N 0.000 description 1
- PKNFEBWNYCJPEK-RHXVGDGXSA-N CC(OCCOC(COCCOC)=O)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1C1OC2(CCCCC2)OC1 Chemical compound CC(OCCOC(COCCOC)=O)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1C1OC2(CCCCC2)OC1 PKNFEBWNYCJPEK-RHXVGDGXSA-N 0.000 description 1
- FTQLNMDAIIBGBW-IMVCKPJZSA-N CC(OCCOC(COCCOCCOC)=O)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 Chemical compound CC(OCCOC(COCCOCCOC)=O)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 FTQLNMDAIIBGBW-IMVCKPJZSA-N 0.000 description 1
- BZPVCLSUABCGLV-OBBFSAAOSA-N CC(OCCOC)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 Chemical compound CC(OCCOC)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 BZPVCLSUABCGLV-OBBFSAAOSA-N 0.000 description 1
- WICUROAVKVSYJE-DDYJWGOMSA-N CC(OCCOCCOC)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 Chemical compound CC(OCCOCCOC)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H]1OC2(CCCCC2)OC1 WICUROAVKVSYJE-DDYJWGOMSA-N 0.000 description 1
- FDCYVKJHPJMTLX-AALCSNISSA-N CC(OCCOCCOCCOC)O[C@H](C1)[C@@H]([C@H](CO)O)O[C@@H]1OC1(CCCCC1)[O]=C Chemical compound CC(OCCOCCOCCOC)O[C@H](C1)[C@@H]([C@H](CO)O)O[C@@H]1OC1(CCCCC1)[O]=C FDCYVKJHPJMTLX-AALCSNISSA-N 0.000 description 1
- ZCZZUOGRXUQMJH-UHFFFAOYSA-N CCC(C)(CC(C)(C)C(OC1(CC2CC(C3)C1)CC3OC2=O)=O)C(OC(C)(C1(CC(C2)C3)CC3CC2C1)C=C)=O Chemical compound CCC(C)(CC(C)(C)C(OC1(CC2CC(C3)C1)CC3OC2=O)=O)C(OC(C)(C1(CC(C2)C3)CC3CC2C1)C=C)=O ZCZZUOGRXUQMJH-UHFFFAOYSA-N 0.000 description 1
- FLWKHUXVODMSNX-LMTUPJBHSA-N CCCCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1C1OC2(CCCCC2)OC1 Chemical compound CCCCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1C1OC2(CCCCC2)OC1 FLWKHUXVODMSNX-LMTUPJBHSA-N 0.000 description 1
- IXPGLRWJBMNBLU-QLTRYCAESA-N CCCCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O Chemical compound CCCCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O IXPGLRWJBMNBLU-QLTRYCAESA-N 0.000 description 1
- OQGGJLDVSUCBSL-ISNWTIPXSA-N CCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)OC2O[C@@H]1C1OC2(CCCCC2)OC1 Chemical compound CCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)OC2O[C@@H]1C1OC2(CCCCC2)OC1 OQGGJLDVSUCBSL-ISNWTIPXSA-N 0.000 description 1
- UEBCJFVLXLBMSX-JKMBVOABSA-N CCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O Chemical compound CCOC(C)O[C@@H]1[C@H]2OC3(CCCCC3)O[C@H]2O[C@@H]1[C@H](CO)O UEBCJFVLXLBMSX-JKMBVOABSA-N 0.000 description 1
- CVBASHMCALKFME-UHFFFAOYSA-N COc(cc1)ccc1[S+](c1ccccc1)c1ccccc1 Chemical compound COc(cc1)ccc1[S+](c1ccccc1)c1ccccc1 CVBASHMCALKFME-UHFFFAOYSA-N 0.000 description 1
- RCOCMILJXXUEHU-UHFFFAOYSA-N Cc(cc1)ccc1[S+](c1ccccc1)c1ccccc1 Chemical compound Cc(cc1)ccc1[S+](c1ccccc1)c1ccccc1 RCOCMILJXXUEHU-UHFFFAOYSA-N 0.000 description 1
- KAUCUKASFLXURN-DSNCZLQVSA-N OCC([C@H]1O[C@@H]2OC3(CCCCC3)O[C@@H]2[C@H]1O)O Chemical compound OCC([C@H]1O[C@@H]2OC3(CCCCC3)O[C@@H]2[C@H]1O)O KAUCUKASFLXURN-DSNCZLQVSA-N 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002003899A JP4025075B2 (ja) | 2002-01-10 | 2002-01-10 | ポジ型感光性組成物 |
| US10/338,737 US7214465B2 (en) | 2002-01-10 | 2003-01-09 | Positive photosensitive composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002003899A JP4025075B2 (ja) | 2002-01-10 | 2002-01-10 | ポジ型感光性組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003207885A JP2003207885A (ja) | 2003-07-25 |
| JP2003207885A5 JP2003207885A5 (enrdf_load_stackoverflow) | 2005-04-07 |
| JP4025075B2 true JP4025075B2 (ja) | 2007-12-19 |
Family
ID=27643367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002003899A Expired - Fee Related JP4025075B2 (ja) | 2002-01-10 | 2002-01-10 | ポジ型感光性組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4025075B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI527792B (zh) * | 2012-06-26 | 2016-04-01 | 羅門哈斯電子材料有限公司 | 光酸產生劑、含該光酸產生劑之光阻劑及含該光阻劑之經塗覆物件 |
| JP6442965B2 (ja) * | 2014-10-07 | 2018-12-26 | Jsr株式会社 | 感放射線性樹脂組成物及びレジストパターン形成方法 |
| WO2016181722A1 (ja) * | 2015-05-14 | 2016-11-17 | 富士フイルム株式会社 | パターン形成方法、電子デバイスの製造方法、及び、感活性光線性又は感放射線性樹脂組成物 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3340864B2 (ja) * | 1994-10-26 | 2002-11-05 | 富士写真フイルム株式会社 | ポジ型化学増幅レジスト組成物 |
| JP4007570B2 (ja) * | 1998-10-16 | 2007-11-14 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| JP4604367B2 (ja) * | 2000-03-27 | 2011-01-05 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
| JP4025074B2 (ja) * | 2001-09-19 | 2007-12-19 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
-
2002
- 2002-01-10 JP JP2002003899A patent/JP4025075B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003207885A (ja) | 2003-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3912767B2 (ja) | ポジ型感光性組成物 | |
| JP4226803B2 (ja) | ポジ型感光性組成物 | |
| JP4102032B2 (ja) | ポジ型レジスト組成物 | |
| JP3827290B2 (ja) | ポジ型感光性組成物 | |
| JP4145075B2 (ja) | 感放射線性樹脂組成物 | |
| JP2003149812A (ja) | ポジ型感光性組成物 | |
| JP4225699B2 (ja) | ポジ型感光性組成物 | |
| US20040009429A1 (en) | Positive-working photosensitive composition | |
| US7214465B2 (en) | Positive photosensitive composition | |
| JP4025076B2 (ja) | ポジ型感光性組成物 | |
| JP2003330202A (ja) | ポジ型レジスト組成物の製造方法 | |
| JP4025062B2 (ja) | ポジ型感光性組成物 | |
| JP3907164B2 (ja) | ポジ型感光性組成物 | |
| JP4025039B2 (ja) | ポジ型感光性組成物 | |
| JP2003131383A (ja) | ポジ型感光性組成物 | |
| JP2003122011A (ja) | ポジ型感光性組成物 | |
| JP4149141B2 (ja) | ポジ型感光性組成物 | |
| JP2001290276A (ja) | ポジ型レジスト組成物 | |
| JP2002236359A (ja) | ポジ型感光性組成物 | |
| JP4025075B2 (ja) | ポジ型感光性組成物 | |
| JP2003149815A (ja) | ポジ型レジスト組成物 | |
| JP4117117B2 (ja) | ポジ型感光性組成物 | |
| JP4313965B2 (ja) | ポジ型感光性組成物 | |
| KR100787887B1 (ko) | 포지티브 감광성 조성물 | |
| JP2003330194A (ja) | ポジ型感光性組成物 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040527 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040527 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20060324 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060404 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060412 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060608 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A132 Effective date: 20060823 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061012 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20061124 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070926 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20071004 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4025075 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101012 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111012 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121012 Year of fee payment: 5 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121012 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131012 Year of fee payment: 6 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |