JP4022335B2 - プローブカードの検査装置 - Google Patents

プローブカードの検査装置 Download PDF

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Publication number
JP4022335B2
JP4022335B2 JP10802499A JP10802499A JP4022335B2 JP 4022335 B2 JP4022335 B2 JP 4022335B2 JP 10802499 A JP10802499 A JP 10802499A JP 10802499 A JP10802499 A JP 10802499A JP 4022335 B2 JP4022335 B2 JP 4022335B2
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Japan
Prior art keywords
disposed
probe card
connector
probe
frame
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP10802499A
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English (en)
Japanese (ja)
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JP2000298141A (ja
JP2000298141A5 (enExample
Inventor
秀樹 池内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Priority to JP10802499A priority Critical patent/JP4022335B2/ja
Publication of JP2000298141A publication Critical patent/JP2000298141A/ja
Publication of JP2000298141A5 publication Critical patent/JP2000298141A5/ja
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Publication of JP4022335B2 publication Critical patent/JP4022335B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10802499A 1999-04-15 1999-04-15 プローブカードの検査装置 Expired - Fee Related JP4022335B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10802499A JP4022335B2 (ja) 1999-04-15 1999-04-15 プローブカードの検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10802499A JP4022335B2 (ja) 1999-04-15 1999-04-15 プローブカードの検査装置

Publications (3)

Publication Number Publication Date
JP2000298141A JP2000298141A (ja) 2000-10-24
JP2000298141A5 JP2000298141A5 (enExample) 2005-08-11
JP4022335B2 true JP4022335B2 (ja) 2007-12-19

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ID=14474048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10802499A Expired - Fee Related JP4022335B2 (ja) 1999-04-15 1999-04-15 プローブカードの検査装置

Country Status (1)

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JP (1) JP4022335B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5391130B2 (ja) * 2010-04-05 2014-01-15 株式会社日本マイクロニクス プローブカードの検査装置
KR101773559B1 (ko) * 2017-02-22 2017-08-31 주식회사 디이엔티 프로브 자동교체장치
JP7138004B2 (ja) * 2018-09-28 2022-09-15 株式会社日本マイクロニクス プローブカード保持具
CN111397765B (zh) * 2020-04-06 2021-08-24 国网河北省电力有限公司石家庄市鹿泉区供电分公司 一种电力变压器故障检测设备
CN113466501B (zh) * 2021-08-04 2024-01-02 深圳市森美协尔科技有限公司 一种探针卡安装系统及探针卡安装方法

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JP2000298141A (ja) 2000-10-24

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