JP4019673B2 - Handler for TCP - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a TCP handler for sorting a TCP tape in which a plurality of TCP (Tape Carrier Packages) each having a device attached to a film are connected and connected to a test apparatus.
[0002]
[Prior art]
As is well known, TCP uses a TAB (Tape Automated Bonding) technique to mount a semiconductor chip (device) on a film. Actually, in the transport stage before the device is mounted on the printed circuit board, the TCP has a tape shape in which a plurality of TCPs are connected. Devices in such a tape form TCP (hereinafter referred to as “TCP tape”) are selected by a dedicated TCP handler.
[0003]
A conventional TCP handler includes a supply reel on which a TCP tape is wound, a receiving reel that travels by winding the TCP tape, and information on the test result on a TCP film based on a test result by a test apparatus. A mark punch section for forming a predetermined mark hole; and a reject punch section for punching out a TCP device determined to be defective based on the test result. Among the test apparatuses, the probe card is provided in the traveling path of the TCP tape. The device is tested by contacting the prober with a TCP test pad.
[0004]
FIG. 3 shows an overall view of the TCP handler.
In FIG. 3, a TCP measurement system S is a TCP handler 100 that travels the TCP tape 1 and a test apparatus 200 that is provided in the travel path of the TCP tape 1 and tests the device by connecting to the TCP tape 1 device. And. As shown in FIG. 4, the TCP tape 1 is formed by connecting a plurality of TCP (Tape Carrier Packages) each having a device (semiconductor chip) attached to a film.
[0005]
Further, the TCP handler 100 includes a supply reel 2A for mounting the TCP tape 1 and a storage reel 2B for winding the TCP tape 1 mounted on the supply reel 2A. The accommodation reel 2 </ b> B winds up the TCP tape 1 that has been subjected to an electrical test or classification by the test apparatus 200. Inclination guides 21 and 22 are provided on the supply reel 2A and the accommodation reel 2B, respectively. Further, in the traveling path of the TCP tape 1 between the supply reel 2A and the receiving reel 2B, the sprocket 3A, pulley 4A, guide 5A, tension pulley 6A, sprocket 7A, sprocket 7B, tension pulley 6B, guide 5B, pulley 4B and a sprocket 3B are provided. These sprockets, pulleys, guides, tension pulleys, and receiving reels constitute a TCP handler 100 that causes the TCP tape 1 to travel at a predetermined speed and tension. Here, the TCP tape 1 is transferred by controlling and rotating each sprocket, and the TCP tape 1 is intermittently fed by these sprockets.
[0006]
The test apparatus 200 includes a probe card 12, an attachment unit 13, and a test head 14. When the pushers 9 and 10 press the TCP tape 1, the TCP test pad and the measurement pin are brought into contact with each other. The test result of the test apparatus 200 is output to the control apparatus CONT.
When testing a device, the TCP handler 100 capable of intermittently feeding the TCP tape 1 stops the running of the TCP tape 1 while aligning the TCP device and the test apparatus 200. The alignment is performed based on a TCP imaging result by the camera 15. That is, the imaging result of the TCP image by the camera 15 is output to the image processing device 15C. The image processing device 15C performs image processing based on the image data by the camera 15, and outputs the processing result to the control device CONT. Based on the processing result of the image processing apparatus 15C, the control apparatus CONT controls the position of the TCP during the test so that the TCP device and the measurement pin of the test apparatus 200 are aligned.
[0007]
On the downstream side of the measurement unit in the travel path of the TCP tape 1, a mark punch unit 11 capable of forming a mark hole in the TCP film, and a reject punch unit (punch device) capable of punching the TCP device from the TCP tape 30). The mark punch unit 11 punches a mark hole in a TCP film based on the test result of the test apparatus 200. The reject punch unit 30 punches out the TCP determined to be defective based on the test result of the test apparatus 200.
[0008]
A detector group 23 is disposed on the downstream side of the travel path of the supply reel 2A, and a detector group 25 is disposed on the upstream side of the travel path of the receiving reel 2B. The detector group 23 senses the presence or absence of a leader tape and a TCP under test. The detection result of the detector group 23 is output to the control device CONT. When the TCP detected by the camera 15A moves to the measurement unit, the control device CONT instructs the test device 200 whether or not a TCP test is possible based on the detection result. The detector group 25 also senses the presence or absence of the TCP tape 1. Cameras 15A and 15B capable of capturing an image of the TCP tape 1 are provided on the upstream side and the downstream side of the measurement unit, respectively. The imaging signals of these cameras 15A and 15B are output to the image processing device 15C. Based on the image processing result, it is confirmed whether the running tape is the leader tape or the TCP under test, whether the device is present, and whether the TCP test is possible. Judgment or punch holes can be detected.
[0009]
FIG. 5 is a schematic configuration diagram of a conventional reject punch unit 30. The reject punch unit 30 includes a punch 31 provided above the traveling TCP tape 1 and a die 32 provided below the TCP tape 1. The die 32 is fixed at a position away from the traveling TCP tape 1. The reason why the TCP tape 1 and the die 32 are separated is to prevent the TCP (device) mounted on the upper and lower surfaces of the TCP tape 1 from interfering with the die 32 during traveling. When punching out the TCP determined to be defective, the punch 31 is lowered with respect to the TCP with the dice 32 and the TCP tape 1 being separated from each other. The TCP is cut and punched when it comes into contact with the die 32.
[0010]
[Problems to be solved by the invention]
However, since the position of the die 32 is fixed when the defective TCP is punched in the reject punch portion 30 of the conventional TCP handler, when the punch 31 is lowered, before the TCP is cut between the die 32. The TCP tape 1 is pushed down to warp downward. In this case, a force in the bending direction or the pulling direction due to the warp of the TCP tape 1 acts on the TCP adjacent to the TCP to be punched, which may adversely affect the TCP.
[0011]
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a TCP handler that does not act on other TCP devices when punching a TCP device.
[0012]
[Means for Solving the Problems]
In order to solve the above-described problems, the first TCP handler moves each TCP tape in which a plurality of TCPs each having a device attached to a film are connected to each other by connecting to the device in the running path of the TCP tape. In a TCP handler for testing a device with a test device, a punch device provided in the traveling path and capable of punching the TCP from one surface of the TCP tape; and a side opposite to the punch device across the TCP tape And a support device that is movable in the contact and separation direction with respect to the other surface of the TCP tape and can support the other surface, and the support device is moved to the other surface while the TCP tape is running. A moving device that moves away from the other surface and moves the support device closer to the other surface during the punching operation. Characterized in that it comprises.
[0013]
According to the present invention, when a TCP device is punched from one side, the other side is supported by the support device, so that the TCP tape does not warp. The force caused by does not work. Further, since the support device is separated from the TCP tape while the TCP tape is running, the TCP mounted on the TCP tape and the support device do not interfere with each other.
[0014]
The second TCP handler includes a control device for controlling the movement operation of the moving device and the punching operation of the punch device in the first TCP handler, and the test device outputs a test result to the control device. The control device controls the moving operation and the punching operation in accordance with a test result of the test device.
[0015]
According to the present invention, since the moving operation of the moving device and the punching operation of the punch device are controlled based on the test result of the test apparatus, the defective device is surely punched out based on the test result.
[0016]
The third TCP handler is the second TCP handler, wherein the control device stops running of the TCP tape during the moving operation and the punching operation.
[0017]
According to the present invention, during the moving operation of the moving device and the punching operation of the punch device, the TCP handler stops the running of the TCP tape, so that the TCP mounted on the TCP tape is not affected by the support device. Stablely supported and punched out.
[0018]
The fourth TCP handler is the TCP handler according to any one of the first to third aspects, wherein the moving device supports the punch device so as to be movable toward and away from the TCP tape, and After the supporting device is brought close to the other surface of the TCP tape, the punch device is brought close to one surface of the TCP tape.
[0019]
According to the present invention, after bringing the support device into contact with the TCP tape, the punch device approaches the TCP tape from the opposite side, so that the TCP tape is reliably supported by the support device during the punching operation of the punch device. The Therefore, the punching operation is stable.
[0020]
A fifth TCP handler is the fourth TCP handler, wherein the moving device includes a cylinder body, a slide guide portion that supports the cylinder body so as to be movable in an axial direction, and a predetermined stroke with respect to the cylinder body. And a stopper member that restricts movement of the rod in the insertion direction from the most protruding position with respect to the cylinder body at a predetermined position, and the rod is moved by the stopper member during the predetermined stroke. The cylinder main body is provided so as to move in the axial direction while being supported by the slide guide portion only for the remaining stroke after the restriction is restricted, the support device is connected to the rod, and the punch device is connected to the cylinder main body. It is characterized by being.
[0021]
According to the present invention, since the approach operation of the support device with respect to the TCP tape and the approach operation of the punch device can be combined with one cylinder, the device configuration can be simplified and made compact.
[0022]
In the fifth TCP handler, a biasing member having a biasing force is provided between the cylinder main body and the stopper member in a direction in which the cylinder main body and the stopper member are separated from each other. It is characterized by that.
[0023]
According to the present invention, by providing the biasing member between the cylinder body and the stopper member, the punch device approaches the TCP tape after the support device approaches the TCP tape.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the TCP handler of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a reject punch unit (punch device) which is a characteristic part of a TCP handler according to the present invention.
Here, the reject punch unit of FIG. 1 is installed in the reject punch unit 30 described in the TCP handler 100 (TCP measurement system S) shown in FIG. 3. In the following description, the reject punch unit is shown in FIG. The description of the same or equivalent components is simplified or omitted.
[0025]
In FIG. 1, a reject punch unit (punch device) 30 is provided in the travel path of the TCP handler 100 and has a punch drive unit (punch device) having a punch (punch device) 31 capable of punching TCP from the upper surface of the TCP tape 1. Device, moving device) 40 and a die (on the opposite side to the punch 31 across the TCP tape 1) that is movable in the contact and separation direction with respect to the lower surface of the TCP tape 1 and can support the lower surface of the TCP tape 1 ( Support device) 32. Here, the TCP tape 1 travels between the punch 31 and the die 32 in the forward direction (+ X direction) of the drawing.
[0026]
The punch drive unit 40 includes a base 41, a cylinder main body 42 fixed to the upper portion of the base 41, a rod 43 disposed at a lower portion of the base 41 and capable of entering and exiting the cylinder main body 42 with a predetermined stroke, The punch 31 is provided in the lower part. The cylinder body 42 and the rod 43 constitute an air cylinder, and the rod 43 moves in the axial direction (vertical direction in the drawing) with respect to the cylinder body 42. The base 41 of the punch drive unit 40 has a through-hole portion 41a, and slides in a vertical direction on a slide guide portion 50 provided in the base portion B so as to extend in the vertical direction via the through-hole portion 41a. It is supported movably. At this time, since the cylinder main body 42 is fixed to the base 41 with the axial direction thereof being the vertical direction, the cylinder main body 42 fixed to the base 41 is supported by the slide guide portion 50 so as to be movable in the axial direction. . Further, the punch 31 attached to the base 41 can move in the vertical direction as the base 41 moves in the vertical direction, that is, can move in the contact / separation direction with respect to the upper surface of the TCP tape 1.
[0027]
The die 32 is fixed integrally with the punch guide portion 45 via the connecting member 44. The punch guide part 45 has a guide hole part 45 a for guiding the punch 31, and the punch 31 is movable in the vertical direction while being guided inside the guide hole part 45 a as the base 41 moves. Further, the connecting member 44 has a through-hole portion 44a, and is slidable in the vertical direction on a slide guide portion 50 provided extending vertically in the base portion B through the through-hole portion 44a. It is supported. Since the die 32, the connecting member 44, and the punch guide portion 45 are integrally fixed, the die 32, the connecting member 44, and the punch guide portion 45 are integrally slid in the vertical direction with respect to the slide guide portion 50. The die 32 moves in the contact / separation direction with respect to the lower surface of the TCP tape 1.
[0028]
The upper surface of the punch guide portion 45 is fixed to the rod 43. Accordingly, the punch guide portion 45 moves in the vertical direction by the movement of the rod 43. Since the punch guide portion 45 and the die 32 are integrally fixed via the connecting member 44, the die 32 moves while being guided by the slide guide portion 50 in the vertical direction by the movement of the rod 43.
[0029]
A stopper member 51 that restricts the upward movement of the punch guide portion 45 is provided in the middle of the slide guide portion 50. Since the punch guide portion 45 is fixed to the rod 43, the stopper member 51 restricts the upward movement of the punch guide portion 45, so that the position of the lot 43 with respect to the cylinder main body 42 from the most protruding position in the insertion direction. Is restricted at a predetermined height position.
[0030]
Further, a spring (biasing member) 52 having an urging force in a direction in which the base 41 and the stopper member 51 are separated is provided between the base 41 fixed to the cylinder body 42 and the stopper member 51. It has been. The base 41 does not fall downward by the biasing force of the spring 52.
[0031]
Next, an operation of punching out a TCP determined to be defective by the test apparatus 200 by the reject punch unit 30 of the TCP handler 100 having the above-described configuration will be described with reference to FIG.
The TCP tape 1 is intermittently fed by the TCP handler 100, and the test apparatus 200 tests the TCP in a stopped state. The test result is output to the control device CONT.
[0032]
The TCP tested by the test apparatus 200 is transferred to the reject punch unit 30. At this time (when the TCP tape 1 is running and before the punching operation), as shown in FIG. 2A, the rod 43 of the air cylinder is in the most protruding state (a state where it is protruded downward) from the cylinder body 42. The die 32 connected to the rod 43 via the punch guide portion 45 and the connecting member 44 is also moved downward. Therefore, the die 32 and the lower surface of the TCP tape 1 are separated from each other.
[0033]
When the TCP determined to be defective by the test apparatus 200 is transferred to the reject punch unit 30, the TCP handler 100 stops the running of the TCP tape 1 under the control of the control device CONT. The reject punch unit 30 starts a punching operation under the control of the control device CONT.
First, as shown in FIG. 2B, the rod 43 of the air cylinder is raised. When the rod 43 moves upward by the predetermined distance L1, the die 32 contacts and supports the lower surface of the TCP tape 1, and the punch guide portion 45 and the stopper member 51 come into contact with each other. At this time, the predetermined distance L 1 is smaller than the stroke L of the rod 43.
When the stopper member 51 and the punch guide portion 45 come into contact with each other, the die 32 is set at a predetermined position in the height direction. Here, the die 32 is set so as to be close to the lower surface of the TCP tape 1.
That is, the stopper member 51 moves in the insertion direction (upward in the drawing) from the position where the rod 43 protrudes from the cylinder body 42 at a predetermined position (position position where the die 32 is close to the lower surface of the TCP tape 1). regulate.
[0034]
Next, when the upward movement of the rod 43, that is, the upward movement of the die 32 is restricted by the stopper member 51, as shown in FIG. For the remaining stroke L2 (= L−L1) after the movement of the rod 43 is restricted, the cylinder body 42 is supported by the slide guide portion 50 and moves downward by overcoming the urging force of the spring 52. Then, the base 41 and the punch 31 connected to the cylinder body 42 also move downward. The lowered punch 31 approaches the upper surface of the TCP tape 1 and punches out the TCP.
[0035]
In this manner, the cylinder body 42 and the rod 43, the slide guide portion 50, the base 41, the punch guide portion 45, the connecting member 44, and the stopper member 51 allow the dice (support device) 32 to be moved to the TCP tape 1 while the TCP tape 1 is running. A moving device 300 is configured to move away from the lower surface of 1 and move the die 32 in close proximity to the lower surface of the TCP tape 1 during the punching operation by the punch 31.
[0036]
When the punching operation is completed, the rod 43 is lowered, and accordingly, the die 32 is lowered and the punch 31 is raised to return to the original standby position.
[0037]
As described above, when the TCP device is punched, the lower surface is supported by the die 32 so that the TCP tape 1 does not warp when the punch 31 is lowered. Therefore, the force resulting from the warp of the TCP tape 1 does not act on another TCP adjacent to the TCP to be punched. Therefore, it is possible to prevent the force when punching out the defective TCP from adversely affecting the non-defective TCP. Further, since the dice 32 are separated from the TCP tape 1 while the TCP tape 1 is running, stable running can be realized without causing interference between the TCP mounted on the TCP tape 1 and the dice 32. .
[0038]
Since the movement of the die 32 and the punch 31 in the contact / separation direction with respect to the TCP tape 1 and the punching operation of the punch 31 are controlled based on the test result of the test apparatus 200, a defective TCP is reliably rejected based on the test result. it can.
[0039]
In the movement operation of the die 32 or the punch 31 in the contact / separation direction with respect to the TCP tape 1 or the punching operation of the punch 31, the TCP handler 100 stops the travel of the TCP tape 1. TCP does not receive an impact from the die 32, and defective TCP is punched after being stably supported.
[0040]
After the die 32 is brought into contact with the TCP tape 1 from below, the punch 31 approaches the TCP tape 1 from above, so that the TCP tape 1 can be reliably supported by the die 32 during the punch 31 punching operation. Therefore, the punching operation is stable.
[0041]
Further, in this embodiment, since the approach operation of the die 32 with respect to the TCP tape 1 and the approach operation of the punch 31 are combined with one cylinder, the apparatus configuration can be simplified and made compact.
[0042]
Since the spring 52 is provided between the base 41 fixed to the cylinder body 42 and the stopper member 51, the base 41 does not fall during the non-punching operation, and the die 32 is moved by one cylinder during the punching operation. The punch 31 can approach the TCP tape 1 after approaching the tape 1.
[0043]
【The invention's effect】
When punching out the TCP device, one side of the TCP tape is supported by the support device, so that the TCP tape does not warp due to the operation of the punch device. Therefore, the force resulting from the warping of the TCP tape does not act on another TCP adjacent to the TCP to be punched, and the force when punching a predetermined TCP can be prevented from adversely affecting the other TCP. Further, since the support device is separated from the TCP tape while the TCP tape is running, the TCP mounted on the TCP tape and the support device do not interfere with each other, and stable running can be realized.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a punching apparatus according to the present invention among TCP handlers.
FIG. 2 is a diagram illustrating the operation of a punch device.
FIG. 3 is an overall schematic diagram of a TCP handler.
FIG. 4 is a diagram showing a TCP tape.
FIG. 5 is a view showing a conventional punch device.
[Explanation of symbols]
1 TCP tape 30 Reject punch (punch device)
31 Punch (Punch device)
32 Dice (supporting device)
50 Slide guide portion 42 Cylinder body 43 Rod 51 Stopper member 52 Spring (biasing member)
100 TCP Handler 200 Test Device 300 Mobile Device CONT Control Device

Claims (4)

In a TCP handler that runs a TCP tape in which a plurality of TCPs each having a device attached to a film are connected, and tests each device with a test apparatus by connecting to the device in the running path of the TCP tape,
A punching device provided in the travel path and capable of punching the TCP from one surface of the TCP tape;
A support device that is provided on the opposite side of the punch device with the TCP tape in between so as to be movable toward and away from the other surface of the TCP tape, and can support the other surface;
A cylinder body to which the punch device is connected; a slide guide portion that supports the cylinder body so as to be movable in the axial direction; and a rod to which the support device is connected and that can be moved in and out with a predetermined stroke with respect to the cylinder body; A stopper member that restricts the movement of the rod from the most protruding position relative to the cylinder body in the insertion direction at a predetermined position, and the cylinder body restricts movement of the rod by the stopper member during the predetermined stroke. and a moving device arranged to move in the axial direction while being supported by the slide guide portion remaining strokes after,
The moving device moves the support device away from the other surface during the running of the TCP tape, and moves the support device close to the other surface during the punching operation. A TCP handler, wherein the punching device is brought close to one surface of the TCP tape . A control device for controlling the moving operation of the moving device and the punching operation of the punch device;
The test device outputs a test result to the control device,
2. The TCP handler according to claim 1, wherein the control device controls the moving operation and the punching operation according to a test result of the test device.   The TCP handler according to claim 2, wherein the control device stops the running of the TCP tape during the moving operation and the punching operation. 4. The TCP handler according to claim 3, wherein a biasing member having a biasing force is provided between the cylinder main body and the stopper member in a direction in which the cylinder main body and the stopper member are separated from each other .

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