JP4006164B2 - 録再分離型薄膜ヘッド及び該ヘッドの製造方法 - Google Patents

録再分離型薄膜ヘッド及び該ヘッドの製造方法 Download PDF

Info

Publication number
JP4006164B2
JP4006164B2 JP2000112166A JP2000112166A JP4006164B2 JP 4006164 B2 JP4006164 B2 JP 4006164B2 JP 2000112166 A JP2000112166 A JP 2000112166A JP 2000112166 A JP2000112166 A JP 2000112166A JP 4006164 B2 JP4006164 B2 JP 4006164B2
Authority
JP
Japan
Prior art keywords
film
electrode
magnetic shield
recording
lower magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000112166A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001297413A (ja
JP2001297413A5 (enExample
Inventor
清典 白木
律 今中
篤 加藤
又洋 小室
Original Assignee
株式会社日立グローバルストレージテクノロジーズ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立グローバルストレージテクノロジーズ filed Critical 株式会社日立グローバルストレージテクノロジーズ
Priority to JP2000112166A priority Critical patent/JP4006164B2/ja
Priority to US09/740,053 priority patent/US6882507B2/en
Publication of JP2001297413A publication Critical patent/JP2001297413A/ja
Priority to US11/087,510 priority patent/US7168155B2/en
Publication of JP2001297413A5 publication Critical patent/JP2001297413A5/ja
Application granted granted Critical
Publication of JP4006164B2 publication Critical patent/JP4006164B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40—Protective measures on heads, e.g. against excessive temperature 
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49044—Plural magnetic deposition layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
JP2000112166A 2000-04-13 2000-04-13 録再分離型薄膜ヘッド及び該ヘッドの製造方法 Expired - Fee Related JP4006164B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000112166A JP4006164B2 (ja) 2000-04-13 2000-04-13 録再分離型薄膜ヘッド及び該ヘッドの製造方法
US09/740,053 US6882507B2 (en) 2000-04-13 2000-12-20 Integrated thin film head with magneto-resistive sensor preventing short circuit between thin films
US11/087,510 US7168155B2 (en) 2000-04-13 2005-03-24 Method of manufacturing an integrated thin film head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000112166A JP4006164B2 (ja) 2000-04-13 2000-04-13 録再分離型薄膜ヘッド及び該ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2001297413A JP2001297413A (ja) 2001-10-26
JP2001297413A5 JP2001297413A5 (enExample) 2006-03-30
JP4006164B2 true JP4006164B2 (ja) 2007-11-14

Family

ID=18624382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000112166A Expired - Fee Related JP4006164B2 (ja) 2000-04-13 2000-04-13 録再分離型薄膜ヘッド及び該ヘッドの製造方法

Country Status (2)

Country Link
US (2) US6882507B2 (enExample)
JP (1) JP4006164B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006202393A (ja) * 2005-01-20 2006-08-03 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及び磁気ヘッドの製造方法
JP2006309846A (ja) * 2005-04-27 2006-11-09 Tdk Corp 薄膜磁気ヘッドおよびその製造方法、ならびに磁気記録装置
JP2007042245A (ja) * 2005-08-05 2007-02-15 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法、並びにそれを搭載した磁気記録再生装置
JP2007157250A (ja) * 2005-12-06 2007-06-21 Alps Electric Co Ltd 磁気ヘッド装置
US7768748B2 (en) * 2006-12-14 2010-08-03 Hitachi Global Storage Technologies Netherlands B.V. Magnetoresistive sensor with overlaid combined leads and shields

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731007A (en) * 1971-04-19 1973-05-01 Denki Onkyo Co Ltd Magnetic head having a magneto-resistive bridge circuit
JPH02142195A (ja) * 1988-11-22 1990-05-31 Nec Kagoshima Ltd 薄膜配線形成方法
US5141623A (en) * 1990-02-15 1992-08-25 Seagate Technology, Inc. Method for aligning pole tips in a thin film head
JPH06333215A (ja) 1993-05-24 1994-12-02 Victor Co Of Japan Ltd 磁気抵抗効果型ヘッドの製造方法
JP2731506B2 (ja) * 1993-11-22 1998-03-25 富士通株式会社 磁気抵抗効果型磁気ヘッド及びその製造方法
US5557491A (en) * 1994-08-18 1996-09-17 International Business Machines Corporation Two terminal single stripe orthogonal MR head having biasing conductor integral with the lead layers
US5764446A (en) * 1996-05-01 1998-06-09 International Business Machines Corporation Magnetic head having an air bearing surface with short-resistant leads
JP2947172B2 (ja) * 1996-05-23 1999-09-13 ヤマハ株式会社 磁気抵抗効果型薄膜磁気ヘッド、誘導型・磁気抵抗効果型複合磁気ヘッド、磁気抵抗効果型薄膜磁気ヘッドの製造方法
JP3157770B2 (ja) * 1997-09-17 2001-04-16 アルプス電気株式会社 薄膜磁気ヘッド
JPH11238211A (ja) 1998-02-19 1999-08-31 Tdk Corp 磁気抵抗効果センサ及び該センサを備えた磁気ヘッド
US6176005B1 (en) * 1998-12-15 2001-01-23 International Business Machines Corporation Method of making read head with improved lead layers
US6219207B1 (en) * 1999-04-26 2001-04-17 International Business Machines Corporation Read sensor having high conductivity multilayer lead structure with a molybdenum layer
US6453542B1 (en) * 2000-02-28 2002-09-24 Headway Technologies, Inc. Method for fabricating balanced shield connections for noise reduction in MR/GMR read heads

Also Published As

Publication number Publication date
US6882507B2 (en) 2005-04-19
US7168155B2 (en) 2007-01-30
JP2001297413A (ja) 2001-10-26
US20010030840A1 (en) 2001-10-18
US20050162784A1 (en) 2005-07-28

Similar Documents

Publication Publication Date Title
US5809636A (en) Method of making a magnetoresistive thin film magnetic head with specific shapes of leads
US5168409A (en) Integrated magnetic head having a magnetic layer functioning as both a magnetic shield and a magnetic pole
US5751522A (en) Combined-type thin film magnetic head with inductive magnetic head having low-inductive core
US5173826A (en) Thin film head with coils of varying thickness
US20010009492A1 (en) Magneto-resistive effect type head
US6392852B1 (en) Thin-film magnetic head and method of manufacturing same, and magnetoresistive device
US5371643A (en) Magnetoresistive head structure that prevents under film from undesirable etching
JP2000113425A (ja) 薄膜磁気ヘッドおよびその製造方法
JP3579271B2 (ja) 薄膜磁気ヘッドの製造方法
US6387285B1 (en) Method of manufacturing thin-film magnetic head
JPH07182622A (ja) 読み出し／書き込み兼用薄膜磁気ヘッド
JP2001297413A (ja) 録再分離型薄膜ヘッド及び該ヘッドの製造方法
US5253134A (en) Thin-film magnetic head
US7497008B2 (en) Method of fabricating a thin film magnetic sensor on a wafer
JPH06162437A (ja) 複合型薄膜磁気ヘッド
JP3521553B2 (ja) 薄膜磁気ヘッド
JPH103617A (ja) 磁気抵抗効果型磁気ヘッド及びその製造方法
JP2001195707A (ja) 薄膜磁気ヘッド及びその製造方法
JP2886783B2 (ja) 磁気抵抗効果型薄膜磁気ヘッド及びその製造方法
JP3309406B2 (ja) 薄膜磁気ヘッド
JP3231510B2 (ja) 磁気ヘッド
JP2000155913A (ja) 薄膜磁気ヘッドおよびその製造方法
JP2002353538A (ja) 磁気検出素子、磁気検出素子の製造方法及び磁気ヘッド
JP3297760B2 (ja) 磁気抵抗効果型磁気ヘッド及びその製造方法
JP2958237B2 (ja) 磁気抵抗効果型薄膜磁気ヘッド

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20020329

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20031128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060113

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060113

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060315

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20060510

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060510

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070730

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070807

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070827

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100831

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100831

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110831

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120831

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120831

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130831

Year of fee payment: 6

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130831

Year of fee payment: 6

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees