JP4006164B2 - 録再分離型薄膜ヘッド及び該ヘッドの製造方法 - Google Patents
録再分離型薄膜ヘッド及び該ヘッドの製造方法 Download PDFInfo
- Publication number
- JP4006164B2 JP4006164B2 JP2000112166A JP2000112166A JP4006164B2 JP 4006164 B2 JP4006164 B2 JP 4006164B2 JP 2000112166 A JP2000112166 A JP 2000112166A JP 2000112166 A JP2000112166 A JP 2000112166A JP 4006164 B2 JP4006164 B2 JP 4006164B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- magnetic shield
- recording
- lower magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 239000010408 film Substances 0.000 claims description 431
- 238000000926 separation method Methods 0.000 claims description 30
- 230000001681 protective effect Effects 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 15
- 239000000945 filler Substances 0.000 claims description 14
- 238000000992 sputter etching Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 18
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 229910003465 moissanite Inorganic materials 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000001939 inductive effect Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 229910000889 permalloy Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000011231 conductive filler Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000012762 magnetic filler Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000112166A JP4006164B2 (ja) | 2000-04-13 | 2000-04-13 | 録再分離型薄膜ヘッド及び該ヘッドの製造方法 |
| US09/740,053 US6882507B2 (en) | 2000-04-13 | 2000-12-20 | Integrated thin film head with magneto-resistive sensor preventing short circuit between thin films |
| US11/087,510 US7168155B2 (en) | 2000-04-13 | 2005-03-24 | Method of manufacturing an integrated thin film head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000112166A JP4006164B2 (ja) | 2000-04-13 | 2000-04-13 | 録再分離型薄膜ヘッド及び該ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001297413A JP2001297413A (ja) | 2001-10-26 |
| JP2001297413A5 JP2001297413A5 (enExample) | 2006-03-30 |
| JP4006164B2 true JP4006164B2 (ja) | 2007-11-14 |
Family
ID=18624382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000112166A Expired - Fee Related JP4006164B2 (ja) | 2000-04-13 | 2000-04-13 | 録再分離型薄膜ヘッド及び該ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US6882507B2 (enExample) |
| JP (1) | JP4006164B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006202393A (ja) * | 2005-01-20 | 2006-08-03 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及び磁気ヘッドの製造方法 |
| JP2006309846A (ja) * | 2005-04-27 | 2006-11-09 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法、ならびに磁気記録装置 |
| JP2007042245A (ja) * | 2005-08-05 | 2007-02-15 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及びその製造方法、並びにそれを搭載した磁気記録再生装置 |
| JP2007157250A (ja) * | 2005-12-06 | 2007-06-21 | Alps Electric Co Ltd | 磁気ヘッド装置 |
| US7768748B2 (en) * | 2006-12-14 | 2010-08-03 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetoresistive sensor with overlaid combined leads and shields |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3731007A (en) * | 1971-04-19 | 1973-05-01 | Denki Onkyo Co Ltd | Magnetic head having a magneto-resistive bridge circuit |
| JPH02142195A (ja) * | 1988-11-22 | 1990-05-31 | Nec Kagoshima Ltd | 薄膜配線形成方法 |
| US5141623A (en) * | 1990-02-15 | 1992-08-25 | Seagate Technology, Inc. | Method for aligning pole tips in a thin film head |
| JPH06333215A (ja) | 1993-05-24 | 1994-12-02 | Victor Co Of Japan Ltd | 磁気抵抗効果型ヘッドの製造方法 |
| JP2731506B2 (ja) * | 1993-11-22 | 1998-03-25 | 富士通株式会社 | 磁気抵抗効果型磁気ヘッド及びその製造方法 |
| US5557491A (en) * | 1994-08-18 | 1996-09-17 | International Business Machines Corporation | Two terminal single stripe orthogonal MR head having biasing conductor integral with the lead layers |
| US5764446A (en) * | 1996-05-01 | 1998-06-09 | International Business Machines Corporation | Magnetic head having an air bearing surface with short-resistant leads |
| JP2947172B2 (ja) * | 1996-05-23 | 1999-09-13 | ヤマハ株式会社 | 磁気抵抗効果型薄膜磁気ヘッド、誘導型・磁気抵抗効果型複合磁気ヘッド、磁気抵抗効果型薄膜磁気ヘッドの製造方法 |
| JP3157770B2 (ja) * | 1997-09-17 | 2001-04-16 | アルプス電気株式会社 | 薄膜磁気ヘッド |
| JPH11238211A (ja) | 1998-02-19 | 1999-08-31 | Tdk Corp | 磁気抵抗効果センサ及び該センサを備えた磁気ヘッド |
| US6176005B1 (en) * | 1998-12-15 | 2001-01-23 | International Business Machines Corporation | Method of making read head with improved lead layers |
| US6219207B1 (en) * | 1999-04-26 | 2001-04-17 | International Business Machines Corporation | Read sensor having high conductivity multilayer lead structure with a molybdenum layer |
| US6453542B1 (en) * | 2000-02-28 | 2002-09-24 | Headway Technologies, Inc. | Method for fabricating balanced shield connections for noise reduction in MR/GMR read heads |
-
2000
- 2000-04-13 JP JP2000112166A patent/JP4006164B2/ja not_active Expired - Fee Related
- 2000-12-20 US US09/740,053 patent/US6882507B2/en not_active Expired - Fee Related
-
2005
- 2005-03-24 US US11/087,510 patent/US7168155B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US6882507B2 (en) | 2005-04-19 |
| US7168155B2 (en) | 2007-01-30 |
| US20010030840A1 (en) | 2001-10-18 |
| US20050162784A1 (en) | 2005-07-28 |
| JP2001297413A (ja) | 2001-10-26 |
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