JP4001989B2 - 位置測定装置の走査部材 - Google Patents

位置測定装置の走査部材 Download PDF

Info

Publication number
JP4001989B2
JP4001989B2 JP31859997A JP31859997A JP4001989B2 JP 4001989 B2 JP4001989 B2 JP 4001989B2 JP 31859997 A JP31859997 A JP 31859997A JP 31859997 A JP31859997 A JP 31859997A JP 4001989 B2 JP4001989 B2 JP 4001989B2
Authority
JP
Japan
Prior art keywords
scanning
tracks
track
excitation
adjacent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP31859997A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10213407A (ja
JPH10213407A5 (enExample
Inventor
ペーター・フイツシヤー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPH10213407A publication Critical patent/JPH10213407A/ja
Publication of JPH10213407A5 publication Critical patent/JPH10213407A5/ja
Application granted granted Critical
Publication of JP4001989B2 publication Critical patent/JP4001989B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analogue/Digital Conversion (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
JP31859997A 1996-11-29 1997-11-19 位置測定装置の走査部材 Expired - Lifetime JP4001989B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19649504:0 1996-11-29
DE19649504 1996-11-29

Publications (3)

Publication Number Publication Date
JPH10213407A JPH10213407A (ja) 1998-08-11
JPH10213407A5 JPH10213407A5 (enExample) 2005-06-16
JP4001989B2 true JP4001989B2 (ja) 2007-10-31

Family

ID=7813127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31859997A Expired - Lifetime JP4001989B2 (ja) 1996-11-29 1997-11-19 位置測定装置の走査部材

Country Status (5)

Country Link
US (1) US6111402A (enExample)
EP (1) EP0845659B1 (enExample)
JP (1) JP4001989B2 (enExample)
AT (1) ATE242870T1 (enExample)
DE (2) DE59710260D1 (enExample)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19701319C2 (de) * 1997-01-16 2000-06-08 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE19935429C2 (de) * 1999-07-28 2002-01-17 Daimler Chrysler Ag Verfahren zur Bestimmung der Winkelposition eines Drehbewegungen ausführenden rotatorischen Teils
DE19941464A1 (de) 1999-09-01 2001-03-15 Hella Kg Hueck & Co Induktiver Positionssensor
DE10032143C2 (de) 1999-09-30 2002-07-18 Heidenhain Gmbh Dr Johannes Ferraris-Sensor und Verfahren zum Betrieb eines Ferraris-Sensors
EP1126248B2 (de) † 2000-02-17 2012-10-17 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung und Verfahren zu deren Betrieb
JP4889855B2 (ja) * 2000-02-17 2012-03-07 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 位置測定装置
DE10049502A1 (de) 2000-10-06 2002-04-11 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur absoluten Positionsbestimmung
EP1248076A1 (de) * 2001-07-30 2002-10-09 Esec Trading S.A. Induktiver Sensor für die Positionserfassung eines metallischen Werkstücks
DE10158223B4 (de) 2001-11-16 2017-10-05 Dr. Johannes Heidenhain Gmbh Drehwinkel-Messgerät
DE10200587B4 (de) * 2002-01-10 2015-03-12 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur inkrementalen Positionsbestimmung
DE10320990A1 (de) * 2003-05-09 2004-11-25 Dr. Johannes Heidenhain Gmbh Induktiver Drehwinkelsensor und damit ausgestatteter Drehgeber
JP4476717B2 (ja) * 2004-06-30 2010-06-09 オークマ株式会社 電磁誘導型位置センサ
US20080202862A1 (en) * 2004-07-27 2008-08-28 Frank Dudde Signal Strip And System For Determining A Movement Status Of A Moving Body
US7385389B2 (en) 2005-04-19 2008-06-10 Mitutoyo Corporation Absolute rotary encoder and micrometer
WO2007068765A1 (de) * 2005-12-16 2007-06-21 Elmos Semiconductor Ag Induktiver positionssensor
DE102006046531A1 (de) 2006-09-29 2008-04-03 Dr. Johannes Heidenhain Gmbh Drehgeber und Verfahren zu dessen Betrieb
DE102006056461A1 (de) * 2006-11-28 2008-05-29 Dr. Johannes Heidenhain Gmbh Drehgeber
DE102006056462A1 (de) 2006-11-28 2008-05-29 Dr. Johannes Heidenhain Gmbh Drehgeber
JP4960140B2 (ja) * 2007-04-27 2012-06-27 株式会社ミツトヨ 誘導検出型ロータリエンコーダ
CN101275988B (zh) * 2007-12-27 2011-08-10 奇瑞汽车股份有限公司 一种永磁同步电机测试系统及测试方法
DE102008015837A1 (de) 2008-03-27 2009-10-01 Dr. Johannes Heidenhain Gmbh Positionsmessgerät und Verfahren zu dessen Betrieb
DE102008017857A1 (de) * 2008-04-09 2009-10-15 Dr. Johannes Heidenhain Gmbh Induktiver Drehwinkelsensor und Verfahren zum Betrieb eines induktiven Drehwinkelsensors
CN101261294B (zh) * 2008-04-24 2010-09-15 奇瑞汽车股份有限公司 一种永磁电机电感参数测量装置及方法
DE102008046741A1 (de) * 2008-09-11 2010-03-18 Dr. Johannes Heidenhain Gmbh Induktiver Positionssensor, damit ausgestattetes Messsystem und Verfahren zum Betrieb eines Positionssensors
JP5133199B2 (ja) * 2008-10-28 2013-01-30 株式会社ミツトヨ 誘導検出型ロータリーエンコーダ
JP5540308B2 (ja) * 2009-10-16 2014-07-02 株式会社ミツトヨ ロータリーエンコーダ
JP2012247323A (ja) * 2011-05-30 2012-12-13 Hitachi Automotive Systems Ltd インダクタンス式回転角度検出装置及びそれを備えたモータ駆動式の絞り弁制御装置
JP6154401B2 (ja) * 2011-12-28 2017-06-28 サーヴォセンス （エスエムシー） リミテッド 高分解能アブソリュート・エンコーダ
DE102012216854A1 (de) 2012-09-20 2014-03-20 Dr. Johannes Heidenhain Gmbh Positionsmessgerät und Verfahren zu dessen Betrieb
JP6239824B2 (ja) * 2013-01-18 2017-11-29 株式会社ミツトヨ 誘導検出型ロータリエンコーダ
US9164155B2 (en) 2013-01-29 2015-10-20 Infineon Technologies Ag Systems and methods for offset reduction in sensor devices and systems
US9605983B2 (en) 2014-06-09 2017-03-28 Infineon Technologies Ag Sensor device and sensor arrangement
US9823168B2 (en) 2014-06-27 2017-11-21 Infineon Technologies Ag Auto tire localization systems and methods utilizing a TPMS angular position index
CN107209874B (zh) * 2014-12-16 2021-04-06 巴鲁夫公司 具有人工神经网络的非接触式位置/距离传感器及其操作方法
DE102016202877B3 (de) * 2016-02-24 2017-06-29 Robert Bosch Gmbh Drehwinkelsensor
DE102016217254B4 (de) * 2016-09-09 2022-02-17 Robert Bosch Gmbh Drehwinkelsensor, Statorelement sowie Rotorelement für diesen
EP3355032B1 (de) * 2017-01-30 2019-03-27 Dr. Johannes Heidenhain GmbH Sensor zur positionsmessung
US11525701B2 (en) 2018-01-22 2022-12-13 Melexis Technologies Sa Inductive position sensor
EP3514502B1 (en) * 2018-01-22 2021-07-14 Melexis Technologies SA Inductive position sensor
FR3077880B1 (fr) * 2018-02-15 2020-01-17 Continental Automotive France Capteur de couple integrant un capteur de position angulaire d'un element en rotation
DE102018217934A1 (de) 2018-10-19 2020-04-23 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
EP3683551B1 (de) 2019-01-17 2021-03-10 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine winkelmesseinrichtung
EP3683552B1 (de) 2019-01-17 2021-03-10 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine winkelmesseinrichtung
DE102019214219A1 (de) 2019-09-18 2021-03-18 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Messeinrichtung
EP3936829B1 (en) * 2020-07-10 2023-08-30 Renesas Electronics America Inc. Inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target
EP3961158B1 (de) * 2020-08-25 2022-11-23 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
US11598654B2 (en) 2020-12-14 2023-03-07 Microchip Technology Inc. High resolution angular inductive sensor and associated method of use
WO2022132229A1 (en) * 2020-12-14 2022-06-23 Microchip Technology Inc. High resolution angular inductive sensor and associated method of use
US11898887B2 (en) 2021-03-25 2024-02-13 Microchip Technology Incorporated Sense coil for inductive rotational-position sensing, and related devices, systems, and methods
EP4086586A1 (en) 2021-05-03 2022-11-09 Vishay MCB Industrie S.A.S. Position encoder
WO2022261571A1 (en) 2021-06-11 2022-12-15 Microchip Technology Incorporated Sense coil for inductive linear-position sensing, and related devices, systems, and methods
CN117716209A (zh) 2021-08-05 2024-03-15 微芯片技术股份有限公司 感应角位置传感器以及相关设备、系统和方法
US12339139B2 (en) 2021-09-28 2025-06-24 Microchip Technology Incorporated Angular-position sensor
US12203780B2 (en) 2022-04-01 2025-01-21 Microchip Technology Incorporated Target for an inductive angular-position sensor
US12411001B2 (en) 2022-04-01 2025-09-09 Microchip Technology Incorporated Target for inductive angular-position sensing
CN114838655B (zh) * 2022-04-12 2023-04-07 北京科技大学 一种多周期双极型电磁感应式角度传感器
EP4273507B1 (de) * 2022-05-05 2024-07-10 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
DE112023002370A5 (de) 2022-05-21 2025-05-08 Flux Gmbh Mehrspuranordnung für Linear- und Winkelmesssysteme
DE102024203299A1 (de) * 2024-04-11 2025-10-16 Robert Bosch Gesellschaft mit beschränkter Haftung Induktive Sensoranordnung zur Erfassung einer Bewegung eines beweglichen Körpers

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3197763A (en) * 1962-08-28 1965-07-27 Electro Mechanical Res Inc Shaft encoders
US3281826A (en) * 1963-03-20 1966-10-25 United Aircraft Corp Non-contacting encoder
IT971206B (it) * 1971-11-26 1974-04-30 Bosch Gmbh Robert Trasduttore induttivo di rotazione in particolare per la misurazione di movimenti angolari e di rota zioni
US3810136A (en) * 1973-02-15 1974-05-07 Singer Co Digital position sensor
NL7900245A (nl) * 1979-01-12 1980-07-15 Philips Nv Tweelaags vlakke electrische spoel met aftakking.
DE3214794C2 (de) * 1982-04-21 1984-06-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Magnetische Längen- oder Winkelmeßeinrichtung
US4697144A (en) * 1984-04-19 1987-09-29 Verify Electronics Limited Position sensing apparatus
IE55855B1 (en) * 1984-10-19 1991-01-30 Kollmorgen Ireland Ltd Position and speed sensors
JPH0665967B2 (ja) * 1985-08-27 1994-08-24 株式会社エスジー アブソリュート回転位置検出装置
US4985691A (en) * 1986-02-26 1991-01-15 University Of Pittsburgh Contactless motion sensor
IE871118L (en) * 1987-05-01 1988-11-01 Univ Manchester Improvements in or relating to linear motion screened¹inductance sensors.
US4853631A (en) * 1987-11-04 1989-08-01 The Superior Electric Company Magnetoresistive sensor having inter-leaved magnetoresistive elements for detecting encoded magnetic information
DE3813949A1 (de) * 1988-04-26 1989-11-09 Heidenhain Gmbh Dr Johannes Vorrichtung zur induktiven signaluebertragung bei tastkoepfen
DE4021637A1 (de) * 1990-07-06 1992-01-09 Mehnert Walter Dipl Ing Dr Ing Induktiver stellungsgeber
DE4127209C2 (de) * 1991-08-16 1996-05-23 Mehnert Walter Dr Geber zur induktiven Erzeugung eines Meßsignals
EP0620416B1 (de) * 1993-04-10 1997-01-02 Dr. Johannes Heidenhain GmbH Magnetisches Messsystem
DE4316221C2 (de) * 1993-05-14 1995-11-23 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE4319322C2 (de) * 1993-06-11 1998-04-23 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE19504307A1 (de) * 1995-02-09 1996-08-14 Siemens Ag Einrichtung zur Erfassung von Position und/oder Geschwindigkeit eines beweglichen Geräteteils
EP0743508A2 (en) * 1995-05-16 1996-11-20 Mitutoyo Corporation Induced current position transducer
GB9523991D0 (en) * 1995-11-23 1996-01-24 Scient Generics Ltd Position encoder
US5841274A (en) * 1997-01-29 1998-11-24 Mitutoyo Corporation Induced current absolute position transducer using a code-track-type scale and read head

Also Published As

Publication number Publication date
US6111402A (en) 2000-08-29
EP0845659A3 (de) 2000-05-17
JPH10213407A (ja) 1998-08-11
ATE242870T1 (de) 2003-06-15
EP0845659A2 (de) 1998-06-03
DE19751853A1 (de) 1998-06-04
EP0845659B1 (de) 2003-06-11
DE59710260D1 (de) 2003-07-17

Similar Documents

Publication Publication Date Title
JP4001989B2 (ja) 位置測定装置の走査部材
JPH10213407A5 (enExample)
JP4504064B2 (ja) 電磁誘導式回転センサ及びこの電磁誘導式回転センサを備えたシャフトエンコーダ
US8710829B2 (en) Sheet coil type resolver
US6828783B2 (en) Angle measuring instrument for a rotating shaft
CN102150016B (zh) 电感式位置传感器、装备其的测量系统和驱动位置传感器的方法
US6522128B1 (en) Position sensor having compact arrangement of coils
JP7781594B2 (ja) 走査素子とこの走査素子を備えた誘導式位置測定装置
US20080197836A1 (en) Position Encoder
JP2014062903A (ja) エンコーダ及びこのエンコーダを稼働させるための方法
JP7657909B2 (ja) 位置センサのための検出デバイス、及びそのような検出デバイスを備えた検出システム
JP2022091109A (ja) 走査素子とこの走査素子を備えた誘導式位置測定装置
US7196527B2 (en) Redundant compact encoders
US11841248B2 (en) Scanning element and inductive position measuring device having a scanning element
JP7620442B2 (ja) 誘導式角度測定機構
US12287196B2 (en) Scanning element and inductive position measuring device having this scanning element
TW202409519A (zh) 感應型位置檢測器
JP2023122545A (ja) 走査素子およびこの走査素子を備えた誘導式位置測定装置
JP7594926B2 (ja) 誘導式位置測定機構
JP2024031952A (ja) 回転運動を検出するための誘導式センサ装置
US20250109969A1 (en) Scanning element for an inductive position measuring device
EP0544043B1 (en) Positional encoder
US20240426593A1 (en) Inductive angle measuring device
US20240077337A1 (en) Scanning element and inductive position measuring device with this scanning element
CN117941018B (zh) 旋转变压器以及伺服马达

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040907

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040907

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040915

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070619

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070814

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070816

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100824

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110824

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120824

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130824

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term