JP3994429B2 - 層間絶縁膜用感放射線性樹脂組成物 - Google Patents

層間絶縁膜用感放射線性樹脂組成物 Download PDF

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Publication number
JP3994429B2
JP3994429B2 JP34126798A JP34126798A JP3994429B2 JP 3994429 B2 JP3994429 B2 JP 3994429B2 JP 34126798 A JP34126798 A JP 34126798A JP 34126798 A JP34126798 A JP 34126798A JP 3994429 B2 JP3994429 B2 JP 3994429B2
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Japan
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radiation
weight
resin composition
sensitive resin
copolymer
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JP34126798A
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Japanese (ja)
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JP2000162769A (ja
JP2000162769A5 (enExample
Inventor
昭二 小笠原
孝徳 中野
昌之 遠藤
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JSR Corp
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JSR Corp
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Priority to JP34126798A priority Critical patent/JP3994429B2/ja
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  • Liquid Crystal (AREA)
  • Materials For Photolithography (AREA)
JP34126798A 1998-12-01 1998-12-01 層間絶縁膜用感放射線性樹脂組成物 Expired - Lifetime JP3994429B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34126798A JP3994429B2 (ja) 1998-12-01 1998-12-01 層間絶縁膜用感放射線性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34126798A JP3994429B2 (ja) 1998-12-01 1998-12-01 層間絶縁膜用感放射線性樹脂組成物

Publications (3)

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JP2000162769A JP2000162769A (ja) 2000-06-16
JP2000162769A5 JP2000162769A5 (enExample) 2005-06-30
JP3994429B2 true JP3994429B2 (ja) 2007-10-17

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JP34126798A Expired - Lifetime JP3994429B2 (ja) 1998-12-01 1998-12-01 層間絶縁膜用感放射線性樹脂組成物

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JP (1) JP3994429B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4529616B2 (ja) 2004-09-24 2010-08-25 Ｊｓｒ株式会社 層間絶縁膜形成用感放射線性樹脂組成物および層間絶縁膜
JP4775994B2 (ja) * 2005-03-14 2011-09-21 株式会社リコー 表示媒体とそれを用いた表示装置と可逆表示体
KR101348757B1 (ko) * 2006-02-03 2014-01-07 주식회사 동진쎄미켐 유기 절연막용 수지 조성물 및 그 제조 방법, 상기 수지조성물을 포함하는 표시판
JP5108480B2 (ja) * 2007-11-28 2012-12-26 東京応化工業株式会社 層間絶縁膜用感光性樹脂組成物
KR102006751B1 (ko) 2012-12-11 2019-08-02 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 표시 소자용 경화막, 표시 소자용 경화막의 형성 방법 및 표시 소자

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