JP3993039B2

JP3993039B2 - Processing / measurement system

Info

Publication number: JP3993039B2
Application number: JP2002216222A
Authority: JP
Inventors: 義則山口; 茂前口; 光平亀井; 治男秋戸; 錦児橋本; 晃二白根澤
Original assignee: DMG Mori Co Ltd; Mori Seiki Co Ltd
Current assignee: DMG Mori Co Ltd
Priority date: 2002-07-25
Filing date: 2002-07-25
Publication date: 2007-10-17
Anticipated expiration: 2022-07-25
Also published as: JP2004061152A

Description

【０００１】
【発明の属する技術分野】
本発明は、適宜支持装置（具）により底面が支持された被加工物を機械加工するととともに、加工された被加工物の加工面形状を測定する加工・測定システムに関する。
【０００２】
【従来の技術】
被加工物（以下、「ワーク」という）を機械加工する工作機械は、例えば、ベッドと、ベッド上に配設され、水平面内で移動可能となったテーブルと、ベッド上に固設されたコラムと、コラムに支持され、上下方向に移動可能となった主軸頭と、主軸頭によって回転自在に支持される主軸と、テーブルや主軸頭を各方向に移動させる送り機構部などを備えて構成される。
【０００３】
前記テーブル上には、適宜支持具やクランプ装置などによってワークが支持，固定され、かかるテーブルと、工具が装着された状態で回転駆動される前記主軸とが、前記送り機構部によって前記各方向に移動せしめられることにより、ワークと工具とが相対移動せしめられて、当該工具によってワークが加工される。
【０００４】
そして、このようにして機械加工されたワークは、その加工面形状が適宜測定装置によって測定されるが、かかる測定を総合的に行い得る測定装置として、三次元測定装置が多用されている。この三次元測定装置は、ワークが支持具などによって支持された状態で載置される測定台と、測定台上に載置されたワークの加工面の位置を検出する接触式若しくは非接触式の測定子と、この測定子を直交３軸方向に移動させる駆動機構部と、駆動機構部に付設されて前記測定子の位置を検出するリニアエンコーダと、このリニアエンコーダによって検出される位置データ及び前記測定子から出力される検出信号を基に、ワークの実加工面形状に係るデータを算出する形状データ算出処理部などを備えて構成される。
【０００５】
斯くして、前記工作機械で機械加工されたワークは、そのテーブル上から取り外された後、三次元測定装置の測定台上に載置され、当該三次元測定装置によってその加工面形状が測定される。
【０００６】
【発明が解決しようとする課題】
ところで、ワークを前記テーブルや測定台上に載置する際には、上述したように、通常、ワーク底面の複数個所を適宜支持具によって支持するようにしている。これは、ワーク底面全体を直にテーブルや測定台上に載置すると、テーブルや測定台とワークとの間に異物が介在し易く、このために、加工精度や測定精度が悪化することが懸念されるからである。また、このような支持状態では、機械加工の加工精度や測定精度が前記ワーク底面の加工精度によって大きく影響されるため、当該機械加工の加工精度や測定精度を高めるためには、ワーク底面を必要以上に高精度に仕上げなければならないという問題も有るからである。
【０００７】
その一方、ワークは完全な剛体ではないため、上記の如く、支持具によりワーク底面の複数個所を支持したのでは、自重によってワークに撓み（変形）を生じる。したがって、ワーク加工面形状の測定に際し、測定時のワーク支持状態（具体的には、ワークを支持する部位及び各支持具相互間の上下方向における支持位置関係）が加工時のワーク支持状態と異なれば、加工時のワークの変形状態と測定時のワークの変形状態とが異なることとなり、ワークの加工面形状が加工時と測定時とで異なることとなる。
【０００８】
ところが、従来、このような自重によるワークの変形は何ら考慮されておらず、加工時のワーク支持状態と測定時のワーク支持状態との間には、相互に何らの関連性も無く、それぞれ異なるものとなっていた。このため、従来では、支持状態の相違によって生じた変形後の加工面形状を測定する結果となっていた。これでは、機械加工された加工面形状の実態を正確に測定（把握）することができない。そして、このようにして測定された測定結果を次加工に反映すべく、かかる測定結果を基に工具補正量などを調整すると、却って加工精度の悪化を招くこととなる。
【０００９】
本発明は、以上の実情に鑑みなされたものであって、ワークの加工面形状の実態を正確に測定することができる加工・測定システムの提供をその目的とする。
【００１０】
【課題を解決するための手段及びその効果】
上記目的を達成するための本発明は、上部が開口し、内部が中空に形成された円筒状の第１本体、該第１本体内の下部に固設された第１下部部材、前記第１本体内で水平に設けられ、軸受を介し前記第１下部部材によって回転可能に支持される第１ウォームホイール、前記第１本体内で前記第１ウォームホイールの上方に配設されて、その中心部に対して螺合し、該第１ウォームホイールの回転に伴って上下方向に昇降する第１昇降部材、前記第１ウォームホイールと噛合する第１ウォーム、及び該第１ウォームに回転動力を付与する第１駆動モータを備えて構成され、前記第１昇降部材上に被加工物の底面を支持する複数の第１支持手段と、前記各第１昇降部材上にそれぞれ配設され、前記被加工物によって前記第１昇降部材に作用する荷重を検出する第１ロードセルと、前記各第１ロードセルによって検出された荷重値を基に前記各第１駆動モータを駆動，制御する第１制御手段とを備え、前記各第１支持手段によって支持された被加工物を機械加工する加工装置と、
上部が開口し、内部が中空に形成された円筒状の第２本体、該第２本体内の下部に固設された第２下部部材、前記第２本体内で水平に設けられ、軸受を介し第２下部部材によって回転可能に支持される第２ウォームホイール、前記第２本体内で前記第２ウォームホイールの上方に配設されて、その中心部に対して螺合し、該第２ウォームホイールの回転に伴って上下方向に昇降する第２昇降部材、前記第２ウォームホイールと噛合する第２ウォーム、及び該第２ウォームに回転動力を付与する第２駆動モータを備えて構成され、機械加工時に前記第１支持手段の第１昇降部材によって支持された被加工物底面の支持部位と同一部位を、前記第２昇降部材上に支持する複数の第２支持手段と、前記各第２昇降部材上にそれぞれ配設され、前記被加工物によって前記第２昇降部材に作用する荷重を検出する第２ロードセルと、該各第２ロードセルによって検出された荷重値を基に前記各第２駆動モータを駆動，制御する第２制御手段と、前記第２支持手段によって支持された前記被加工物の三次元形状を測定する三次元測定手段とを備えた測定装置とを、電気通信回線を介し接続して構成される加工・測定システムであって、
前記測定装置の第２制御手段が、前記加工装置の各第１ロードセルによって検出された荷重値を前記加工装置から受信し、受信した荷重値と前記各第２ロードセルによって検出される荷重値とが同一の値となるように、前記各第２駆動モータを駆動，制御するように構成された加工・測定システムに係る。
【００１１】
この加工・測定システムによれば、まず、加工に際し、加工装置において、被加工物の底面が複数の第１支持手段によって支持され、この状態で第１ロードセルによって各第１昇降部材に作用する荷重値が検出される。
【００１２】
次に、検出される荷重値が所定の値となるように第１制御手段によって当該第１駆動モータが駆動，制御される。そして、このようにして第１駆動モータが駆動，制御された後、各第１ロードセルによって検出された荷重値が、電気通信回線を介して測定装置の第２制御手段に送信されるとともに、当該加工装置によって被加工物が機械加工される。
【００１３】
次に、加工が終了すると、加工後の被加工物が測定装置に搬入され、複数の第２支持手段によってその底面が支持される。その際、前記第１支持手段の第１昇降部材によって支持された部位と同一の部位が第２昇降部材よってそれぞれ支持されるとともに、第２ロードセルによって当該第２昇降部材に作用する荷重値がそれぞれ検出される。
【００１４】
ついで、この第２ロードセルによって検出される荷重値が前記加工装置から受信した荷重値と同じ値となるように、前記第２制御手段によって各第２駆動モータが駆動，制御される。これにより、第２支持手段における被加工物の支持状態、即ち、測定時の被加工物の支持状態が、第１支持手段における被加工物の支持状態、即ち、加工時の被加工物の支持状態と同じ状態にされる。
【００１５】
しかる後、このようにして第２昇降部材により支持された被加工物の三次元形状（加工面形状）が、三次元測定手段によって測定される。尚、前記三次元測定手段には、接触式の他非接触式の測定子を備えたものが含まれる。
【００１６】
上述したように、支持具等によって被加工物底面の複数個所を支持した場合、自重によって被加工物に変形を生じるため、測定時の支持状態が加工時の支持状態と異なる場合には、加工時の被加工物の変形状態と測定時の被加工物の変形状態とが異なることとなり、結果、被加工物の加工面形状が加工時と測定時とで異なるという問題を生じる。
【００１７】
この測定装置によれば、測定時の被加工物の支持状態を機械加工時の支持状態と同じ状態とすることができるので、測定時の被加工物の変形状態を加工時の被加工物の変形状態と同じ状態にすることができ、この結果、被加工物の加工面形状を加工時と測定時とで一致させることが可能となる、即ち、加工時の被加工物の加工面形状を測定時に再現することが可能となる。
【００１８】
これにより、機械加工後の加工面形状の実態を正確に測定（把握）することができ、このようにして正確に測定された加工面形状の実態を次加工に反映することで、加工精度の更なる向上を図ることができる。また、この加工・測定システムによれば、加工時の被加工物の支持状態に係るデータを、電気通信回線を介し測定装置に送信して、測定時の被加工物の支持状態を加工時の支持状態に合わせるようにしているので、測定時の支持状態を加工時のそれに合わせるに当たり、これを正確且つ容易に行うことができる。
【００１９】
また、本発明は、上部が開口し、内部が中空に形成された円筒状の第１本体、該第１本体内の下部に固設された第１下部部材、前記第１本体内で水平に設けられ、軸受を介し前記第１下部部材によって回転可能に支持される第１ウォームホイール、前記第１本体内で前記第１ウォームホイールの上方に配設されて、その中心部に対して螺合し、該第１ウォームホイールの回転に伴って上下方向に昇降する第１昇降部材、前記第１ウォームホイールと噛合する第１ウォーム、及び該第１ウォームに回転動力を付与する第１サーボモータを備えて構成され、前記第１昇降部材上に被加工物の底面を支持する複数の第１支持手段と、前記各第１サーボモータに付設され、その回転位置を検出する第１ロータリエンコーダと、前記各第１ロータリエンコーダによって検出された回転位置を基に前記各第１サーボモータを駆動，制御する第１制御手段とを備え、前記各第１支持手段によって支持された被加工物を機械加工する加工装置と、
上部が開口し、内部が中空に形成された円筒状の第２本体、該第２本体内の下部に固設された第２下部部材、前記第２本体内で水平に設けられ、軸受を介し第２下部部材によって回転可能に支持される第２ウォームホイール、前記第２本体内で前記第２ウォームホイールの上方に配設されて、その中心部に対して螺合し、該第２ウォームホイールの回転に伴って上下方向に昇降する第２昇降部材、前記第２ウォームホイールと噛合する第２ウォーム、及び該第２ウォームに回転動力を付与する第２サーボモータを備えて構成され、機械加工時に前記第１支持手段の第１昇降部材によって支持された被加工物底面の支持部位と同一部位を、前記第２昇降部材上に支持する複数の第２支持手段と、前記各第２サーボモータに付設され、その回転位置を検出する第２ロータリエンコーダと、該各第２ロータリエンコーダによって検出された回転位置を基に前記各第２サーボモータを駆動，制御する第２制御手段と、前記第２支持手段によって支持された前記被加工物の三次元形状を測定する三次元測定手段とを備えた測定装置とを、電気通信回線を介し接続して構成される加工・測定システムであって、
前記測定装置の第２制御手段が、前記加工装置の各第１ロータリエンコーダによって検出された回転位置を前記加工装置から受信し、受信した回転位置と前記各第２ロータリエンコーダによって検出される回転位置とが同一の値となるように、前記各第２サーボモータを駆動，制御するように構成された加工・測定システムに係る。
【００２０】
この加工・測定システムは、第１サーボモータに付された第１ロータリエンコーダによって第１サーボモータの回転位置を検出し、第２サーボモータに付設された第２ロータリエンコーダによって第２サーボモータの回転位置を検出するようにしたものである。そして、各第１ロータリエンコーダにより検出された回転位置に係るデータが電気通信回線を介して測定装置の第２制御手段に送信され、測定装置の各第２ロータリエンコーダによって検出される各第２サーボモータの回転位置が、受信した回転位置と一致するように、第２サーボモータが第２制御手段によって制御される。斯くして、第２支持手段における被加工物の支持状態、即ち、測定時の被加工物の支持状態が、第１支持手段における被加工物の支持状態、即ち、加工時の被加工物の支持状態と同じ状態にされ、上記と同様の効果が奏される。
【００２１】
尚、前記電気通信回線には、ＬＡＮ，ＶＡＮ，専用の電話回線や光通信回線などネットワークを構築するための各種通信回線が含まれる。
【００２２】
【発明の実施の形態】
以下、本発明の具体的な実施形態について添付図面に基づき説明する。尚、図１は、本発明の一実施形態に係る加工・測定システムの概略構成を示したブロック図である。また、図２は、本実施形態に係る加工装置の一部を示した正面図であり、図３は、本実施形態に係る測定装置の一部を示した正面図である。また、図４は、本実施形態に係る支持装置などの概略構成を一部ブロック図で示した平面図であり、図５は、図４における矢示Ａ−Ａ方向の断面図である。
【００２３】
図１に示すように、本例の加工・測定システム１は、加工装置１０と、測定装置４０と、これら加工装置１０と測定装置４０とを接続する通信回線３５とから構成される。
【００２４】
前記加工装置１０は、図１，図２，図４及び図５に示すように、水平面内で移動可能となったテーブル１１と、上下方向に移動可能となった主軸１２と、テーブル１１上に適宜間隔で配設され、ワークＷを支持する複数の支持装置２０と、各支持装置２０の作動を制御する支持制御装置３０と、各支持装置２０の上端部に配設されたロードセル３１などを備える。尚、前記テーブル１１と主軸１２とは図示しない適宜送り機構部によって前記各方向に移動せしめられる。
【００２５】
前記支持装置２０は、内部が中空に形成された円筒状の本体２１と、本体２１内の下部に固設された下部部材２２と、軸受２３を介し下部部材２２によって回転可能に支持されるウォームホイール２４と、ウォームホイール２４の中心部に螺合し、このウォームホイール２４の回転に伴って矢示方向（上下方向）に昇降する昇降部材２５と、ウォームホイール２４と噛合するウォーム２６と、ウォーム２６に減速機（図示せず）を介して回転動力を付与し、このウォーム２６を回転させる駆動モータ２７とを備えて構成されており、前記ロードセル３１を介し昇降部材２５によってワークＷの底面が支持される。
【００２６】
尚、前記各ロードセル３１は、ワークＷを支持することによって各支持装置２０に作用する力を検出するために設けられている。各支持装置２０に作用する力は、当該支持装置２０の上下方向における支持位置によってそれぞれ異なるため、これを検出することによって、各支持装置２０の支持位置をそれぞれ把握することができる。
【００２７】
前記支持制御装置３０は、各ロードセル３１によって検出される荷重値を受信し、受信した荷重値が予め設定された目標荷重値となるように、各駆動モータ２７を駆動，制御して、各支持装置２０の支持位置をそれぞれ調整するとともに、各ロードセル３１によって検出される荷重値を、通信回線３５を介して前記測定装置４０に送信する。尚、前記目標荷重値は、図示しない適宜入力装置から入力される。
【００２８】
前記測定装置４０は、図１，図３，図４及び図５に示すように、ワークＷが載置される測定台４１を具備した三次元測定機４２と、前記支持装置２０と同一間隔で測定台４１上に配置されるとともに、当該支持装置２０によって支持されたワークＷ底面の支持部位と同一部位を支持可能となった複数の支持装置５０と、各支持装置５０の作動を制御する支持制御装置６０と、各支持装置５０の上端部に配設されたロードセル６１とを備えて構成される。
【００２９】
前記三次元測定機４２は、その詳細な構造については図示しないが、ワークＷに接触したときにのみ検出信号を出力する測定子４３と、測定子４３を直交３軸方向に移動させる駆動機構部（図示せず）と、駆動機構部（図示せず）に付設されて測定子４３の位置を検出するリニアエンコーダ（図示せず）と、測定子４３から出力される検出信号、及びリニアエンコーダ（図示せず）によって検出される位置データを基に、ワークＷの実加工面形状に係るデータを算出する形状データ算出処理部（図示せず）などを備えている。
【００３０】
前記支持装置５０は、本体５１，下部部材５２，軸受５３，ウォームホイール５４，昇降部材５５，ウォーム５６，駆動モータ５７などからなり、昇降部材５５により前記ロードセル６１を介してワークＷ底面を支持する。尚、支持装置５０は前記支持装置２０と同じ構造であるので、その詳細な説明については、これを省略する。
【００３１】
前記支持制御装置６０は、各ロードセル６１によって検出される荷重値を受信するとともに、前記支持制御装置３０から送信された荷重値を受信し、各ロードセル６１によって検出される荷重値と、これに対応する前記支持制御装置３０から受信した荷重値とが同一の値となるように、即ち、各支持装置５０相互間における上下方向の支持位置関係が、前記各支持装置２０によって支持された上下方向の支持位置関係と同一になるように、各駆動モータ５７を駆動，制御して、各支持装置５０の支持位置をそれぞれ調整する。
【００３２】
以上のように構成された本例の加工・測定システム１によれば、以下に説明するようにして、ワークＷが加工装置１０により機械加工され、機械加工されたワークＷの加工面形状が測定装置４０により測定される。
【００３３】
まず、ワークＷは、その底面が各支持装置２０によって支持された状態で、適宜クランプ装置（図示せず）などによってテーブル１１上に固定される。このとき、各ロードセル３１によって検出される荷重値が、予め設定された目標荷重値となるように、各駆動モータ２７が支持制御装置３０によって駆動，制御されて、各支持装置２０における上下方向の支持位置がそれぞれ調整される。また、各ロードセル３１によって検出される荷重値は、支持制御装置３０によって通信回線３５を介して測定装置４０の支持制御装置６０に送信される。
【００３４】
その後、工具Ｔが装着され、適宜回転駆動せしめられる主軸１２と、テーブル１１とが、送り機構部（図示せず）によって前記各方向にそれぞれ移動せしめられることにより、ワークＷと工具Ｔとが相対移動せしめられて、当該工具ＴによってワークＷが加工される。
【００３５】
そして、機械加工されたワークＷはテーブル１１上から取り外されて測定装置４０に搬入され、前記支持装置２０による支持部位と同一部位が各支持装置５０によってそれぞれ支持される。ついで、各ロードセル６１によって検出される荷重値と、これに対応する支持制御装置３０から受信した荷重値とが同じ値となるように、即ち、各支持装置５０相互間における上下方向の支持位置関係が、前記各支持装置２０相互間における上下方向の支持位置関係と同じ状態となるように、支持制御装置６０により各駆動モータ５７が駆動，制御され、各支持装置５０における支持位置がそれぞれ調整される。
【００３６】
これにより、ワークＷは、加工装置１０の支持装置２０によって支持された支持状態と同じ状態で、測定装置２０の支持装置５０によって支持されることになる。
【００３７】
その後、駆動機構部（図示せず）によって測定子４３を予め設定された各測定位置に移動させ、当該測定位置において測定子４３をワークＷに接触させることにより、測定子４３から接触信号が出力され、この接触信号と、リニアエンコーダ（図示せず）によって検出される位置データとを基に、形状データ算出処理部（図示せず）においてワークＷの実加工面形状が算出される。
【００３８】
ところで、上述したように、支持具等によってワークＷ底面の複数個所を支持した場合、自重によってワークＷに変形を生じるため、測定時の支持状態が加工時の支持状態と異なる場合には、加工時のワークＷの変形状態と測定時のワークＷの変形状態とが異なることとなり、結果、ワークＷの加工面形状が加工時と測定時とで異なるという問題を生じる。
【００３９】
本例の加工・測定システム１によれば、測定時のワークＷの支持状態が加工時の支持状態と同じ状態となるようにしているので、測定時のワークＷの変形状態を加工時のワークＷの変形状態と同じ状態にすることができ、この結果、ワークＷの加工面形状を加工時と測定時とで一致させることが可能となる、即ち、加工時のワークＷの加工面形状を測定時に再現することが可能となる。これにより、機械加工後の加工面形状の実態を正確に測定（把握）することができ、このようにして正確に測定された加工面形状の実態を次加工に反映することで、加工精度の更なる向上を図ることができる。
【００４０】
また、加工時のワークＷの支持状態に係るデータを、通信回線３５を介し測定装置４０に送信して、測定時のワークＷの支持状態を加工時の支持状態に合わせるようにしているので、測定時の支持状態を加工時のそれに合わせるに当たり、これを正確且つ容易に行うことができる。
【００４１】
以上、本発明の一実施形態について説明したが、本発明の採り得る具体的な態様は、何らこれに限定されるものではない。
【００４２】
上例では、各支持装置２０，５０の支持位置を、各支持装置２０，５０に作用する力から把握するように構成したが、これに限られるものではなく、前記駆動モータ２７，５７をサーボモータとするとともに、前記ロードセル３１，６１を前記サーボモータに付設されたロータリエンコーダとして、当該ロータリエンコーダによりサーボモータの回転位置を検出することによって、各支持装置２０，５０の支持位置を検出するように構成することもできる。
【００４３】
この場合、前記支持制御装置３０は、各ロータリエンコーダ（支持装置２０側）によって検出される回転位置が、適宜設定された目標回転位置と一致するように、各サーボモータ（支持装置２０側）を駆動，制御し、前記支持制御装置６０は、各ロータリエンコーダ（支持装置５０側）によって検出される回転位置と、支持制御装置３０から受信した回転位置とが同一の値になるように、各サーボモータ（支持装置５０側）を駆動，制御する。
【図面の簡単な説明】
【図１】本発明の一実施形態に係る加工・測定システムの概略構成を示したブロック図である。
【図２】本実施形態に係る加工装置の一部を示した正面図である。
【図３】本実施形態に係る測定装置の一部を示した正面図である。
【図４】本実施形態に係る支持装置などの概略構成を一部ブロック図で示した平面図である。
【図５】図４における矢示Ａ−Ａ方向の断面図である。
【符号の説明】
１加工・測定システム
１０加工装置
１１テーブル
１２主軸
２０，５０支持装置
２５，５５昇降部材
２７，５７駆動モータ
３０，６０支持制御装置
３１，６１ロードセル
４０測定装置
４１測定台
４２三次元測定機
４３測定子[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a machining / measurement system for machining a workpiece whose bottom surface is supported by a support device (tool) as appropriate and measuring the shape of the machined surface of the machined workpiece.
[0002]
[Prior art]
A machine tool for machining a workpiece (hereinafter referred to as “workpiece”) includes, for example, a bed, a table arranged on the bed and movable in a horizontal plane, and a column fixed on the bed. And a spindle head supported by the column and movable in the vertical direction, a spindle rotatably supported by the spindle head, and a feed mechanism section for moving the table and spindle head in each direction. The
[0003]
On the table, a work is supported and fixed as appropriate by a support tool, a clamp device, etc., and the table and the spindle that is rotationally driven in a state where a tool is mounted are placed in each direction by the feed mechanism unit. By being moved, the workpiece and the tool are relatively moved, and the workpiece is processed by the tool.
[0004]
And the workpiece surface machined in this way is measured for the shape of the machined surface by a measuring device as appropriate, and a three-dimensional measuring device is frequently used as a measuring device capable of comprehensively performing such measurement. This three-dimensional measuring apparatus includes a measurement table placed in a state where the workpiece is supported by a support or the like, and a contact type or non-contact type for detecting the position of the work surface of the workpiece placed on the measurement table. A probe, a drive mechanism for moving the probe in three orthogonal axes, a linear encoder attached to the drive mechanism for detecting the position of the probe, position data detected by the linear encoder, and the Based on the detection signal output from the probe, it is configured to include a shape data calculation processing unit for calculating data related to the actual machining surface shape of the workpiece.
[0005]
Thus, after the workpiece machined by the machine tool is removed from the table, it is placed on the measuring table of the three-dimensional measuring device, and the processed surface shape is measured by the three-dimensional measuring device. The
[0006]
[Problems to be solved by the invention]
By the way, when the work is placed on the table or the measurement table, as described above, usually, a plurality of places on the bottom face of the work are appropriately supported by a support. This is because when the entire workpiece bottom is placed directly on a table or measurement table, foreign matter is likely to intervene between the table or measurement table and the workpiece, which may lead to deterioration in machining accuracy or measurement accuracy. Because it is done. In such a support state, the machining accuracy and measurement accuracy of machining are greatly influenced by the machining accuracy of the workpiece bottom surface. Therefore, in order to increase the machining accuracy and measurement accuracy of the machining, the workpiece bottom surface is necessary. This is because there is a problem that it must be finished with high accuracy.
[0007]
On the other hand, since the work is not a complete rigid body, as described above, if a plurality of positions on the bottom surface of the work are supported by the support, the work is bent (deformed) by its own weight. Therefore, when measuring the workpiece machining surface shape, the workpiece support state at the time of measurement (specifically, the support position relationship in the vertical direction between the part supporting the workpiece and each support) is different from the workpiece support state at the time of machining. For example, the deformation state of the workpiece at the time of machining is different from the deformation state of the workpiece at the time of measurement, and the shape of the work surface of the workpiece is different between the time of machining and the time of measurement.
[0008]
However, conventionally, such deformation of the workpiece due to its own weight is not taken into consideration, and there is no relationship between the workpiece support state at the time of machining and the workpiece support state at the time of measurement, which are different from each other. It was a thing. For this reason, conventionally, it has been the result of measuring the shape of the machined surface after deformation caused by the difference in the support state. This makes it impossible to accurately measure (understand) the actual shape of the machined surface. If the tool correction amount or the like is adjusted based on the measurement result so that the measurement result measured in this way is reflected in the next machining, the machining accuracy is deteriorated.
[0009]
The present invention has been made in view of the above circumstances, and an object thereof is to provide a machining / measuring system capable of accurately measuring the actual shape of the machined surface of a workpiece.
[0010]
[Means for solving the problems and effects thereof]
In order to achieve the above object, the present invention provides a cylindrical first body having an open top and a hollow interior, a first lower member fixed to a lower portion of the first body, and the first A first worm wheel that is horizontally provided in the body and is rotatably supported by the first lower member via a bearing, and is disposed in the first body above the first worm wheel and has a central portion A first elevating member that moves up and down in accordance with the rotation of the first worm wheel, a first worm that meshes with the first worm wheel, and applying rotational power to the first worm. is configured to include a first drive motor, the plurality of first supporting means for supporting the bottom surface of the workpiece to the first lifting member, are respectively disposed on each of the first elevating member on the workpiece The load acting on the first elevating member by A first load cell for detecting the a respective first said based on detected load value by the load cell drive each first drive motor, first control means for controlling, supported by the respective first support means A processing device for machining the workpiece,
A cylindrical second main body having an opening at the top and a hollow inside, a second lower member fixed to the lower portion of the second main body, and provided horizontally in the second main body via a bearing A second worm wheel rotatably supported by a second lower member, disposed in the second main body above the second worm wheel, and screwed into a central portion thereof; the second worm wheel A second elevating member that moves up and down in accordance with the rotation of the second worm wheel, a second worm that meshes with the second worm wheel, and a second drive motor that applies rotational power to the second worm. A plurality of second support means for supporting on the second elevating member the same part as the support part of the bottom surface of the workpiece, which is sometimes supported by the first elevating member of the first support means, and each second elevating member Arranged on each of the above, A second load cell for detecting a load acting on the second lifting member by engineering material, wherein on the basis of the detected load values by respective second load cell driving each second drive motor, and a second control means for controlling and a measuring device that includes a three-dimensional measuring means for measuring the three-dimensional shape of the workpiece supported by said second supporting means, in the processing and measurement system configured by connecting via an electric communication line There,
Second control means of the measuring device receives a load value detected by each of the first load cell of the processing apparatus from the processing apparatus, and a load value detected load value and the received by the respective second load cell The present invention relates to a machining / measurement system configured to drive and control each of the second drive motors so as to have the same value.
[0011]
According to the processing and measurement system, firstly, upon processing, in the processing apparatus, the bottom surface of the workpiece is supported by a plurality of first support means, the load acting on each of the first lift member in this state by the first load cell A value is detected.
[0012]
Next, the first drive motor is driven and controlled by the first control means so that the detected load value becomes a predetermined value. Then, after the first drive motor is driven and controlled in this way, the load value detected by each first load cell is transmitted to the second control means of the measuring device via the telecommunication line, and The workpiece is machined by the processing device.
[0013]
Next, when the processing is completed, the processed workpiece is carried into the measuring device, and the bottom surface is supported by the plurality of second support means. At that time, the with the same site and the site that is supported by the first elevating member of the first support means is supported second lifting member thus each load values acting on the second lifting member by the second load cell, respectively Detected.
[0014]
Next, each second drive motor is driven and controlled by the second control means so that the load value detected by the second load cell becomes the same value as the load value received from the processing apparatus. Thereby, the support state of the workpiece in the second support means, that is, the support state of the workpiece at the time of measurement is the support state of the workpiece in the first support means, that is, the support of the workpiece during the processing. The same as the state.
[0015]
Thereafter, the three-dimensional shape (machined surface shape) of the workpiece supported by the second elevating member in this way is measured by the three-dimensional measuring means. The three-dimensional measuring means includes a contact type and a non-contact type measuring element.
[0016]
As described above, when multiple places on the bottom surface of the workpiece are supported by a support or the like, the workpiece is deformed by its own weight, so if the support state at the time of measurement is different from the support state at the time of processing, The deformation state of the workpiece at the time and the deformation state of the workpiece at the time of measurement are different, and as a result, there is a problem that the shape of the processed surface of the workpiece is different between the machining time and the measurement time.
[0017]
According to this measuring apparatus, since the support state of the work piece at the time of measurement can be made the same as the support state at the time of machining, the deformation state of the work piece at the time of measurement is changed to the work state at the time of processing. As a result, it becomes possible to make the machined surface shape of the workpiece coincide with the time of machining and at the time of measurement, that is, the shape of the machined surface of the workpiece at the time of machining. It can be reproduced during measurement.
[0018]
As a result, the actual state of the machined surface shape after machining can be accurately measured (understood). By reflecting the actual state of the machined surface shape measured in this way in the next machining, machining accuracy can be improved. Further improvement can be achieved. Further, according to this machining / measuring system, data related to the workpiece support state during processing is transmitted to the measuring device via the telecommunication line, and the workpiece support state during measurement is determined during processing. Since it is adapted to the support state, it can be accurately and easily performed when the support state at the time of measurement is matched with that at the time of processing.
[0019]
The present invention also provides a cylindrical first body having an open top and a hollow interior, a first lower member fixed to a lower portion of the first body, and horizontally in the first body. A first worm wheel that is rotatably supported by the first lower member via a bearing, and is disposed above the first worm wheel in the first body and screwed to a central portion thereof. A first elevating member that moves up and down in accordance with the rotation of the first worm wheel, a first worm that meshes with the first worm wheel, and a first servo motor that applies rotational power to the first worm. It is configured to include a plurality of first supporting lifting means for supporting the bottom surface of the workpiece to the first lifting member, wherein is attached to the first servo motor, a first rotary encoder for detecting the rotational position , Each first rotary And a first control means for driving and controlling each first servo motor based on the rotational position detected by the encoder, and a machining apparatus for machining a workpiece supported by each first support means; ,
A cylindrical second main body having an opening at the top and a hollow inside, a second lower member fixed to the lower portion of the second main body, and provided horizontally in the second main body via a bearing A second worm wheel rotatably supported by a second lower member, disposed in the second main body above the second worm wheel, and screwed into a central portion thereof; the second worm wheel A second elevating member that elevates in the vertical direction with rotation of the second worm wheel, a second worm that meshes with the second worm wheel, and a second servomotor that applies rotational power to the second worm, and is machined A plurality of second support means for supporting on the second elevating member the same part as the support part of the bottom surface of the work piece supported by the first elevating member of the first support means, and the second servo motors The rotation position attached to Supported by the second rotary encoder, the second control means for driving and controlling the second servo motor based on the rotational position detected by the second rotary encoder, and the second support means. A processing / measuring system configured by connecting a measuring device including a three-dimensional measuring means for measuring a three-dimensional shape of the workpiece through an electric communication line,
The second control means of the measuring device receives the rotational position detected by each first rotary encoder of the processing device from the processing device, and the received rotational position and the rotational position detected by the second rotary encoder. The machining / measurement system is configured to drive and control each of the second servo motors so that the values are equal to each other.
[0020]
In this machining / measurement system, the rotational position of the first servomotor is detected by a first rotary encoder attached to the first servomotor, and the second servomotor is rotated by a second rotary encoder attached to the second servomotor. The position is detected. Then, the data relating to the rotational position detected by each first rotary encoder is transmitted to the second control means of the measuring device via the telecommunication line, and each second servo detected by each second rotary encoder of the measuring device. The second servo motor is controlled by the second control means so that the rotational position of the motor matches the received rotational position. Thus, the support state of the work piece in the second support means, that is, the support state of the work piece at the time of measurement is the support state of the work piece in the first support means, that is, the work piece state at the time of processing. The same state as the support state is obtained, and the same effect as described above is exhibited.
[0021]
The telecommunication lines include various communication lines for constructing a network such as a LAN, a VAN, a dedicated telephone line and an optical communication line.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a block diagram showing a schematic configuration of a machining / measurement system according to an embodiment of the present invention. FIG. 2 is a front view showing a part of the processing apparatus according to the present embodiment, and FIG. 3 is a front view showing a part of the measuring apparatus according to the present embodiment. FIG. 4 is a plan view partially showing a schematic configuration of the support device and the like according to this embodiment in a block diagram, and FIG. 5 is a cross-sectional view in the direction of arrows AA in FIG.
[0023]
As shown in FIG. 1, the machining / measurement system 1 of this example includes a machining apparatus 10, a measurement apparatus 40, and a communication line 35 that connects the machining apparatus 10 and the measurement apparatus 40.
[0024]
As shown in FIGS. 1, 2, 4, and 5, the processing apparatus 10 includes a table 11 that is movable in a horizontal plane, a spindle 12 that is movable in the vertical direction, and a table 11. A plurality of support devices 20 that are arranged at appropriate intervals and support the workpiece W, a support control device 30 that controls the operation of each support device 20, a load cell 31 that is provided at the upper end of each support device 20, and the like. Prepare. The table 11 and the spindle 12 are moved in the respective directions by an appropriate feeding mechanism (not shown).
[0025]
The support device 20 includes a cylindrical main body 21 having a hollow interior, a lower member 22 fixed to the lower portion of the main body 21, and a worm that is rotatably supported by the lower member 22 via a bearing 23. A wheel 24, a lifting member 25 that is screwed into the central portion of the worm wheel 24 and moves up and down in the direction of the arrow (up and down) as the worm wheel 24 rotates, a worm 26 that meshes with the worm wheel 24, 26 is provided with a drive motor 27 for applying rotational power to the worm 26 via a speed reducer (not shown) and rotating the worm 26, and the bottom surface of the work W is lowered by the elevating member 25 via the load cell 31. Supported.
[0026]
Each load cell 31 is provided to detect a force acting on each support device 20 by supporting the workpiece W. Since the force acting on each support device 20 varies depending on the support position in the vertical direction of the support device 20, the support position of each support device 20 can be grasped by detecting this.
[0027]
The support control device 30 receives the load value detected by each load cell 31, and drives and controls each drive motor 27 so that the received load value becomes a preset target load value. The support position of the apparatus 20 is adjusted, and the load value detected by each load cell 31 is transmitted to the measurement apparatus 40 via the communication line 35. The target load value is input from an appropriate input device (not shown).
[0028]
As shown in FIGS. 1, 3, 4, and 5, the measuring device 40 has a coordinate measuring machine 42 having a measuring table 41 on which a workpiece W is placed, and the support device 20 at the same interval. A plurality of support devices 50 arranged on the measurement table 41 and capable of supporting the same portion as the support portion of the bottom surface of the work W supported by the support device 20, and a support for controlling the operation of each support device 50 A control device 60 and a load cell 61 disposed at the upper end of each support device 50 are provided.
[0029]
Although the detailed structure of the coordinate measuring machine 42 is not shown, a measuring element 43 that outputs a detection signal only when contacting the workpiece W, and a drive mechanism unit that moves the measuring element 43 in three orthogonal axes. (Not shown), a linear encoder (not shown) attached to a drive mechanism (not shown) to detect the position of the probe 43, a detection signal output from the probe 43, and a linear encoder ( A shape data calculation processing unit (not shown) for calculating data related to the actual machining surface shape of the workpiece W is provided on the basis of position data detected by (not shown).
[0030]
The support device 50 includes a main body 51, a lower member 52, a bearing 53, a worm wheel 54, an elevating member 55, a worm 56, a drive motor 57, and the like, and the work W bottom surface is supported by the elevating member 55 via the load cell 61. . Since the support device 50 has the same structure as the support device 20, a detailed description thereof will be omitted.
[0031]
The support control device 60 receives the load value detected by each load cell 61, receives the load value transmitted from the support control device 30, and corresponds to the load value detected by each load cell 61. The load value received from the support control device 30 is the same value, that is, the vertical support position relationship between the support devices 50 is the vertical direction supported by the support devices 20. Each drive motor 57 is driven and controlled so as to be the same as the support position relationship, and the support position of each support device 50 is adjusted.
[0032]
According to the machining / measurement system 1 of the present example configured as described above, the workpiece W is machined by the machining apparatus 10 and the machining surface shape of the machined workpiece W is measured as described below. Measured by device 40.
[0033]
First, the workpiece W is fixed on the table 11 by a clamping device (not shown) or the like as appropriate with the bottom surface supported by each supporting device 20. At this time, each drive motor 27 is driven and controlled by the support control device 30 so that the load value detected by each load cell 31 becomes a preset target load value. Each support position is adjusted. Further, the load value detected by each load cell 31 is transmitted by the support control device 30 to the support control device 60 of the measuring device 40 via the communication line 35.
[0034]
Thereafter, the spindle 12 to which the tool T is mounted and appropriately driven to rotate and the table 11 are moved in the respective directions by a feed mechanism (not shown), so that the workpiece W and the tool T are relatively moved. The workpiece W is processed by the tool T after being moved.
[0035]
Then, the machined work W is removed from the table 11 and carried into the measuring device 40, and the same portion as the support portion by the support device 20 is supported by each support device 50. Then, the load value detected by each load cell 61 and the load value received from the corresponding support control device 30 are the same, that is, the vertical support position relationship between the support devices 50. However, each drive motor 57 is driven and controlled by the support control device 60 so that the support position relationship in the vertical direction between the support devices 20 is the same, and the support position in each support device 50 is adjusted. The
[0036]
As a result, the workpiece W is supported by the support device 50 of the measuring device 20 in the same state as the support state supported by the support device 20 of the processing device 10.
[0037]
Thereafter, the probe 43 is moved to each preset measurement position by a drive mechanism (not shown), and the probe 43 is brought into contact with the workpiece W at the measurement position, whereby a contact signal is output from the probe 43. Then, based on this contact signal and position data detected by a linear encoder (not shown), an actual machining surface shape of the workpiece W is calculated in a shape data calculation processing unit (not shown).
[0038]
By the way, as described above, when a plurality of places on the bottom surface of the work W are supported by a support tool or the like, the work W is deformed by its own weight, so that if the support state at the time of measurement is different from the support state at the time of processing, The deformation state of the workpiece W at the time and the deformation state of the workpiece W at the time of measurement are different, resulting in a problem that the shape of the machining surface of the workpiece W is different between the machining time and the measurement time.
[0039]
According to the machining / measurement system 1 of this example, since the support state of the workpiece W at the time of measurement is the same as the support state at the time of machining, the deformation state of the workpiece W at the time of measurement is changed to the workpiece at the time of machining. The deformed state of W can be made the same, and as a result, the shape of the work surface of the workpiece W can be matched between the time of machining and the time of measurement. It can be reproduced during measurement. As a result, the actual state of the machined surface shape after machining can be accurately measured (understood). By reflecting the actual state of the machined surface shape measured in this way in the next machining, machining accuracy can be improved. Further improvement can be achieved.
[0040]
In addition, since the data related to the support state of the workpiece W at the time of processing is transmitted to the measuring device 40 via the communication line 35, the support state of the workpiece W at the time of measurement is matched with the support state at the time of processing. This can be accurately and easily performed when the supporting state at the time of measurement is matched with that at the time of processing.
[0041]
As mentioned above, although one Embodiment of this invention was described, the specific aspect which this invention can take is not limited to this at all.
[0042]
In the above example, the support positions of the support devices 20 and 50 are determined from the force acting on the support devices 20 and 50. However, the present invention is not limited to this, and the drive motors 27 and 57 are servo controlled. As a motor, the load cells 31 and 61 are used as rotary encoders attached to the servo motor, and the rotation position of the servo motor is detected by the rotary encoder so that the support position of each of the support devices 20 and 50 is detected. It can also be configured.
[0043]
In this case, the support control device 30 moves each servo motor (support device 20 side) so that the rotation position detected by each rotary encoder (support device 20 side) matches the target rotation position set appropriately. The support control device 60 drives and controls each servo so that the rotation position detected by each rotary encoder (support device 50 side) and the rotation position received from the support control device 30 have the same value. Drives and controls the motor (supporting device 50 side).
[Brief description of the drawings]
FIG. 1 is a block diagram showing a schematic configuration of a machining / measurement system according to an embodiment of the present invention.
FIG. 2 is a front view showing a part of the processing apparatus according to the embodiment.
FIG. 3 is a front view showing a part of the measuring apparatus according to the present embodiment.
FIG. 4 is a plan view partially showing a schematic configuration of the support device and the like according to the present embodiment in a block diagram.
5 is a cross-sectional view in the direction of arrows AA in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Processing and measurement system 10 Processing apparatus 11 Table 12 Spindle 20, 50 Support apparatus 25,55 Lifting member 27,57 Drive motor 30,60 Support control apparatus 31,61 Load cell 40 Measuring apparatus 41 Measuring stand 42 Three-dimensional measuring machine 43 Measurement Child

Claims

A cylindrical first main body having an opening at the top and a hollow inside, a first lower member fixed to the lower portion of the first main body, provided horizontally in the first main body, via a bearing A first worm wheel rotatably supported by the first lower member, disposed in the first body above the first worm wheel, and screwed into a central portion thereof; A first elevating member that moves up and down in accordance with the rotation of the wheel, a first worm that meshes with the first worm wheel, and a first drive motor that applies rotational power to the first worm, a plurality of first support means for supporting the bottom surface of the workpiece on the first lifting member, wherein each disposed on each first lift member, the load acting on the first elevating member by the workpiece a first load cell for detecting the Wherein based on the detected load value by the first load cell driving each first drive motor, and a first control means for controlling, processing apparatus for machining a workpiece supported by said respective first support means When,
A cylindrical second main body having an opening at the top and a hollow inside, a second lower member fixed to the lower portion of the second main body, and provided horizontally in the second main body via a bearing A second worm wheel rotatably supported by a second lower member, disposed in the second main body above the second worm wheel, and screwed into a central portion thereof; the second worm wheel A second elevating member that moves up and down in accordance with the rotation of the second worm wheel, a second worm that meshes with the second worm wheel, and a second drive motor that applies rotational power to the second worm. A plurality of second support means for supporting on the second elevating member the same part as the support part of the bottom surface of the workpiece, which is sometimes supported by the first elevating member of the first support means, and each second elevating member Arranged on each of the above, A second load cell for detecting a load acting on the second lifting member by engineering material, wherein on the basis of the detected load values by respective second load cell driving each second drive motor, and a second control means for controlling and a measuring device that includes a three-dimensional measuring means for measuring the three-dimensional shape of the workpiece supported by said second supporting means, in the processing and measurement system configured by connecting via an electric communication line There,
Second control means of the measuring device receives a load value detected by each of the first load cell of the processing apparatus from the processing apparatus, and a load value detected load value and the received by the respective second load cell A processing / measuring system configured to drive and control each of the second drive motors so as to have the same value.

A cylindrical first main body having an opening at the top and a hollow inside, a first lower member fixed to the lower portion of the first main body, provided horizontally in the first main body, via a bearing A first worm wheel rotatably supported by the first lower member, disposed in the first body above the first worm wheel, and screwed into a central portion thereof; A first elevating member that moves up and down in accordance with the rotation of the wheel, a first worm that meshes with the first worm wheel, and a first servomotor that applies rotational power to the first worm, a plurality of first support means for supporting the bottom surface of the workpiece on the first lifting member, wherein is attached to the first servo motor, a first rotary encoder for detecting the rotational position, wherein the first rotary encoder inspection by Is provided with a first control means and said rotational position based on the respective first drive servomotors, control, and processing apparatus for machining a workpiece wherein supported by the first supporting means,
A cylindrical second main body having an opening at the top and a hollow inside, a second lower member fixed to the lower portion of the second main body, and provided horizontally in the second main body via a bearing A second worm wheel rotatably supported by a second lower member, disposed in the second main body above the second worm wheel, and screwed into a central portion thereof; the second worm wheel A second elevating member that elevates in the vertical direction with rotation of the second worm wheel, a second worm that meshes with the second worm wheel, and a second servomotor that applies rotational power to the second worm, and is machined A plurality of second support means for supporting on the second elevating member the same part as the support part of the bottom surface of the work piece supported by the first elevating member of the first support means, and the second servo motors The rotation position attached to A second rotary encoder for detecting the said based on the detected rotational positions by respective second rotary encoder drive each second servo motor, and a second control means for controlling, supported by said second support means wherein a measuring apparatus and a three-dimensional measuring means for measuring the three-dimensional shape of the workpiece, a machining and measurement system configured by connecting via an electric communication line,
Second control means of the measuring device, receives the rotational position detected by the first rotary encoder of the processing apparatus from the processing device, the rotational position detected as the rotational position received by said respective second rotary encoder A processing / measuring system configured to drive and control each of the second servo motors so that the values are the same.