JP3979673B2 - 浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング - Google Patents
浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング Download PDFInfo
- Publication number
- JP3979673B2 JP3979673B2 JP51261298A JP51261298A JP3979673B2 JP 3979673 B2 JP3979673 B2 JP 3979673B2 JP 51261298 A JP51261298 A JP 51261298A JP 51261298 A JP51261298 A JP 51261298A JP 3979673 B2 JP3979673 B2 JP 3979673B2
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- JP
- Japan
- Prior art keywords
- block
- potential
- cells
- preprogramming
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007667 floating Methods 0.000 title claims description 63
- 230000005641 tunneling Effects 0.000 title claims description 36
- 238000000034 method Methods 0.000 claims description 52
- 238000012360 testing method Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 7
- 230000001939 inductive effect Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 3
- 108091006146 Channels Proteins 0.000 description 85
- 238000009792 diffusion process Methods 0.000 description 10
- 239000002784 hot electron Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 238000011084 recovery Methods 0.000 description 9
- 238000013459 approach Methods 0.000 description 8
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000005689 Fowler Nordheim tunneling Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/107—Programming all cells in an array, sector or block to the same state prior to flash erasing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0416—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/14—Circuits for erasing electrically, e.g. erase voltage switching circuits
- G11C16/16—Circuits for erasing electrically, e.g. erase voltage switching circuits for erasing blocks, e.g. arrays, words, groups
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3436—Arrangements for verifying correct programming or erasure
- G11C16/3454—Arrangements for verifying correct programming or for detecting overprogrammed cells
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3436—Arrangements for verifying correct programming or erasure
- G11C16/3454—Arrangements for verifying correct programming or for detecting overprogrammed cells
- G11C16/3459—Circuits or methods to verify correct programming of nonvolatile memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| WO96/14349 | 1996-09-05 | ||
| PCT/US1996/014349 WO1998010471A1 (en) | 1996-09-05 | 1996-09-05 | Triple well floating gate memory and operating method with isolated channel program, preprogram and erase processes |
| PCT/US1997/003861 WO1998010424A1 (en) | 1996-09-05 | 1997-03-10 | Fowler-nordheim (f-n) tunneling for pre-programming in a floating gate memory device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001500658A JP2001500658A (ja) | 2001-01-16 |
| JP2001500658A5 JP2001500658A5 (enExample) | 2004-12-09 |
| JP3979673B2 true JP3979673B2 (ja) | 2007-09-19 |
Family
ID=22255744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51261298A Expired - Lifetime JP3979673B2 (ja) | 1996-09-05 | 1997-03-10 | 浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5963476A (enExample) |
| EP (2) | EP0925586B1 (enExample) |
| JP (1) | JP3979673B2 (enExample) |
| WO (2) | WO1998010471A1 (enExample) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6188604B1 (en) * | 1998-03-02 | 2001-02-13 | Amic Technology, Inc. | Flash memory cell & array with improved pre-program and erase characteristics |
| WO1999063543A1 (en) * | 1998-06-04 | 1999-12-09 | Macronix International Co., Ltd. | Block decoded wordline driver with positive and negative voltage modes using four terminal mos transistors |
| JP3999900B2 (ja) | 1998-09-10 | 2007-10-31 | 株式会社東芝 | 不揮発性半導体メモリ |
| US6091657A (en) * | 1999-01-20 | 2000-07-18 | Lucent Technologies Inc. | Integrated circuit having protection of low voltage devices |
| US6091635A (en) * | 1999-03-24 | 2000-07-18 | Worldwide Semiconductor Manufacturing Corporation | Electron injection method for substrate-hot-electron program and erase VT tightening for ETOX cell |
| US6188609B1 (en) * | 1999-05-06 | 2001-02-13 | Advanced Micro Devices, Inc. | Ramped or stepped gate channel erase for flash memory application |
| DE69923548D1 (de) | 1999-06-22 | 2005-03-10 | St Microelectronics Srl | Flashkompatibler EEPROM Speicher |
| US6327183B1 (en) | 2000-01-10 | 2001-12-04 | Advanced Micro Devices, Inc. | Nonlinear stepped programming voltage |
| US6222771B1 (en) * | 2000-01-31 | 2001-04-24 | Eon Silicon Devices, Inc. | Unified program method and circuitry in flash EEPROM |
| US6269025B1 (en) | 2000-02-09 | 2001-07-31 | Advanced Micro Devices, Inc. | Memory system having a program and erase voltage modifier |
| US6246610B1 (en) | 2000-02-22 | 2001-06-12 | Advanced Micro Devices, Inc. | Symmetrical program and erase scheme to improve erase time degradation in NAND devices |
| US6295228B1 (en) | 2000-02-28 | 2001-09-25 | Advanced Micro Devices, Inc. | System for programming memory cells |
| US6304487B1 (en) | 2000-02-28 | 2001-10-16 | Advanced Micro Devices, Inc. | Register driven means to control programming voltages |
| US6246611B1 (en) * | 2000-02-28 | 2001-06-12 | Advanced Micro Devices, Inc. | System for erasing a memory cell |
| US6556477B2 (en) | 2001-05-21 | 2003-04-29 | Ibm Corporation | Integrated chip having SRAM, DRAM and flash memory and method for fabricating the same |
| US6670234B2 (en) | 2001-06-22 | 2003-12-30 | International Business Machines Corporation | Method of integrating volatile and non-volatile memory cells on the same substrate and a semiconductor memory device thereof |
| US6784480B2 (en) * | 2002-02-12 | 2004-08-31 | Micron Technology, Inc. | Asymmetric band-gap engineered nonvolatile memory device |
| US6906376B1 (en) * | 2002-06-13 | 2005-06-14 | A Plus Flash Technology, Inc. | EEPROM cell structure and array architecture |
| US7221586B2 (en) | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide nanolaminates |
| US6865407B2 (en) * | 2002-07-11 | 2005-03-08 | Optical Sensors, Inc. | Calibration technique for non-invasive medical devices |
| US6888200B2 (en) * | 2002-08-30 | 2005-05-03 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
| US6903969B2 (en) * | 2002-08-30 | 2005-06-07 | Micron Technology Inc. | One-device non-volatile random access memory cell |
| US6917078B2 (en) * | 2002-08-30 | 2005-07-12 | Micron Technology Inc. | One transistor SOI non-volatile random access memory cell |
| US6771541B1 (en) * | 2003-02-25 | 2004-08-03 | Nexflash Technologies, Inc. | Method and apparatus for providing row redundancy in nonvolatile semiconductor memory |
| US8125003B2 (en) * | 2003-07-02 | 2012-02-28 | Micron Technology, Inc. | High-performance one-transistor memory cell |
| CN1836289A (zh) * | 2003-08-13 | 2006-09-20 | 皇家飞利浦电子股份有限公司 | 改进的电荷俘获非易失性存储器的擦除和读取方案 |
| KR100558004B1 (ko) * | 2003-10-22 | 2006-03-06 | 삼성전자주식회사 | 게이트 전극과 반도체 기판 사이에 전하저장층을 갖는비휘발성 메모리 소자의 프로그램 방법 |
| CN100463138C (zh) * | 2004-04-26 | 2009-02-18 | 旺宏电子股份有限公司 | 电荷陷入非易失性存储器的电荷平衡操作方法 |
| US7075828B2 (en) * | 2004-04-26 | 2006-07-11 | Macronix International Co., Intl. | Operation scheme with charge balancing erase for charge trapping non-volatile memory |
| US7133313B2 (en) * | 2004-04-26 | 2006-11-07 | Macronix International Co., Ltd. | Operation scheme with charge balancing for charge trapping non-volatile memory |
| KR100591254B1 (ko) * | 2004-04-29 | 2006-06-19 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
| US7145186B2 (en) * | 2004-08-24 | 2006-12-05 | Micron Technology, Inc. | Memory cell with trenched gated thyristor |
| US7224619B2 (en) * | 2005-09-09 | 2007-05-29 | Macronix International Co., Ltd. | Method and apparatus for protection from over-erasing nonvolatile memory cells |
| US20080117691A1 (en) * | 2006-11-17 | 2008-05-22 | Sharp Kabushiki Kaisha | Erasing circuit of nonvolatile semiconductor memory device |
| US7746706B2 (en) | 2006-12-15 | 2010-06-29 | Spansion Llc | Methods and systems for memory devices |
| US8320191B2 (en) * | 2007-08-30 | 2012-11-27 | Infineon Technologies Ag | Memory cell arrangement, method for controlling a memory cell, memory array and electronic device |
| US7940572B2 (en) * | 2008-01-07 | 2011-05-10 | Mosaid Technologies Incorporated | NAND flash memory having multiple cell substrates |
| US8984238B2 (en) * | 2009-02-05 | 2015-03-17 | Spansion Llc | Fractured erase system and method |
| DE102009014371A1 (de) | 2009-03-21 | 2010-09-30 | Emico Gmbh | Beheizbarer Vorfilter für Abgasreinigungsanlagen bei Dieselmotoren |
| CN102498475A (zh) * | 2009-07-10 | 2012-06-13 | 柰米闪芯积体电路有限公司 | 高速高密度以nand为基础的双晶体管-nor闪存的新构成 |
| CN112582001B (zh) * | 2019-09-30 | 2024-05-24 | 台湾积体电路制造股份有限公司 | 半导体器件及其形成方法 |
| FR3113976B1 (fr) * | 2020-09-07 | 2023-07-28 | St Microelectronics Rousset | Mémoire type mémoire morte électriquement programmable et effaçable |
| CN112639978B (zh) * | 2020-12-04 | 2023-07-21 | 长江存储科技有限责任公司 | 用于三维nand闪存中的擦除和复位的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US243559A (en) * | 1881-06-28 | Thomas hipwell | ||
| US5122985A (en) * | 1990-04-16 | 1992-06-16 | Giovani Santin | Circuit and method for erasing eeprom memory arrays to prevent over-erased cells |
| US5132935A (en) * | 1990-04-16 | 1992-07-21 | Ashmore Jr Benjamin H | Erasure of eeprom memory arrays to prevent over-erased cells |
| JP3068291B2 (ja) * | 1990-12-12 | 2000-07-24 | 新日本製鐵株式会社 | 半導体記憶装置 |
| KR970003809B1 (ko) * | 1991-12-09 | 1997-03-22 | 후지쓰 가부시끼가이샤 | 소거특성을 개량한 플래쉬메모리 및 그것에 대한 회로 |
| DE4311358C2 (de) * | 1992-04-07 | 1999-07-22 | Mitsubishi Electric Corp | Nicht-flüchtige Halbleiterspeichereinrichtung und Betriebsverfahren für eine nicht-flüchtige Halbleiterspeichereinrichtung und Verfahren zum Programmieren von Information in eine nicht-flüchtige Halbleiterspeichereinrichtung |
| US5341342A (en) * | 1992-12-18 | 1994-08-23 | National Semiconductor Corporation | Flash memory cell structure |
| EP0690452A3 (en) * | 1994-06-28 | 1999-01-07 | Advanced Micro Devices, Inc. | Electrically erasable memory and method of erasure |
| US5487033A (en) * | 1994-06-28 | 1996-01-23 | Intel Corporation | Structure and method for low current programming of flash EEPROMS |
| US5699298A (en) * | 1996-05-22 | 1997-12-16 | Macronix International Co., Ltd. | Flash memory erase with controlled band-to-band tunneling current |
| US5790456A (en) * | 1997-05-09 | 1998-08-04 | Advanced Micro Devices, Inc. | Multiple bits-per-cell flash EEPROM memory cells with wide program and erase Vt window |
-
1996
- 1996-09-05 WO PCT/US1996/014349 patent/WO1998010471A1/en not_active Ceased
-
1997
- 1997-03-10 EP EP97915919A patent/EP0925586B1/en not_active Expired - Lifetime
- 1997-03-10 WO PCT/US1997/003861 patent/WO1998010424A1/en not_active Ceased
- 1997-03-10 EP EP02026762A patent/EP1306856B1/en not_active Expired - Lifetime
- 1997-03-10 JP JP51261298A patent/JP3979673B2/ja not_active Expired - Lifetime
- 1997-11-12 US US08/975,516 patent/US5963476A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1306856A3 (en) | 2003-07-02 |
| WO1998010471A1 (en) | 1998-03-12 |
| EP0925586B1 (en) | 2003-07-09 |
| EP0925586A1 (en) | 1999-06-30 |
| EP1306856B1 (en) | 2005-06-29 |
| US5963476A (en) | 1999-10-05 |
| JP2001500658A (ja) | 2001-01-16 |
| EP0925586A4 (en) | 2000-05-31 |
| WO1998010424A1 (en) | 1998-03-12 |
| EP1306856A2 (en) | 2003-05-02 |
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