JP3979673B2 - 浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング - Google Patents

浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング Download PDF

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JP3979673B2
JP3979673B2 JP51261298A JP51261298A JP3979673B2 JP 3979673 B2 JP3979673 B2 JP 3979673B2 JP 51261298 A JP51261298 A JP 51261298A JP 51261298 A JP51261298 A JP 51261298A JP 3979673 B2 JP3979673 B2 JP 3979673B2
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block
potential
cells
preprogramming
channel
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JP2001500658A (ja
JP2001500658A5 (enExample
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チュン シウン ヒュン
ツェン ヒューエイ シアウ
ヤオ ウー チェン
アイ ロン リー
フューチア ソーン
レイ リン ワン
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マクロニクス インターナショナル カンパニー リミテッド
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/107Programming all cells in an array, sector or block to the same state prior to flash erasing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0416Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/14Circuits for erasing electrically, e.g. erase voltage switching circuits
    • G11C16/16Circuits for erasing electrically, e.g. erase voltage switching circuits for erasing blocks, e.g. arrays, words, groups
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/3454Arrangements for verifying correct programming or for detecting overprogrammed cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/3454Arrangements for verifying correct programming or for detecting overprogrammed cells
    • G11C16/3459Circuits or methods to verify correct programming of nonvolatile memory cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B69/00Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Volatile Memory (AREA)
  • Read Only Memory (AREA)
  • Semiconductor Memories (AREA)
JP51261298A 1996-09-05 1997-03-10 浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング Expired - Lifetime JP3979673B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
WO96/14349 1996-09-05
PCT/US1996/014349 WO1998010471A1 (en) 1996-09-05 1996-09-05 Triple well floating gate memory and operating method with isolated channel program, preprogram and erase processes
PCT/US1997/003861 WO1998010424A1 (en) 1996-09-05 1997-03-10 Fowler-nordheim (f-n) tunneling for pre-programming in a floating gate memory device

Publications (3)

Publication Number Publication Date
JP2001500658A JP2001500658A (ja) 2001-01-16
JP2001500658A5 JP2001500658A5 (enExample) 2004-12-09
JP3979673B2 true JP3979673B2 (ja) 2007-09-19

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JP51261298A Expired - Lifetime JP3979673B2 (ja) 1996-09-05 1997-03-10 浮遊ゲートメモリデバイスにおけるプリプログラミングのためのファウラ・ノルトハイム(f―n)トンネリング

Country Status (4)

Country Link
US (1) US5963476A (enExample)
EP (2) EP0925586B1 (enExample)
JP (1) JP3979673B2 (enExample)
WO (2) WO1998010471A1 (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6188604B1 (en) * 1998-03-02 2001-02-13 Amic Technology, Inc. Flash memory cell & array with improved pre-program and erase characteristics
WO1999063543A1 (en) * 1998-06-04 1999-12-09 Macronix International Co., Ltd. Block decoded wordline driver with positive and negative voltage modes using four terminal mos transistors
JP3999900B2 (ja) 1998-09-10 2007-10-31 株式会社東芝 不揮発性半導体メモリ
US6091657A (en) * 1999-01-20 2000-07-18 Lucent Technologies Inc. Integrated circuit having protection of low voltage devices
US6091635A (en) * 1999-03-24 2000-07-18 Worldwide Semiconductor Manufacturing Corporation Electron injection method for substrate-hot-electron program and erase VT tightening for ETOX cell
US6188609B1 (en) * 1999-05-06 2001-02-13 Advanced Micro Devices, Inc. Ramped or stepped gate channel erase for flash memory application
DE69923548D1 (de) 1999-06-22 2005-03-10 St Microelectronics Srl Flashkompatibler EEPROM Speicher
US6327183B1 (en) 2000-01-10 2001-12-04 Advanced Micro Devices, Inc. Nonlinear stepped programming voltage
US6222771B1 (en) * 2000-01-31 2001-04-24 Eon Silicon Devices, Inc. Unified program method and circuitry in flash EEPROM
US6269025B1 (en) 2000-02-09 2001-07-31 Advanced Micro Devices, Inc. Memory system having a program and erase voltage modifier
US6246610B1 (en) 2000-02-22 2001-06-12 Advanced Micro Devices, Inc. Symmetrical program and erase scheme to improve erase time degradation in NAND devices
US6295228B1 (en) 2000-02-28 2001-09-25 Advanced Micro Devices, Inc. System for programming memory cells
US6304487B1 (en) 2000-02-28 2001-10-16 Advanced Micro Devices, Inc. Register driven means to control programming voltages
US6246611B1 (en) * 2000-02-28 2001-06-12 Advanced Micro Devices, Inc. System for erasing a memory cell
US6556477B2 (en) 2001-05-21 2003-04-29 Ibm Corporation Integrated chip having SRAM, DRAM and flash memory and method for fabricating the same
US6670234B2 (en) 2001-06-22 2003-12-30 International Business Machines Corporation Method of integrating volatile and non-volatile memory cells on the same substrate and a semiconductor memory device thereof
US6784480B2 (en) * 2002-02-12 2004-08-31 Micron Technology, Inc. Asymmetric band-gap engineered nonvolatile memory device
US6906376B1 (en) * 2002-06-13 2005-06-14 A Plus Flash Technology, Inc. EEPROM cell structure and array architecture
US7221586B2 (en) 2002-07-08 2007-05-22 Micron Technology, Inc. Memory utilizing oxide nanolaminates
US6865407B2 (en) * 2002-07-11 2005-03-08 Optical Sensors, Inc. Calibration technique for non-invasive medical devices
US6888200B2 (en) * 2002-08-30 2005-05-03 Micron Technology Inc. One transistor SOI non-volatile random access memory cell
US6903969B2 (en) * 2002-08-30 2005-06-07 Micron Technology Inc. One-device non-volatile random access memory cell
US6917078B2 (en) * 2002-08-30 2005-07-12 Micron Technology Inc. One transistor SOI non-volatile random access memory cell
US6771541B1 (en) * 2003-02-25 2004-08-03 Nexflash Technologies, Inc. Method and apparatus for providing row redundancy in nonvolatile semiconductor memory
US8125003B2 (en) * 2003-07-02 2012-02-28 Micron Technology, Inc. High-performance one-transistor memory cell
CN1836289A (zh) * 2003-08-13 2006-09-20 皇家飞利浦电子股份有限公司 改进的电荷俘获非易失性存储器的擦除和读取方案
KR100558004B1 (ko) * 2003-10-22 2006-03-06 삼성전자주식회사 게이트 전극과 반도체 기판 사이에 전하저장층을 갖는비휘발성 메모리 소자의 프로그램 방법
CN100463138C (zh) * 2004-04-26 2009-02-18 旺宏电子股份有限公司 电荷陷入非易失性存储器的电荷平衡操作方法
US7075828B2 (en) * 2004-04-26 2006-07-11 Macronix International Co., Intl. Operation scheme with charge balancing erase for charge trapping non-volatile memory
US7133313B2 (en) * 2004-04-26 2006-11-07 Macronix International Co., Ltd. Operation scheme with charge balancing for charge trapping non-volatile memory
KR100591254B1 (ko) * 2004-04-29 2006-06-19 엘지.필립스 엘시디 주식회사 유기전계 발광소자와 그 제조방법
US7145186B2 (en) * 2004-08-24 2006-12-05 Micron Technology, Inc. Memory cell with trenched gated thyristor
US7224619B2 (en) * 2005-09-09 2007-05-29 Macronix International Co., Ltd. Method and apparatus for protection from over-erasing nonvolatile memory cells
US20080117691A1 (en) * 2006-11-17 2008-05-22 Sharp Kabushiki Kaisha Erasing circuit of nonvolatile semiconductor memory device
US7746706B2 (en) 2006-12-15 2010-06-29 Spansion Llc Methods and systems for memory devices
US8320191B2 (en) * 2007-08-30 2012-11-27 Infineon Technologies Ag Memory cell arrangement, method for controlling a memory cell, memory array and electronic device
US7940572B2 (en) * 2008-01-07 2011-05-10 Mosaid Technologies Incorporated NAND flash memory having multiple cell substrates
US8984238B2 (en) * 2009-02-05 2015-03-17 Spansion Llc Fractured erase system and method
DE102009014371A1 (de) 2009-03-21 2010-09-30 Emico Gmbh Beheizbarer Vorfilter für Abgasreinigungsanlagen bei Dieselmotoren
CN102498475A (zh) * 2009-07-10 2012-06-13 柰米闪芯积体电路有限公司 高速高密度以nand为基础的双晶体管-nor闪存的新构成
CN112582001B (zh) * 2019-09-30 2024-05-24 台湾积体电路制造股份有限公司 半导体器件及其形成方法
FR3113976B1 (fr) * 2020-09-07 2023-07-28 St Microelectronics Rousset Mémoire type mémoire morte électriquement programmable et effaçable
CN112639978B (zh) * 2020-12-04 2023-07-21 长江存储科技有限责任公司 用于三维nand闪存中的擦除和复位的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US243559A (en) * 1881-06-28 Thomas hipwell
US5122985A (en) * 1990-04-16 1992-06-16 Giovani Santin Circuit and method for erasing eeprom memory arrays to prevent over-erased cells
US5132935A (en) * 1990-04-16 1992-07-21 Ashmore Jr Benjamin H Erasure of eeprom memory arrays to prevent over-erased cells
JP3068291B2 (ja) * 1990-12-12 2000-07-24 新日本製鐵株式会社 半導体記憶装置
KR970003809B1 (ko) * 1991-12-09 1997-03-22 후지쓰 가부시끼가이샤 소거특성을 개량한 플래쉬메모리 및 그것에 대한 회로
DE4311358C2 (de) * 1992-04-07 1999-07-22 Mitsubishi Electric Corp Nicht-flüchtige Halbleiterspeichereinrichtung und Betriebsverfahren für eine nicht-flüchtige Halbleiterspeichereinrichtung und Verfahren zum Programmieren von Information in eine nicht-flüchtige Halbleiterspeichereinrichtung
US5341342A (en) * 1992-12-18 1994-08-23 National Semiconductor Corporation Flash memory cell structure
EP0690452A3 (en) * 1994-06-28 1999-01-07 Advanced Micro Devices, Inc. Electrically erasable memory and method of erasure
US5487033A (en) * 1994-06-28 1996-01-23 Intel Corporation Structure and method for low current programming of flash EEPROMS
US5699298A (en) * 1996-05-22 1997-12-16 Macronix International Co., Ltd. Flash memory erase with controlled band-to-band tunneling current
US5790456A (en) * 1997-05-09 1998-08-04 Advanced Micro Devices, Inc. Multiple bits-per-cell flash EEPROM memory cells with wide program and erase Vt window

Also Published As

Publication number Publication date
EP1306856A3 (en) 2003-07-02
WO1998010471A1 (en) 1998-03-12
EP0925586B1 (en) 2003-07-09
EP0925586A1 (en) 1999-06-30
EP1306856B1 (en) 2005-06-29
US5963476A (en) 1999-10-05
JP2001500658A (ja) 2001-01-16
EP0925586A4 (en) 2000-05-31
WO1998010424A1 (en) 1998-03-12
EP1306856A2 (en) 2003-05-02

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