JP3945595B2 - 光スイッチ素子および光スイッチ方法 - Google Patents
光スイッチ素子および光スイッチ方法 Download PDFInfo
- Publication number
- JP3945595B2 JP3945595B2 JP13826597A JP13826597A JP3945595B2 JP 3945595 B2 JP3945595 B2 JP 3945595B2 JP 13826597 A JP13826597 A JP 13826597A JP 13826597 A JP13826597 A JP 13826597A JP 3945595 B2 JP3945595 B2 JP 3945595B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- gap
- substrate
- heater
- optical switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 222
- 238000000034 method Methods 0.000 title description 47
- 239000000758 substrate Substances 0.000 claims description 145
- 239000007788 liquid Substances 0.000 claims description 115
- 230000007246 mechanism Effects 0.000 claims description 59
- 239000004065 semiconductor Substances 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 description 69
- 239000010410 layer Substances 0.000 description 52
- 239000007789 gas Substances 0.000 description 36
- 238000004891 communication Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 24
- 239000011159 matrix material Substances 0.000 description 16
- 239000000835 fiber Substances 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005253 cladding Methods 0.000 description 10
- 239000006260 foam Substances 0.000 description 10
- 230000009471 action Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 239000004020 conductor Substances 0.000 description 7
- 239000011162 core material Substances 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000005499 meniscus Effects 0.000 description 6
- 230000004913 activation Effects 0.000 description 5
- 238000001994 activation Methods 0.000 description 5
- 238000007872 degassing Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000012792 core layer Substances 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910004490 TaAl Inorganic materials 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 208000012868 Overgrowth Diseases 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002998 adhesive polymer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002779 inactivation Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US663,503 | 1984-10-22 | ||
| US08/663,503 US5699462A (en) | 1996-06-14 | 1996-06-14 | Total internal reflection optical switches employing thermal activation |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1090735A JPH1090735A (ja) | 1998-04-10 |
| JPH1090735A5 JPH1090735A5 (enExample) | 2005-04-07 |
| JP3945595B2 true JP3945595B2 (ja) | 2007-07-18 |
Family
ID=24662090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13826597A Expired - Fee Related JP3945595B2 (ja) | 1996-06-14 | 1997-05-28 | 光スイッチ素子および光スイッチ方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5699462A (enExample) |
| EP (1) | EP0813088A1 (enExample) |
| JP (1) | JP3945595B2 (enExample) |
Families Citing this family (142)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69731454T2 (de) * | 1996-08-22 | 2005-10-20 | Koninklijke Philips Electronics N.V. | Elektooptische schaltvorrichtung |
| US6072924A (en) * | 1996-09-02 | 2000-06-06 | Nippon Telegraph And Telephone Corporation | Optical switch and method for assembling the same |
| US5852689A (en) * | 1997-04-09 | 1998-12-22 | Hewlett-Packard Company | Method for making fluid optical switches |
| US6122416A (en) * | 1997-09-26 | 2000-09-19 | Nippon Telegraph And Telephone Corporation | Stacked thermo-optic switch, switch matrix and add-drop multiplexer having the stacked thermo-optic switch |
| US6816296B2 (en) | 1997-10-29 | 2004-11-09 | Teloptics Corporation | Optical switching network and network node and method of optical switching |
| US6768572B2 (en) * | 1997-10-29 | 2004-07-27 | Teloptics Corporation | Solid state free space switch array on a substrate |
| US6310712B1 (en) | 1997-10-29 | 2001-10-30 | Teloptics Corporation | Discrete element light modulating microstructure devices |
| US5960131A (en) * | 1998-02-04 | 1999-09-28 | Hewlett-Packard Company | Switching element having an expanding waveguide core |
| US6195478B1 (en) | 1998-02-04 | 2001-02-27 | Agilent Technologies, Inc. | Planar lightwave circuit-based optical switches using micromirrors in trenches |
| US6055344A (en) * | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
| US6137930A (en) | 1998-07-08 | 2000-10-24 | Optical Switch Corporation | Method and apparatus for aligning optical fibers |
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| US6236787B1 (en) | 1998-07-08 | 2001-05-22 | Optical Switch Corporation | Method and apparatus for aligning optical fibers using an alignment spacer |
| US6062681A (en) * | 1998-07-14 | 2000-05-16 | Hewlett-Packard Company | Bubble valve and bubble valve-based pressure regulator |
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| US6389189B1 (en) | 1998-10-23 | 2002-05-14 | Corning Incorporated | Fluid-encapsulated MEMS optical switch |
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| US6377873B1 (en) * | 1999-08-23 | 2002-04-23 | Agilent Technologies, Inc. | Method for determining optimum pressure for forming a bubble in liquid |
| US6473541B1 (en) | 1999-09-15 | 2002-10-29 | Seng-Tiong Ho | Photon transistors |
| US6438283B1 (en) | 1999-10-08 | 2002-08-20 | Optical Switch Corporation | Frustrated total internal reflection switch using double pass reflection and method of operation |
| US6404943B1 (en) | 1999-10-08 | 2002-06-11 | Agilent Technologies, Inc. | Apparatus and method for directing optical signals using a movable optical switching element |
| US6238805B1 (en) | 1999-10-08 | 2001-05-29 | Agilent Technologies, Inc. | Low-stress interface between materials having different coefficients of expansion and method for fabricating same |
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| US6320994B1 (en) * | 1999-12-22 | 2001-11-20 | Agilent Technolgies, Inc. | Total internal reflection optical switch |
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| JP2002207181A (ja) | 2001-01-09 | 2002-07-26 | Minolta Co Ltd | 光スイッチ |
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-
1996
- 1996-06-14 US US08/663,503 patent/US5699462A/en not_active Expired - Lifetime
-
1997
- 1997-05-28 JP JP13826597A patent/JP3945595B2/ja not_active Expired - Fee Related
- 1997-06-10 EP EP97109420A patent/EP0813088A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US5699462A (en) | 1997-12-16 |
| EP0813088A1 (en) | 1997-12-17 |
| JPH1090735A (ja) | 1998-04-10 |
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