GB2359898A - An integrated optical waveguide - Google Patents
An integrated optical waveguide Download PDFInfo
- Publication number
- GB2359898A GB2359898A GB0005193A GB0005193A GB2359898A GB 2359898 A GB2359898 A GB 2359898A GB 0005193 A GB0005193 A GB 0005193A GB 0005193 A GB0005193 A GB 0005193A GB 2359898 A GB2359898 A GB 2359898A
- Authority
- GB
- United Kingdom
- Prior art keywords
- integrated optical
- light
- optical device
- slab
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/128—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode field shaping
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/105—Materials and properties semiconductor single crystal Si
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
Description
1 2359898 1 INTEGRATED OPTICAL DEVICE This invention relates to an
integrated optical device for refracting a beam of light. It also relates to an integrated optical device functioning as an optical switch.
Various types of integrated optical switch are known. Most of these make use of interference effects to provide selective communication between one or more light inputs and one or more light outputs.
The present invention provides an alternative form of device.
According to a first aspect of the invention there is provided an integrated optical device for selectively directing light from one or more input waveguides to one or more output waveguides, the device comprising: a slab waveguide; one or more input waveguides for directing light into the slab waveguide; one or more output waveguides for receiving light from the input waveguide(s) after it has travelled through the slab waveguide; and adjustment means for adjusting the refractive index of a portion of the slab waveguide through which the light travels so as to refract the light as it passes therethrough, whereby transmission of light between the input and output waveguide(s) can be selectively controlled.
The present invention also provides a novel integrated optical device for refracting a light beam.
Thus, according to a second aspect of the invention, there is provided an integrated optical device for refracting a beam of light so as to alter its direction of travel, the device comprising a slab waveguide through which the beam is directed and adjustment means for adjusting the refractive index of a portion of the slab such that the direction of light emerging from said portion can be altered by adjusting the refractive index of said portion.
An embodiment of a device according to the second aspect of the invention may be used in the first aspect of the invention.
2 Preferred and optical features of both aspects of the invention will be apparent from the following description and from the subsidiary claims of the specification.
The invention will now be further described, merely by way of example, with reference to the accompanying drawings Figure 1 shows a schematic diagram of an embodiment of the first aspect of the invention; Figures 2 and 3 are sectional views through a ridge waveguide and a slab waveguide formed on a silicon-on-insulator chip; and Figure 4 shows a portion of Figure 1 in more detail.
Figure 1 shows an optical chip 1 having an input waveguide 2, a plurality of output waveguides 3 and a slab waveguide region 4 between the input and output waveguides 2,3. Figure 1 also shows a first parabolic mirror 5, a second parabolic mirror 6 and a triangular portion 4A of the slab waveguide 4.
Light from the input waveguide 2 is confined in a vertical direction, i.e the direction perpendicular to the plane of the chip 1, but diverges as it travels across the slab waveguide 4 until it reaches the first mirror 5 which is arranged to collimate the beam and direct it through the portion 4A to the second mirror 6. The second mirror 6 receives a collimated beam from the portion 4A and focuses this towards one of the output waveguides 3.
If the portion 4A has the same refractive index as the slab region 4 on the input and output sides thereof, the beam will pass through the portion 4A without deviation. However, if the refractive index of the portion 4A is altered so as to differ from that of the slab regions 4 on the input and output sides thereof, it will act in the manner of a prism and refract the beam of light as it passes therethrough.
i 1 3 The refracted beam of light remains collimated but strikes the second mirror 6 at a different angle and so is focussed thereby at a different position. Thus, by appropriate adjustment of the refractive index of the portion 4A, it can be arranged so that the light is directed towards a selected one of the output waveguides 3.
In a preferred arrangement, the portion 4A may be part of the slab region 4 on top of which is provided a heater, e.g. in the form of a series of resistance heaters formed by narrow lines 7 of conductive material, deposited on the upper surface of the slab region as shown in Figure 4.
By arranging the heaters 7 in a triangular pattern they can be used to change the temperature, and hence the refractive index, of a triangular portion of the slab waveguide 4 beneath the array of heaters 7. Electrical connections to the heaters 7 are not shown in Figure 4.
The application of appropriate heating currents to the heaters 7 thus controls the refractive index of the triangular portion 4a of the slab waveguide 4 and thus which of the output waveguides 3 the light is directed to. The device thus functions as an optical switch.
The chip 1 preferably comprises silicon and is preferably a silicon-oninsulator chip.
The input waveguide is preferably a rib waveguide 8 formed in a silicon layer 9 in a known manner. Figure 2 shows a cross section through a rib waveguide formed in a silicon layer 9 supported on a substrate 10 (typically also silicon) with an insulting layer 11 (typically silicon dioxide) therebetween. The height of the rib (from the top surface thereof to the oxide layer 11) is typically around 8 microns (but may be other sizes) and the thickness or height of the silicon layer on either side of the rib is typically around 5 microns. Other types of waveguide, including optical fibres, may also be used for directing light into the slab region 4.
Figure 3 shows a cross section through the slab waveguide region. This preferably comprises a continuation of the silicon layer 9 in which the rib waveguides are formed and thus also has a height of around 8 microns.
4 The slab region 4 preferably confines the light in a vertical direction, Le a direction perpendicular to the plane of the slab region, but does not confine the light in a horizontal direction so the light spreads out within the slab region 4 after leaving the input waveguide 1.
The parabolic mirrors 5, 6 may be formed by etching a recess in the silicon layer 9 so as to form a vertical curved wall on one side of the recess which forms a reflective surface. Preferably, reflection at this surface occurs by total internal reflection. In the case of silicon, this can be achieved by arranging so that the angle of incidence on the parabolic mirror is greater than 16 degrees, which is the critical angle. This holds for both polarisations so polarisation dependent losses (PIDL) are low.
Other forms of reflective devices may be used and the term mirror as used herein is intended to include such devices.
Figure 4 shows the triangular array of heaters 7 in more detail. The array preferably comprises a series of resistance heaters, e.g. comprising a narrow strip of aluminium or tungsten, e.g. a titanium, tungsten, gold alloy, and may be between 5 and 20 microns wide and 0.5 to 2.0 microns thick with a spacing between adjacent strips (centre to centre) of about 30 to 50 microns. An example comprising strips of tungsten alloy around 1 micron thick, 10 microns wide and at 40 micron intervals gave satisfactory results. The lines are preferably perpendicular to the axis of the light beam but may be parallel thereto.
The array of heaters may be arranged in a variety of patterns and the lines can be individually controlled to provide the required temperature change andlor temperature gradients. Changes in temperature of several tens of degrees Centigrade, e.g. in the range of 10-100 degrees Centigrade, produce a change in refractive index of the silicon layer of less than one percent but this is sufficient to cause the required deviation of the beam. Greater changes in refractive index cause a greater deviation and will be required if the switch is provided with a greater number of output waveguides. The example shown comprises four output waveguides 3 but many more may be used, e.g. a hundred or even several hundred.
The distance between the second mirror 6 and the output waveguides 3 may be increased to provide greater separation between the output waveguides for a given angle of deviation caused by the portion 4A.
In a typical arrangement, such as that shown in Figure 1, the collimated beam may have a width of around 100 microns and the triangular region 6A has similar dimensions so as to interrupt the entire width of the beam. The components of the device would be spaced apart by distances greater than indicated in the schematic diagram and the overall dimensions of the chip may typically be around 15 mm long (from the input side to the output side) and around 5 mm wide. Other layouts and dimensions may, however, be used depending on the circumstances.
Whilst the above description relates to an integrated optical switch with a triangular portion of a slab waveguide which is heated so as to function in the manner of a prism, other arrangements may be used. Other means may be used to actively control the refractive index of a portion of the slab waveguides, for example charge carrier injection, or depletion. The region of the slab waveguide the refractive index of which is changed may also be of other shapes. Whilst a triangular shape has the advantage of simplicity and the use of a simple triangular shape in conjunction with a collimated beam avoids introducing optical aberrations, other shapes, e.g. with convex andlor concave sides, may be used, e.g. to function in the manner of a lens.
Such a device may be used in other applications which require beam steering, Le refraction of a beam of light so as to alter its direction of travel. A simple beam steering device may comprise a slab waveguide through which a light beam is directed with adjustment means for adjusting the refractive index of a portion of the slab region so the direction of light emerging from the portion can be altered by adjusting the refractive index of that portion. As described above, the portion preferably has a shape selected to imitate an optical component such as a prism or a lens.
6
Claims (15)
1 An integrated optical device for selectively directing light from one or more input waveguides to one or more output waveguides, the device comprising: a slab waveguide; one or more input waveguides for directing light into the slab waveguide., one or more output waveguides for receiving light from the input waveguide(s) after it has travelled through the slab waveguide; and adjustment means for adjusting the refractive index of a portion of the slab waveguide through which the light travels so as to refract the light as it passes therethrough, whereby transmission of light between the input and output waveguide(s) can be selectively controlled.
2.
3.
4.
5.
6.
7.
An integrated optical device for refracting a beam of light so as to alter its direction of travel, the device comprising a slab waveguide through which the beam is directed and adjustment means for adjusting the refractive index of a portion of the slab such that the direction of light emerging from said portion can be altered by adjusting the refractive index of said portion.
An integrated optical device as claimed in claim 1 or 2 in which the adjustment means comprises heating means for heating the said portion of the slab to thereby alter its refractive index.
An integrated optical device as claimed in claim 3 in which the heating means comprises a plurality of resistance heaters provided over the said portion.
An integrated optical device as claimed in claim 4 in which the resistance heaters comprise strips of aluminium, tungsten or alloys thereof.
An integrated optical device as claimed in any preceding claim in which the said portion has a shape selected to function in the manner of an optical component.
An integrated optical device as claimed in claim 6 in which the shape in substantially triangular whereby the said portion acts in the manner of a prism.
7
8. An integrated optical device as claimed in any preceding claim comprising one or more mirrors for directing light through andlor receiving light from the said portion.
An integrated optical device as claimed in claim 8 in which a parabolic mirror is used to direct a collimated beam of light through the said portion.
10. An integrated optical device as claimed in claim 9 in which a parabolic mirror is used to receive a collimated beam of light from said portion and focus it at a selected point.
11. An integrated optical device as claimed in claim 10 in which the position of the selected point can be adjusted by using the adjustment means to adjust the refractive index of the said portion.
12. An integrated optical device as claimed in claim 11 in which the selected point or points correspond to the position of one or more outputs of the device.
13. An integrated optical device as claimed in any preceding claim in which the slab region comprises a silicon layer which confines the light therein in a direction perpendicular to the plane of the slab but allows light therein to spread out within the plane of the slab.
14. An integrated optical device as claimed in claim 13 formed on a silicon-on insulator chip.
15. An integrated optical device substantially as hereinbefore described with reference to and/or as shown in the accompanying drawings.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0005193A GB2359898A (en) | 2000-03-04 | 2000-03-04 | An integrated optical waveguide |
| EP01907952A EP1261893A1 (en) | 2000-03-04 | 2001-03-02 | Integrated optical device |
| AU2001235818A AU2001235818A1 (en) | 2000-03-04 | 2001-03-02 | Integrated optical device |
| PCT/GB2001/000880 WO2001067172A1 (en) | 2000-03-04 | 2001-03-02 | Integrated optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0005193A GB2359898A (en) | 2000-03-04 | 2000-03-04 | An integrated optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB0005193D0 GB0005193D0 (en) | 2000-04-26 |
| GB2359898A true GB2359898A (en) | 2001-09-05 |
Family
ID=9886936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB0005193A Withdrawn GB2359898A (en) | 2000-03-04 | 2000-03-04 | An integrated optical waveguide |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1261893A1 (en) |
| AU (1) | AU2001235818A1 (en) |
| GB (1) | GB2359898A (en) |
| WO (1) | WO2001067172A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2377762A (en) * | 2001-07-17 | 2003-01-22 | Bookham Technology Plc | Divergent beam steerer formed in a substrate |
| WO2022066322A1 (en) * | 2020-09-24 | 2022-03-31 | Apple Inc. | Optical system with phase shifting elements |
| US11500154B1 (en) | 2019-10-18 | 2022-11-15 | Apple Inc. | Asymmetric optical power splitting system and method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6912330B2 (en) | 2001-05-17 | 2005-06-28 | Sioptical Inc. | Integrated optical/electronic circuits and associated methods of simultaneous generation thereof |
| US6603889B2 (en) | 2001-05-17 | 2003-08-05 | Optronx, Inc. | Optical deflector apparatus and associated method |
| US6947615B2 (en) | 2001-05-17 | 2005-09-20 | Sioptical, Inc. | Optical lens apparatus and associated method |
| CN109298404B (en) * | 2018-10-22 | 2023-05-23 | 上海交通大学 | Integrated two-dimensional light beam steering device based on lens |
| WO2020171244A1 (en) * | 2019-02-18 | 2020-08-27 | (주)트루아이즈 | Optical waveguide, optical system, and optical gas sensor |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086530A (en) * | 1983-10-18 | 1985-05-16 | Nec Corp | Waveguide type optical switch |
| GB2174212A (en) * | 1985-04-27 | 1986-10-29 | Stc Plc | Optical switch |
| EP0488708A2 (en) * | 1990-11-28 | 1992-06-03 | Fujitsu Limited | Optical switching device |
| EP0500102A2 (en) * | 1991-02-21 | 1992-08-26 | Sumitomo Electric Industries, Ltd | Optical switch |
| EP0505844A2 (en) * | 1991-03-28 | 1992-09-30 | Texas Instruments Incorporated | Integrated-optic waveguide devices and method |
| JPH05158083A (en) * | 1991-12-05 | 1993-06-25 | Nippon Telegr & Teleph Corp <Ntt> | Spectral diffraction type optical switch |
| WO1995008787A1 (en) * | 1993-09-21 | 1995-03-30 | Bookham Technology Limited | An electro-optic device |
| EP0813088A1 (en) * | 1996-06-14 | 1997-12-17 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4143941A (en) * | 1977-12-01 | 1979-03-13 | Sperry Rand Corporation | Low loss optical data terminal device for multimode fiber guide optical communication systems |
| US4762383A (en) * | 1981-12-04 | 1988-08-09 | Omron Tateisi Electronics Co. | Two dimensional light beam deflectors utilizing thermooptical effect and method of using same |
| JPS5915225A (en) * | 1982-07-15 | 1984-01-26 | Omron Tateisi Electronics Co | Optical switch |
| FR2635198B1 (en) * | 1988-08-03 | 1992-09-04 | Commissariat Energie Atomique | INTEGRATED LIGHT BEAM SWITCHING DEVICE |
| US5317446A (en) * | 1992-09-29 | 1994-05-31 | Eastman Kodak Company | Electrooptic device for scanning using domain reversed regions |
| US5623566A (en) * | 1995-05-19 | 1997-04-22 | Lucent Technologies Inc. | Network with thermally induced waveguide |
-
2000
- 2000-03-04 GB GB0005193A patent/GB2359898A/en not_active Withdrawn
-
2001
- 2001-03-02 AU AU2001235818A patent/AU2001235818A1/en not_active Abandoned
- 2001-03-02 EP EP01907952A patent/EP1261893A1/en not_active Withdrawn
- 2001-03-02 WO PCT/GB2001/000880 patent/WO2001067172A1/en not_active Application Discontinuation
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086530A (en) * | 1983-10-18 | 1985-05-16 | Nec Corp | Waveguide type optical switch |
| GB2174212A (en) * | 1985-04-27 | 1986-10-29 | Stc Plc | Optical switch |
| EP0488708A2 (en) * | 1990-11-28 | 1992-06-03 | Fujitsu Limited | Optical switching device |
| EP0500102A2 (en) * | 1991-02-21 | 1992-08-26 | Sumitomo Electric Industries, Ltd | Optical switch |
| EP0505844A2 (en) * | 1991-03-28 | 1992-09-30 | Texas Instruments Incorporated | Integrated-optic waveguide devices and method |
| JPH05158083A (en) * | 1991-12-05 | 1993-06-25 | Nippon Telegr & Teleph Corp <Ntt> | Spectral diffraction type optical switch |
| WO1995008787A1 (en) * | 1993-09-21 | 1995-03-30 | Bookham Technology Limited | An electro-optic device |
| EP0813088A1 (en) * | 1996-06-14 | 1997-12-17 | Hewlett-Packard Company | Total internal reflection optical switches employing thermal activation |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2377762A (en) * | 2001-07-17 | 2003-01-22 | Bookham Technology Plc | Divergent beam steerer formed in a substrate |
| US11500154B1 (en) | 2019-10-18 | 2022-11-15 | Apple Inc. | Asymmetric optical power splitting system and method |
| WO2022066322A1 (en) * | 2020-09-24 | 2022-03-31 | Apple Inc. | Optical system with phase shifting elements |
| US11852865B2 (en) | 2020-09-24 | 2023-12-26 | Apple Inc. | Optical system with phase shifting elements |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2001235818A1 (en) | 2001-09-17 |
| WO2001067172A1 (en) | 2001-09-13 |
| EP1261893A1 (en) | 2002-12-04 |
| GB0005193D0 (en) | 2000-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |