JPS60243642A - Optical switch - Google Patents
Optical switchInfo
- Publication number
- JPS60243642A JPS60243642A JP9858084A JP9858084A JPS60243642A JP S60243642 A JPS60243642 A JP S60243642A JP 9858084 A JP9858084 A JP 9858084A JP 9858084 A JP9858084 A JP 9858084A JP S60243642 A JPS60243642 A JP S60243642A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- liquid
- optical waveguides
- optical waveguide
- waveguides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
本発明は電気的に光の進向方向の切換えを行なうことが
できる光スィッチに関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to an optical switch that can electrically switch the direction of propagation of light.
一般に光路の切換えを行なう光スィッチは2種類の形式
に大別される。即ち適切な形状を有する一1ノコク)町
ρII−rAイkn−コ山−〜に月寥ヱも憔士可n^/
−+L?■7乱して光路の切換を行う形式の光スィッチ
と、電気光学効果や磁気光学効果を利用して光路の切換
を行ない可動部を有しない形式の光スィッチとに分ける
ことができる。前者の形式の光スィッチは低挿入損であ
り効率がよいが、機械的な可動部を有するため、後者の
形式の光スィッチに比してスイッチング速゛度は劣る。Optical switches that switch optical paths are generally classified into two types. That is, a town with an appropriate shape, a town ρII-rA, a mountain, and a moon can also be destroyed.
-+L? (7) Optical switches can be divided into optical switches that switch the optical path by disturbing the optical path, and optical switches that switch the optical path using electro-optic or magneto-optic effects and have no moving parts. The former type of optical switch has low insertion loss and high efficiency, but because it has mechanically moving parts, its switching speed is inferior to the latter type of optical switch.
一方、後者の形式の光スィッチとしては、LiNbO3
の結晶を用いたもの等多数提案されているが、いずれも
挿入損が大きくスイッチング角度が小さいという欠点が
あった。On the other hand, the latter type of optical switch is LiNbO3
Many proposals have been made, including those using crystals, but all of them have the disadvantages of large insertion loss and small switching angle.
そこで液体を発泡させ気泡を形成し、この気泡の有無に
より光を全反射させて光の行路を変更させる光偏向器が
考案されている。即ち特許公開昭49−5475に開示
される光偏光器は第4図に示す如き構成を有する。つま
シ透明容器102中に液体104を装填し、透明容器1
02と略45度の角度をなすように液体104と略しい
油接率を有する元媒体106を設け、この元媒体106
0面上に液体104を蒸気化させる為の発泡手段108
を設ける構成を有する。この光偏向器でけ発泡手段10
8に電圧を印加させない時(第4図(a))には入射光
110は直進するが、一方発泡手段108に電圧を印加
させて(第4図(b))液体104を蒸気化させると、
その蒸気化した気泡112でより入射光110が全反射
し入射光110が全反射し入射光106と反射光114
の方向が変わる。Therefore, an optical deflector has been devised in which the liquid is foamed to form air bubbles, and the light is totally reflected to change the path of the light depending on the presence or absence of the air bubbles. That is, the optical polarizer disclosed in Japanese Patent Publication No. 49-5475 has a configuration as shown in FIG. The liquid 104 is loaded into the transparent container 102, and the transparent container 1
A source medium 106 having a approximate oil contact ratio with the liquid 104 is provided so as to form an angle of approximately 45 degrees with 02, and this source medium 106
Foaming means 108 for vaporizing liquid 104 on surface 0
It has a configuration that provides. Foaming means 10 with this optical deflector
When no voltage is applied to the foaming means 108 (FIG. 4(a)), the incident light 110 travels straight; however, when a voltage is applied to the foaming means 108 (FIG. 4(b)), the liquid 104 is vaporized. ,
The vaporized bubbles 112 totally reflect the incident light 110, and the incident light 110 is totally reflected, resulting in the incident light 106 and the reflected light 114.
direction changes.
しかるにこのような構成を有する光偏向器は透明容器1
02の壁面に対し略45度となるように光媒体106を
設ける為、光偏向器自体の構成が複雑であ)製造が難し
い。又光媒体106は透明な物質によ多形成されるとし
ても、光が透過する際多少の反射等を生じ光量のロスは
免れないものであシ、更に発泡手段108の面上での泡
は不安定な形状である等の欠点を有した。However, an optical deflector having such a configuration has a transparent container 1.
Since the optical medium 106 is provided at an angle of approximately 45 degrees to the wall surface of the optical deflector 02, the structure of the optical deflector itself is complicated and difficult to manufacture. Furthermore, even if the optical medium 106 is made of a transparent material, it is inevitable that light will be reflected to some extent when it passes through, resulting in a loss of light quantity. It had drawbacks such as an unstable shape.
そこで本発明の目的は前記欠点を解消すべく、構成が簡
単で光量ロスが少なく安定した泡を発生し得る光スィッ
チを提供することにある。SUMMARY OF THE INVENTION In order to eliminate the above-mentioned drawbacks, it is an object of the present invention to provide an optical switch that is simple in construction and capable of generating stable bubbles with little light loss.
前記目的を達成すべ(本発明は、基板上に複数の光導波
路を一次元状に形成し;前記光導波路の油接率と略等し
い油接率を有する液体が装填された液体装填部を前記光
導波路と所定の角度をなすように前記複数の光導波路の
うち隣接する光導波路の間に形成し;前記液体装填部の
温度を上げる発熱手段を前記基板と前記液体装填部間に
形成することを特徴とする。To achieve the above object (the present invention forms a plurality of optical waveguides in a one-dimensional shape on a substrate; forming between adjacent optical waveguides among the plurality of optical waveguides so as to form a predetermined angle with the optical waveguide; and forming a heat generating means for increasing the temperature of the liquid loading section between the substrate and the liquid loading section. It is characterized by
以下図面に基づいて本発明の実施例を具体的かつ詳細に
説明する。第1図は本発明の第1実施例に係h、(、)
は光スィッチの平面図、(b)は(、)のx−x’によ
る断面図、(C)は(、)のy −y’による断面図で
ある。但しくc)は気泡18が発生した状態を表示して
いる。Embodiments of the present invention will be described in detail below based on the drawings. FIG. 1 shows the first embodiment of the present invention.
is a plan view of the optical switch, (b) is a sectional view taken along line xx' of (,), and (C) is a sectional view taken along y-y' of (,). However, c) shows a state in which bubbles 18 are generated.
図に示す如(本実施例では基板2上に2つの光導波路4
a、4bを一直線上に形成する。前記光導波路4a 、
4bは光学ガラスBK7を用いる。As shown in the figure (in this example, there are two optical waveguides 4 on the substrate 2).
Form a and 4b on a straight line. the optical waveguide 4a,
4b uses optical glass BK7.
該光導波路4m、4bの油接率(1,51)と略等しい
油接率を有する液体6が装填された液体装填部8を前記
光導波路4a、4bの間に設ける。前記液体6としては
油接率1.50のベンゼンを用いる。A liquid loading section 8 loaded with a liquid 6 having an oil contact ratio approximately equal to the oil contact ratio (1, 51) of the optical waveguides 4m and 4b is provided between the optical waveguides 4a and 4b. As the liquid 6, benzene with an oil contact ratio of 1.50 is used.
更に液体装填部8と基板2との間には該液体装填部8に
装入される液体6の温度を上げる発熱手段たる発熱抵抗
体10が設けられる。尚12は天板、14は発熱抵抗体
10を保護する抵抗体保護層、16は発熱抵抗体10の
電極であシ、18は気泡である。Further, a heating resistor 10 is provided between the liquid loading section 8 and the substrate 2 as a heating means for increasing the temperature of the liquid 6 charged into the liquid loading section 8. Note that 12 is a top plate, 14 is a resistor protection layer that protects the heating resistor 10, 16 is an electrode of the heating resistor 10, and 18 is a bubble.
次に第1実施例の作用を第2図に基づいて説明する。第
2図(a) M (b)は発熱抵抗体10が発熱して々
い状態及び発熱した状態を夫々示す。発熱抵抗体10が
発熱していない状態では光導波路4a(第1図)中をA
方向に進行する光は、液体装填部8をも直進し光導波路
4b中を更に直進する。Next, the operation of the first embodiment will be explained based on FIG. 2. FIGS. 2(a) and 2(b) show a state in which the heating resistor 10 is generating heat and a state in which it has generated heat, respectively. When the heating resistor 10 is not generating heat, the inside of the optical waveguide 4a (FIG. 1) is
The light traveling in the direction also travels straight through the liquid loading section 8 and further straight through the optical waveguide 4b.
なぜなら光導波路4畠の油接率n□(1,51)と液体
6の油接率n2(1,50)は略等しい為入射角θ、中
中尉射角、となる。This is because the oil contact ratio n□ (1, 51) of the optical waveguide 4 and the oil contact ratio n2 (1, 50) of the liquid 6 are approximately equal, so the incident angle θ is the middle angle of incidence.
ところで電極16を通じて発熱抵抗体10に電塘を疏す
と、発熱抵抗体10の淵庁がト昇し、発熱抵抗体10の
上部にある液体6が気化し発泡する。すなわち気泡18
が液体装填部8に発生する。By the way, when a voltage is applied to the heating resistor 10 through the electrode 16, the bottom of the heating resistor 10 rises, and the liquid 6 above the heating resistor 10 vaporizes and foams. That is, air bubbles 18
occurs in the liquid loading section 8.
この場合、A方向に入射した光は、第2図(b)の様に
光導波路4aと液体装填部8の境界面で全反射しB方向
に進行する。なぜなら第2図(b)において全反射が起
こる条件は
3
とかける。ここで、nl =1.51 jn3=1.O
O(気体ベンゼンの屈折率)を代入すると上式は、θ1
〉41゜
となる。本実施例では光導波路4&と液体装填部8のな
す角φは45°に設定しであるので、θ、=45°とな
シ式(1)が満たされる。すなわち、気泡18が発生す
ると、第2図(b)のごとく全反射がおこる。In this case, the light incident in the A direction is totally reflected at the interface between the optical waveguide 4a and the liquid loading section 8, as shown in FIG. 2(b), and travels in the B direction. This is because the conditions for total internal reflection in Figure 2(b) are multiplied by 3. Here, nl = 1.51 jn3 = 1. O
By substituting O (the refractive index of gaseous benzene), the above equation becomes θ1
〉41°. In this embodiment, the angle φ formed by the optical waveguide 4& and the liquid loading section 8 is set to 45°, so that θ=45°, and formula (1) is satisfied. That is, when bubbles 18 are generated, total reflection occurs as shown in FIG. 2(b).
前記実施例では、光導波路4a 、4bとして光学ガ5
スBK7、液体6としてベンゼンヲ用いたが、この他に
FKIと四塩化炭素の組み合せも考えられる。即ち、式
(1)の条件を満たす様な、いかなる光導波路材料と液
体の組合せに対しても、本発明は有効であることは勿論
のことである。In the embodiment described above, the optical waveguides 5a and 5b are used as the optical waveguides 4a and 4b.
Although benzene was used as the liquid BK7 and liquid 6, other combinations of FKI and carbon tetrachloride are also conceivable. That is, it goes without saying that the present invention is effective for any combination of optical waveguide material and liquid that satisfies the condition of formula (1).
なお、本実施例では、発熱抵抗体10 K Ta2N、
抵抗体保護層6に8102、電極16にAuを用い、本
実施例に係る光スィッチの製法は通常のサーマルヘッド
の製法によった。したがって、本素子の小型化・高集積
化はサーマルヘッドの製法を応用できるので、大変容易
である。In addition, in this example, the heating resistor 10K Ta2N,
8102 was used for the resistor protection layer 6 and Au was used for the electrode 16, and the optical switch according to this example was manufactured by a normal method for manufacturing a thermal head. Therefore, it is very easy to miniaturize and increase the integration of this element because the manufacturing method of a thermal head can be applied.
又、第2図(b)に示す如く入射方向をAからC方向に
変更するとD方向に反射される。っまfiAと逆方向か
ら光を入射させるとともできる。Further, when the incident direction is changed from A to C direction as shown in FIG. 2(b), the light is reflected in D direction. This can also be done by inputting light from the direction opposite to fiA.
また、前記の様に本発明による光スィッチは小型化・高
集積化が可能なので本素子をアレー状に並べその一端に
レーザー・ダイオード等の光源を接続する事によって、
非常にコンパクトな光走査素子を得る事ができる。Furthermore, as mentioned above, the optical switch according to the present invention can be made smaller and highly integrated, so by arranging the elements in an array and connecting a light source such as a laser diode to one end,
A very compact optical scanning element can be obtained.
第3図に本発明の第2実捲例として該光走査素子を図示
する。第3図は光走査素子の平面図であシ、図に示すよ
うに複数個の光導波路4−2゜4−2.・・・、4−(
N+1)を−次元状に形成し、隣接する光導波路間に液
体装填部8を設け、この液体装填部8の一端はすべて連
結し、各液体装填部8と図示しない基板との間に発熱抵
抗体111゜10−2.・ 、1O−(N+1)を設け
る。2゜はレーデダイオードである。FIG. 3 illustrates the optical scanning element as a second practical example of the present invention. FIG. 3 is a plan view of the optical scanning element, and as shown in the figure, a plurality of optical waveguides 4-2.4-2. ..., 4-(
N+1) is formed in a -dimensional shape, a liquid loading section 8 is provided between adjacent optical waveguides, one end of this liquid loading section 8 is all connected, and a heating resistor is installed between each liquid loading section 8 and a substrate (not shown). Body 111°10-2.・ , 1O-(N+1) is provided. 2° is a radar diode.
ここで、図示外の駆動回路にょシ発熱抵抗体10−1.
10−2.・=、1O−(N+1 )に選択的に電力を
加える事によって任意の位置(本実施例では10−Nの
位置)に気泡18を発生させて光の進行方向を変換し光
を走査することができる。Here, a drive circuit (not shown) is connected to the heating resistor 10-1.
10-2.・By selectively applying power to =, 1O-(N+1), a bubble 18 is generated at an arbitrary position (in this example, the position 10-N) to change the traveling direction of the light and scan the light. I can do it.
以上詳細かつ具体的に説明した如く本発明によれば以下
に示す効果を奏する。As described above in detail and specifically, the present invention provides the following effects.
(1)基板上に発熱抵抗体、光導波路、液体装填部、天
板を各々層状に形成する為、構成が簡単となる。(1) The configuration is simple because the heating resistor, optical waveguide, liquid loading section, and top plate are formed in layers on the substrate.
(2)光量ロスが殆んどない。(2) There is almost no light loss.
(3)液体装填部内に泡を発生させるので安定的に泡の
発生を行なえうる。(3) Since bubbles are generated within the liquid loading section, bubbles can be generated stably.
(4)入射方向を180度回転させてもスイッチの働き
を奏し得る。(4) Even if the direction of incidence is rotated by 180 degrees, it can function as a switch.
第1図は本発明第1実施例に係る光スイッチの構成図で
(、)は平面図、(b)は(、)のX−x′による断面
図、(C)は(、)のy −、/にょる断面図である。
第2図は第1実施例の作用を示す説明図、第3図は本発
明第2実施例の概略構成図、第4図は従来の光偏光器Q
断面図であり (、)は発泡手段に電圧を印加しない状
態(b)は発泡手段に電圧を印加した状態を示す。
図において、
2・・・基板、4a 、4b・・・光導波路、6・・・
液体、8・・・液体装填部、1o・・・発熱抵抗体、φ
・・・所定の角度
である。
@1図
(b) (C)Fig. 1 is a block diagram of an optical switch according to the first embodiment of the present invention, (,) is a plan view, (b) is a sectional view taken along line X-x' of (,), and (C) is a y of (,). -, / is a sectional view. Fig. 2 is an explanatory diagram showing the operation of the first embodiment, Fig. 3 is a schematic configuration diagram of the second embodiment of the present invention, and Fig. 4 is a conventional optical polarizer Q.
It is a sectional view, and (,) shows a state in which no voltage is applied to the foaming means, and (b) shows a state in which a voltage is applied to the foaming means. In the figure, 2...substrate, 4a, 4b...optical waveguide, 6...
Liquid, 8...Liquid loading part, 1o...Heating resistor, φ
...It is a predetermined angle. @Figure 1 (b) (C)
Claims (1)
記光導波路の油接率と略等しい油接率を有する液体が装
填された液体装填部を前記光導波路と所定の角度をなす
ように前記複数の光導波路のうち隣接する光導波路の間
に形成し;前記液体装填部の温度を上げる発熱手段を前
記基板と前記液体装填部間に形成することを特徴とする
光スィッチ。(1) A plurality of optical waveguides are formed in a one-dimensional shape on a substrate; a liquid loading section loaded with a liquid having an oil contact ratio approximately equal to that of the optical waveguide is set at a predetermined angle with the optical waveguide. An optical switch characterized in that the optical switch is formed between adjacent optical waveguides among the plurality of optical waveguides; and a heat generating means for increasing the temperature of the liquid loading section is formed between the substrate and the liquid loading section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9858084A JPS60243642A (en) | 1984-05-18 | 1984-05-18 | Optical switch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9858084A JPS60243642A (en) | 1984-05-18 | 1984-05-18 | Optical switch |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60243642A true JPS60243642A (en) | 1985-12-03 |
Family
ID=14223591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9858084A Pending JPS60243642A (en) | 1984-05-18 | 1984-05-18 | Optical switch |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60243642A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62270926A (en) * | 1986-05-20 | 1987-11-25 | Fujitsu Ltd | Total reflection type optical modulation element |
WO1989009945A1 (en) * | 1988-04-07 | 1989-10-19 | Martin Marietta Corporation | Optical switch device |
JPH04204808A (en) * | 1990-11-30 | 1992-07-27 | Hitachi Cable Ltd | Waveguide type optical branching circuit |
JPH04299304A (en) * | 1991-03-28 | 1992-10-22 | Hitachi Cable Ltd | Waveguide type optical switch |
JPH0553025A (en) * | 1991-08-29 | 1993-03-05 | Hitachi Cable Ltd | Waveguide type optical switch |
JP2005331857A (en) * | 2004-05-21 | 2005-12-02 | Sony Corp | Display device |
-
1984
- 1984-05-18 JP JP9858084A patent/JPS60243642A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62270926A (en) * | 1986-05-20 | 1987-11-25 | Fujitsu Ltd | Total reflection type optical modulation element |
WO1989009945A1 (en) * | 1988-04-07 | 1989-10-19 | Martin Marietta Corporation | Optical switch device |
US5018842A (en) * | 1988-04-07 | 1991-05-28 | Martin Marietta Corporation | Optical switch device |
JPH04204808A (en) * | 1990-11-30 | 1992-07-27 | Hitachi Cable Ltd | Waveguide type optical branching circuit |
JPH04299304A (en) * | 1991-03-28 | 1992-10-22 | Hitachi Cable Ltd | Waveguide type optical switch |
JPH0553025A (en) * | 1991-08-29 | 1993-03-05 | Hitachi Cable Ltd | Waveguide type optical switch |
JP2005331857A (en) * | 2004-05-21 | 2005-12-02 | Sony Corp | Display device |
JP4691902B2 (en) * | 2004-05-21 | 2011-06-01 | ソニー株式会社 | Display device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9829766B2 (en) | Electro-optic beam deflector device | |
US5544268A (en) | Display panel with electrically-controlled waveguide-routing | |
US20050265403A1 (en) | Tunable laser having liquid crystal waveguide | |
US5504772A (en) | Laser with electrically-controlled grating reflector | |
US5852688A (en) | Method for manipulating optical energy using poled structure | |
US5581642A (en) | Optical frequency channel selection filter with electronically-controlled grating structures | |
US8563991B2 (en) | Optical semiconductor device, laser chip and laser module | |
JPS6254991A (en) | Semiconductor laser | |
JP2003515253A (en) | Tapered planar optical waveguide | |
JPS63501382A (en) | Wavelength selection element | |
US4658402A (en) | Optical bistable semiconductor laser producing lasing light in direction normal to semiconductor layers | |
EP1841025B1 (en) | Optical semiconductor device | |
US4767170A (en) | Optical deflector device | |
JPS60243642A (en) | Optical switch | |
US4648687A (en) | Optical switching device | |
US4762383A (en) | Two dimensional light beam deflectors utilizing thermooptical effect and method of using same | |
US20100040101A1 (en) | Optical Semiconductor Device | |
US4830448A (en) | Light modulator and wave guide device | |
EP0105693B1 (en) | Bipolar voltage controlled optical switch using intersecting waveguide | |
JP2932742B2 (en) | Waveguide type optical device | |
JP2936792B2 (en) | Waveguide type optical device | |
JPS60242434A (en) | Optical deflector | |
JPH10206620A (en) | Period modulated diffraction grating | |
JPS5944607B2 (en) | thin film optical switch array | |
JPH05323403A (en) | Higher harmonic generator |