JP3927280B2 - Surplus ball detection method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and apparatus for detecting surplus balls, and is suitable for use in, for example, a detection method and apparatus for detecting surplus balls generated when bumps are formed on a substrate or a semiconductor chip by using fine balls. Is something.
[0002]
[Prior art]
In order to efficiently form a ball bump on a bump forming object such as a substrate or an electrode of a semiconductor chip, a group of fine metal balls corresponding to at least one semiconductor chip is sucked and held together, and the fine A technique for transferring a metal ball group onto the bump forming object has been put into practical use.
[0003]
As described above, in order to suck and hold a plurality of fine metal ball groups collectively, using an array substrate in which suction holes are formed at all positions corresponding to bump formation positions on the bump formation object, After the fine metal balls are attracted and held on the array substrate, the array substrate is transported to a bonding stage and bonded to the bonded portion.
[0004]
When ball bumps are formed in this way, uniformly formed fine metal balls can be bonded together at the bump formation position, so that ball bumps with high reliability can be formed easily and efficiently. Can do.
[0005]
By the way, recently, with the miniaturization of semiconductor chips, the wiring pitch of electrodes has been reduced, and accordingly, the miniaturization of bumps has been required. For this reason, the size of the fine metal balls used for forming the ball bumps has become very small, for example, 500 μmφ or less, and in particular, 100 μmφ or less.
[0006]
As described above, when the size of the fine metal balls is reduced, excessive balls may be generated when a plurality of fine metal balls are attracted and held on the array substrate. Therefore, surplus balls are detected in a state where a plurality of fine metal balls are adsorbed and held on the array substrate.
[0007]
  The surplus balls are generated in various states.9As shown in (a) and (b), it can be divided roughly. Figure91 is an array substrate, 2 is a through hole formed on the array substrate 1, 3 is a fine metal ball adsorbed in the through hole 2, 3a is an excess ball, 4 is an excess ball detection device, and 5 is an excess ball detection. The directions in which the device 4 detects the surplus balls 3a are shown.
[0008]
  Figure9As shown in FIG. 2, the surplus ball detection device 4 is arranged to face the array substrate 1 and detects the surplus balls 3a from the front of the array substrate 1. The positions of the fine metal balls 3 held at predetermined positions on the array substrate 1 are all known.
[0009]
  Therefore, even if the number of the fine metal balls 3 is very large, it is ensured whether or not the fine metal balls 3 are held at a predetermined position, or whether or not the surplus balls 3a are attached to a position other than the predetermined position. For example, figure9As shown to (a), the excess ball 3a adhering to positions other than a predetermined position can be detected reliably.
[0010]
[Problems to be solved by the invention]
  But figure9In the case shown in (b), the direction along the detection direction of the surplus ball detection device 4, that is, the figure9Since two or more fine metal balls are arranged in the vertical direction, whether or not there is the fine metal ball 3 at a predetermined position or the surplus balls 3a at a position other than the predetermined position as in the conventional detection method. It was not possible to detect by the method of detecting whether or not it was attached.
[0011]
In view of the above-described problems, an object of the present invention is to reliably detect two or more surplus balls arranged in the vertical direction when a bump is formed using a fine ball.
[0012]
[Means for Solving the Problems]
  The method for detecting surplus balls according to the present invention is a method for detecting surplus balls generated when holding fine balls on an array substrate, wherein the focal position of the detection camera is a position that matches the fine balls that are normally held. Further, the present invention is characterized in that a surplus ball is detected on the basis of an imaging output in accordance with these two focal positions, and a position that is positioned in front of the fine ball that is normally held.
[0013]
  The present inventionSpecialIn the method of detecting surplus balls generated when holding the fine balls on the array substrate,The detection camera has two focal positions: a position that matches the fine ball that is normally held, and a position that is closer to the front than the fine ball that is normally held. For imaging outputIt is characterized by detecting surplus balls, which is characterized by detecting surplus balls based on the above.
[0016]
  Another feature of the present invention is that, in the method for detecting surplus balls generated when the fine balls are held on the array substrate, the fine balls held on the array substrate areArranged in the front direction CCD Camera andDiagonallyArranged CCD Both on the cameraImageAn image obtained by imaging from the front direction;A surplus ball is detected based on an image obtained by imaging from the oblique direction.
[0018]
Another feature of the present invention is that, in the method for detecting surplus balls generated when holding the fine balls on the array substrate, while applying vibration to the array substrate holding the fine balls, A fine ball held on the array substrate is imaged in a state where the vibration is applied, and surplus balls are detected based on the image obtained by the imaging.
[0019]
Another feature of the present invention is that in the method for detecting surplus balls generated when holding the fine balls on the array substrate, the surplus balls held in series on the array substrate are defeated. It is characterized by detecting.
[0020]
According to another feature of the present invention, the method of tilting the surplus balls is such that the array substrate is passed over a ball tilting jig positioned at a predetermined height and held in series. The method is characterized in that the surplus balls are brought into contact with the ball defeating jig and defeated.
[0021]
Another feature of the present invention is that the method of defeating the surplus balls is a method of injecting a fluid toward the array substrate and defeating the surplus balls held in series with the fluid. It is characterized by being.
[0022]
According to another aspect of the present invention, in the method of detecting surplus balls generated when holding the fine balls on the array substrate, the array substrate holding the fine balls is set to a predetermined height. Based on the image obtained by imaging the fine balls held on the array substrate after passing over the positioned ball defeating jig and depressing the surplus balls that are vertically connected, It is characterized by detecting surplus balls.
[0023]
Another feature of the present invention is that, in a method for detecting surplus balls generated when holding fine balls on an array substrate, fluid is ejected toward the array substrate holding the fine balls. In this way, after the surplus balls connected in the vertical direction are brought down, the fine balls held on the array substrate are imaged, and the surplus balls are detected based on the image obtained by the imaging. Yes.
[0024]
Another feature of the present invention is that the fluid is compressed air.
[0026]
  Another feature of the present invention is to detect surplus balls generated when the fine balls are held on the array substrate.apparatusIn the above, the focal position is aligned with the position of the fine ball that is normally held and the position closer to the front than the fine ball that is normally held.Have two with positionBased on the detection camera and the imaging output that matches the two focal points of the detection cameraDetect excess ballsAnd a surplus ball detecting means.
[0029]
Another feature of the present invention is that the surplus ball detecting means includes an image obtained by capturing an image in a state where the fine balls are normally held on the array substrate, and the detection camera. A surplus ball is detected by comparing the captured image.
[0030]
  Another feature of the present invention is to detect surplus balls generated when the fine balls are held on the array substrate.apparatusIn, the imaging means for imaging the fine balls held on the array substrate from both the front direction and the oblique direction, an image obtained by imaging from the front direction, and obtained by imaging from the oblique direction And surplus ball detecting means for detecting surplus balls based on comparison of images.
[0032]
According to another aspect of the present invention, in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, vibration applying means for applying a vibration having a predetermined amplitude to the array substrate; Imaging means for imaging fine balls held on the array substrate to which vibration is applied by the vibration applying means, and surplus ball detection means for detecting surplus balls based on an image obtained by the imaging means It is characterized by having.
[0033]
Another feature of the present invention is that in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, the surplus balls held in series on the array substrate are defeated. It has a detection means for detecting in a state.
[0034]
According to another aspect of the present invention, in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, the detecting means includes a ball tipping jig positioned at a predetermined height. And passing the array substrate over the ball tilting jig to tilt the surplus balls held in series on the array substrate.
[0035]
According to another aspect of the present invention, in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, the detection means ejects fluid toward the array substrate. The surplus balls held in a row in the vertical direction are brought down by the fluid.
[0036]
Another feature of the present invention is that in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, a predetermined distance from the array substrate holding the fine balls is provided. A ball tilting jig positioned at such a height, an array substrate moving means for passing the array substrate over the ball tilting jig and tilting surplus balls, and the ball tilting jig An image pickup means for picking up an image of the fine balls held on the array substrate that has passed through, and a surplus ball detection means for detecting a surplus ball based on the image obtained by the image pickup means.
[0037]
According to another feature of the present invention, in the apparatus for detecting surplus balls generated when holding the fine balls on the array substrate, fluid is ejected toward the array substrate holding the fine balls. Obtained by the fluid ejecting apparatus that brings the surplus ball into a tilted state, the imaging means that images the fine balls held on the array substrate in which the surplus ball is tilted by the fluid ejecting apparatus, and the imaging means And a surplus ball detecting means for detecting a surplus ball based on the obtained image.
[0038]
Another feature of the present invention is that the fluid ejected from the fluid ejecting apparatus is compressed air.
[0039]
[Action]
  Since the present invention comprises the above technical means, according to the first invention,In the case of an extra ball, since it exists at a position away from a predetermined focal length, by imaging the fine balls held on the array substrate with a predetermined focal length, the detection camera Based on the strength of the imaging output,It is possible to reliably detect surplus balls that are overlapped in a vertical straight line when viewed from the detection direction.
[0041]
According to another feature of the present invention, the fine balls held on the array substrate are imaged from an oblique direction, and the surplus balls are detected based on the image obtained by the imaging. Therefore, it is possible to obtain images of different sizes between the portion held by the ball and the portion where the surplus ball is generated, and even if surplus balls that overlap in a straight line as viewed from the detection direction occur Can be detected.
[0042]
According to another feature of the present invention, since the image is taken with vibration applied to the array substrate holding the fine balls, an image obtained by picking up the normally held fine balls is obtained. In the image obtained by imaging the surplus ball, the size and contour thereof can be varied, and even if a surplus ball that overlaps the vertical straight line when viewed from the detection direction is generated, it can be reliably detected. Will be able to.
[0043]
Another feature of the present invention is that the array substrate holding the fine balls is passed over a ball defeating jig positioned at a predetermined height, and the surplus balls are defeated before imaging. As a result, even if surplus balls in a vertically continuous state occur, the surplus balls can be imaged in an easy-to-see state when viewed from the front, and the surplus balls can be reliably detected.
[0044]
Another feature of the present invention is that a fluid is ejected onto the array substrate holding the fine balls, so that the surplus balls held vertically connected to the array substrate are brought down. Since it did in this way, even if the excessive ball | bowl which overlaps with the state of the straight line seeing from the front direction generate | occur | produces, it can detect reliably.
[0045]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, an embodiment of a surplus ball detection method and apparatus according to the present invention will be described with reference to the drawings.
  FIG. 1 shows the surplus ball detection of the present invention.Judgment formFIG.
[0046]
As shown in FIG. 1, the surplus ball detection device of the present embodiment includes a projector 10, an image sensor 11, an A / D conversion unit 12, an image memory 13, a grayscale image preprocessing unit 14, a binarization unit 15, a surplus. It is comprised by the ball | bowl detection process means 16 grade | etc.,.
[0047]
The light projector 10 is for irradiating the surface 7 of the array substrate 1 with light 7 from an oblique direction, whereby a shadow of the fine metal balls 3 (see FIG. 2) is formed on the surface of the array substrate 1. Is done.
[0048]
The image pickup device 11 picks up an image of the array substrate 1 from the front direction and replaces the light quantity distribution on the array substrate 1 with an electric signal, and is composed of a lens and a peripheral circuit of the image pickup device.
[0049]
The A / D conversion means 12 is for converting the video signal S1 output in analog form from the image sensor 11 into a digital electric signal. As a result, the surface of the array substrate 1 that is a detection object. The brightness distribution information is transferred to the image memory 13 as two-dimensional array data S2.
[0050]
The image memory 13 is for storing the two-dimensional array data S2 input from the A / D conversion means 12 at a predetermined address.
The grayscale image preprocessing means 14 is for performing preprocessing of the image data taken into the image memory 13, and performs processing such as image distortion correction and noise removal, for example.
[0051]
The binarizing means 15 performs processing for determining each pixel fetched into the image memory 13 as “0” or “1”. Here, each pixel can be determined using a threshold in gray scale according to memory or processing capability.
[0052]
Based on the information on the brightness distribution of the surface of the array substrate 1 binarized by the binarization means 15 or the like, the surplus ball detection processing means 16 determines whether or not there are surplus balls on the array substrate 1. It is for judgment.
[0057]
  Next, figure2And figure3Of the surplus ball detection method and apparatus of the present invention with reference to FIG.FirstThe embodiment will be described. thisFirstIn the case of this embodiment, the surplus balls 3a are detected by setting the focal length when imaging the fine metal balls 3 held on the array substrate 1 to a predetermined value.
[0058]
  Ie, figure2In the image, the image is focused on the position indicated by A and the image is focused on the position indicated by B. As described above, when the image is focused on the position indicated by A,3An image as shown in (a) is obtained. In addition, when focusing on the position indicated by B and taking an image, FIG.3An image as shown in (b) is obtained.
[0059]
  Figure3Since the image of (a) is focused on the position indicated by A, the fine metal balls 3 on both sides of the three imaged fine metal balls 3 are normal images 21a. An image obtained by imaging the middle fine metal ball 3 is an out-of-focus image 21b.
[0060]
  Also figure3Since the image of (b) is focused on the position indicated by B, among the three imaged fine metal balls 3, the fine metal balls 3 on both sides are in an out-of-focus image 21b, which is the middle. An image obtained by imaging the fine metal ball 3 is a normal image 21a.
[0061]
  On the other hand, when the array substrate 1 in a normal state without the surplus balls 3a is imaged,3As shown in (c), all the fine metal balls 3 can be captured as normal images 21a.
[0062]
  Therefore, the surplus ball detection processing means 163Comparison of (a) image with (c) image or figure3By comparing the image of (b) and the image of (c), the presence / absence of the surplus ball 3a and the position of the surplus ball 3a can be detected easily and reliably.
[0063]
  Next, figure4Of the present invention with reference toSecondThe embodiment will be described.
  Figure4As shown in the figure, in this embodiment, the first CCD camera 24a and the second CCD camera 24b are used to image the fine balls 3 adsorbed to the array substrate 1.
[0064]
The first CCD camera 24a takes an image of the array substrate 1 adsorbing a plurality of fine balls 3 from an oblique direction 25a of 45 °. In addition, the second CCD camera 24b captures an image from the front direction 25b of the array substrate 1.
[0065]
  As mentioned above, if the imaging direction is changed,5As shown in (a) and (b), two types of images can be obtained. Where5(A) is an image obtained by imaging from the oblique direction 25a with the first CCD camera 24a. Also figure5(B) is an image obtained by imaging from the front direction 25b with the second CCD camera 24b.
[0066]
  When these images are compared, they are images obtained from the front direction 25b.5In (b), all the fine balls 3 are imaged as a substantially perfect circle image, that is, as a normal image 26a. In contrast, figure5In (a), a large elliptical abnormal image 26b that is not a perfect circle is captured.
[0067]
  The abnormal image 26b is shown in FIG.4As shown in FIG. 4, the image is taken because the surplus ball 3a is generated. That is, even if the surplus ball 3a is generated, if the surplus ball 3a is overlapped with the fine ball 3, if the image is taken from the front direction 25b, the normal image 26a is taken.
[0068]
However, when the surplus ball 3a is generated, the height of the portion is the sum of the height of the fine ball 3 and the height of the surplus ball 3a, so that if the image is taken from the oblique direction 25a, an image with a large area is obtained. That is, it can be picked up as an abnormal image 26b.
[0069]
  Therefore, in the case of the present embodiment, the surplus ball detection processing means 16 described above causes the5Image and figure of (a)5By comparing with the image of (b), the presence / absence of the surplus ball 3a and the position of the surplus ball 3a can be detected easily and reliably.
[0070]
In addition, by setting an upper limit value of the area of the captured extra ball 3a and comparing the area of the actually captured image of the extra ball 3a with the upper limit value, the presence and position of the extra ball 3a can be known. Can do.
[0071]
  Next, figure6Of the present invention with reference toThirdThe embodiment will be described. Figure6As shown in FIG. 2, in this embodiment, the vibration device 27 is attached to the array substrate 1 and vibration is applied by the vibration device 27. When vibration of a predetermined frequency is applied to the array substrate 1,6As indicated by the arrow R in (a), the surplus ball 3 a rotates with the fine ball 3.
[0072]
  When rotating in this way, the surplus balls 3a are moved by the action of centrifugal force.6As shown by the dotted line in (b), it rotates in a state deviated from a vertical straight line when viewed from the detection direction. Therefore, even if the array substrate 1 is imaged by the CCD camera 24 from the front direction 25b, if the surplus balls 3a are present, it can be captured as a large image or an image with a large shake. You can know the position reliably.
[0073]
  Next, figure7Of the present invention with reference to4thThe embodiment will be described. The surplus ball detection device of this embodiment is shown in FIG.7As shown in (a), a ball falling jig 28 is provided as a surplus ball falling means, and the ball falling jig 28 is provided at a predetermined height. And figure7As shown by an arrow F in FIG. 4A, the array substrate 1 is moved on the above-described ball defeating jig 28.
[0074]
  Then, the fine balls 3 that are normally attracted to the through holes 2 of the array substrate 1 do not come into contact with the ball falling jig 28, but the surplus balls 3 a that overlap the fine balls 3 are not attached to the ball falling jig. 287As shown to (b), it will be in the state which fell down seeing from the vertical straight line.
[0075]
  In this state, since it can be easily and reliably distinguished from the front direction 25b,7As shown in (b), it can be easily known that the surplus ball 3a is generated based on the image obtained by imaging with the CCD camera 24.
[0076]
  Next, figure8Of the present invention with reference to5thThe embodiment will be described.
  In the case of this embodiment, the example which used the air ejection apparatus 29 instead of the surplus ball fall jig | tool mentioned above is shown.
[0077]
  Ie, figure8As shown in FIG. 3, the air blowing device 29 for defeating the balls is disposed obliquely below the array substrate 1. And figure8As indicated by an arrow 29a in (a), air is jetted toward the adsorption surface of the array substrate 1. In this way, when the surplus ball 3a is generated, the above-mentioned4thAs shown in the embodiment, since the surplus balls 3a that overlap the fine balls 3 can be brought into a tilted state as viewed from a vertical straight line, the surplus balls 3a can be detected easily and reliably. In addition to air, a gas such as nitrogen may be ejected to defeat the surplus balls.
[0078]
Since the surplus ball detection method and apparatus of this embodiment detect surplus balls 3a as described above, surplus balls 3a arranged in a line in the vertical direction, which are difficult to detect with the conventional detection method, are detected. Can be reliably detected.
[0079]
Therefore, fine metal balls of less than 500 μmφ, particularly fine metal balls of less than 300 μmφ, tend to generate surplus balls in the vertical direction, but the present invention is effectively used when bumps are formed using these fine metal balls. Therefore, it is possible to reliably detect the presence and position of excess balls when forming fine ball bumps, and to greatly reduce the occurrence of defective products.
[0080]
【The invention's effect】
  As described above, according to the first aspect of the present invention, when the fine balls held on the array substrate are picked up with a detection camera, the fine balls are picked up at a predetermined focal length. It is possible to distinguish the fine ball from the magnitude of the image signal, and based on the strength of the imaging output of the detection camera, it is possible to reliably detect the surplus ball that is overlapped in a straight line when viewed from the detection direction.
[0082]
According to another feature of the present invention, the fine balls held on the array substrate are imaged from an oblique direction, and the surplus balls are detected based on an image obtained by imaging from the oblique direction. Therefore, it is possible to obtain images of different sizes between the part that is normally held and the part where the surplus ball is generated, and reliably detect the surplus ball that overlaps the vertical straight line when viewed from the detection direction. can do.
[0083]
According to another feature of the present invention, since the image is taken in a state where vibration is applied to the array substrate holding the fine balls, surplus balls overlapping in a vertically connected state are generated and the portion is Compared with the image obtained by imaging the normally held part, the image obtained by imaging can be different in size and outline, and overlaps the vertical straight line state as seen from the detection direction It is possible to reliably detect surplus balls.
[0084]
Another feature of the present invention is that the array substrate holding the fine balls is passed over a ball tilting jig positioned at a predetermined height and the surplus balls are tilted before imaging. Therefore, even if surplus balls that overlap in a vertically connected state occur, the surplus balls can be imaged in an easy-to-see state when viewed from the front, and even with a surplus ball in a vertically connected state Can be detected.
[0085]
Therefore, according to the present invention, even when a fine metal ball having a diameter of less than 500 μmφ, particularly a fine metal ball having a diameter of less than 300 μmφ, is superposed in the vertical direction, it can be detected well. When the bumps are formed by using them, the generation of defective products can be greatly reduced.
[Brief description of the drawings]
FIG. 1 shows an embodiment of the present invention, and excess ball detectionJudgment formFIG.
[Figure2]FirstIt is a figure which shows this embodiment and explains that a focal distance changes with the position of a fine ball.
[Figure3FIG. 10 is a diagram showing a state in which images obtained by different focal lengths are different.
[Figure4]SecondIt is a figure which shows a mode that shows and shows a mode that it images from the diagonal direction.
[Figure5It is a diagram showing an example of an image obtained by imaging from an oblique direction.
[Figure6]ThirdIt is a figure which shows this embodiment and shows the example which applied the vibration to the arrangement | sequence board | substrate, and became easy to see the excessive ball | bowl from a front direction.
[Figure7]4thIt is a figure which shows this embodiment and shows the example which made the arrangement | sequence board | substrate contact | abut to a ball | bowl down jig | tool, and was easy to see the excess ball | bowl.
[Figure8]5thIt is a figure which shows this embodiment and shows the example which made the excess ball easy to see by injecting the fluid to the arrangement | sequence board | substrate.
[Figure9It is a diagram for explaining an example of a conventional surplus ball detection method.
[Explanation of symbols]
1 Array substrate
2 Through hole
3 Fine metal balls
4 Surplus ball detector
7 Light
10 Floodlight
11 Image sensor
12 A / D conversion means
13 Image memory
14 Gray image pre-processing means
15 Binarization means
16 Surplus ball detection processing means

Claims (19)

In a method of detecting surplus balls generated when holding fine balls on an array substrate,
The detection camera has two focal positions: a position that matches the fine ball that is normally held, and a position that is closer to the front than the fine ball that is normally held. A method for detecting surplus balls, wherein surplus balls are detected based on the obtained imaging output. In a method of detecting surplus balls generated when holding fine balls on an array substrate,
The fine balls held on the array substrate are imaged by both a CCD camera arranged in the front direction and a CCD camera arranged in the oblique direction, and an image obtained by imaging from the front direction, and from the oblique direction, A surplus ball detection method, comprising: detecting a surplus ball based on an image obtained by imaging. In a method of detecting surplus balls generated when holding fine balls on an array substrate,
The vibration is applied to the array substrate holding the fine balls, and the fine balls held on the array substrate are imaged in the state where the vibration is applied, and the surplus is based on the image obtained by the imaging. A method of detecting surplus balls, wherein the balls are detected. In a method of detecting surplus balls generated when holding fine balls on an array substrate,
A method for detecting surplus balls, wherein the surplus balls held in series on the array substrate are defeated and detected.   In the method of defeating the surplus balls, the array substrate is passed over a ball defeating jig positioned at a predetermined height, and the surplus balls held in series are applied to the ball defeating jig. The surplus ball detection method according to claim 4, wherein the surplus ball is defeated by contact.   5. The surplus according to claim 4, wherein the method of defeating the surplus balls is a method of ejecting a fluid toward the array substrate and defeating the surplus balls held in series in the vertical direction with the fluid. Ball detection method. In a method of detecting surplus balls generated when holding fine balls on an array substrate,
The array substrate holding the fine balls is passed over a ball tilting jig positioned at a predetermined height, and the surplus balls in a vertically connected state are tilted and then held on the array substrate. A method for detecting a surplus ball, comprising: picking up an image of a fine ball, and detecting the surplus ball based on an image obtained by the image pick-up. In a method of detecting surplus balls generated when holding fine balls on an array substrate,
By ejecting fluid toward the array substrate holding the fine balls, the excess balls connected in the vertical direction are brought down, and then the fine balls held on the array substrate are imaged, and the imaging is performed. A surplus ball is detected based on an image obtained in this manner.   The surplus ball detection method according to claim 8, wherein the fluid is compressed air. In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
A detection camera having two focus positions: a position in accordance with a fine ball that is normally held; and a position in front of the fine ball that is normally held; and two focal points of the detection camera A surplus ball detection device comprising surplus ball detection means for detecting a surplus ball based on an imaging output adapted to the above.   The surplus ball detection means detects the surplus ball by comparing an image obtained by capturing an image in a state where the fine balls are normally held on the array substrate and an image captured by the detection camera. The surplus ball detection device according to claim 10, wherein In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
Imaging means for imaging the fine balls held on the array substrate from both the front direction and the oblique direction;
Surplus ball detection means comprising: excess ball detection means for detecting an excess ball based on a comparison between an image obtained by imaging from the front direction and an image obtained by imaging from the oblique direction apparatus. In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
Obtained by a vibration applying means for applying vibration of a predetermined amplitude to the array substrate, an imaging means for imaging fine balls held on the array substrate in a state in which vibration is applied by the vibration applying means, and the imaging means. A surplus ball detection device comprising: surplus ball detection means for detecting a surplus ball based on the obtained image. In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
A surplus ball detecting apparatus comprising detecting means for detecting surplus balls held in series on the array substrate in a tilted state.   The detecting means includes a ball tilting jig positioned at a predetermined height, and passes the array substrate over the ball tilting jig and is held in series with the array substrate. The surplus ball detection device according to claim 14, wherein the surplus ball detection device is placed in a tilted state.   The said detection means is equipped with the injection means which injects the fluid toward the said arrangement | positioning board | substrate, The excess ball currently hold | maintained by connecting the said length is made into the state which fell down by the said fluid. The excess ball detection device described. In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
A ball tipping jig positioned at a height such that it is at a predetermined interval with respect to the array substrate holding the fine balls;
An array substrate moving means for passing the array substrate over the ball defeating jig and defeating surplus balls;
An imaging means for imaging the fine balls held on the array substrate that has passed over the ball collapse jig ;
A surplus ball detection device comprising surplus ball detection means for detecting a surplus ball based on an image obtained by the imaging means. In an apparatus for detecting surplus balls generated when holding fine balls on an array substrate,
A fluid ejecting apparatus that ejects fluid toward the array substrate holding the fine balls to tilt the surplus balls;
Imaging means for imaging fine balls held on the array substrate in a state where surplus balls have been defeated by the fluid ejection device ;
A surplus ball detection device comprising surplus ball detection means for detecting a surplus ball based on an image obtained by the imaging means.   The surplus ball detection device according to claim 18, wherein the fluid ejected from the fluid ejection device is compressed air.

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