JP3922742B2 - フィルム厚の測定方法及び装置 - Google Patents

フィルム厚の測定方法及び装置 Download PDF

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Publication number
JP3922742B2
JP3922742B2 JP22483696A JP22483696A JP3922742B2 JP 3922742 B2 JP3922742 B2 JP 3922742B2 JP 22483696 A JP22483696 A JP 22483696A JP 22483696 A JP22483696 A JP 22483696A JP 3922742 B2 JP3922742 B2 JP 3922742B2
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JP
Japan
Prior art keywords
light
film
signal
light source
frequency
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Expired - Fee Related
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JP22483696A
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English (en)
Japanese (ja)
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JPH09119815A (ja
JPH09119815A5 (enExample
Inventor
ウエイン・ヴィー・ソリン
ブライアン・エル・ヘフナー
シャリーニ・ヴェンカテシュ
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JPH09119815A publication Critical patent/JPH09119815A/ja
Publication of JPH09119815A5 publication Critical patent/JPH09119815A5/ja
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Publication of JP3922742B2 publication Critical patent/JP3922742B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP22483696A 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置 Expired - Fee Related JP3922742B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US520,029 1995-08-28
US08/520,029 US5610716A (en) 1995-08-28 1995-08-28 Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal

Publications (3)

Publication Number Publication Date
JPH09119815A JPH09119815A (ja) 1997-05-06
JPH09119815A5 JPH09119815A5 (enExample) 2004-07-29
JP3922742B2 true JP3922742B2 (ja) 2007-05-30

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ID=24070903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22483696A Expired - Fee Related JP3922742B2 (ja) 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置

Country Status (4)

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US (1) US5610716A (enExample)
EP (1) EP0762077B1 (enExample)
JP (1) JP3922742B2 (enExample)
DE (1) DE69631400T2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210053973A (ko) * 2018-09-07 2021-05-12 아이사팩 홀딩 에스에이 용접 포장재의 제조 방법

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10267610A (ja) * 1997-03-26 1998-10-09 Kowa Co 光学測定装置
US6198540B1 (en) 1997-03-26 2001-03-06 Kowa Company, Ltd. Optical coherence tomography have plural reference beams of differing modulations
US6088100A (en) * 1997-07-14 2000-07-11 Massachusetts Institute Of Technology Three-dimensional light absorption spectroscopic imaging
KR100386793B1 (ko) * 1998-04-21 2003-06-09 가부시키가이샤 히타치세이사쿠쇼 박막의 막두께 계측 방법 및 그 장치 및 이를 이용한 박막디바이스의 제조 방법 및 그 제조 장치
RU2152588C1 (ru) * 1998-05-22 2000-07-10 НИИ Российский центр лазерной физики при Санкт-Петербургском государственном университете Способ измерения оптической толщины плоскопараллельных прозрачных объектов
US6034774A (en) * 1998-06-26 2000-03-07 Eastman Kodak Company Method for determining the retardation of a material using non-coherent light interferometery
US6034772A (en) * 1998-10-29 2000-03-07 Eastman Kodak Company Method for processing interferometric measurement data
US6038027A (en) * 1998-10-29 2000-03-14 Eastman Kodak Company Method for measuring material thickness profiles
US6067161A (en) * 1998-10-29 2000-05-23 Eastman Kodak Company Apparatus for measuring material thickness profiles
US6157037A (en) * 1998-12-04 2000-12-05 Photosense, Llc Sensing device and method for measuring emission time delay during irradiation of targeted samples
US6806969B2 (en) * 2001-10-19 2004-10-19 Agilent Technologies, Inc. Optical measurement for measuring a small space through a transparent surface
US7133137B2 (en) * 2002-06-27 2006-11-07 Visx, Incorporated Integrated scanning and ocular tomography system and method
US7206076B2 (en) * 2003-11-04 2007-04-17 Lumetrics, Inc. Thickness measurement of moving webs and seal integrity system using dual interferometer
JP2005283387A (ja) * 2004-03-30 2005-10-13 Sumitomo Osaka Cement Co Ltd 厚さ測定装置ならびに厚さ測定方法
GB0415766D0 (en) 2004-07-14 2004-08-18 Taylor Hobson Ltd Apparatus for and a method of determining a characteristic of a layer or layers
US7310151B2 (en) * 2004-08-30 2007-12-18 Chian Chiu Li Interferometric optical apparatus and method using wavefront division
CN100516772C (zh) * 2004-09-09 2009-07-22 鸿富锦精密工业（深圳）有限公司 光学信号处理装置及方法
US7515275B2 (en) * 2006-07-18 2009-04-07 Institut National D'optique Optical apparatus and method for distance measuring
JP5124424B2 (ja) * 2008-11-17 2013-01-23 株式会社キーエンス 光学式変位計
CN103630239B (zh) * 2013-02-19 2017-05-03 中国科学院电子学研究所 分辨率增强傅里叶微光谱仪
US20150022658A1 (en) * 2013-07-16 2015-01-22 University Of North Carolina At Charlotte Noise reduction techniques, fractional bi-spectrum and fractional cross-correlation, and applications

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341205A (en) * 1991-01-15 1994-08-23 The United States Of America As Represented By The Secretary Of The Navy Method for characterization of optical waveguide devices using partial coherence interferometry
WO1992019930A1 (en) * 1991-04-29 1992-11-12 Massachusetts Institute Of Technology Method and apparatus for optical imaging and measurement
US5323229A (en) * 1992-08-31 1994-06-21 Science Applications International Corporation Measurement system using optical coherence shifting interferometry

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210053973A (ko) * 2018-09-07 2021-05-12 아이사팩 홀딩 에스에이 용접 포장재의 제조 방법
KR102841874B1 (ko) 2018-09-07 2025-08-05 아이사팩 홀딩 에스에이 용접 포장재의 제조 방법

Also Published As

Publication number Publication date
DE69631400D1 (de) 2004-03-04
JPH09119815A (ja) 1997-05-06
US5610716A (en) 1997-03-11
EP0762077A2 (en) 1997-03-12
EP0762077B1 (en) 2004-01-28
DE69631400T2 (de) 2004-12-09
EP0762077A3 (en) 1998-01-07

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