JP3909457B2 - Copper foil surface inspection device and copper foil surface inspection method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a copper foil surface inspection apparatus and a copper foil surface inspection method. More specifically, the present invention relates to a resin coating-coated copper foil that is irradiated with light to adhere fibers onto the resin coating, tar. The present invention relates to a copper foil surface inspection apparatus and a copper foil surface inspection method for optically detecting defects such as bubbles.
[0002]
[Prior art and problems to be solved by the invention]
Surface flaw inspection for optically detecting surface flaws existing on the surface to be inspected by irradiating light to the surface to be inspected such as the surface of a thin steel sheet and analyzing the reflected light from the surface to be inspected A method has been proposed.
[0003]
For example, Japanese Patent Application Laid-Open No. 58-204353 proposes a surface flaw detection method for a metal object in which light is incident on a subject surface and specular reflection light and diffuse reflection light from the subject surface are detected by a camera. . In this surface flaw detection method, light is incident on the subject surface at an angle of 35 ° to 75 °, and the reflected light from the subject surface is reflected within the regular reflection direction and the incident direction or an angle within 20 ° from the regular reflection direction. Light is received by two cameras installed in the direction. Then, the light reception signals of the two cameras are compared and, for example, a logical sum of the two is obtained. Only when two cameras detect an abnormal value at the same time, the corresponding abnormal value is regarded as a scratch, thereby realizing a surface flaw detection method that is not affected by noise.
[0004]
Japanese Laid-Open Patent Publication No. 60-228943 proposes a method for inspecting the surface of a subject by receiving backscattered light from the subject. In this wrinkle inspection method, light is incident on a stainless steel plate at a large incident angle, and reflected light returning to the incident side, that is, backscattered light is detected, thereby detecting wrinkles on the surface of the stainless steel plate.
[0005]
Furthermore, Japanese Patent Application Laid-Open No. 8-178867 proposes a flat steel hot flaw detector by detecting a plurality of backscattered reflected lights. This flat steel hot flaw detector detects pruritus on a hot rolled flat bar. In this flaw detection apparatus, the angle of the heel slope is 10 to 40 °, and a plurality of cameras are arranged in the backward diffuse reflection direction so as to cover all specularly reflected light from the heel slope in this range. Has been.
[0006]
However, each measurement technique proposed in each of the above-mentioned publications is intended to detect wrinkles with remarkable unevenness, and the adhesion of fibers onto a resin coating without significant unevenness It has been difficult to reliably detect defects due to tar and bubbles.
[0007]
For example, the flaw detection method disclosed in Japanese Patent Application Laid-Open No. 58-204353 has two cameras that receive regular reflection light and scattered reflection light, and the purpose thereof is based on the logical sum of detection signals from the two cameras. It is removal of the influence of noise. Therefore, the wrinkle signal is captured by both cameras for wrinkles having remarkable unevenness, that is, wrinkles that are cracked, wrinkled or turned up on the surface. However, it is not possible to reliably detect defects due to fiber adhesion, tar, or bubbles on the resin coating surface that does not have significant unevenness so that only one of the cameras can capture the wrinkle signal. .
[0008]
In addition, the surface condition inspection method disclosed in Japanese Patent Application Laid-Open No. 60-228943 is directed to a lifted bald ridge that is manifested on a stainless steel plate having a small surface roughness. Therefore, it cannot be applied to defects due to fiber adhesion, tar, and bubbles on the surface of the resin coating having no lifted parts that have not been revealed.
[0009]
Further, the flat steel hot flaw detection apparatus disclosed in Japanese Patent Application Laid-Open No. 8-178867 is intended for scraping flaws and is based on capturing specularly reflected light on the sloping slope, and therefore has no significant unevenness. In the case of defects due to adhesion of fibers on the coating, tar, and bubbles, there are some that cannot be captured by the backscattered reflected light, and there has been a problem that leakage of detection occurs.
[0010]
The present invention has been made to solve the above-mentioned problems, and is a copper foil surface inspection that detects defects due to fiber adhesion, tar and bubbles on the resin coating on the resin-coated copper foil surface with high accuracy. An object is to provide an apparatus and a copper foil surface inspection method.
[0011]
[Means for Solving the Problems]
  In order to achieve the above object, a copper foil surface inspection apparatus according to a first aspect of the present invention includes a light source for irradiating light on a resin coating side surface of a resin coated copper foil, and a positive light from the resin coating side surface of the copper foil. First light receiving means for receiving reflected light, second light receiving means for receiving scattered light from the resin coating side surface of the copper foil, and light of the first region received by the first light receiving means. When the amount of light is less than or equal to the first threshold and the shape of the first region is a predetermined shapeSaid first regionAreaOf the resin coatingWhen it is determined that fibers are attached, and the amount of light in the second region received by the second light receiving means is equal to or less than a second threshold,Said second regionAreaOf the resin coatingThe third region is determined when it is determined that tar is attached and the amount of light in the third region received by the second light receiving unit is equal to or greater than a third threshold value that is greater than the second threshold value.Of the resin coatingAnd a determination unit for determining that a bubble is present.
[0012]
  Moreover, the copper foil surface inspection method of 2nd invention irradiates light to the resin coating side surface of the resin-coated copper foil, and the first light receiving means receives the regular reflection light from the resin coating side surface of the copper foil. And the scattered light from the resin coating side surface of the copper foil is received by the second light receiving means, and the amount of light in the first region received by the first light receiving means is less than or equal to the first threshold value. And when the shape of the first region is a predetermined shapeSaid first regionAreaOf the resin coatingWhen it is determined that fibers are attached, and the amount of light in the second region received by the second light receiving means is equal to or less than a second threshold,Said second regionAreaOf the resin coatingThe third region is determined when it is determined that tar tar has adhered, and the amount of light in the third region received by the second light receiving means is equal to or greater than a third threshold value that is greater than a second threshold value. ofResin coatingIt is determined that there is a bubble.
[0013]
According to the first and second inventions, the resin-coated surface of the resin-coated copper foil is irradiated with light, the specularly reflected light from the surface is received by the first light receiving means, and the scattered light is secondly reflected. The light is received by the light receiving means. Here, the portion of the resin-coated copper foil on which the fibers on the resin coating side are attached and the amount of specular reflection light from the portion where the bubbles are present are the portions where neither the fibers nor the bubbles are attached Less than the amount of specularly reflected light from Further, the scattered light from the portion of the resin-coated copper foil on the resin coating side surface where tar adheres is less than the scattered light from the portion where tar does not adhere. Furthermore, the amount of scattered light from the portion where the bubble on the resin coating side surface of the resin-coated copper foil exists is larger than the amount of scattered light from the portion where no bubble exists. In addition, the amount of specularly reflected light from the resin-coated copper foil on the resin-coated surface and the part where bubbles are present is less than the light in the other parts. The fibers are elongated and the bubbles are circular. Therefore, in the determination unit, when the light amount of the first region received by the first light receiving unit is equal to or less than the first threshold value and the shape of the first region is a predetermined shape, the fibers are attached. And when the amount of light in the second region received by the second light receiving means is less than or equal to a second threshold, it is determined that tar is attached to the predetermined region, and the second If the amount of light in the third area received by the light receiving means is equal to or greater than a third threshold value that is greater than the second threshold value, it is determined that a bubble is present in the third area. In this way, the threshold is set based on the light reflection characteristics and shape of the fiber, tar, and bubble, and the fiber, tar, and bubble of the fiber, tar, and bubble are determined based on the light reception result and shape determination of the two kinds of light, regular reflection light and scattered light Since each defect is extracted, the type-specific defect can be extracted more accurately.
[0014]
  In the first and second inventions, there is an area within the first area where the amount of light received by the first light receiving means is equal to or smaller than the fourth threshold and smaller than the fourth threshold. If the first regionOf the resin coatingIt can also be determined that fibers are attached to the surface.
[0015]
In this way, the regularly reflected light received is divided into two threshold levels, and there is a portion where light below the fourth threshold is received in a predetermined area where light below the first threshold is received. Is used as a condition for determining the adhesion of fibers, so that defects due to the adhesion of fibers can be detected more accurately.
[0016]
  Furthermore, in the first invention and the second invention, when the first area is a predetermined size or more,Said first regionAreaOf the resin coatingIt can also be determined that fibers are attached to the surface.
[0017]
In this way, when the predetermined area satisfying the condition equal to or lower than the first threshold is a certain area and is larger than the predetermined size, it is determined that there is a defect due to the adhesion of the fiber, so an abnormal value part due to noise is excluded. It is possible to extract the defective portion due to the adhesion of the fibers more accurately.
[0018]
  In the first and second aspects of the invention, the second area is larger than a predetermined size.For the resin coating in the second regionIt can also be determined that tar is attached.
[0019]
As described above, when the predetermined area satisfying the condition equal to or smaller than the second threshold is combined to some extent to form an area of a predetermined size or more, it is determined that there is a defect due to the adhesion of tar. It is possible to eliminate the defect, and it is possible to extract the defective portion due to the adhesion of the fiber more accurately.
[0020]
  In the first and second inventions, the third area is larger than a predetermined size.The resin coating in the third regionIt can also be determined that a bubble exists.
[0021]
As described above, when the predetermined area satisfying the condition equal to or smaller than the third threshold is formed to a certain size or larger, it is determined that there is a defect due to the adhesion of tar. It is possible to eliminate the defect, and it is possible to extract the defective portion due to the adhesion of the fiber more accurately.
In the first and second aspects of the invention, the reflected light from at least one of the first region to the third region is reflected at a third resolution higher than that of the first light receiving unit and the second light receiving unit. The light is received by the light receiving means, and the determination is further made based on the amount of light received by the third light receiving means to further distinguish the presence or absence of at least one of fiber, tar, and bubble, and as a result, the fiber, tar, and bubble It is also possible to determine that at least one of fiber, tar, and bubble is finally attached when it is determined that at least one of is attached.
[0022]
  Thus, the light is received by the third light receiving means having a higher resolution than the first light receiving means and the second light receiving means, and the determination is made based on the amount of light received by the third light receiving means. , And at least one of the bubbles is attached, and as a result, when at least one of the fibers, tars, and bubbles is determined to be attached, at least one of the fibers, tars, and bubbles By determining that it is attached, it is possible to more accurately determine the attachment of at least one of fiber, tar, and bubble, and the region received by the third light receiving means is the first region to the third region. Therefore, it is possible to limit the light receiving region and efficiently inspect the defect.
  A copper foil surface inspection apparatus according to a third aspect of the present invention is a first light source that receives light from a resin-coated surface of a resin-coated copper foil and light that is specularly reflected from the resin-coated surface of the copper foil. The light receiving means, the second light receiving means for receiving scattered light from the resin coating side surface of the copper foil, and the light amount of the first region received by the first light receiving means is less than or equal to the first threshold value. In addition, the first region has a predetermined shape, and a region in which the amount of light received by the first light receiving means is equal to or smaller than a fourth threshold value and less than a fourth threshold value is within the first region. In the case where it is determined that fibers are attached to the first region, and the amount of light in the second region received by the second light receiving means is equal to or less than a second threshold value, It is determined that tar adheres to the predetermined area, and the second light receiving A determination unit that determines that a bubble is present in the third region when the amount of light of the third region received by the stage is equal to or greater than a third threshold value that is greater than the second threshold value. It is a thing.
In the copper foil surface inspection method according to the fourth aspect of the present invention, light is irradiated on the resin coating side surface of the resin coated copper foil, and regular reflection light from the resin coating side surface of the copper foil is received by the first light receiving means. And the scattered light from the resin coating side surface of the copper foil is received by the second light receiving means, and the light quantity of the first region received by the first light receiving means is less than or equal to the first threshold value, and The first region has a predetermined shape, and a region in which the amount of light received by the first light receiving means is equal to or smaller than a fourth threshold value that is smaller than a first threshold value is present in the first region. When it is determined that the fiber is attached to the first region, and the light amount of the second region received by the second light receiving means is equal to or less than a second threshold, the predetermined It is determined that tar has adhered to the area, and the second light receiving means If the amount of light of the third region is equal to or higher than the second threshold value larger than the third threshold value which is more light is to determine that there is a bubble in said third region.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
[First Embodiment]
Hereinafter, the copper foil surface inspection apparatus of the present invention will be described in detail with reference to the drawings.
[0024]
As shown in FIG. 1, the copper foil surface inspection apparatus according to the present embodiment includes lights 12a, 12b, 12c, CCD sensors 14a, 14b, guide rollers 20, and a signal processing unit 28.
[0025]
A copper foil 26 as an object to be inspected is provided with a resin coating 27 on one side, and the resin coating 27 side is an inspection target. The copper foil 26 is discharged from a copper foil manufacturing apparatus (not shown) and guided to a copper foil surface inspection apparatus via a plurality of rollers. The main sizes of the copper foil 26 include those having a width of 1300 mm, 1350 mm, and a thickness of 12 μm, 18 μm, 35 μm, and 70 μm. The guide roller 20 rotates in the direction of the arrow X and conveys the copper foil 26 as an object to be inspected. The copper foil 26 is wound around the upper outer periphery of the guide roller 20 with the resin coating 27 side facing outward.
[0026]
The light 12a for irradiating the copper foil 26 with light is installed at a position to irradiate (for example, at an incident angle of 30 °) the reading portion P of the copper foil 26 located above the horizontal direction of the central portion of the guide roller 20. The reading portion P is irradiated with light. A plurality of CCD sensors 14a (for example, six) along the axial direction of the guide roller 20 are installed on the optical axis of the specularly reflected light from the reading portion P irradiated by the light 12a. The reflected light from P is received.
[0027]
A rotary encoder 16 (not shown) that outputs a pulse signal corresponding to the rotation of the guide roller 20 is connected to the rotation shaft of the guide roller 20.
[0028]
The light 12b is installed at a position to irradiate (for example, from an angle of incidence of 45 °) a reading portion Q of the copper foil 26 located at a direction of, for example, 160 ° from the horizontal direction of the central portion of the guide roller 20. The reading portion Q is irradiated with light. The light 12c is installed with the reading portion Q in a direction opposite to the position where the light 12b is installed, and irradiates the reading portion Q with light. A plurality of (for example, six) CCD sensors 14b are installed in the normal direction of the reading portion Q along the axial direction of the guide roller 20, and receive the scattered light from the reading portion Q.
[0029]
As shown in FIG. 2, the signal processing unit 28 includes a determination unit 18, a reflected light processing unit 22, and a scattered light processing unit 24. The reflected light processing unit 22 is connected to the CCD sensor 14 a and the determination unit 18, and the scattered light processing unit 24 is connected to the CCD sensor 14 b and the determination unit 18. The rotary encoder 16 is connected to the guide roller 20 and the determination unit 18. The reflected light processing unit 22, the scattered light processing unit 24, and the determination unit 18 can be configured by a microcomputer including a CPU, a ROM, and a RAM.
[0030]
Next, the operation of the present embodiment will be described.
[0031]
When a start instruction is issued to a drive unit (not shown), the guide roller 20 rotates in the X direction and starts conveying the copper foil 26. At the same time, the light 12a irradiates the reading portion P of the copper foil 26 with an incident angle of 30 °, for example, and the CCD sensor 14a reflects light, that is, specularly reflected light from the oblique direction of the reading portion P of the copper foil 26 with a light receiving angle of 30 °, for example. Is received. The lights 12b and 12c irradiate the reading portion Q of the copper foil 26 at an incident angle of 45 °, for example, and the CCD sensor 14b receives the scattered light from the reading portion Q in front of the reading portion Q, that is, at a light receiving angle of 0 °. . As shown in FIG. 3, the light is received in units of a certain size in the width direction W and the longitudinal direction H of the copper foil 26. In the CCD sensor 14a and the CCD sensor 14b, image data obtained by converting each pixel into an 8-bit luminance signal according to the intensity of received light is transmitted to the reflected light processing unit 22 and the scattered light processing unit 24, respectively.
[0032]
When the reflected light processing unit 22 receives the image data from the CCD sensor 14a, the reflected light processing shown in FIG. 4 is performed.
[0033]
In step 80, the image data is received, and the average value of the brightness of the image data received in step 82 is calculated. For example, the luminance average value calculated in step 84 is multiplied by 0.8, and the first value smaller than the luminance average value by a predetermined factor is set as the threshold value.
[0034]
Here, it has been experimentally found that when the resin coating 27 has defects due to fibers or bubbles, the amount of reflected light is smaller than the surface of the copper foil without defects due to these. That is, the luminance of the portion where the defect due to the adhesion of the fiber or the bubble is lower than the luminance of the portion without the adhesion. Therefore, in the received image data, it is highly possible that a portion with low luminance has a defect due to fibers or bubbles.
[0035]
Therefore, in step 86, for example, 0.8 times the calculated average brightness value is set as the first threshold value, a label is attached to a pixel whose brightness is smaller than the average brightness value × 0.8, and the brightness is the average brightness value × 0. Black labeling is performed for each region composed of pixels smaller than eight. In step 88, a region where the black labeling area is somewhat large, that is, a portion where black labeling pixels are gathered to some extent is extracted. This is because a certain amount of noise is generated in the image data converted by the CCD sensor 14a, and even if there is no defect due to adhesion of fibers and bubbles, pixels with low luminance are generated and labeled. In addition, since there are fine fibers and bubbles that do not need to be removed, this process is performed to eliminate these cases. Therefore, a filter process for extracting only a labeling region having a predetermined size or larger is performed, and black labeling regions constituting a labeling region smaller than the predetermined size are excluded. The predetermined size is set in consideration of the accuracy of the CCD sensor 14a, fibers to be excluded as defects, the size of bubbles, and the like.
[0036]
In step 90, fibers and bubbles are distinguished according to the shape of the extracted black labeling region, and only the labeling region determined to be a fiber is extracted. The distinction between the shape of the fiber and the bubble is that the shape of the fiber is long and thin, and the shape of the bubble is circular. Therefore, a long and narrow shape can be used as a fiber, and a circular shape can be used as a bubble.
[0037]
In step 92, for example, a luminance value 0.6 times the luminance average value is obtained, and a luminance value 0.6 times the luminance average value is set as the second threshold value. This is because, in the image captured by the CCD sensor 14a, when there is a pixel having a luminance of a certain value or less among the pixels constituting the black labeling region of a predetermined size or more, that is, in a region where the luminance is somewhat low. This is because there is a high possibility that fibers or bubbles adhere when there is a lower luminance portion. In step 94, only black labeling regions in which pixels having a luminance lower than the second threshold exist are extracted from black labeling pixels constituting a labeling region having a predetermined size or larger, and pixels having a luminance lower than the second threshold are extracted. Exclude black labeling areas that do not exist. In step 96, the image that has been black-labeled in the previous step is output to the determination unit 18, and the process is terminated.
[0038]
FIGS. 3A and 3A show examples of images captured by the CCD sensor 14a, and FIGS. 3A and 2B show examples of images after step 88 of this processing. 3) shows an example of an image after the end of this processing step 90, and FIGS. 3A and 3 (4) show an example of an image after the end of this processing. In the image data captured by the CCD sensor 14a, a, b, c, and d are recognized as portions having a luminance value smaller than the average value × 0.8 (1). The a portion smaller than the size is removed and the b, c, and d portions remain (2). After the step 90 is completed, the circular b is removed and the c and d portions remain (3), and the process ends. Later, the c portion that does not have the brightness lower than the average value × 0.6 is removed and the d portion is extracted (4), and this portion is estimated to be a defective portion due to fiber adhesion.
[0039]
According to the present processing, a portion having a predetermined size or more in a region having a value equal to or larger than a predetermined size in a region equal to or smaller than a first predetermined multiple of the luminance average value and the second predetermined average luminance value. A portion having an area within the double value is extracted.
[0040]
On the other hand, when the scattered light processing unit 24 receives the image data from the CCD sensor 14b, the scattered light processing shown in FIG. 5 is performed.
[0041]
In step 60, the image data is received, and in step 62, the average luminance value of the image data received is calculated. The average value of the luminance of the image data can be calculated by dividing the total luminance of all the pixels in W × H by the number of pixels.
[0042]
Here, it has been experimentally found that when the resin coating 27 has defects due to adhesion of tar, the amount of scattered light is smaller than that of the resin coating surface without these defects. In addition, it has been found by experiments that defects due to fibers and bubbles do not reduce the amount of scattered light in the scattered light as compared to the surroundings, as in the case of a defective portion due to tar. In other words, the luminance of only the portion where defects due to the adhesion of tar occur is lower than that of the portion without these defects, and looks dark to human eyes. Therefore, in the received image data, there is a high possibility that a portion with low luminance has a defect due to the adhesion of tar. Therefore, in step 64, the black threshold value is calculated by the average luminance value × 0.8, and in step 66, a pixel having a luminance smaller than the calculated black threshold is labeled, and the pixel is configured with a pixel whose luminance is smaller than the black threshold value. Black labeling is performed for each area. In step 68, an area where the black labeling is larger than a predetermined size, that is, a part where black labeling pixels are gathered to some extent is extracted. This is because a certain amount of noise is generated in the image data converted by the CCD sensor 14b, and even if there is no defect due to the adhesion of tar, pixels with low luminance are generated and black labeling is performed. This process is performed to eliminate these cases because there is a fine tar deposit that does not need to be removed. Therefore, a filter process for extracting only a labeling region having a predetermined size or larger is performed, and black labeling regions constituting a labeling region smaller than the predetermined size are excluded.
[0043]
In step 70, the white threshold value is calculated by the luminance average value × 1.2. Here, it has been proved by experiments that when the resin coating 27 has a defect due to generation of bubbles, the amount of scattered light is larger than that of the resin coating surface having no defect. In addition, it has been found through experiments that defects due to fibers and tar do not increase in the amount of scattered light compared to the surroundings in the scattered light as in the case of defective portions due to bubbles. That is, the brightness of only the part where the defect is generated due to the bubble generation is higher than the part without the defect, and the human eye looks whitish. Therefore, in the received image data, it is highly possible that a portion with high luminance has a defect due to the occurrence of bubbles. Therefore, in step 70, the white threshold value is calculated by the average luminance value × 1.2, and in step 72, the pixels having the luminance higher than the calculated white threshold are labeled, and the pixels are configured by the pixels having the luminance higher than the white threshold. White labeling is performed for each area. In step 74, an area where the white labeling is larger than a predetermined size, that is, a part where white labeling pixels are gathered to some extent is extracted. This is because a certain amount of noise is generated in the image data converted by the CCD sensor 14b, and even if there is no defect due to the generation of bubbles, pixels with high luminance are generated and white labeling is performed. This process is performed in order to eliminate these cases because there are fine bubbles that do not need to be removed. Therefore, a filter process for extracting only a labeling region having a predetermined size or larger is performed, and white labeling regions constituting a labeling region smaller than the predetermined size are excluded.
[0044]
In step 76, the black and white labeled images are output to the determination unit 18 and the present process is terminated.
[0045]
In the above description, 0.8 times the luminance average value of the received image unit is set as the black threshold value, and 1.2 times the luminance average value is set as the white threshold value. However, defects due to adhesion of tar and bubbles can be detected. It is also possible to detect by setting other threshold values. The predetermined size is set in consideration of the accuracy of the CCD sensor 14b, the tar to be eliminated as a defect, the size of the bubble, and the like.
[0046]
FIGS. 3B and 3A show examples of images captured by the CCD sensor 14b. FIGS. 3B and 2B show examples of images after the completion of this processing step 68. FIGS. ) Shows an example of the image after this processing. In the image captured by the CCD sensor 14b, e and f are recognized as luminance portions smaller than the black threshold, and g and h are recognized as luminance portions larger than the white threshold, but are recognized as black threshold values. The portion f smaller than the predetermined size is removed from the portion (2), the portion g recognized smaller than the predetermined size is removed from the portion recognized as the white threshold, and the portions e and h are estimated as defective portions (3).
[0047]
According to this process, it is possible to extract a portion having a size greater than or equal to a predetermined size in a portion with low luminance and a portion having a size greater than or equal to a predetermined size in a portion with high luminance.
[0048]
The determination unit 18 receives the image data from the reflected light processing unit 22 as image data A and the image data from the scattered light processing unit 24 as image data B, and the defect portion extraction processing of the copper foil 26 is shown in FIG. This is done according to the flowchart shown.
[0049]
The copper foil 26 is conveyed by the guide roller 20 and read by the CCDs 14a and 14b at the reading position P and the reading position Q, respectively. Therefore, a time difference occurs in the timing at which the same portion of the copper foil 26 is read. Therefore, in step 100, the time difference is measured by counting pulse signals corresponding to the rotation speed of the guide roller 20 obtained by the rotary encoder 16, and the image data received at a predetermined time difference after receiving the image data A. B is determined as image data of the same portion of the copper foil 26, and image data A and image data B of the same portion of the copper foil 26 are paired. In step 102, the paired image data A and image data B are compared to determine whether the area is black-labeled by the reflected light processing, that is, whether the area is black-labeled by the image data A. . If the determination is affirmative, in step 104, filtering is performed to extract only a region of a predetermined size or larger, and in step 114, the extracted region is output as a fiber adhering portion. finish. If the determination is negative, it is determined in step 106 whether or not the region is black labeled by the scattered light processing, that is, whether or not the region is black labeled by the image data B. If the determination is affirmative, in step 108, filtering is performed to extract only a region of a predetermined size or larger, and in step 116, the extracted region is output as a tar adhering portion. finish. If the determination is negative, it is determined in step 110 whether or not the region is a white region labeled with scattered light processing, that is, whether or not it is a region labeled white with the image data B. If the determination is affirmative, in step 112, filtering is performed to extract only a region of a predetermined size or larger, and in step 118, the extracted region is output as a bubble presence portion, and this processing is performed. finish. If the determination is negative, the process is terminated as it is.
[0050]
According to the present embodiment, a portion having a low luminance and a predetermined shape in image data obtained by reading the surface of the copper foil 26 by reflected light from the copper foil 26 is extracted as a defective portion due to the fiber, and the copper foil. Since the low-luminance part of the image data read from the surface of the copper foil 26 by the scattered light from 26 is extracted as a defective part due to the adhesion of tar, and the high-luminance part is extracted as a defective part due to the adhesion of bubbles. The defects of the copper foil 26 can be extracted accurately and accurately for each type of defect.
[0051]
[Second Embodiment]
Next, a second embodiment will be described. The same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
[0052]
As shown in FIG. 7, the copper foil surface inspection apparatus according to the present embodiment includes a CCD camera 15 and a light 13 having higher resolution than the CCD sensor used in the first embodiment. It is installed on the downstream side in the moving direction of the copper foil 26 from the copper foil surface inspection position in the form. Further, as shown in FIG. 8, a verification processing unit 25 is connected to the determination unit 18, and the verification processing unit 25 is connected to the CCD camera 15. The CCD camera 15 is installed so as to image the surface of the copper foil 26 vertically and movably in the width direction W of the copper foil 26, and a ring-shaped light 13 is provided around the imaging side of the CCD camera 15. is set up. The CCD camera 15 is also connected to a determination unit 18.
[0053]
In the same manner as in the first embodiment, after extracting defect portions due to adhesion of fibers, tars, and bubbles, the determination unit 18 obtains positional information of the extracted defect portions (hereinafter referred to as “temporary defect portions”). The data is transmitted to a drive unit (not shown) of the CCD camera 15, and the CCD camera 15 is moved to a position where a temporary defect portion can be imaged. The light 13 emits light at the timing when the temporary defect portion moves, and the CCD camera 15 images the surface of the temporary defect portion. The captured image is transmitted to the verification processing unit 25, where verification processing is performed according to the flowchart shown in FIG.
[0054]
The image is received at step 120, and the average luminance of the image received at step 122 is calculated. The image captured here is characterized in that the center of the adhered portion of the fibers, tar, and bubbles is black and the periphery thereof is white. Therefore, in step 124, the luminance threshold value of the peripheral portion of the portion to be extracted as a defective portion is calculated by luminance average × 1.3, and in step 126, the luminance threshold is configured by pixels larger than the luminance average value × 1.3. Perform white labeling for each area. Then, in step 128, the luminance threshold value of the central portion of the portion extracted as the defective portion is calculated as luminance average × 0.2, and in step 130, the pixel whose luminance is smaller than the luminance average × 0.2 in the white labeling area. Extract only the white labeling area in which is present, and exclude the other white labeling areas. In step 132, the white-labeled image is output to the determination unit 18, and the process ends.
[0055]
Then, the determination unit 18 compares the output white-labeled image with the image of the fiber, tar, and bubble regions obtained in the same manner as in the first embodiment. In addition, it is determined that a defect due to adhesion of fibers, tar, and bubbles occurs in a portion that is a fiber, tar, and bubble region.
[0056]
According to the present embodiment, the fiber, tar, and bubble adhering portions extracted earlier are checked again with a CCD camera having a higher resolution to check whether there are fibers, tar, and bubbles adhering. Each defect of fiber, tar and bubble can be extracted. In addition, since an image with an expensive high-resolution CCD camera is performed only in a portion that is determined to have a defect based on the previously captured image, the imaging range can be limited, and the copper foil can be efficiently used. Defects can be detected.
[0057]
【The invention's effect】
As described above, according to the first and second inventions, the resin-coated copper foil is irradiated with light on the resin coating side surface, and the regular reflection light from the surface is received by the first light receiving means. The scattered light is received by the second light receiving means. Then, when the light amount of the first region received by the first light receiving means is equal to or less than the first threshold and the shape of the first region is a predetermined shape, it is determined that the fibers are attached. When the amount of light in the second area received by the second light receiving means is less than or equal to a second threshold value, it is determined that tar is attached to the predetermined area, and the second light receiving means When the amount of light of the received third region is equal to or greater than a third threshold value that is greater than the second threshold value, it is determined that bubbles are present in the third region. Judge that there is a defect. In this way, the threshold is set based on the light reflection characteristics and shape of the fiber, tar, and bubble, and the fiber, tar, and bubble of the fiber, tar, and bubble are determined based on the light reception result and shape determination of the two kinds of light, regular reflection light and scattered light Since each defect is extracted, the type-specific defect can be extracted more accurately.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a copper foil surface inspection apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic block diagram of a signal processing portion of the first embodiment.
FIG. 3 is an example of an image read by a CCD sensor.
FIG. 4 is a flowchart of regular reflection light processing.
FIG. 5 is a flowchart of scattered light processing.
FIG. 6 is a flowchart of determination processing.
FIG. 7 is a diagram showing positions of a high-resolution CCD camera and copper foil.
FIG. 8 is a schematic block diagram of a signal processing portion of the second embodiment.
FIG. 9 is a flowchart of verify processing.
[Explanation of symbols]
12a, 12b, 12c, 13 lights
14a, 14b, 15 CCD sensor
16 Encoder
18 Judgment part
20 Guide roller
22 Reflected light processing section
24 Scattered light processing section
25 Verify processing section
26 Copper foil
28 Signal processor

Claims (14)

A light source for irradiating the resin-coated surface of the resin-coated copper foil with light;
First light receiving means for receiving regular reflection light from the resin coating side surface of the copper foil;
Second light receiving means for receiving scattered light from the resin coating side surface of the copper foil;
Said first amount of light of the first area that has been received by the light receiving means first threshold value or less, and the resin coating of the first realm when the shape of the first region is of a predetermined shape to determine the fiber is attached, if the amount of light of the second region that is received by the second light receiving means is less than the second threshold value, the resin coating of the second realm When it is determined that tar is attached and the amount of light of the third region received by the second light receiving means is equal to or greater than a third threshold value that is greater than the second threshold value , A determination unit that determines that bubbles are present in the resin coating ;
A copper foil surface inspection device. The determination unit includes the first region when a region where the amount of light received by the first light receiving unit is equal to or smaller than a fourth threshold and less than a fourth threshold is present in the first region. The copper foil surface inspection apparatus according to claim 1 , wherein it is determined that fibers are attached to the resin coating . The said judgment part judges that the fiber has adhered to the said resin coating of the said 1st area | region , when the said 1st area | region is more than predetermined size, The Claim 1 or Claim 2 characterized by the above-mentioned. Copper foil surface inspection device. The said determination part determines that the tar has adhered to the said resin coating of the said 2nd area | region , when the said 2nd area | region is more than predetermined size. The copper foil surface inspection apparatus of Claim 1. The said determination part determines that the bubble exists in the said resin coating of the said 3rd area | region when the said 3rd area | region is more than predetermined size, Any of Claim 1 thru | or 4 characterized by the above-mentioned. The copper foil surface inspection apparatus of Claim 1. And further comprising a third light receiving means having higher resolution than the first light receiving means and the second light receiving means for receiving reflected light from at least one of the first region to the third region,
The determination unit further distinguishes whether or not at least one of a fiber, a tar, and a bubble is attached based on the amount of light received by the third light receiving unit, and as a result, at least one of the fiber, the tar, and the bubble is attached. 6. The copper according to claim 1, wherein it is determined that at least one of a fiber, a tar, and a bubble is finally attached when it is distinguished from Foil surface inspection device. Irradiate the resin-coated surface of the resin-coated copper foil with light,
The regular reflection light from the resin coating side surface of the copper foil is received by the first light receiving means,
Scattered light from the resin coating side surface of the copper foil is received by the second light receiving means,
Said first amount of light of the first area that has been received by the light receiving means first threshold value or less, and the resin coating of the first realm when the shape of the first region is of a predetermined shape to determine the fiber is attached, if the amount of light of the second region that is received by the second light receiving means is less than the second threshold value, the resin coating of the second realm The third region is determined when it is determined that tar tar has adhered, and the amount of light in the third region received by the second light receiving means is equal to or greater than a third threshold value that is greater than a second threshold value. The copper foil surface inspection method which judges that the bubble exists in the said resin coating . The determination is made when the area of the first area that is less than or equal to the fourth threshold and the amount of light received by the first light receiving means is present in the first area . It is judged that the fiber has adhered to the said resin coating , The copper foil surface inspection method of Claim 7 characterized by the above-mentioned. 9. The determination according to claim 7, wherein the determination determines that fibers are attached to the resin coating in the first region when the first region has a predetermined size or more. Copper foil surface inspection method. 10. The determination according to any one of claims 7 to 9, wherein the determination is that tar is attached to the resin coating in the second region when the second region is a predetermined size or more. The copper foil surface inspection method of item 1. 11. The determination according to any one of claims 7 to 10, wherein the determination is that a bubble is present in the resin coating of the third region when the third region is a predetermined size or more. 2. The copper foil surface inspection method according to item 1. The reflected light from at least one of the first region to the third region is received by a third light receiving unit having a higher resolution than the first light receiving unit and the second light receiving unit,
The determination further distinguishes whether or not at least one of fiber, tar, and bubble is attached based on the amount of light received by the third light receiving means, and as a result, at least one of fiber, tar, and bubble is attached. The copper foil according to any one of claims 7 to 11, wherein it is determined that at least one of a fiber, a tar, and a bubble is finally attached when it is distinguished from the copper foil. Surface inspection method. A light source for irradiating the resin-coated surface of the resin-coated copper foil with light;
  First light receiving means for receiving regular reflection light from the resin coating side surface of the copper foil;
  Second light receiving means for receiving scattered light from the resin coating side surface of the copper foil;
  Light received by the first light receiving means when the amount of light of the first area received by the first light receiving means is less than or equal to a first threshold and the shape of the first area is a predetermined shape. When the area below the fourth threshold that is less than the first threshold is present in the first area, it is determined that fibers are attached to the first area, and the second When the amount of light in the second area received by the light receiving means is less than or equal to the second threshold, it is determined that tar is attached to the predetermined area, and the third light received by the second light receiving means is received. A determination unit that determines that a bubble is present in the third region when the amount of light in the region is equal to or greater than a third threshold value greater than a second threshold value;
  A copper foil surface inspection device. Irradiate the resin-coated surface of the resin-coated copper foil with light,
  The regular reflection light from the resin coating side surface of the copper foil is received by the first light receiving means,
  Scattered light from the resin coating side surface of the copper foil is received by the second light receiving means,
  Light received by the first light receiving means when the amount of light of the first area received by the first light receiving means is less than or equal to a first threshold and the shape of the first area is a predetermined shape. When the area below the fourth threshold that is less than the first threshold is present in the first area, it is determined that fibers are attached to the first area, and the second When the amount of light in the second area received by the light receiving means is less than or equal to the second threshold, it is determined that tar is attached to the predetermined area, and the third light received by the second light receiving means is received. A copper foil surface inspection method for determining that bubbles are present in the third region when the amount of light in the region is equal to or greater than a third threshold value greater than a second threshold value.

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