JP3902830B2 - 基板の研磨装置 - Google Patents

基板の研磨装置 Download PDF

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Publication number
JP3902830B2
JP3902830B2 JP11015097A JP11015097A JP3902830B2 JP 3902830 B2 JP3902830 B2 JP 3902830B2 JP 11015097 A JP11015097 A JP 11015097A JP 11015097 A JP11015097 A JP 11015097A JP 3902830 B2 JP3902830 B2 JP 3902830B2
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JP
Japan
Prior art keywords
frame
polishing
top ring
dressing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11015097A
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English (en)
Japanese (ja)
Other versions
JPH10286761A5 (https=
JPH10286761A (ja
Inventor
賢也 伊藤
英夫 相澤
比呂海 矢島
賢一 重田
佳邦 竪山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Toshiba Corp
Original Assignee
Ebara Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Toshiba Corp filed Critical Ebara Corp
Priority to JP11015097A priority Critical patent/JP3902830B2/ja
Publication of JPH10286761A publication Critical patent/JPH10286761A/ja
Publication of JPH10286761A5 publication Critical patent/JPH10286761A5/ja
Application granted granted Critical
Publication of JP3902830B2 publication Critical patent/JP3902830B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP11015097A 1997-04-11 1997-04-11 基板の研磨装置 Expired - Fee Related JP3902830B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11015097A JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11015097A JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Publications (3)

Publication Number Publication Date
JPH10286761A JPH10286761A (ja) 1998-10-27
JPH10286761A5 JPH10286761A5 (https=) 2004-12-16
JP3902830B2 true JP3902830B2 (ja) 2007-04-11

Family

ID=14528327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11015097A Expired - Fee Related JP3902830B2 (ja) 1997-04-11 1997-04-11 基板の研磨装置

Country Status (1)

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JP (1) JP3902830B2 (https=)

Also Published As

Publication number Publication date
JPH10286761A (ja) 1998-10-27

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