JP3900519B2 - Surface-coated cemented carbide cutting tool with excellent wear resistance under high-speed heavy cutting conditions. - Google Patents
Surface-coated cemented carbide cutting tool with excellent wear resistance under high-speed heavy cutting conditions. Download PDFInfo
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Description
【０００１】
【発明の属する技術分野】
この発明は、硬質被覆層が高硬度と高強度を兼ね備え、したがって各種の鋼や鋳鉄などの切削加工を、特に高速で、かつ高い機械的衝撃を伴う高切り込みや高送りなどの重切削条件で行なった場合に、硬質被覆層がチッピング（微小欠け）などの発生なく、すぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具（以下、被覆超硬工具という）に関するものである。
【０００２】
【従来の技術】
一般に、被覆超硬工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。
【０００３】
また、被覆超硬工具として、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットからなる基体（以下、これらを総称して超硬基体と云う）の表面に、原子比で、
Ｚｒ／（Ｚｒ＋Ｔｉ）：０．４０〜０．６０、
炭素／（炭素＋窒素）：０．４０〜０．６０、
を満足するＺｒとＴｉの複合炭窒化物［以下、（Ｚｒ，Ｔｉ）ＣＮで示す］層からなる硬質被覆層を１〜１５μｍの平均層厚で蒸着してなる被覆超硬工具が提案され、各種の鋼や鋳鉄などの連続切削や断続切削加工に用いた場合にすぐれた切削性能を発揮することも知られている（例えば特許文献１参照）。
【０００４】
さらに、上記の被覆超硬工具が、例えば図１に概略縦断面図で示される通り、中央部にステンレス鋼製の反応ガス吹き出し管が立設され、前記反応ガス吹き出し管には、図２（ａ）に概略斜視図で、同（ｂ）に概略平面図で例示される黒鉛製の超硬基体支持パレットが串刺し積層嵌着され、かつこれらがステンレス鋼製のカバーを介してヒーターで加熱される構造を有する化学蒸着装置を用い、超硬基体を前記超硬基体支持パレットの底面に形成された多数の反応ガス通過穴位置に図示される通りに載置した状態で前記化学蒸着装置に装入し、
反応ガス組成（容量％で）：ＺｒＣｌ4：０．０５〜５％、ＴｉＣｌ4：０．１〜６％、ＣＨ3ＣＮ：０．６〜５％、Ｎ2：０．５〜４０％、Ｈ2：残り、
反応雰囲気温度：９００〜１０５０℃、
反応雰囲気圧力：５〜５０ｋＰａ、
の条件で（Ｚｒ，Ｔｉ）ＣＮからなる硬質被覆層を形成することにより製造されることも知られている（例えば特許文献２参照）。
【０００５】
【特許文献１】
特開昭６２−５６５６４号公報
【特許文献２】
特開２００１−１１６３２号公報
【０００６】
【発明が解決しようとする課題】
近年の切削加工装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求も強く、これに伴い、切削加工は高速化の傾向を深め、かつ高切り込みや高送りなどの重切削条件での切削加工が強く求められる傾向にあるが、上記の従来被覆超硬工具においては、これを通常の切削加工条件で用いた場合には問題はないが、特に切削加工を高速で、かつ高い機械的衝撃を伴う高切り込みや高送りなどの重切削条件で行なった場合には、硬質被覆層の強度および硬さ不足が原因で、硬質被覆層の摩耗進行が一段と促進し、かつチッピングも発生し易くなることから、比較的短時間で使用寿命に至るのが現状である。
【０００７】
【課題を解決するための手段】
そこで、本発明者等は、上述のような観点から、特に高速重切削加工条件で硬質被覆層がすぐれた耐摩耗性を発揮する被覆超硬工具を開発すべく、上記の従来被覆超硬工具を構成する硬質被覆層に着目し、研究を行った結果、
（ａ）上記の図１，２に示される化学蒸着図装置を用いて形成された従来被覆超硬工具を構成する（Ｚｒ，Ｔｉ）ＣＮ層は、厚さ全体に亘って実質的に均一な組成を有し、したがって均質な硬さと強度を有するが、（Ｚｒ，Ｔｉ）ＣＮ層を形成するに際して、例えば図３に反応ガス組成自動制御システムが概略チャート図で示される通り、反応ガス組成および流量中央制御装置に、前記（Ｚｒ，Ｔｉ）ＣＮ層からなる硬質被覆層に層厚方向にそってＺｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点とを所定間隔をおいて交互に繰り返し形成させる目的で、前記Ｚｒおよび炭素の最高含有点並びにＴｉおよび窒素の最高含有点に対応した反応ガス組成、並びに前記両点間のＺｒと炭素およびＴｉと窒素の連続変化に対応した反応ガス組成、さらに前記両点間の間隔および硬質被覆層の全体層厚を、過去の実績データに基づいてインプットし、この反応ガス組成および流量中央制御装置からの制御信号にしたがって、原料ガスボンベからのＨ2ガス、ＣＨ4ガス、Ｎ2ガス、およびＨＣｌガスの流量、さらにＺｒＣｌ4ガスおよびＴｉＣｌ4ガスの流量をそれぞれの原料流量自動制御装置にて制御しながら、化学蒸着装置の反応ガス吹き出し管に導入すると、層厚方向にそって、Ｚｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点とが所定間隔をおいて交互に繰り返し存在し、かつ前記Ｚｒおよび炭素の最高含有点から前記Ｔｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点から前記Ｚｒおよび炭素の最高含有点へＺｒと炭素およびＴｉと窒素の含有量が連続的に変化する成分濃度分布構造をもつた（Ｚｒ，Ｔｉ）ＣＮ層からなる硬質被覆層が形成されるようになること。
【０００８】
（ｂ）上記（ａ）の繰り返し連続変化成分濃度分布構造の（Ｚｒ，Ｔｉ）ＣＮ層において、
上記Ｚｒおよび炭素の最高含有点におけるＺｒとＴｉおよび炭素と窒素の相互含有割合を示すＺｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）を、それぞれ原子比で、
Ｚｒ／（Ｚｒ＋Ｔｉ）：０．８０〜０．９８、
炭素／（炭素＋窒素）：０．８０〜０．９８、
上記Ｔｉおよび窒素の最高含有点におけるＴｉとＺｒおよび窒素と炭素の相互含有割合を示すＴｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）を、それぞれ原子比で、
Ｔｉ／（Ｔｉ＋Ｚｒ）：０．８０〜０．９８、
窒素／（窒素＋炭素）：０．８０〜０．９８、
とし、かつ隣り合う上記Ｚｒおよび炭素の最高含有点と上記Ｔｉおよび窒素の最高含有点の厚さ方向の間隔を０．０１〜０．２μmとすると、
上記Ｚｒおよび炭素の最高含有点部分では、Ｚｒおよび炭素が主体を占め、これら両成分の作用によってきわめて高い硬さを示し、一方上記Ｔｉおよび窒素の最高含有点部分では、Ｔｉおよび窒素が主体を占め、これら両成分の作用によって高い強度を示すようになり、かつこれらＺｒおよび炭素の最高含有点と上記Ｔｉおよび窒素の最高含有点の間隔をきわめて小さくしたことから、層全体の特性として高硬度と高強度を具備するようになり、したがって、硬質被覆層がかかる構成の（Ｚｒ，Ｔｉ）ＣＮ層からなる被覆超硬工具は、各種の鋼や鋳鉄などの切削加工を、特に高い機械的衝撃を伴う高速重切削条件で行なった場合にも、硬質被覆層にチッピングの発生なく、すぐれた耐摩耗性を発揮するようになること。
以上（ａ）および（ｂ）に示される研究結果を得たのである。
【０００９】
この発明は、上記の研究結果に基づいてなされたものであって、超硬基体の表面に、（Ｚｒ，Ｔｉ）ＣＮ層からなる硬質被覆層を１〜１５μｍの全体平均層厚で蒸着してなる被覆超硬工具において、
上記硬質被覆層が、層厚方向にそって、Ｚｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点とが所定間隔をおいて交互に繰り返し存在し、かつ前記Ｚｒおよび炭素の最高含有点から前記Ｔｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点から前記Ｚｒおよび炭素の最高含有点へＺｒとＴｉおよび炭素と窒素の含有量が連続的に変化する成分濃度分布構造を有し、
さらに、上記Ｚｒおよび炭素の最高含有点におけるＺｒとＴｉおよび炭素と窒素の相互含有割合を示すＺｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）が、それぞれ原子比で、
Ｚｒ／（Ｚｒ＋Ｔｉ）：０．８０〜０．９８、
炭素／（炭素＋窒素）：０．８０〜０．９８、
上記Ｔｉおよび窒素の最高含有点におけるＴｉとＺｒおよび窒素と炭素の相互含有割合を示すＴｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）が、それぞれ原子比で、
Ｔｉ／（Ｔｉ＋Ｚｒ）：０．８０〜０．９８、
窒素／（窒素＋炭素）：０．８０〜０．９８、
を満足し、かつ隣り合う上記Ｚｒおよび炭素の最高含有点と上記Ｔｉおよび窒素の最高含有点の間隔が、０．０１〜０．２μmである、
高速重切削条件で硬質被覆層がすぐれた耐摩耗性を発揮する被覆超硬工具に特徴を有するものである。
【００１０】
つぎに、この発明の被覆超硬工具において、これを構成する硬質被覆層の構成を上記の通りに限定した理由を説明する。
（ａ）Ｚｒおよび炭素の最高含有点
上記の通り硬質被覆層である（Ｚｒ，Ｔｉ）ＣＮ層の厚さ方向に沿ってＺｒおよび炭素成分の相対的に高い部分を繰り返し形成して層自体の硬さを向上させ、同じくＴｉよび窒素成分の相対的に高い部分を繰り返し形成して層自体の強度を向上させるものであり、したがってＺｒおよび炭素の最高含有点では硬さが著しく向上したもになるので、すぐれた耐摩耗性を発揮するようになるが、この場合ＺｒとＴｉおよび炭素と窒素の相互含有割合を示すＺｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）がいずれも原子比で（以下、同じ）０．９８を越えると、実質的にＺｒと炭素で構成されることになることから、強度低下は避けられず、高強度を有するＴｉと窒素の最高含有点が隣接して存在しても、高い機械的衝撃を伴なう高速重切削ではチッピングが発生し易くなり、一方同値が０．８０未満になると硬さが急激に低下し、層自体の摩耗が促進するようになることから、Ｚｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）の値をいずれも０．８０〜０．９８と定めた。
【００１１】
（ｂ）Ｔｉおよび窒素の最高含有点
上記の通りＺｒおよび炭素の最高含有点は相対的にすぐれた硬さを有するが、反面相対的に強度が不十分であるため、このＺｒおよび炭素の最高含有点の強度不足を補う目的で、高強度を有するＴｉおよび窒素の最高含有点を厚さ方向に交互に介在させるものである。しかし、ＴｉとＺｒおよび窒素と炭素の相互含有割合を示すＴｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）が、それぞれ０．９８を越えると、実質的にＴｉと窒素で構成されるようになることから、Ｔｉおよび窒素の最高含有点に所定の硬さを確保することができず、これが摩耗促進の原因となり、一方同値がいずれも０．８０未満になると、急激な強度低下が起り、この結果チッピングが発生し易くなることから、Ｔｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）の値をいずれも０．８０〜０．９８と定めた。
【００１２】
（ｃ）Ｚｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点間の間隔
その間隔が０．０１μm未満ではそれぞれの点を上記の組成で明確に形成することが困難であり、この結果層に所望のすぐれた高硬度と高強度を確保することができなくなり、またその間隔が０．２μmを越えるとそれぞれの点がもつ欠点、すなわちＺｒおよび炭素の最高含有点であれば強度不足、Ｔｉおよび窒素の最高含有点であれば硬さ不足が層内に局部的に現れ、これが原因でチッピングが発生し易くなったり、摩耗進行が促進されるようになることから、その間隔を０．０１〜０．２μmと定めた。
【００１３】
（ｄ）硬質被覆層の全体平均層厚
その層厚が１μｍ未満では、所望の耐摩耗性を確保することができず、一方その平均層厚が１５μｍを越えると、チッピングが発生し易くなることから、その平均層厚を１〜１５μｍと定めた。
【００１４】
【発明の実施の形態】
つぎに、この発明の被覆超硬工具を実施例により具体的に説明する。
原料粉末として、平均粒径：６．５μｍを有する粗粒ＷＣ粉末、同３．５μｍを有する中粒ＷＣ粉末、同０．８μｍの微粒ＷＣ粉末、同１．３μｍのＴａＣ粉末、同１．２μｍのＮｂＣ粉末、同１．２μｍのＺｒＣ粉末、同２．３μｍのＣｒ3Ｃ2粉末、同１．０μｍの（Ｔｉ，Ｗ）ＣＮ（質量比で、ＴｉＣ／ＴｉＮ／ＷＣ＝２４／２０／５６）粉末、および同１．８μｍのＣｏ粉末を用意し、これら原料粉末をそれぞれ表１に示される配合組成に配合し、ボールミルで７２時間混合し、減圧乾燥した後、１００ＭＰａ の圧力で圧粉体にプレス成形し、この圧粉体を、表面部にＣｏ富化層を形成するものについては１３．３Ｐａ、そして全体に亘って均一組織を有するものについては６．７Ｐａの真空中、温度：１４３０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０８のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１６０６１２のチップ形状をもったＷＣ基超硬合金製の超硬基体Ａ１〜Ａ１０を形成した。なお、超硬基体Ａ−１、Ａ−３、Ａ−４、Ａ−６、Ａ−７、およびＡ−９の表面部にＣｏ富化層の形成が見られた。
【００１５】
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（重量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を２ｋＰａの炭素雰囲気中、温度：１５００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．１０のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１６０６１２のチップ形状をもったＴｉＣＮ系サーメット製の超硬基体Ｂ１〜Ｂ６を形成した。
【００１６】
つぎに、上記の超硬基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれを、アセトン中で超音波洗浄し、乾燥した後、図１に示される化学蒸着装置内に、第２図に示される超硬基体支持パレットの位置決め穴に載置した状態で装入し、まず、装置内をヒーターで９００℃に加熱したところで、ＴｉＣｌ4：４．２％、Ｎ2：３０％、Ｈ2：残りからなる組成を有する反応ガスを反応ガス吹き出し管を通して導入して、装置内の反応雰囲気圧力を３０ｋＰａとし、この状態で２０分間保持して前記超硬基体表面に、下地密着層として０．３μmの平均層厚をもった窒化チタン（ＴｉＮ）層を形成し、ついで、同じく装置内の雰囲気温度をヒーターにて加熱して１０２０℃とした後、図３に示される反応ガス組成自動制御システムの反応ガス組成および流量中央制御装置に、過去の実績にデータにしたがって、表３に示されるＺｒおよび炭素の最高含有点の目標Ｚｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）、さらにＴｉおよび窒素の最高含有点の目標Ｔｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）に対応する反応ガス組成、前記Ｚｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点間のＺｒとＴｉおよび炭素と窒素の含有量の連続変化に対応する反応ガス組成、さらに表４，６に示される前記両点間の目標間隔および硬質被覆層の目標全体層厚をインプットし、この反応ガス組成および流量中央制御装置からの信号にしたがって作動するコントロールバルブ内蔵の原料ガス流量自動制御装置を通して、原料ガスであるＨ2ガス、Ｎ2ガス、ＣＨ4ガス、ＴｉＣｌ4ガス、およびＺｒＣｌ4ガス（この場合、前記ＴｉＣｌ4ガスは図示の通り流量制御されたＨ2ガスをキャリアガスとしてＴｉＣｌ4ガス気化器に送り、ここで液体から気化されたＴｉＣｌ4と共に原料ガス流量自動制御装置に送られ、また前記ＺｒＣｌ4ガスは、ＺｒＣｌ4発生器で金属Ｚｒと流量制御されたＨＣｌガスを反応させることにより形成される）を、それぞれのガス流量を自動制御しながら、図１の化学蒸着装置の反応ガス吹き出し管から装置内に導入し（装置内の反応雰囲気圧力は常に７ｋＰａに保持される）、もって前記超硬基体の表面に、層厚方向に沿って表３，４に示される目標Ｚｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）のＺｒおよび炭素の最高含有点と、目標Ｔｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）のＴｉおよび窒素の最高含有点とが交互に同じく表３，４に示される目標間隔で繰り返し存在し、かつ前記Ｚｒおよび炭素の最高含有点から前記Ｔｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点から前記Ｚｒおよび炭素の最高含有点へＺｒとＴｉおよび炭素と窒素の含有量がそれぞれ連続的に変化する成分濃度分布構造を有し、かつ同じく表３，４に示される目標全体層厚の硬質被覆層を蒸着することにより、本発明被覆超硬工具としての本発明表面被覆超硬合金製スローアウエイチップ（以下、本発明被覆超硬チップと云う）１〜１６をそれぞれ製造した。
【００１７】
また、比較の目的で、上記の超硬基体Ａ１〜Ａ１０およびＢ１〜Ｂ６を、アセトン中で超音波洗浄し、乾燥した後、同じくそれぞれ図１，２に示される通常の化学蒸着装置に装入し、上記したＴｉＮ層形成条件と同じ条件で下地密着層として０．３μｍの平均層厚を有するＴｉＮ層を形成し、ついで反応雰囲気温度を１０２０℃に加熱した後、それぞれ表６，７に示される目標Ｚｒ／（Ｚｒ＋Ｔｉ）および目標炭素／（炭素＋窒素）に対応した組成の反応ガスを反応ガス吹き出し管から導入し、反応雰囲気圧力を７ｋＰａに一定とした条件で、前記超硬基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれの表面に、表６，７に示される目標組成および目標層厚を有し、かつ層厚方向に沿って実質的に組成変化のない（Ｚｒ，Ｔｉ）ＣＮ層からなる硬質被覆層を蒸着することにより、従来被覆超硬工具としての従来表面被覆超硬合金製スローアウエイチップ（以下、従来被覆超硬チップと云う）１〜１６をそれぞれ製造した。
【００１８】
つぎに、上記本発明被覆超硬チップ１〜１６および従来被覆超硬チップ１〜１６について、これを工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４１５の丸棒、
切削速度：３５０ｍ／ｍｉｎ．、
切り込み：５．０ｍｍ、
送り：０．３０ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件での合金鋼の乾式連続高速高切り込み切削加工試験、
被削材：ＪＩＳ・Ｓ２５Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：３８０ｍ／ｍｉｎ．、
切り込み：１．０ｍｍ、
送り：０．４５ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件での炭素鋼の乾式断続高速高送り切削加工試験、さらに、
被削材：ＪＩＳ・ＦＣ３００の長さ方向等間隔４本縦溝入り丸棒、
切削速度：４００ｍ／ｍｉｎ．、
切り込み：６．０ｍｍ、
送り：０．３０ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件での鋳鉄の乾式断続高速高切り込み切削加工試験を行い、いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表４〜７に示した。
【００１９】
【表１】
【表２】
【表３】
【表４】
【表５】
【表６】
【表７】
この結果得られた本発明被覆超硬チップ１〜１６および従来被覆超硬チップ１〜１６を構成する硬質被覆層について、厚さ方向に沿ってＺｒ、Ｔｉ、炭素、および窒素の含有量をオージェ分光分析装置を用いて測定し、この測定結果から各測定点におけるＺｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）値、さらにＴｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）値を算出したところ、本発明被覆超硬チップ１〜１６の硬質被覆層では、Ｚｒおよび炭素の最高含有点と、Ｔｉおよび窒素の最高含有点とがそれぞれ目標値と実質的に同じ組成および間隔で交互に繰り返し存在し、かつＺｒおよび炭素の最高含有点からＴｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点からＺｒおよび炭素の最高含有点へＺｒとＴｉおよび炭素と窒素の含有量が連続的に変化する成分濃度分布構造を有することが確認され、また、硬質被覆層の全体平均層厚も目標全体層厚と実質的に同じ値を示した。一方前記従来被覆超硬チップ１〜１６の硬質被覆層では厚さ方向に沿って組成変化が見られず、かつ目標組成と実質的に同じ組成および目標全体層厚と実質的に同じ全体平均層厚を示すことが確認された。
【００２７】
【発明の効果】
表３〜７に示される結果から、硬質被覆層が層厚方向に、相対的にすぐれた高硬度を有するＺｒおよび炭素の最高含有点と相対的に高強度を有するＴｉおよび窒素の最高含有点とが交互に所定間隔をおいて繰り返し存在し、かつ前記Ｚｒおよび炭素の最高含有点から前記Ｔｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点から前記Ｚｒおよび炭素の最高含有点へＺｒとＴｉおよび炭素と窒素の含有量が連続的に変化する成分濃度分布構造を有する本発明被覆超硬チップ１〜１６は、いずれも各種の鋼や鋳鉄などの切削加工を、高速で、かつ高い機械的衝撃を伴う高切り込みや高送りなどの重切削条件で行なった場合にも、硬質被覆層がすぐれた耐摩耗性および耐チッピング性を発揮するのに対して、硬質被覆層が層厚方向に沿って実質的に組成変化のない従来被覆超硬チップ１〜１６においては、特に高い機械的衝撃を伴う高速重切削条件では強度不足が原因でチッピングが発生し、硬さ不足と相俟って、比較的短時間で使用寿命に至ることが明らかである。
上述のように、この発明の被覆超硬工具は、通常の条件での切削加工は勿論のこと、特に各種の鋼や鋳鉄などの切削加工を、高速で、かつ高い機械的衝撃を伴う高切り込みや高送りなどの重切削条件で行なった場合にも、すぐれた耐摩耗性と耐チッピング性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。
【図面の簡単な説明】
【図１】被覆超硬工具を構成する硬質被覆層を形成するのに用いられている化学蒸着装置を例示する概略縦断面図である。
【図２】化学蒸着装置の構造部材である超硬基体支持パレットを示し、（ａ）が概略斜視図、（ｂ）が概略平面図である。
【図３】この発明の被覆超硬工具を構成する硬質被覆層の形成に用いられる反応ガス組成自動制御システムの概略チャート図である。[0001]
BACKGROUND OF THE INVENTION
In the present invention, the hard coating layer has both high hardness and high strength. Therefore, cutting of various steels and cast irons is performed under heavy cutting conditions such as high cutting and high feed with high mechanical impact particularly at high speed. The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a coated carbide tool) that exhibits excellent wear resistance when the hard coating layer does not cause chipping (microchips) or the like.
[0002]
[Prior art]
In general, coated carbide tools are used for throwaway inserts that are detachably attached to the tip of a cutting tool for drilling and cutting of various materials such as steel and cast iron, and for flat cutting. There are drills, miniature drills, solid type end mills used for chamfering, grooving, shoulder processing, etc. Also, the throwaway tip is detachably attached and cutting is performed in the same way as the solid type end mill Throwaway end mill tools are known.
[0003]
Further, as a coated carbide tool, a substrate made of tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet (hereinafter collectively referred to as a cemented carbide substrate). ) On the surface, in atomic ratio,
Zr / (Zr + Ti): 0.40 to 0.60,
Carbon / (carbon + nitrogen): 0.40 to 0.60,
A coated carbide tool formed by vapor-depositing a hard coating layer composed of a Zr and Ti composite carbonitride [hereinafter referred to as (Zr, Ti) CN] layer satisfying the following conditions is proposed: It is also known to exhibit excellent cutting performance when used for continuous cutting and intermittent cutting of various steels and cast iron (see, for example, Patent Document 1).
[0004]
Furthermore, as shown in the schematic longitudinal sectional view of FIG. 1, for example, the coated carbide tool has a stainless steel reaction gas blowing pipe standing at the center thereof. A graphite cemented carbide substrate support pallet illustrated in a schematic perspective view in (a) and a schematic plan view in (b) is skewered and laminated, and these are heated by a heater through a stainless steel cover. A chemical vapor deposition apparatus having a structure is used, and the cemented carbide substrate is mounted on the chemical vapor deposition apparatus in a state where the carbide substrate is placed as illustrated in a number of reaction gas passage hole positions formed on the bottom surface of the carbide substrate support pallet. Enter
Reaction gas composition (by volume%): ZrCl 4: 0.05~5% , TiCl 4: 0.1~6%, CH 3 CN: 0.6~5%, N 2: 0.5~40%, H 2 : Remaining
Reaction atmosphere temperature: 900-1050 ° C.
Reaction atmosphere pressure: 5 to 50 kPa,
It is also known that it is manufactured by forming a hard coating layer made of (Zr, Ti) CN under the conditions (see, for example, Patent Document 2).
[0005]
[Patent Document 1]
Japanese Patent Laid-Open No. 62-56564 [Patent Document 2]
Japanese Patent Laid-Open No. 2001-11632
[Problems to be solved by the invention]
In recent years, there has been a remarkable increase in performance of cutting devices. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting processing. Although there is a tendency to require cutting under heavy cutting conditions such as high feed, there is no problem when using the above conventional coated carbide tools under normal cutting conditions. When machining is performed at high speed and under heavy cutting conditions such as high cutting and high feed with high mechanical impact, the wear of the hard coating layer is further progressed due to insufficient strength and hardness of the hard coating layer. Since it promotes and chipping easily occurs, the service life is reached in a relatively short time.
[0007]
[Means for Solving the Problems]
In view of the above, the present inventors have developed the above-mentioned conventional coated carbide tool in order to develop a coated carbide tool that exhibits excellent wear resistance with a hard coating layer particularly under high-speed heavy cutting conditions. As a result of conducting research focusing on the hard coating layer that composes
(A) The (Zr, Ti) CN layer constituting the conventional coated carbide tool formed using the chemical vapor deposition apparatus shown in FIGS. 1 and 2 is substantially uniform over the entire thickness. In forming a (Zr, Ti) CN layer, which has a composition and thus a uniform hardness and strength, for example, the reaction gas composition automatic control system shown in FIG. In the central flow rate controller, the highest content point of Zr and carbon and the highest content point of Ti and nitrogen are alternately arranged at predetermined intervals along the layer thickness direction in the hard coating layer composed of the (Zr, Ti) CN layer. For the purpose of repeated formation, the reaction gas composition corresponding to the highest content point of Zr and carbon and the highest content point of Ti and nitrogen, and the reaction gas corresponding to the continuous change of Zr and carbon and Ti and nitrogen between the two points Formed, further wherein the entire layer thickness of the spacing and the hard coating layer between the two points, and inputs based on historical data, according to a control signal from the reaction gas composition and flow rates central controller, H from the raw material gas cylinder While controlling the flow rates of 2 gas, CH 4 gas, N 2 gas, and HCl gas, as well as the flow rates of ZrCl 4 gas and TiCl 4 gas with the respective raw material flow rate automatic control devices, When introduced, along the layer thickness direction, the highest content point of Zr and carbon and the highest content point of Ti and nitrogen are alternately present at predetermined intervals, and the highest content point of Zr and carbon from the highest content point of Zr and carbon. And the highest content point of nitrogen, the highest content point of Ti and nitrogen, and the highest content point of Zr and carbon. Manner and with varying component concentration distribution structure (Zr, Ti) to become that as hard coating layer consisting of CN layer is formed.
[0008]
(B) In the (Zr, Ti) CN layer having the repeated continuous change component concentration distribution structure of (a) above,
Zr / (Zr + Ti) and carbon / (carbon + nitrogen) indicating the mutual content ratio of Zr and Ti and carbon and nitrogen at the highest content point of Zr and carbon, respectively, in atomic ratio,
Zr / (Zr + Ti): 0.80 to 0.98,
Carbon / (carbon + nitrogen): 0.80 to 0.98,
Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) indicating the mutual content ratio of Ti and Zr and nitrogen and carbon at the highest content point of Ti and nitrogen, respectively, in atomic ratio,
Ti / (Ti + Zr): 0.80 to 0.98,
Nitrogen / (nitrogen + carbon): 0.80 to 0.98,
And the distance in the thickness direction between the highest content point of Zr and carbon adjacent to each other and the highest content point of Ti and nitrogen is 0.01 to 0.2 μm,
In the highest content point portion of Zr and carbon, Zr and carbon mainly occupy, and extremely high hardness is exhibited by the action of both components. On the other hand, in the highest content point portion of Ti and nitrogen, Ti and nitrogen are mainly contained. As a result of the action of these two components, high strength is exhibited, and the distance between the highest content point of Zr and carbon and the highest content point of Ti and nitrogen is extremely small. Therefore, coated carbide tools composed of a (Zr, Ti) CN layer with a hard coating layer can be used to cut various types of steel and cast iron, especially with high mechanical impact. Even when performed under high-speed heavy cutting conditions with high resistance, the hard coating layer has excellent wear resistance without chipping.
The research results shown in (a) and (b) above were obtained.
[0009]
The present invention has been made on the basis of the above research results, and a hard coating layer composed of a (Zr, Ti) CN layer is deposited on the surface of a cemented carbide substrate with an overall average layer thickness of 1 to 15 μm. In the coated carbide tool
In the hard coating layer, the highest content point of Zr and carbon and the highest content point of Ti and nitrogen are alternately present at predetermined intervals along the layer thickness direction, and the highest content point of Zr and carbon Has a component concentration distribution structure in which the contents of Zr, Ti, carbon and nitrogen continuously change from the highest content point of Ti and nitrogen to the highest content point of Zr and carbon from the highest content point of Ti and nitrogen. And
Furthermore, Zr / (Zr + Ti) and carbon / (carbon + nitrogen) indicating the mutual content ratio of Zr and Ti and carbon and nitrogen at the highest content point of Zr and carbon are atomic ratios, respectively.
Zr / (Zr + Ti): 0.80 to 0.98,
Carbon / (carbon + nitrogen): 0.80 to 0.98,
Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) indicating the mutual content ratio of Ti and Zr and nitrogen and carbon at the highest content point of Ti and nitrogen are atomic ratios, respectively.
Ti / (Ti + Zr): 0.80 to 0.98,
Nitrogen / (nitrogen + carbon): 0.80 to 0.98,
And the distance between the highest content point of Zr and carbon adjacent to each other and the highest content point of Ti and nitrogen is 0.01 to 0.2 μm.
It is characterized by a coated carbide tool that exhibits excellent wear resistance with a hard coating layer under high-speed heavy cutting conditions.
[0010]
Next, in the coated carbide tool of the present invention, the reason why the structure of the hard coating layer constituting the tool is limited as described above will be described.
(A) Maximum content point of Zr and carbon As described above, relatively high portions of Zr and carbon components are repeatedly formed along the thickness direction of the (Zr, Ti) CN layer which is a hard coating layer, and the layer itself It increases the hardness and also repeatedly forms relatively high portions of Ti and nitrogen components to improve the strength of the layer itself, and therefore the hardness is significantly improved at the highest Zr and carbon content points. Therefore, excellent wear resistance is exhibited. In this case, Zr / (Zr + Ti) and carbon / (carbon + nitrogen) indicating the mutual content ratio of Zr and Ti and carbon and nitrogen are both in atomic ratio. When the value exceeds 0.98 (hereinafter the same), since it is substantially composed of Zr and carbon, a decrease in strength is inevitable, and the highest content points of Ti and nitrogen having high strength are adjacent to each other. High even if present In high-speed heavy cutting with mechanical impact, chipping is likely to occur. On the other hand, when the value is less than 0.80, the hardness decreases rapidly and the wear of the layer itself is promoted. The values of (Zr + Ti) and carbon / (carbon + nitrogen) were both set to 0.80 to 0.98.
[0011]
(B) Maximum content point of Ti and nitrogen As described above, the maximum content point of Zr and carbon has relatively excellent hardness, but on the other hand, since the strength is relatively insufficient, In order to compensate for insufficient strength of the content points, the highest content points of Ti and nitrogen having high strength are alternately interposed in the thickness direction. However, when Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon), which indicate the mutual content ratio of Ti and Zr and nitrogen and carbon, exceed 0.98, respectively, it is substantially composed of Ti and nitrogen. Therefore, it is not possible to ensure a predetermined hardness at the highest content point of Ti and nitrogen, this causes the acceleration of wear, on the other hand, if both are less than 0.80, a rapid decrease in strength occurs, As a result, since chipping is likely to occur, the values of Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) were both set to 0.80 to 0.98.
[0012]
(C) Interval between the highest content point of Zr and carbon and the highest content point of Ti and nitrogen If the distance is less than 0.01 μm, it is difficult to clearly form each point with the above composition. In addition, the desired excellent hardness and strength cannot be ensured, and if the distance exceeds 0.2 μm, the disadvantages of the respective points, that is, if the maximum content of Zr and carbon is insufficient, the strength is insufficient. In addition, if the content of nitrogen is the highest, a shortage of hardness appears locally in the layer, which may cause chipping easily or promote wear progress. It was set to -0.2 micrometer.
[0013]
(D) Overall average layer thickness of hard coating layer If the layer thickness is less than 1 μm, desired wear resistance cannot be ensured. On the other hand, if the average layer thickness exceeds 15 μm, chipping tends to occur. Therefore, the average layer thickness was determined to be 1 to 15 μm.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Next, the coated carbide tool of the present invention will be specifically described with reference to examples.
As raw material powder, a coarse WC powder having an average particle size of 6.5 μm, a medium WC powder having the same 3.5 μm, a fine WC powder having the same 0.8 μm, a TaC powder having the same 1.3 μm, and 1.2 μm being the same. NbC powder, 1.2 μm ZrC powder, 2.3 μm Cr 3 C 2 powder, 1.0 μm (Ti, W) CN (by mass ratio, TiC / TiN / WC = 24/20/56) ) Powder and Co powder of 1.8 μm were prepared, and each of these raw material powders was blended in the blending composition shown in Table 1, mixed in a ball mill for 72 hours, dried under reduced pressure, and then compacted at a pressure of 100 MPa. In this case, the green compact is formed into a vacuum at 13.3 Pa for the one having a Co-enriched layer on the surface and 6.7 Pa for one having a uniform structure throughout, and the temperature: 1430 Baked at ℃ for 1 hour And, after sintering, R the cutting edge portion: forming a WC-based cemented carbide superhard substrate A1~A10 having a tip shape of ISO standard · CNMG160612 subjected to honing of 0.08. In addition, formation of Co-enriched layers was observed on the surface portions of the carbide substrates A-1, A-3, A-4, A-6, A-7, and A-9.
[0015]
In addition, as raw material powders, all are TiCN (weight ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a carbon atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour. After sintering, the cutting edge portion was subjected to a honing process of R: 0.10, and ISO standard / CNMG160612. TiCN-based cermet carbide substrates B1 to B6 having the following chip shape were formed.
[0016]
Next, each of the above-mentioned carbide substrates A1 to A10 and B1 to B6 is ultrasonically cleaned in acetone and dried, and then the carbide shown in FIG. 2 is placed in the chemical vapor deposition apparatus shown in FIG. First, when the inside of the apparatus was heated to 900 ° C. with a heater, it was loaded with TiCl 4 : 4.2%, N 2 : 30%, H 2 : remaining. A reaction gas having a composition is introduced through a reaction gas blowing tube, the reaction atmosphere pressure in the apparatus is set to 30 kPa, and this state is maintained for 20 minutes, and an average layer of 0.3 μm is formed on the surface of the cemented carbide substrate as a base adhesion layer. After forming a titanium nitride (TiN) layer having a thickness and then heating the atmospheric temperature in the apparatus to 1020 ° C. with a heater, the reaction gas composition of the reaction gas composition automatic control system shown in FIG. and In accordance with the data in the past results, the target Zr / (Zr + Ti) and carbon / (carbon + nitrogen), and the maximum content point of Ti and nitrogen shown in Table 3 Reaction gas composition corresponding to target Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon), Zr and Ti and carbon and nitrogen contents between the highest content point of Zr and carbon and the highest content point of Ti and nitrogen The reaction gas composition corresponding to the continuous change of the gas, the target distance between the two points shown in Tables 4 and 6, and the target total layer thickness of the hard coating layer are input, and the reaction gas composition and the signal from the central flow controller are input. The raw material gas H 2 gas, N 2 gas, CH 4 gas, TiCl 4 gas, and Z are fed through the automatic control device for the raw material gas flow rate that operates according to rCl 4 gas (in this case, the TiCl 4 gas is sent to a TiCl 4 gas vaporizer using a H 2 gas whose flow rate is controlled as shown in the figure as a carrier gas, and together with TiCl 4 vaporized from the liquid, a raw material gas flow rate automatic control device The ZrCl 4 gas is formed by reacting metal Zr with HCl gas whose flow rate is controlled by a ZrCl 4 generator), while automatically controlling the respective gas flow rates. The reaction gas was introduced into the apparatus from the reaction gas blowing pipe of the vapor deposition apparatus (the reaction atmosphere pressure in the apparatus is always maintained at 7 kPa), so that the surface of the carbide substrate is shown in Tables 3 and 4 along the layer thickness direction. Target Zr / (Zr + Ti) and carbon / (carbon + nitrogen) Zr and carbon maximum content points, target Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) Ti and nitrogen And the highest content point of Ti and nitrogen from the highest content point of Zr and carbon to the highest content point of Ti and nitrogen. Having a component concentration distribution structure in which the contents of Zr, Ti, and carbon and nitrogen continuously change from the maximum content point of Zr and carbon to the highest content point of Zr and carbon, respectively, By depositing a coating layer, throwaway tips (hereinafter referred to as the present invention coated carbide tips) 1 to 16 made of the present surface coated cemented carbide as the present invention coated carbide tools were produced.
[0017]
Further, for the purpose of comparison, the above-mentioned carbide substrates A1 to A10 and B1 to B6 are ultrasonically cleaned in acetone and dried, and then charged into ordinary chemical vapor deposition apparatuses shown in FIGS. Then, a TiN layer having an average layer thickness of 0.3 μm was formed as a base adhesion layer under the same conditions as the TiN layer formation conditions described above, and then the reaction atmosphere temperature was heated to 1020 ° C. Under the conditions that the reaction gas having a composition corresponding to the target Zr / (Zr + Ti) and the target carbon / (carbon + nitrogen) is introduced from the reaction gas blowing tube and the reaction atmosphere pressure is kept constant at 7 kPa, From each surface of A10 and B1 to B6, from the (Zr, Ti) CN layer having the target composition and the target layer thickness shown in Tables 6 and 7, and substantially no composition change along the layer thickness direction. Become By depositing the quality coating layer, conventional coating conventional surface-coated cemented carbide indexable as cemented carbide (hereinafter, conventional coating called carbide inserts) were 1-16 were prepared, respectively.
[0018]
Next, with the present invention coated carbide tips 1-16 and conventional coated carbide tips 1-16, in a state where this is screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SCM415 round bar,
Cutting speed: 350 m / min. ,
Cutting depth: 5.0mm,
Feed: 0.30 mm / rev. ,
Cutting time: 10 minutes,
Dry-type continuous high-speed high-cut cutting test of alloy steel under the conditions of
Work material: JIS-S25C round bar with four equal grooves in the longitudinal direction,
Cutting speed: 380 m / min. ,
Cutting depth: 1.0 mm,
Feed: 0.45 mm / rev. ,
Cutting time: 10 minutes,
Dry intermittent high-speed high-feed cutting test of carbon steel under the conditions of
Work material: JIS / FC300 lengthwise equidistant 4 bars with vertical grooves,
Cutting speed: 400 m / min. ,
Cutting depth: 6.0 mm,
Feed: 0.30 mm / rev. ,
Cutting time: 10 minutes,
A dry interrupted high-speed high-cut cutting test of cast iron was performed under the conditions described above, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Tables 4-7.
[0019]
[Table 1]
[Table 2]
[Table 3]
[Table 4]
[Table 5]
[Table 6]
[Table 7]
For the hard coating layers constituting the coated carbide chips 1 to 16 of the present invention and the conventional coated carbide chips 1 to 16 obtained as a result, the contents of Zr, Ti, carbon, and nitrogen along the thickness direction were Auger. Measurement was performed using a spectroscopic analyzer, and Zr / (Zr + Ti) and carbon / (carbon + nitrogen) values at each measurement point, and Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) values were calculated from the measurement results. However, in the hard coating layers of the coated carbide chips 1 to 16 of the present invention, the highest content point of Zr and carbon and the highest content point of Ti and nitrogen are alternately repeated at substantially the same composition and interval as the target values, respectively. Zr, Ti, and carbon from the highest content point of Zr and carbon to the highest content point of Ti and nitrogen, and from the highest content point of Ti and nitrogen to the highest content point of Zr and carbon It is confirmed that the content of nitrogen has a continuously changing component concentration distribution structure, also showing the overall mean layer thickness even entire target layer thickness substantially the same value of the hard layer. On the other hand, in the hard coating layers of the conventional coated carbide chips 1 to 16, no composition change is observed along the thickness direction, and the composition is substantially the same as the target composition and the overall average layer thickness is substantially the same as the target overall layer thickness. It was confirmed to show thickness.
[0027]
【The invention's effect】
From the results shown in Tables 3 to 7, the hard coating layer has, in the layer thickness direction, the highest content point of Zr and carbon having relatively high hardness and the highest content point of Ti and nitrogen having relatively high strength. Are alternately present at predetermined intervals, and from the highest content point of Zr and carbon to the highest content point of Ti and nitrogen, and from the highest content point of Ti and nitrogen to the highest content point of Zr and carbon The coated carbide chips 1 to 16 of the present invention having a component concentration distribution structure in which the contents of Zr and Ti and carbon and nitrogen continuously change are all capable of cutting various steels and cast irons at high speed. The hard coating layer exhibits excellent wear resistance and chipping resistance even under heavy cutting conditions such as high cutting with high mechanical impact and high feed, while the hard coating layer has a layer thickness. Along the direction In the conventional coated carbide chips 1 to 16 having substantially no composition change, chipping occurs due to insufficient strength especially under high-speed heavy cutting conditions with high mechanical impact. It is clear that the service life is reached in a short time.
As described above, the coated carbide tool of the present invention is capable of cutting various steels and cast irons as well as cutting under normal conditions at high speed and with high mechanical impact. Even under heavy cutting conditions such as high feed and high feed, it exhibits excellent wear resistance and chipping resistance and exhibits excellent cutting performance over a long period of time. It is possible to cope with the reduction of cost and cost.
[Brief description of the drawings]
FIG. 1 is a schematic longitudinal sectional view illustrating a chemical vapor deposition apparatus used for forming a hard coating layer constituting a coated carbide tool.
2A and 2B show a cemented carbide substrate support pallet that is a structural member of a chemical vapor deposition apparatus, in which FIG. 2A is a schematic perspective view, and FIG. 2B is a schematic plan view.
FIG. 3 is a schematic chart of a reaction gas composition automatic control system used for forming a hard coating layer constituting the coated carbide tool of the present invention.
Claims (1)
上記硬質被覆層が、層厚方向にそって、Ｚｒおよび炭素の最高含有点とＴｉおよび窒素の最高含有点とが所定間隔をおいて交互に繰り返し存在し、かつ前記Ｚｒおよび炭素の最高含有点から前記Ｔｉおよび窒素の最高含有点、前記Ｔｉおよび窒素の最高含有点から前記Ｚｒおよび炭素の最高含有点へＺｒとＴｉおよび炭素と窒素の含有量が連続的に変化する成分濃度分布構造を有し、
さらに、上記Ｚｒおよび炭素の最高含有点におけるＺｒとＴｉおよび炭素と窒素の相互含有割合を示すＺｒ／（Ｚｒ＋Ｔｉ）および炭素／（炭素＋窒素）が、それぞれ原子比で、
Ｚｒ／（Ｚｒ＋Ｔｉ）：０．８０〜０．９８、
炭素／（炭素＋窒素）：０．８０〜０．９８、
上記Ｔｉおよび窒素の最高含有点におけるＴｉとＺｒおよび窒素と炭素の相互含有割合を示すＴｉ／（Ｔｉ＋Ｚｒ）および窒素／（窒素＋炭素）が、それぞれ原子比で、
Ｔｉ／（Ｔｉ＋Ｚｒ）：０．８０〜０．９８、
窒素／（窒素＋炭素）：０．８０〜０．９８、
を満足し、かつ隣り合う上記Ｚｒおよび炭素の最高含有点と上記Ｔｉおよび窒素の最高含有点の間隔が、０．０１〜０．２μmであること、
を特徴とする高速重切削条件で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具。Surface-coated carbide formed by vapor-depositing a hard coating layer composed of a composite carbonitride layer of Zr and Ti on the surface of a tungsten carbide-based cemented carbide substrate or a titanium carbonitride cermet substrate with an overall average layer thickness of 1 to 15 μm. In alloy cutting tools,
In the hard coating layer, the highest content point of Zr and carbon and the highest content point of Ti and nitrogen are alternately present at predetermined intervals along the layer thickness direction, and the highest content point of Zr and carbon Has a component concentration distribution structure in which the contents of Zr, Ti, carbon and nitrogen continuously change from the highest content point of Ti and nitrogen to the highest content point of Zr and carbon from the highest content point of Ti and nitrogen. And
Furthermore, Zr / (Zr + Ti) and carbon / (carbon + nitrogen) indicating the mutual content ratio of Zr and Ti and carbon and nitrogen at the highest content point of Zr and carbon are atomic ratios, respectively.
Zr / (Zr + Ti): 0.80 to 0.98,
Carbon / (carbon + nitrogen): 0.80 to 0.98,
Ti / (Ti + Zr) and nitrogen / (nitrogen + carbon) indicating the mutual content ratio of Ti and Zr and nitrogen and carbon at the highest content point of Ti and nitrogen are atomic ratios, respectively.
Ti / (Ti + Zr): 0.80 to 0.98,
Nitrogen / (nitrogen + carbon): 0.80 to 0.98,
And the interval between the highest content point of Zr and carbon adjacent to each other and the highest content point of Ti and nitrogen is 0.01 to 0.2 μm,
A surface-coated cemented carbide cutting tool that exhibits excellent wear resistance under high-speed heavy cutting conditions.
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