JP3884112B2 - 光半導体装置及びその製造方法 - Google Patents

光半導体装置及びその製造方法 Download PDF

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Publication number
JP3884112B2
JP3884112B2 JP28419296A JP28419296A JP3884112B2 JP 3884112 B2 JP3884112 B2 JP 3884112B2 JP 28419296 A JP28419296 A JP 28419296A JP 28419296 A JP28419296 A JP 28419296A JP 3884112 B2 JP3884112 B2 JP 3884112B2
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Japan
Prior art keywords
light emitting
semiconductor device
light
emitting element
optical semiconductor
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Expired - Fee Related
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JP28419296A
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English (en)
Japanese (ja)
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JPH10132558A (ja
JPH10132558A5 (enExample
Inventor
博志 宮島
正孝 伊藤
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Olympus Corp
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Olympus Corp
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Priority to JP28419296A priority Critical patent/JP3884112B2/ja
Publication of JPH10132558A publication Critical patent/JPH10132558A/ja
Publication of JPH10132558A5 publication Critical patent/JPH10132558A5/ja
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Publication of JP3884112B2 publication Critical patent/JP3884112B2/ja
Anticipated expiration legal-status Critical
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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP28419296A 1996-10-25 1996-10-25 光半導体装置及びその製造方法 Expired - Fee Related JP3884112B2 (ja)

Priority Applications (1)

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JP28419296A JP3884112B2 (ja) 1996-10-25 1996-10-25 光半導体装置及びその製造方法

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Application Number Priority Date Filing Date Title
JP28419296A JP3884112B2 (ja) 1996-10-25 1996-10-25 光半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JPH10132558A JPH10132558A (ja) 1998-05-22
JPH10132558A5 JPH10132558A5 (enExample) 2004-10-07
JP3884112B2 true JP3884112B2 (ja) 2007-02-21

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JP28419296A Expired - Fee Related JP3884112B2 (ja) 1996-10-25 1996-10-25 光半導体装置及びその製造方法

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963809C2 (de) * 1999-12-30 2002-01-17 Osram Opto Semiconductors Gmbh Optischer Encoder mit dreifacher Photodiode
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
JP5029079B2 (ja) 2007-03-15 2012-09-19 富士ゼロックス株式会社 半導体素子および光学装置
JP5253138B2 (ja) * 2008-12-24 2013-07-31 オリンパス株式会社 光学式エンコーダ
JP5580676B2 (ja) * 2010-07-14 2014-08-27 オリンパス株式会社 光学式センサ
JP5962884B2 (ja) * 2011-12-20 2016-08-03 株式会社安川電機 エンコーダ及びサーボモータ
WO2016043052A1 (ja) * 2014-09-16 2016-03-24 株式会社村田製作所 光センサモジュール及びその製造方法
JP2018179501A (ja) * 2017-04-03 2018-11-15 日本精工株式会社 近接覚センサ
KR102515244B1 (ko) * 2021-04-29 2023-03-29 주식회사 라이팩 광 센서 패키지 제조 방법 및 광 센서 패키지

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JPH10132558A (ja) 1998-05-22

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