JP3860746B2 - Multilayer piezoelectric element and injection device - Google Patents

Multilayer piezoelectric element and injection device Download PDF

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Publication number
JP3860746B2
JP3860746B2 JP2001393083A JP2001393083A JP3860746B2 JP 3860746 B2 JP3860746 B2 JP 3860746B2 JP 2001393083 A JP2001393083 A JP 2001393083A JP 2001393083 A JP2001393083 A JP 2001393083A JP 3860746 B2 JP3860746 B2 JP 3860746B2
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JP2003197991A (en
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進 小野
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京セラ株式会社
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Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a laminated piezoelectric element and an injection device used for a precision positioning device such as a fuel injection valve for an automobile and an optical device, a drive element for vibration prevention, and the like.
[0002]
[Prior art]
Conventionally, in order to obtain a large amount of displacement using the electrostrictive effect, multilayer piezoelectric elements in which piezoelectric bodies and internal electrodes are alternately stacked have been proposed. Multilayer piezoelectric elements are classified into two types: simultaneous firing type and stack type in which piezoelectric ceramics and internal electrode plates are alternately laminated. Since the multilayer piezoelectric element is advantageous for thinning, its superiority is being shown.
[0003]
Conventionally, the co-fired multilayer piezoelectric element has conventionally been made by first placing the green sheet on the upper and lower surfaces of an active part molded body in which green sheets containing piezoelectric materials and internal electrode patterns containing internal electrode materials are alternately laminated. An element body molded body in which a plurality of inactive part molded bodies formed by laminating is laminated is manufactured. In the end portion of the internal electrode pattern exposed on the side surface of the element body molded body, the concave grooves are alternately formed, and the end portions of the internal electrode pattern are alternately exposed on the opposite side surface of the element body molded body, An insulator is filled in the concave groove and baked to produce an element body.
[0004]
Thereafter, a paste containing metal powder and glass frit is applied and baked on the side surface of the element body where the internal electrodes are alternately exposed and on the side surface of the inactive portion, and the external electrodes alternately connected to the internal electrodes are connected to the element body. To the side surfaces (side surfaces of the active portion and the inactive portion).
[0005]
This external electrode is formed by diffusing and joining the metal powder constituting the external electrode and the internal electrode material, and diffusing Si in the glass frit constituting the external electrode into the active part piezoelectric body and the inactive part. It was joined to the element body.
[0006]
[Problems to be solved by the invention]
However, in the conventional multilayer piezoelectric element, since there is no internal electrode in the inactive part, Si in the glass frit constituting the external electrode diffuses into the inactive part when joining the inactive part to the external electrode. The bonding strength between the external electrode and the inactive portion is weaker than the bonding strength between the external electrode and the active portion, and peeling occurs from the inactive portion side end of the external electrode during driving. There was a problem that it was easy to do.
[0007]
That is, when the stacked piezoelectric element is driven, the active portion is displaced by the reverse piezoelectric effect, but the inactive portion is not displaced by the reverse piezoelectric effect, so that stress is applied in the vicinity of the boundary between the active portion and the inactive portion. Separation occurs from the edge of the external electrode, which is concentrated and weak in bonding strength, that is, the inactive part side end of the external electrode, and the active part and the external electrode are separated from this as the starting point. There was a problem that the connection was cut and the characteristics deteriorated.
[0008]
In addition, it is conceivable that Si in the glass frit in the external electrode is increased, and Si in the external electrode is diffused in a large amount in the active part or the inactive part. There has been a problem that the surface of the piezoelectric body to which the external electrode is bonded is embrittled and the bonding strength of the external electrode is decreased. In particular, there is a problem that the bonding strength between the inactive portion where no internal electrode is present and the external electrode is significantly reduced.
[0009]
The multilayer piezoelectric element of the present invention solves the above-mentioned problems, can prevent peeling of the external electrode from the end portion on the inactive portion side, has excellent durability and high reliability. It aims at providing a body element and an injection device.
[0010]
[Means for Solving the Problems]
The multilayer piezoelectric element of the present invention includes a plurality of piezoelectric bodies and a plurality of internal electrodes that are alternately stacked , an active portion that is displaced, and an inactive portion that is provided at both ends of the active portion in the stacking direction and is not displaced. A laminated piezoelectric element comprising: an element body comprising: a pair of external electrodes joined to side surfaces of the element body; and the internal electrodes are alternately connected to each other, wherein the external electrode, the inactive portion, Si bonding strength is, the much larger than the bonding strength between the external electrode and the active portion, and the external electrodes, and having a glass containing Si, Si content of the inert portion of the active portion than the content, wherein the multi Ikoto.
[0011]
In such a multilayered piezoelectric element, the bonding strength between the external electrode and the inactive portion is greater than the bonding strength between the external electrode and the active portion, and therefore the external electrode is peeled off from the inactive portion end due to stress during driving. Can be prevented and durability and reliability can be improved.
[0012]
Further, in the present invention, the external electrodes, and having a glass containing Si, the Si content of the inert portion is of larger than Si content of active part. Si in the external electrode diffuses from the external electrode forming surface of the element body to the inside during the heat treatment, but by adding more Si to the inactive part than in the active part, the active part and the external electrode are joined. Although the strength does not change, the glass frit Si in the external electrode is less likely to diffuse into the inactive part than the active part, the diffusion distance of Si into the inactive part becomes shorter, and the inactive part and the external electrode Although the effect of improving the bonding strength due to the diffusion of Si decreases, the embrittlement of the side surface of the inactive portion can be suppressed, and the decrease in the bonding strength due to this can be remarkably suppressed. The bonding strength is significantly improved and can be made larger than the bonding strength between the active portion and the external electrode.
[0013]
On the other hand, since it is not necessary to increase the amount of Si contained in the external electrode, it is possible to minimize weakening of the active electrode forming surface of the active part and the inactive part.
[0014]
Si in the external electrode is determined to have the highest bonding strength from the viewpoint of weakening of the side surface of the element body due to Si diffusion and improvement of the bonding strength. In this case, however, a decrease in bonding strength due to weakening of the element body is inevitable. . In the present invention, Si is preliminarily contained in the inactive part to minimize the diffusion of Si into the inactive part, minimize the weakening of the side surface of the inactive part, and improve the bonding strength than before. be able to. On the other hand, if Si is contained in advance in the piezoelectric body, the piezoelectric characteristics are deteriorated, which is not preferable.
[0015]
An injection device of the present invention includes a storage container having an injection hole, the stacked piezoelectric element stored in the storage container, and a valve for ejecting liquid from the injection hole by driving the stacked piezoelectric element. It is made.
[0016]
In the injection device of the present invention, since peeling from the end portion of the external electrode in the multilayer piezoelectric element can be suppressed, durability and reliability can be improved as the injection device.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1A is a perspective view showing an embodiment of a multilayer piezoelectric element comprising the multilayer piezoelectric actuator of the present invention, and FIG. 1B is a longitudinal sectional view taken along line AA ′ of FIG. .
[0018]
As shown in FIG. 1, the multilayer piezoelectric actuator of the present invention is provided on an active portion 8 in which a plurality of piezoelectric bodies 1 and a plurality of internal electrodes 2 are alternately stacked, and on the outer side of the active portion 8 in the stacking direction. Further, the element main body 3 having a quadrangular prism shape composed of the inactive portion 9 is provided.
[0019]
The end portions of the internal electrodes 2 are exposed on the opposite side surfaces (external electrode forming surfaces) of the element body 3, and conductive portions 4a are formed on the exposed portions of the internal electrodes 2, respectively. The metal plate 4b is joined to the part 4a, and the external electrode 4 is configured.
[0020]
Thereby, the internal electrodes 2 are electrically connected to the respective external electrodes 4 every other layer, while the ends of the internal electrodes 2 not connected to the external electrodes 4 are covered with the insulator 10. . Furthermore, a lead wire 16 is connected and fixed to the external electrode 4 with solder or the like.
[0021]
As the piezoelectric body 1, for example, lead zirconate titanate Pb (Zr, Ti) O 3 (hereinafter abbreviated as PZT) or a piezoelectric ceramic material mainly composed of barium titanate BaTiO 3 is used. It is not limited, and any ceramics having piezoelectricity may be used. As the piezoelectric material, as the piezoelectric strain constant d 33 it is high is preferable.
[0022]
The thickness of the piezoelectric body 1, that is, the distance between the internal electrodes 2, is preferably 0.05 to 0.25 mm from the viewpoint of downsizing and applying a high electric field. In order to obtain a larger amount of displacement by applying a voltage to the stacked piezoelectric element, a method of increasing the number of stacked layers is used, but when the number of stacked layers is increased, the piezoelectric body 1 in the active portion 8 is increased. This is because if the thickness is too large, the actuator cannot be reduced in size and height, and if the thickness of the piezoelectric body 1 in the active portion 8 is too thin, dielectric breakdown tends to occur.
[0023]
In addition, a groove having a depth of 50 to 500 μm and a width of 30 to 200 μm in the stacking direction is formed on the surface of the element body 3 on the side of the active portion 8 where the external electrode 4 is formed. The insulator 10 is formed by being filled with polyimide resin, polyamideimide resin, silicone rubber, or the like. In this way, the end portions of the internal electrode 2 are insulated by the insulators 10 alternately filled in the groove every other layer, and the other end portion of the internal electrode 2 that is not insulated is connected to the metal plate via the conductive portion 4a. It is connected.
[0024]
The conductive portion 4 a needs to contain silver or an alloy containing silver as a main component for bonding by diffusion bonding with the internal electrode 2 and a glass component for bonding by diffusion bonding with the piezoelectric body 1. In order to provide conductivity as the external electrode 4, it is desirable that silver or an alloy containing silver as a main component is 40 to 90% by volume in the total amount of the external electrode 4.
[0025]
The thickness t of the metal plate 4b constituting the external electrode 4 follows the expansion and contraction of the actuator, and no disconnection occurs between the metal plate 4b and the conductive portion 4a or between the conductive portion 4a and the internal electrode 2. Therefore, it is desirable that it is 50 μm or less.
[0026]
The plate-like metal plate 4b is made of a metal having conductivity such as silver, nickel, copper, gold, and aluminum, and an alloy thereof. Among these, the bonding strength with the conductive portion 4a is strong, and the Young's modulus is high. From the viewpoint of low, silver or an alloy containing silver as a main component is desirable.
[0027]
The insulator 10 is preferably made of a material having a low elastic modulus that follows the displacement of the element body 3, specifically, silicone rubber or the like in order to strengthen the bonding with the element body 3. .
[0028]
A metal plate 4b is connected and fixed to at least one side surface of the element body 3 via a conductive portion 4a, and the stacked internal electrodes 2 are electrically connected to the external electrode 4 every other layer. ing. The metal plate 4b serves to supply in common a voltage necessary for displacing the piezoelectric body 1 by the inverse piezoelectric effect to each internal electrode 2 in the active portion 8 connected thereto.
[0029]
Further, the lead wire 16 is connected and fixed to the external electrode 4 by soldering. The lead wire 16 serves to connect the external electrode 4 to an external voltage supply unit.
[0030]
In the present invention, the bonding strength between the external electrode 4 and the inactive portion 9 is equal to or higher than the bonding strength between the external electrode 4 and the active portion 8. That is, when the bonding strength between the external electrode 4 and the inactive portion 9 is set to be equal to or higher than the bonding strength between the external electrode 4 and the active portion 8, it occurs near the boundary between the active portion 8 and the inactive portion 9 during driving. It is possible to prevent the peeling from the end portion of the external electrode 4 due to the stress to be applied, and high reliability can be obtained.
[0031]
In the present invention, it is desirable that the inactive portion 9 contains more Si than the active portion 8. This is because the inactive portion 9 contains more Si than the active portion 8, thereby reducing the distance of the concentration gradient of diffusion of the Si into the inactive portion 9 in the external electrode 4, due to excessive diffusion of Si. This is because a decrease in the bonding strength due to embrittlement of the piezoelectric body of the inactive portion 9 is prevented, and the bonding strength between the external electrode 4 and the inactive portion 9 is improved. Note that the Si content in the inactive portion 9 prevents the decrease in strength of the piezoelectric body 1 due to the diffusion of Si, and is 0.1-3 of the piezoelectric ceramic constituting the inactive portion 9 in terms of SiO 2. % By weight is desirable. In particular, it is preferably 0.1 to 1% by weight from the viewpoint of reducing the Si diffusion distance and improving the bonding strength.
[0032]
The multi-layer piezoelectric element configured as described above is manufactured by the following process. First, a slurry is prepared by mixing a calcined powder of a piezoelectric ceramic such as lead zirconate titanate Pb (Zr, Ti) O 3 , a binder made of an organic polymer, and a plasticizer, and by a slip casting method, A ceramic green sheet having a thickness of 50 to 250 μm is prepared.
[0033]
A conductive paste mainly composed of silver-palladium serving as the internal electrode 2 is printed on one side of the green sheet to a thickness of 1 to 10 μm by screen printing. After the conductive paste is dried, a predetermined number of green sheets coated with the conductive paste are stacked to form an active part molded body of the active part 8.
[0034]
Separately, a predetermined amount of SiO 2 , calcined powder of piezoelectric ceramics such as lead zirconate titanate Pb (Zr, Ti) O 3 , a binder made of an organic polymer, and a plasticizer were mixed. A slurry is prepared, and a ceramic green sheet having a thickness of 50 to 250 μm is prepared by a slip casting method.
[0035]
A predetermined number of the green sheets are laminated at both ends in the lamination direction of the active part molded body, and the inactive part molded body is laminated.
[0036]
Next, pressure is applied while heating the laminated body at 50 to 200 ° C. to integrate the laminated body. After the integrated laminate is cut to a predetermined size, the binder is removed at 400 to 800 ° C. for 5 to 40 hours, and main firing is performed at 900 to 1200 ° C. for 2 to 5 hours. A laminated sintered body to be the main body 3 is obtained. The end of the internal electrode 2 is exposed on the side surface of the element body 3.
[0037]
Thereafter, a groove is formed in every other layer on the side surface of the element body 3 where the external electrode 4 is formed by a dicing apparatus or the like. A silver glass paste made of silver powder and Pb-Si-based or B-Si-based glass powder is interposed between the side surface of the element body 3 in which the concave grooves are formed and the metal plate 4b. Then, Si in the silver glass paste is transferred to the piezoelectric body 1 and the inactive portion 9 of the active portion 8 by heat-treating the metal plate 4b and the element main body 3 at a pressure of 2 to 80 kPa at 500 to 900 ° C. In addition, the silver in the silver glass paste diffuses to the internal electrode 2, and a conductive portion 4a is formed on the side surface of the element body 3, and a metal plate 4b made of a plate-like conductive member is formed on the conductive portion 4a. Are joined.
[0038]
Thereafter, the lead wire 16 is connected to the external electrode 4 and the outer peripheral surface of the element is coated with an exterior resin by a method such as dipping by vacuum defoaming, and then a polarization voltage of 0.1 to 3 kV is applied to the entire element. Is subjected to polarization treatment to obtain a final laminated piezoelectric element.
[0039]
In the multilayer piezoelectric actuator configured as described above, the bonding strength between the external electrode 4 and the inactive portion 9 is greater than the bonding strength between the external electrode 4 and the active portion 8, and the actuator is driven. In this case, it is possible to prevent peeling of the external electrode 4 from the end of the inactive part due to stress generated near the boundary between the active part 8 and the inactive part 9, and to provide a highly reliable actuator. it can.
[0040]
The multilayer piezoelectric element of the present invention may be any column body such as a quadrangular column, a hexagonal column, or a cylinder, but a quadrangular column shape is desirable for ease of cutting.
[0041]
Moreover, although the metal plate 4b is used as the external electrode 4, the same effect can be obtained even if it is formed only by a paste.
[0042]
FIG. 2 shows an injection device according to the present invention. In the figure, reference numeral 31 denotes a storage container. An injection hole 33 is provided at one end of the storage container 31, and a needle valve 35 that can open and close the injection hole 33 is stored in the storage container 31.
[0043]
A fuel passage 37 is provided in the injection hole 33 so as to be able to communicate. The fuel passage 37 is connected to an external fuel supply source, and fuel is always supplied to the fuel passage 37 at a constant high pressure. Therefore, when the needle valve 35 opens the injection hole 33, the fuel supplied to the fuel passage 37 is formed to be injected into a fuel chamber (not shown) of the internal combustion engine at a constant high pressure.
[0044]
Further, the upper end portion of the needle valve 35 has a large diameter, and serves as a piston 41 slidable with a cylinder 39 formed in the storage container 31. In the storage container 31, the piezoelectric actuator 43 described above is stored.
[0045]
In such an injection device, when the piezoelectric actuator 43 is extended by applying a voltage, the piston 41 is pressed, the needle valve 35 closes the injection hole 33, and the supply of fuel is stopped. When the application of voltage is stopped, the piezoelectric actuator 43 contracts, the disc spring 45 pushes back the piston 41, and the injection hole 33 communicates with the fuel passage 37 so that fuel is injected.
[0046]
【Example】
Example 1
A slurry is prepared by mixing a calcined powder of piezoelectric ceramic such as lead zirconate titanate Pb (Zr, Ti) O 3 , a binder made of an organic polymer, and a plasticizer, and a thickness of 150 μm is obtained by a slip casting method. A ceramic green sheet was prepared.
[0047]
A conductive paste mainly composed of silver-palladium serving as an internal electrode is printed on one side of the green sheet to a thickness of 5 μm by a screen printing method, and the conductive paste is dried. 100 green sheets were laminated to produce an active part molded body.
[0048]
On the other hand, a predetermined amount of SiO 2 is added to the slurry, ceramic green sheets are produced by a slip casting method, 10 ceramic green sheets are laminated at both ends in the laminating direction of the active part molded body, and active body molding is performed. An inactive part molded body was formed on both end faces of the body to prepare a device body molded body.
[0049]
Next, the element body molded body was pressed and integrated while being heated at 100 ° C., cut into a size of 10 mm × 10 mm, debindered at 800 ° C. for 10 hours, and then at 1130 ° C. for 2 hours. Was fired to obtain a laminated sintered body to be the element body.
[0050]
Thereafter, concave grooves having a width of 50 μm and a depth of 200 μm were formed on the side surface of the active part where the external electrodes were formed, every other layer than the dicing apparatus. And, between the external electrode forming side surface of the element body in which this concave groove is formed and the metal plate mainly composed of silver, a silver glass paste made of silver powder and B-Si glass powder is interposed, By heat-treating the external electrode in a pressure contact state at a pressure of 30 kPa, a conductive portion was formed on the side surface of the element body, the conductive portion was bonded to a metal plate, and the external electrode was bonded to the element body. Thereafter, silicone rubber was filled into the concave groove to form the insulator 10.
[0051]
The diffusion distance of Si into the element body of the obtained sample was measured by electron probe microanalysis (EPMA). The result is shown in FIG. In addition, in order to measure the bonding strength of the external electrode of the obtained multilayer piezoelectric element, the bonded portion of the external electrode with the inactive portion and the bonded portion with the active portion are cut and separated, A metal plate was bonded to the plate with an epoxy resin, and the strength was measured by pulling the plate. The result of the tensile strength ratio between the active part and the inactive part is shown in FIG.
[0052]
FIG. 3 shows that the Si diffusion distance decreases as the amount of SiO 2 in the inactive portion increases. As a result, excessive diffusion of Si into the inactive part is suppressed, and it becomes possible to prevent weakening of the surface of the piezoelectric body of the inactive part, and the bonding strength between the external electrode and the inactive part is improved. Recognize.
[0053]
Further, when the amount of SiO 2 in the inactive part is 0.1 to 3% by weight, the diffusion distance is shortened and a large bonding strength ratio is obtained. In particular, the amount of SiO 2 in the inactive part is 0.1 to 1%. It turns out that it is desirable to set it as 0.0 weight%.
Example 2
Using a green sheet in which 2% by weight of SiO 2 is added to the inert part, lead wires are connected to the laminated piezoelectric element manufactured in the same manner as in Example 1, and silicone is formed on the outer peripheral surface of the element by dipping or the like. The laminated piezoelectric element of the present invention was obtained by coating the resin, applying a polarization voltage of 1 kV, and polarizing the entire element.
[0054]
For comparison, a similar sample was prepared for the inactive part except that the same green sheet as that for the active part was used.
[0055]
As a result of applying a DC voltage of 200 V to the obtained multilayer piezoelectric actuator, a displacement of 10 μm was obtained for each actuator.
[0056]
In order to compare the durability of the obtained actuator, a driving durability test was performed at room temperature with a DC electric field of 200 V up to 5 × 10 8 cycles. In the driving test, the actuator was driven, the displacement was measured, and the variation from the initial displacement was examined. The displacement is measured with the average value of the values measured at the center part and the peripheral part of the element with a laser displacement meter by fixing the sample on the vibration isolation table, attaching an aluminum foil to the upper surface of the sample, and using a laser displacement meter. evaluated. The results are shown in Table 1.
[0057]
[Table 1]
[0058]
From Table 1, the conventional product in which Si is not contained in the inactive part has a weak joint strength between the external electrode and the inactive part, and the external electrode is also seen from the vicinity of the boundary between the active part and the inactive part in the driving test. The voltage was not supplied to the internal electrode after peeling, and the displacement characteristics deteriorated when the number of cycles was less than a predetermined number. On the other hand, the displacement of the product of the present invention was not observed after the driving test.
[0059]
【The invention's effect】
As described above in detail, in the multilayer piezoelectric element of the present invention, the bonding strength between the external electrode and the inactive portion is equal to or higher than the bonding strength between the external electrode and the active portion, so even when the actuator is driven, It is possible to prevent peeling of the external electrode due to stress generated near the boundary between the active part and the inactive part, and to provide an actuator with high reliability.
[Brief description of the drawings]
1A and 1B show a multilayer piezoelectric element according to the present invention, in which FIG. 1A is a perspective view and FIG. 1B is a longitudinal sectional view taken along line AA ′ of FIG.
FIG. 2 is an explanatory view showing an injection device of the present invention.
FIG. 3 is a graph showing the amount of SiO 2 in the inactive part, the diffusion distance of Si, and the bonding strength ratio.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Piezoelectric body 2 ... Internal electrode 3 ... Element main body 4 ... External electrode 8 ... Active part 9 ... Inactive part 10 ... Exterior resin 16 ... Lead wire

Claims (3)

  1. Formed by laminating a plurality of piezoelectric bodies and a plurality of internal electrodes alternately, the active portion of the displacement, provided at opposite ends in the stacking direction of the active portion, and the device body of the inactive portion is not displaced, the element A laminated piezoelectric element having a pair of external electrodes bonded to side surfaces of the main body and alternately connected to the internal electrodes, wherein the bonding strength between the external electrodes and the inactive portion is wherein much larger than the bonding strength between the active portion, and the external electrodes, and having a glass containing Si, the multi Ikoto than the Si content of the Si content of said inert portion said active portion A laminated piezoelectric element.
  2. Laminated piezoelectric element according to claim 1, wherein the Si content of the inert portion is characterized in that 0.1 to 3 wt% more in terms of SiO 2 than the active section.
  3. 3. A storage container having an injection hole, the multilayer piezoelectric element accommodated in the storage container, and a valve for ejecting liquid from the injection hole by driving the multilayer piezoelectric element. An injection device characterized by comprising.
JP2001393083A 2001-12-26 2001-12-26 Multilayer piezoelectric element and injection device Active JP3860746B2 (en)

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WO2005011009A1 (en) * 2003-07-28 2005-02-03 Kyocera Corporation Laminate type electronic component and production method therefor and laminate type piezoelectric element
JP4771649B2 (en) * 2003-07-28 2011-09-14 京セラ株式会社 Manufacturing method of multilayer electronic component
EP2037511A3 (en) 2003-09-24 2009-04-22 Kyocera Corporation Multilayer piezoelectric element
DE602004027519D1 (en) 2003-09-24 2010-07-15 Kyocera Corp Multilayer piezoelectric component
EP1988586B1 (en) 2003-09-25 2010-11-10 Kyocera Corporation Multi-layer piezoelectric device
JP4803956B2 (en) * 2003-09-25 2011-10-26 京セラ株式会社 Piezoelectric ceramics, laminated piezoelectric element using the same, and jetting apparatus
DE10345500B4 (en) 2003-09-30 2015-02-12 Epcos Ag Ceramic multilayer component
JP4593909B2 (en) * 2003-12-17 2010-12-08 京セラ株式会社 Multilayer piezoelectric element and injection device
JP2005191046A (en) * 2003-12-24 2005-07-14 Kyocera Corp Laminated piezoelectric element, manufacturing method thereof, and ejector
JP4868707B2 (en) * 2004-01-19 2012-02-01 京セラ株式会社 Multilayer piezoelectric element and injection device
JP5329544B2 (en) 2008-07-29 2013-10-30 京セラ株式会社 Fuel injection system
JP5328750B2 (en) * 2010-11-09 2013-10-30 京セラ株式会社 Multilayer piezoelectric element and jetting apparatus using the same

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