JP3860053B2 - ポジ型感光性組成物 - Google Patents

ポジ型感光性組成物 Download PDF

Info

Publication number
JP3860053B2
JP3860053B2 JP2002065444A JP2002065444A JP3860053B2 JP 3860053 B2 JP3860053 B2 JP 3860053B2 JP 2002065444 A JP2002065444 A JP 2002065444A JP 2002065444 A JP2002065444 A JP 2002065444A JP 3860053 B2 JP3860053 B2 JP 3860053B2
Authority
JP
Japan
Prior art keywords
group
examples
resin
atom
mol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002065444A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003262952A5 (enrdf_load_stackoverflow
JP2003262952A (ja
Inventor
亨 藤森
Original Assignee
富士フイルムホールディングス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士フイルムホールディングス株式会社 filed Critical 富士フイルムホールディングス株式会社
Priority to JP2002065444A priority Critical patent/JP3860053B2/ja
Publication of JP2003262952A publication Critical patent/JP2003262952A/ja
Publication of JP2003262952A5 publication Critical patent/JP2003262952A5/ja
Application granted granted Critical
Publication of JP3860053B2 publication Critical patent/JP3860053B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP2002065444A 2002-03-11 2002-03-11 ポジ型感光性組成物 Expired - Fee Related JP3860053B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002065444A JP3860053B2 (ja) 2002-03-11 2002-03-11 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002065444A JP3860053B2 (ja) 2002-03-11 2002-03-11 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JP2003262952A JP2003262952A (ja) 2003-09-19
JP2003262952A5 JP2003262952A5 (enrdf_load_stackoverflow) 2005-04-07
JP3860053B2 true JP3860053B2 (ja) 2006-12-20

Family

ID=29197747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002065444A Expired - Fee Related JP3860053B2 (ja) 2002-03-11 2002-03-11 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3860053B2 (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7906268B2 (en) 2004-03-18 2011-03-15 Fujifilm Corporation Positive resist composition for immersion exposure and pattern-forming method using the same
JP4448782B2 (ja) * 2004-03-18 2010-04-14 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
EP1621927B1 (en) 2004-07-07 2018-05-23 FUJIFILM Corporation Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same
JP4740666B2 (ja) * 2004-07-07 2011-08-03 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
US20070059636A1 (en) * 2005-09-12 2007-03-15 Konica Minolta Medical & Graphic, Inc. Light sensitive planographic printing plate material
JP4691442B2 (ja) * 2005-12-09 2011-06-01 富士フイルム株式会社 ポジ型レジスト組成物およびそれを用いたパターン形成方法
JP4912733B2 (ja) 2006-02-17 2012-04-11 東京応化工業株式会社 液浸露光用レジスト組成物およびレジストパターン形成方法
JP4961374B2 (ja) * 2007-03-28 2012-06-27 富士フイルム株式会社 ポジ型レジスト組成物およびパターン形成方法
JP5277022B2 (ja) * 2009-02-26 2013-08-28 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP5427436B2 (ja) * 2009-02-26 2014-02-26 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP5191567B2 (ja) * 2011-01-12 2013-05-08 富士フイルム株式会社 ポジ型感光性樹脂組成物、硬化膜の形成方法、硬化膜、有機el表示装置、及び、液晶表示装置
TWI602015B (zh) 2012-07-18 2017-10-11 住友化學股份有限公司 光阻組成物及光阻圖案之產生方法
JP6327791B2 (ja) * 2013-03-29 2018-05-23 株式会社ネオス フッ素系重合体及びこれを含有する表面処理剤
JP6252157B2 (ja) * 2013-12-16 2017-12-27 住友化学株式会社 レジスト組成物及びレジストパターンの製造方法
JP2024154795A (ja) * 2023-04-19 2024-10-31 信越化学工業株式会社 有機膜形成用組成物、有機膜形成方法、及びパターン形成方法

Also Published As

Publication number Publication date
JP2003262952A (ja) 2003-09-19

Similar Documents

Publication Publication Date Title
JP4025074B2 (ja) ポジ型レジスト組成物
JP4083053B2 (ja) ポジ型レジスト組成物
JP3982950B2 (ja) ポジ型感光性樹脂組成物
JP3860053B2 (ja) ポジ型感光性組成物
US7285369B2 (en) Positive resist composition and pattern formation method using the same
JP4360957B2 (ja) ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4025102B2 (ja) ポジ型レジスト組成物
JP3907167B2 (ja) ポジ型レジスト組成物
JP2005049695A (ja) ポジ型レジスト組成物
KR101049070B1 (ko) 포지티브 레지스트 조성물 및 이것을 사용한 패턴형성방법
JP4360955B2 (ja) ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4360844B2 (ja) ポジ型レジスト組成物
JP4313965B2 (ja) ポジ型感光性組成物
JP2005025150A (ja) ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2004045856A (ja) ポジ型レジスト組成物
JP2002090987A (ja) ポジ型レジスト組成物
JP4324496B2 (ja) ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2004157244A (ja) ポジ型レジスト組成物
JP2004102019A (ja) ポジ型レジスト組成物
JP4070642B2 (ja) ポジ型レジスト組成物
JP2005070423A (ja) レジスト組成物及びそれを用いたパターン形成方法
JP2004294870A (ja) ポジ型レジスト組成物
JP2004126302A (ja) ポジ型レジスト組成物
JP2004191649A (ja) ポジ型レジスト組成物
JP2004251975A (ja) ポジ型レジスト組成物

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040514

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040514

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060324

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060911

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060913

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060920

R150 Certificate of patent or registration of utility model

Ref document number: 3860053

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090929

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090929

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090929

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100929

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100929

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110929

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120929

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130929

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees