JP3849031B2 - 振動装置およびこれを備えた装置 - Google Patents

振動装置およびこれを備えた装置 Download PDF

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Publication number
JP3849031B2
JP3849031B2 JP34526396A JP34526396A JP3849031B2 JP 3849031 B2 JP3849031 B2 JP 3849031B2 JP 34526396 A JP34526396 A JP 34526396A JP 34526396 A JP34526396 A JP 34526396A JP 3849031 B2 JP3849031 B2 JP 3849031B2
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Japan
Prior art keywords
frequency
vibration
vibrating body
speed
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP34526396A
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English (en)
Japanese (ja)
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JPH10191661A5 (enrdf_load_stackoverflow
JPH10191661A (ja
Inventor
義文 西本
清史 金岩
栄一 柳
誠 塩見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Canon Precision Inc
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Canon Inc
Canon Precision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Canon Inc, Canon Precision Inc filed Critical Canon Inc
Priority to JP34526396A priority Critical patent/JP3849031B2/ja
Publication of JPH10191661A publication Critical patent/JPH10191661A/ja
Publication of JPH10191661A5 publication Critical patent/JPH10191661A5/ja
Application granted granted Critical
Publication of JP3849031B2 publication Critical patent/JP3849031B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP34526396A 1996-12-25 1996-12-25 振動装置およびこれを備えた装置 Expired - Lifetime JP3849031B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34526396A JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34526396A JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

Publications (3)

Publication Number Publication Date
JPH10191661A JPH10191661A (ja) 1998-07-21
JPH10191661A5 JPH10191661A5 (enrdf_load_stackoverflow) 2004-12-02
JP3849031B2 true JP3849031B2 (ja) 2006-11-22

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ID=18375421

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Application Number Title Priority Date Filing Date
JP34526396A Expired - Lifetime JP3849031B2 (ja) 1996-12-25 1996-12-25 振動装置およびこれを備えた装置

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JP (1) JP3849031B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376966B1 (en) * 2000-05-22 2002-04-23 Caterpillar, Inc. Method and apparatus for controlling a piezoelectric device
JP4663350B2 (ja) * 2005-02-15 2011-04-06 キヤノン株式会社 制御装置および制御方法
JP5162750B2 (ja) * 2006-10-05 2013-03-13 国立大学法人静岡大学 位置決め装置及び位置決め方法
JP6579893B2 (ja) * 2015-09-30 2019-09-25 キヤノン株式会社 振動型アクチュエータの制御装置と制御方法、駆動装置、撮像装置及び自動ステージ

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Publication number Publication date
JPH10191661A (ja) 1998-07-21

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